JPH07147341A - Container - Google Patents

Container

Info

Publication number
JPH07147341A
JPH07147341A JP29625693A JP29625693A JPH07147341A JP H07147341 A JPH07147341 A JP H07147341A JP 29625693 A JP29625693 A JP 29625693A JP 29625693 A JP29625693 A JP 29625693A JP H07147341 A JPH07147341 A JP H07147341A
Authority
JP
Japan
Prior art keywords
members
difference
deformation
materials
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP29625693A
Other languages
Japanese (ja)
Inventor
Shoji Sakata
莊司 坂田
Toshio Hatsuda
俊雄 初田
Kenichi Kasai
憲一 笠井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP29625693A priority Critical patent/JPH07147341A/en
Publication of JPH07147341A publication Critical patent/JPH07147341A/en
Pending legal-status Critical Current

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  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

PURPOSE:To reduce a force generated at a bonded part and to eliminate the damage of the bonded part by providing a function which absorbs the difference in a deformation between materials of different kinds and between materials which cause a temperature difference. CONSTITUTION:Members 1, 2 of different materials are bonded by a member 3 which has a deformation-absorbing function. When the members 1, 2 are constituted of materials whose coefficient of thermal expansion is different, both cause an extension difference when they are subjected to a temperature change. However, since the member 3 has a soft structure in a direction in which the extension difference of the members 1, 2 is caused, it absorbs the extension difference of both members 1, 2, and a large force is not generated in a bonded part. That is to say, the members 1, 2 can be assembled even by using a production process via a thermal history such as a braxing operation, a soldering operation or the like. Thereby, an unreasonable force due to a deformation difference is not generated, and the soundness of solder is held when both members are bonded by the solder. Consequently, this system is effective when it is used for a container whose airtightness is required.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は部分的に別の特性、例え
ば伝熱性と低熱膨張性が要求される容器などにおいて、
隣合った部材が異なった変形を生じるものに用いて、両
者の変形差を吸収して接合部の健全性を保持するのに効
果のある容器に関する。
BACKGROUND OF THE INVENTION The present invention is partly for other properties such as heat transfer and low thermal expansion.
The present invention relates to a container which is used in which adjacent members cause different deformations, absorbs a difference in deformation between the two members, and is effective in maintaining the soundness of a joint.

【0002】[0002]

【従来の技術】部材の熱変形差を吸収できる気密容器の
構造として、パッキンとボルトによる構成がある(公知
例1)が、この構造ではボルト締結のためのフランジが
必要であり、容器全体の寸法は容器としての有効寸法に
比較して大きくなることが欠点である。また、容器内に
特殊な気体を封入する場合、部材間の相対変形に起因す
る微摺動によりパッキンが摩耗するので確実な気密性が
得られない可能性もある。
2. Description of the Related Art As a structure of an airtight container capable of absorbing the difference in thermal deformation of members, there is a structure using packing and bolts (known example 1). However, this structure requires a flange for fastening the bolts, and thus the entire container The disadvantage is that the dimensions are large compared to the effective dimensions of the container. In addition, when a special gas is filled in the container, the packing may be worn due to slight sliding caused by relative deformation between the members, so that reliable air tightness may not be obtained.

【0003】そこでパッキン,ボルト締結に代えて半田
封止することがあるが(公知例2)、この場合は半田に
より結合する部材間の変形差が大きいと半田が破壊する
おそれがあるので、部材間に変形差が生じにくいような
材料組合わせが行われる。すなわち熱膨張係数を大きく
異なる材料の組合わせは困難である。
Therefore, soldering may be performed instead of packing and bolt fastening (known example 2), but in this case, if the deformation difference between the members joined by the solder is large, the solder may be broken, so Material combinations are performed so that a difference in deformation does not easily occur between them. That is, it is difficult to combine materials having greatly different thermal expansion coefficients.

【0004】公知例3は熱膨張係数の異なるものに適用
することを考えたマルチチップ構造で、接合する部材の
各々に筒状の変形差吸収部材を取付け、この先端部で気
密用の半田付けを行っている。この筒状の部材はこの部
分の変形能が変形差吸収能力を決定するので、筒状部材
を長くする必要があり、図のような構造となり、モジュ
ール厚さ方向のスペースが必要である。
Known example 3 is a multi-chip structure which is considered to be applied to those having different thermal expansion coefficients. A cylindrical deformation difference absorbing member is attached to each of the members to be joined, and soldering for airtightness is performed at the tip thereof. It is carried out. Since the deformability of this portion determines the deformation difference absorbing ability of this tubular member, it is necessary to elongate the tubular member, resulting in the structure as shown in the figure and a space in the module thickness direction.

【0005】[0005]

【発明が解決しようとする課題】熱膨張係数など熱特性
の異なる材料同士の組み合わせからなる容器では、温度
変化に伴って、他方同一材料から成る容器では部分的に
大きな温度差がある場合に、接合部に大きな力が生じ、
接合部の破損原因となりやすい。本発明はこのような不
具合を解決しようとするものである。
In a container made of a combination of materials having different thermal characteristics such as a thermal expansion coefficient, when there is a large temperature difference between the containers made of the same material due to a temperature change, the container made of the same material has a large temperature difference. A large force is generated at the joint,
It is likely to cause damage to the joint. The present invention is intended to solve such a problem.

【0006】[0006]

【課題を解決するための手段】接合部に発生する力は接
合せんとする部材間の変形差に起因するため、部材間に
変形差を吸収する機能を持った別の部材を設けることに
より、上記不具合を解決しようとするものである。
[Means for Solving the Problems] Since the force generated at the joint portion is caused by the deformation difference between the members to be joined, by providing another member having a function of absorbing the deformation difference between the members, It is intended to solve the above-mentioned problems.

【0007】[0007]

【作用】マルチチップモジュールを例にとり作用を説明
する。通常LSI搭載基板はLSIとの接合部の熱ひず
み低減を図るため、熱膨張係数がLSIとほぼ等しいセ
ラミック系の材料が用いられるが、これらは一般に熱伝
導特性が劣る。一方、LSIの発生熱は積極的にモジュ
ール外に放出する必要があるため、LSI上部のカバー
部分は伝熱特性の優れたもの、主に金属が用いられる。
セラミック基板と金属性のカバーとを仮に半田接合する
とすれば、先ず接合プロセスにおいて両者の熱変形差に
よって半田に過大な応力が発生する可能性がある。ま
た、稼働中はLSIに近接した基板は高温となり、冷却
ジャケット側はこれに比べ低温となるのでこの温度差に
よっても上述と同様の熱変形差を生じ半田に負担がかか
る可能性がある。さらに基板,キャップはこれらの力に
よって変形を生じることになり、特に面外の変形によっ
ては基板に搭載される他の部品との接続,キャップと他
の部品との接触熱伝達性能に不具合を生じる恐れがあ
る。
Operation The operation will be described by taking a multi-chip module as an example. Usually, the LSI mounting board is made of a ceramic material having a thermal expansion coefficient substantially equal to that of the LSI in order to reduce the thermal strain at the joint with the LSI, but these materials generally have poor thermal conductivity. On the other hand, since the heat generated by the LSI needs to be actively released to the outside of the module, the cover portion on the upper side of the LSI is made of a material having excellent heat transfer characteristics, mainly metal.
If the ceramic substrate and the metallic cover are soldered together, there is a possibility that excessive stress will be generated in the solder due to the difference in thermal deformation between the two in the joining process. Further, during operation, the substrate close to the LSI has a high temperature and the cooling jacket side has a lower temperature than that, so that the temperature difference may cause the same thermal deformation difference as described above, and the solder may be burdened. Further, the substrate and the cap will be deformed by these forces, and in particular, the out-of-plane deformation causes a problem in connection with other components mounted on the substrate and in contact heat transfer performance between the cap and the other component. There is a fear.

【0008】このように変形差のでる材料組合わせにお
いて、接合部に発生する力を低減するためには、例え
ば、ベローや蛇腹のようなより変形しやすい部材を接合
部に設けることが有効である。
In order to reduce the force generated at the joint in the combination of materials having different deformations, it is effective to provide a more easily deformable member such as a bellows or a bellows at the joint. is there.

【0009】[0009]

【実施例】以下、図1ないし図8により本案の実施例を
説明する。図1ないし図3は材質の異なる部材1,2を
変形吸収機能を持たせた部材3により結合した気密容
器、図4はこの変形吸収機能を持つ部材の拡大図、図
5,図6はこれの製作手段の例を示したものである。先
ず、図1において部材1,2は熱膨張係数の異なる材料
で構成した場合、これが温度変化を受けると、両者は伸
び差を生じるが、部材3は部材1,2の伸び差を生じる
方向に柔構造となっているため両部材の伸び差を吸収し
て接合部に大きな力を発生させない。すなわち、部材
1,2をろう付けや半田付けなど熱履歴を経る製造プロ
セスを取っても組立てが可能である。図2は容器が円形
の例を示している。部材1,2は上下を倒置して構成す
ることもでき、部材2は側面と底面(或いは上面)別材
料で構成することもできる。容器をこのような形状とす
ることができる場合、変形差吸収部材3の製作が図1の
角形に比べ容易で、かつ正確に容器が製作できる利点が
ある。図3はLSIのモジュールとしてこの構造を採用
した例を示している。基板1上のLSI9は動作状態で
発熱するので、これを伝熱部材10を介して上部の冷却
ジャケット8に伝達させ効率良く冷却させなくてはなら
ない。LSIはSiに代表されるように熱膨張係数が低
いので、これを搭載する基板はSiと熱膨張係数の近い
セラミックが用いられる。一方、冷却ジャケットは前述
のように熱伝導性の優れた材料を用いる必要があり、実
用金属材料中で最適の銅で構成し両者を半田により接合
する。部材1,2間には変形差吸収部材3を図に示すよ
うに設置する。このようにすることにより、熱変形差は
部品3に吸収され接合部に大きな力が生じないので、接
合部の半田の健全性が確保される。なお、この構造で図
の上下方向の力に対して強度的に部材3が弱い恐れがあ
る場合はこれを保護する部材11を設けることにより補
強が可能である。また外部からモジュールを引き上げる
ことが必要であればハンドリング治具12を用いて図の
ように部材3に力がかからないようにすることもでき
る。
Embodiments of the present invention will be described below with reference to FIGS. 1 to 3 are airtight containers in which members 1 and 2 made of different materials are joined by a member 3 having a deformation absorbing function, FIG. 4 is an enlarged view of the member having the deformation absorbing function, and FIGS. This is an example of the manufacturing means of. First, in FIG. 1, when the members 1 and 2 are made of materials having different thermal expansion coefficients, when they are subjected to a temperature change, they have an expansion difference, but the member 3 is in a direction in which the members 1 and 2 have an expansion difference. Since it has a flexible structure, it does not generate a large force at the joint by absorbing the difference in elongation between both members. That is, the members 1 and 2 can be assembled even if a manufacturing process that undergoes a heat history such as brazing or soldering is performed. FIG. 2 shows an example in which the container is circular. The members 1 and 2 may be constructed by inverting them upside down, and the member 2 may be made of a material different from the side surface and the bottom surface (or the top surface). When the container can be formed in such a shape, there is an advantage that the deformation difference absorbing member 3 can be manufactured more easily than the rectangular shape of FIG. 1 and the container can be manufactured accurately. FIG. 3 shows an example in which this structure is adopted as an LSI module. Since the LSI 9 on the substrate 1 generates heat in an operating state, it must be transferred to the upper cooling jacket 8 via the heat transfer member 10 for efficient cooling. Since the LSI has a low coefficient of thermal expansion as represented by Si, a substrate on which the LSI is mounted is made of a ceramic whose coefficient of thermal expansion is close to that of Si. On the other hand, it is necessary to use a material having excellent thermal conductivity for the cooling jacket as described above, and the cooling jacket is made of optimum copper in a practical metal material and both are joined by solder. A deformation difference absorbing member 3 is installed between the members 1 and 2 as shown in the figure. By doing so, the thermal deformation difference is absorbed by the component 3 and a large force is not generated in the joint portion, so that the soundness of the solder in the joint portion is secured. In this structure, if the member 3 is liable to be weak against the force in the vertical direction in the figure, it is possible to reinforce it by providing the member 11 for protecting it. If it is necessary to pull up the module from the outside, the handling jig 12 can be used so that no force is applied to the member 3 as shown in the figure.

【0010】図4は変形差吸収部材3の拡大断面図であ
り、例えば、銅のように展延性に富む薄板を図5に示す
ような深絞りすることにより製作することができる。図
4で屈曲部3aを複数個にすれば変形吸収量をさらに増
加させることができる。
FIG. 4 is an enlarged cross-sectional view of the deformation difference absorbing member 3, which can be manufactured, for example, by deep drawing a thin plate such as copper having high ductility as shown in FIG. The deformation absorption amount can be further increased by providing a plurality of bent portions 3a in FIG.

【0011】図6は変形差吸収部材3と部材1,2を組
み立てる一方法を示したものである。変形差吸収部材3
を予め部材1に半田接合し、この半田より融点の低い別
の半田7を3の接合部分にプリセットしておいてこれを
部材2を半田付けすれば図1の容器が完成する。
FIG. 6 shows one method of assembling the deformation difference absorbing member 3 and the members 1 and 2. Deformation difference absorbing member 3
1 is soldered to the member 1 in advance, another solder 7 having a lower melting point than this solder is preset in the joint portion 3 and the member 2 is soldered to complete the container of FIG.

【0012】図はパッキンとボルト締めによる気密容器
に変形差吸収部材を付けたものである。部材1,2間の
変形差は変形差吸収部材3によって吸収されるので、パ
ッキン14は微摺動しないため摩耗のおそれはない。
In the drawing, a deformation difference absorbing member is attached to an airtight container formed by packing and bolting. Since the deformation difference between the members 1 and 2 is absorbed by the deformation difference absorbing member 3, the packing 14 does not slightly slide, so that there is no fear of wear.

【0013】図8は変形差吸収部材の屈曲部を二個にし
た例を示したものである。このようにすることにより屈
曲部一個の場合に比べ約2倍の変形吸収能が期待でき
る。
FIG. 8 shows an example in which the deformation difference absorbing member has two bent portions. By doing so, it is possible to expect a deformation absorption capacity that is about twice that of a single bent portion.

【0014】[0014]

【発明の効果】本発明によれば、変形差による無理な力
が発生せず、半田で接合している場合はその半田の健全
性が保持される。従って気密性が要求される容器に用い
て特に効果がある。
According to the present invention, an unreasonable force due to the difference in deformation does not occur, and the integrity of the solder can be maintained when the solder is used for joining. Therefore, it is particularly effective when used in a container that requires airtightness.

【0015】また、接合部に無理な力が発生しないの
で、部材1と部材2の面外の変形が小さく抑えられる。
Further, since an unreasonable force is not generated in the joint portion, the out-of-plane deformation of the members 1 and 2 can be suppressed to a small level.

【0016】さらに、パッキン,ボルト締め構造の容器
に適用した場合はパッキンの摺動摩耗を低減し、気密性
を保持することができる。
Further, when applied to a container having a packing and bolt tightening structure, sliding wear of the packing can be reduced and airtightness can be maintained.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例の容器の説明図。FIG. 1 is an explanatory view of a container according to an embodiment of the present invention.

【図2】本発明の円形容器の説明図。FIG. 2 is an explanatory view of a circular container of the present invention.

【図3】本発明のLSIモジュールの側面断面図。FIG. 3 is a side sectional view of an LSI module of the present invention.

【図4】変形差吸収部材の側面断面図。FIG. 4 is a side sectional view of the deformation difference absorbing member.

【図5】変形差吸収部材の深絞り成型法を示す断面図。FIG. 5 is a cross-sectional view showing a deep drawing method for a deformation difference absorbing member.

【図6】変形差吸収部材を用いた容器の組立法を示す部
分の断面図。
FIG. 6 is a sectional view of a portion showing a method for assembling a container using a deformation difference absorbing member.

【図7】本発明のパッキン,ボルト締め容器の断面図。FIG. 7 is a cross-sectional view of a packing and a bolted container according to the present invention.

【図8】屈曲部二個の変形差吸収部材の断面図。FIG. 8 is a cross-sectional view of a deformation difference absorbing member having two bending portions.

【符号の説明】[Explanation of symbols]

1,2…部材、3…変形差吸収部材、6…半田、7…プ
リセット半田。
1, 2 ... Member, 3 ... Deformation difference absorbing member, 6 ... Solder, 7 ... Preset solder.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】異種材料の組合わせによる容器、及び部分
的に温度差の生じやすい容器において、前記異種材料間
及び温度差の生じる材料間の変形差を吸収する機能を持
たせたことを特徴とする容器。
1. A container made of a combination of different materials and a container in which a temperature difference is likely to occur partially have a function of absorbing a deformation difference between the different materials and between the materials having a temperature difference. And a container.
JP29625693A 1993-11-26 1993-11-26 Container Pending JPH07147341A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29625693A JPH07147341A (en) 1993-11-26 1993-11-26 Container

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29625693A JPH07147341A (en) 1993-11-26 1993-11-26 Container

Publications (1)

Publication Number Publication Date
JPH07147341A true JPH07147341A (en) 1995-06-06

Family

ID=17831221

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29625693A Pending JPH07147341A (en) 1993-11-26 1993-11-26 Container

Country Status (1)

Country Link
JP (1) JPH07147341A (en)

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