JPH07151826A - System for distributing test program - Google Patents

Abstract

PURPOSE:To make a system for distributing a test program to an inspection process from a design department efficient. CONSTITUTION:In a design department 1, a test-program generation means 4 automatically generates a test program from design information. A production- condition-information registration means 5 generates production-condition information on the loading method, the setting condition or the like of the test program. A production-information storage device 3 stores the test program and the production-condition information which have been generated for every product name and every test program number. A data transfer means 6 integrally data-transfers the test program and the production-condition information which have been held in the production-information storage device 3. In a production department 2, a production-information storage device 7 stores the test program and the production-condition information which have been data- transferred. A test-program readout means 8 downloads the test program to an inspection device from the production-information storage device 7. A production-condition-information retrieval means 9 retrieves the production- condition information from the production-information storage device 7 and sets the condition in the inspection device.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a test program distribution method, and more particularly to a test program distribution method from a design department in a semiconductor manufacturing process to an inspection process.

[0002]

2. Description of the Related Art A conventional test program distribution method will be described with reference to the drawings. FIG. 2 is an explanatory diagram showing an example of a conventional test program distribution method.

The design department 21 creates a test program 23 and manufacturing condition information 24 for the product before the product flows, and the test program is FD or MT, and the manufacturing condition information is distributed to the inspection process of the production department 22 in a form. To do. In the inspection process in the manufacturing department, when the product comes in, the worker refers to the manufacturing condition information 26 distributed in advance, causes the inspection device to read the test program 25 corresponding to the product name, and performs the inspection. Operate the device.

As a publicly known material close to the prior art, there is Japanese Unexamined Patent Publication No. Hei 2-276978.

[0005]

In the above-mentioned conventional test program distribution method, when the operator operates the inspection device in the inspection process, the test program and the manufacturing condition information must be available to the operator at the same timing. I have to. However, since the test program is distributed from the design department to the production department in different media such as FD and MT, and the manufacturing condition information is a form, it is not always available to the operator at the same timing, which may cause a delay in production. was there.

[0006]

The present invention provides a test program distribution method for inspecting an inspection apparatus in a production department using a test program distributed from a design department, wherein the design department pre-installs the test program. A test program generating means for automatically generating from given design information, a manufacturing condition information registering means for generating manufacturing condition information such as the loading method of the test program and setting conditions, and the above-mentioned generated for each product name and test program number. And a first manufacturing information storage device that holds the generated manufacturing condition information, and data that integrally transfers the test program and the manufacturing condition information held in the first manufacturing information storage device. A transfer means is provided, and the production department is provided with the test program to which the data is transferred. A second manufacturing information storage device that holds condition information, a test program reading unit that downloads the test program from the second manufacturing information storage device to the inspection device, and the manufacturing from the second manufacturing information storage device. Manufacturing condition information retrieving means for retrieving condition information and setting conditions in the inspection device.

[0007]

The present invention will be described in detail with reference to the drawings.

FIG. 1 is a block diagram showing an embodiment of the present invention. In the block diagram shown in FIG. 1, the design department 1 has a manufacturing information storage device 3 for holding a test program and manufacturing condition information for each product name and test program number.
The production department 2 includes a test program generation means 4, a manufacturing condition information registration means 5, and a data transfer means 6 for transferring the test program and the manufacturing condition information.
Similarly, a manufacturing information storage device 7 that holds a test program and manufacturing condition information for each product name and test program number,
The test program reading means 8 for downloading the test program to the inspection apparatus and the manufacturing condition information searching means 9 are included.

In the design department, first, the test program generating means 4 is used to automatically generate a test program for a certain product from the design information and store it in the manufacturing information storage device 3, and then the test program loading method and setting conditions are set. The manufacturing condition information is registered in the same manufacturing information storage device 3 using the manufacturing condition information registration means 5. At this time, in the manufacturing information storage device 3, the test program and the manufacturing condition information are related by using the product name and the test program number as keys.

Next, the generated test program and manufacturing condition information are transferred at the same timing by the data transfer means 6 from the manufacturing information storage device 3 of the design department 1 to the manufacturing information storage device 7 of the production department 2. .

In the production department 2, the manufacturing condition information searching means 9 confirms the transferred data, and at the same time, the test program reading means 8 downloads the test program to the inspection device. At this time, various condition settings of the inspection device can be promptly performed using the manufacturing condition information search function.

[0012]

According to the test program transfer method of the present invention,
Since the test program and manufacturing condition information are managed in the same database, and data is transferred from the design department to the production department, the test program and manufacturing condition information are always transmitted to the workers in the production department at the same timing. It is expected that the operator can read the inspection device test program and save the labor for setting the conditions, improve the quality of the manufacturing condition information, and shorten the transmission time of the manufacturing condition information from design to production.

[Brief description of drawings]

FIG. 1 is a block diagram showing an embodiment of the present invention.

FIG. 2 is an explanatory diagram showing an example of a conventional technique.

[Explanation of symbols]

 1, 21 Design department 2, 22 Production department 3, 7 Manufacturing information storage device 4 Test program generating means 5 Manufacturing condition information registering means 6 Data transfer means 8 Test program reading means 9 Manufacturing condition information searching means 23, 25 Test program 24, 26 Manufacturing condition information

─────────────────────────────────────────────────── ───Continued from the front page (51) Int.Cl. ⁶ Identification code Internal reference number FI Technical indication H01L 21/66 Z 7630-4M

Claims (1)

[Claims] 1. A test program distribution method for inspecting an inspection device in a production department using a test program distributed from a design department, wherein the design department automatically generates the test program from design information given in advance. Test program generating means, manufacturing condition information registering means for generating manufacturing condition information such as the loading method and setting conditions of the test program, the generated test program for each product name and test program number, and the generated The manufacturing method includes: a first manufacturing information storage device that holds manufacturing condition information; and a data transfer unit that integrally transfers the test program and the manufacturing condition information held in the first manufacturing information storage device. The department stores a second program that holds the test program and manufacturing condition information that have been transferred. A manufacturing information storage device, a test program reading means for downloading the test program from the second manufacturing information storage device to the inspection device, and the inspection device by retrieving the manufacturing condition information from the second manufacturing information storage device. And a manufacturing condition information retrieving means for setting conditions to the test program transfer method.