JPH07143766A - Oscillation wave motor - Google Patents

Abstract

PURPOSE:To easily provide an oscillation wave motor for high accuracy control in which high accuracy positioning or rotational speed control, which can not be achieved by an oscillation wave motor incorporating an encoder, can be realized. CONSTITUTION:The oscillation wave motor comprises an oscillator 2 generating a traveling oscillation wave while being supported on the housing 103, a mover 7 urged by a spring 14 to come into pressure contact with the oscillator 2 and rotated by the frictional driving force generated by the traveling oscillation wave, and a rotary shaft coupled with the mover in order to take out the rotation of the mover while being born, at the opposite ends, by first and second ball bearings 11, 12, wherein the output is taken out from a rotary shaft on the side being born by the second ball bearing for urging the axial load of the spring 14. The rotary shaft being born by the first ball bearing is coupled directly with an input shaft for securing the rotary disc of a shaft encoder.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention produces a progressive vibration wave in a vibrating body by applying a voltage to an electro-mechanical energy conversion element, and friction driving between the vibrating body and a moving body in contact therewith. The present invention relates to a structure of a vibration wave motor that causes relative movement, particularly a vibration wave motor for high precision control.

[0002]

2. Description of the Related Art Since an oscillatory wave motor has a low speed and high torque characteristic, it is easy to directly drive a driven body, has high responsiveness, and has essentially high resolution.
Unlike an electromagnetic motor, it has been researched in recent years as an effective motor for highly accurate positioning or rotation speed control because it has no coking and has a large holding force.

Japanese Unexamined Patent Publication (Kokai) No. 62-58886 controls to reduce a change in the number of revolutions caused by a change in the load applied to the vibration wave motor. A rotor of the vibration wave motor includes a rotating disk and a vibration wave motor. The detection unit is fixed to the housing of the to construct an encoder for speed or position detection, and the vibration wave motor with built-in encoder measures the wave number of the detector that responds to a certain rotation or movement amount and drives it. The frequency is controlled according to the relationship with the wave number of the ultrasonic vibration.

The rotary disk of this encoder is 360 °
It is said that an ultrasonic drive pulse motor with an angular resolution of 0.01 ° can be realized by providing a slit divided into 1024 pieces.

Next, Japanese Patent Laid-Open No. 3-253272 discloses a high-precision control vibration wave motor by integrally incorporating a high-precision and ultra-high-resolution encoder on the other end side of the output shaft of the vibration wave motor. The feature is that a plurality of bearing members are provided in a housing that supports the vibrating body to support the rotating shaft.In this housing, an encoder housing including an encoder detection unit and a signal processing circuit, and an encoder rotating disk are installed. It is said that a vibration wave motor for control with ultra-high accuracy can be provided by incorporating the rotary shaft into the other end of the output shaft to form an encoder with high accuracy and ultra-high resolution.

[0006]

When the vibration wave motor is used to perform positioning or control of the rotation speed, it is desirable that the encoder, which is the rotation detection means, has a higher resolution, and the accumulated error per rotation is large. Must be as small as possible and the output signal must be stable.

For example, when the rotational speed is controlled by using the conventional high torque type vibration wave motor, the required accuracy is 33.3 rp.
m, no load, wow and flutter value is 0.2 to 0.02
Assuming% RMS (however, 500 Hz or less), the resolution of the encoder used is 3 in the number of pulses PPR per rotation.
It can be expected that 600 to 10,000 is necessary, and the cumulative error per rotation is about 100 to 10 seconds.

Such a high-precision and high-resolution encoder is applied to a flat type vibration wave motor having limited radial and axial dimensions, as disclosed in, for example, Japanese Patent Laid-Open No. 58886/1987, the rotor of which 360 ° is 3,600. The rotating disk having the divided slits is fixed, and the detection unit and its signal processing circuit are fixed to the casing supporting the vibrating body.
It is impossible to construct a high resolution optical encoder of 0PPR in the current technology.

Next, Japanese Laid-Open Patent Publication No. 3-253272 discloses a laser rotary encoder, which has a super-high resolution and a small cumulative error, is integrally incorporated outside the motor on the other end side of the output shaft of a highly accurate rotary shaft. It seems that it is easy to satisfy the required accuracy in the above-mentioned rotation speed control.

However, this expensive, high-precision, super-resolution laser rotary encoder has a life as a matter of course, and, for example, if the semiconductor laser, which is a light emitting source, is deteriorated, the accuracy of the encoder is deteriorated and the encoder becomes unusable. Also, the ball bearing that supports the rotating disk has a limited life and needs to be repaired. In order to repair this encoder, it is necessary to return it to the manufacturer together with the vibration wave motor, adjust the optical system and electrical system of the encoder, and reassemble the mechanical system.

As described above, even a high-accuracy control vibrator motor in which a high-accuracy and high-resolution encoder is integrally incorporated outside a vibration wave motor is troublesome in terms of repair, and as a result, it is expensive and difficult to use. There is a problem.

[0012]

The structure for achieving the object of the present invention is as set forth in the claims,
For example, a casing, a vibrating body that is supported by the casing, and generates a progressive vibration wave, is brought into pressure contact with the vibrating body by a pressing means, and is rotated by frictional driving by the progressive vibration wave of the vibrating body. In a vibration wave motor including a moving body and a rotating shaft connected to the moving body so as to take out rotation of the moving body and supported at both ends by first and second ball bearings, an axial load of a pressurizing means is applied. However, the basic bearing load of the ball bearing is larger than or at least equal to that of the first ball bearing, the rotating shaft supported by the second ball bearing is used as the output shaft, and the first ball bearing of the rotating shaft supports it. The input shaft that fixes the rotary disk of the shaft encoder is directly connected to one end of the shaft encoder, and the encoder housing including the detection unit of the shaft encoder and the signal processing circuit is fixed to the housing via a relay member, so that a commercially available high precision Resolution shaft enco Da The is intended to obtain a vibration wave motor for highly accurate control mounted for lineage.

[0013]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail based on the embodiments shown in the drawings.

FIG. 1 is a longitudinal sectional view showing an embodiment in which a shaft encoder is attached to a vibration wave motor according to the present invention, FIG. 2 is a front view of a vibrating body shown in FIG. 1, and FIG. 3 is a front view of a compression spring member. 4A is an electrode configuration diagram, and FIG. 4B is a developed side view of the stator.

In FIGS. 1, 2 and 4 (a) and (b),
Reference numeral 1 denotes a thin ring-shaped piezoelectric element having a thickness b, which is made of an elastic material and has a solid electrode surface on a vibrating body 2 formed by four protrusions at equal intervals over λ / 2 (where λ is a wavelength). It is fixed and used as a stator.

As shown in FIG. 4 (a), the electrode structure on the other surface of the piezoelectric element 1 is polarized at λ / 2 pitch so that the expansion and contraction polarities are alternately opposite to the wavelength λ of the frequency to be excited. The driven A electrode group (A _{1 to} A ₈ ) and the B electrode group (B _{1 to} B ₈ ) and the λ / 4 for detecting the vibration state of each electrode group between the A and B electrodes. It is composed of pitch vibration detection electrodes S _A and S _B, and also three common electrodes G for grounding.

The driving B electrode group (B _{1 to} B ₈ ) is arranged at a pitch shifted by 3 / 4λ from the driving A electrode group (A _{1 to} A ₈ ), while the vibration detecting electrode S _A is arranged. and S _B are a electrode group for driving (a ₁ to a ₈₎ and the B electrode group (B ₁ .about.B
₈ ), each of which is arranged around the substantially antinode position of the standing wave.

In FIG. 4 (b), a plurality of protrusions on the contact surface 2a of the driving body 2 are formed by forming slits of a constant width (t) with respect to the axis, and h is the slit depth. Where H is the total height of the vibrator.

Further, as shown in FIG. 4B, the vibration detecting electrodes S _A and S _B of the piezoelectric element 1 are fixed so that the center points thereof coincide with the center points of the slit portions of the driving body 2. Since it is used as a stator, the driving A electrode group (A ₁ ~
The center points of the A ₈ ) or B electrode groups (B _{1 to} B ₈ ) all coincide with the center points of the slits.

The vibrating body 2 is a thin plate annular portion 2 on the neutral surface.
4 through a thick plate ring portion 2c on the inner diameter side via b.
Housing 103 with two screws (made of a material having good thermal conductivity)
It is fixed to.

A first ball bearing 11 is provided in the center of the housing 103 with an outer ring fixed thereto. Reference numeral 110 denotes a rotating shaft, one end 110a of which is supported by the inner ring of the first ball bearing 11 so as to be slidable in the axial direction, and the other end 110b of which is provided at the center of the housing cover 8 fixed to the housing 103 by a screw 9. The outer ring is fixed to the inner ring of the second ball bearing 12 which is fixedly provided so as to be slidable in the axial direction. One end 1 of this rotating shaft 110
10b has an inner diameter fitting portion 110c and a fixing screw hole 110d for fixing a shaft encoder described later.

Reference numeral 7 denotes a moving body formed of an annular sliding body 6 made of a composite resin and an annular supporting body 5 made of, for example, an aluminum alloy, which is concentrically fixed to the sliding body 6 with a heat-resistant adhesive. Via the rubber elastic sheet member 17 at the bottom,
It is supported by an intermediate member 15 which is fixed to the rotating shaft 110 by shrink fitting or fixing.

Reference numeral 14 is a compression spring member for pressurization shown in FIG. 3, which is arranged between the intermediate member 15 and the inner ring 12a of the second ball bearing 12 at the center of the housing cover 8. The axial load of the member 14 is applied in the axial direction of the support body 5 to bring the sliding body 6 of the moving body 7 into pressure contact with the sliding surface 2a of the driving body 2.

In the assembly of the vibration wave motor of this embodiment, the casing 103 having the first ball bearing 11 fixed to the central portion is fixed to the fixed portion where the stator including the piezoelectric element 1 and the vibrating body 2 is concentrically fixed. The rotor including the intermediate member 15 that supports the moving body 7 including the slide body 6 and the support body 5 through the elastic sheet member 17 and the rotating shaft 110 to which the intermediate member 15 is fixed is attached to the first casing 103 of the fixed portion side. Inner ring 11 of ball bearing 11
Then, the contact surface 2a of the vibrating body 2 and the sliding body 6 of the moving body 7 are brought into contact with each other to perform axial positioning.

Next, the compression spring member 14 is inserted into the rotary shaft 110, and the second ball bearing 12 of the housing cover 8 provided with the second ball bearing 12 at the center thereof is in contact with the intermediate member 15. The inner ring 12a is inserted into the rotary shaft 110, the compression spring member 14 is bent, and temporarily fixed to the housing 103 with the screw 9.

In this state, the second ball bearing 12 is preloaded by receiving the axial load of the compression spring member on the inner ring 12a, and the first ball bearing 12 also has the rotating shaft 11a.
Since the inner ring 11a is preloaded by the 0-groove 110e and the C-clip-shaped tightening washer 18, the first and second ball bearings 11 and 12 that support the rotating shaft 110 have radial and axial clearances. Is zero and there is no play.

The outer diameter portion of the rotary shaft 110, which is fitted with the first and second ball bearings 11 and 12, has a coaxiality of about 1 μm, and the first and second ball bearings 11 and 12 have the same coaxiality. The radial clearance between the inner rings 11a and 12a can be set to about 1 μm if necessary by selecting the grade of the ball bearing.

Therefore, the radial and axial play is zero in the preload, and the first and second ball bearings 11 and 1 selected so that the clearance between the rotary shaft 110 and the rotary shaft 110 is small.
The rotary shaft 110 having both ends supported by 2 and having excellent concentricity can rotate about the shaft center without swinging when the housing cover 8 is finally fixed to the housing 103 with the screws 9. .

In FIG. 1, 19 is a flexible printed board which is adhesively fixed to the electrode surface of the piezoelectric element 1, 21 is a reinforcing plate, which is fixed to the housing 103 with screws (not shown). Reference numeral 22 is a connector fixed to the reinforcing plate 21.

A spacer (not shown) is installed between the inner ring 12a of the second ball bearing 12 and the compression spring member 14 at the center of the housing cover 8 to prevent the axial load generated by the compression spring member 14 from being applied. I am adjusting.

The above is the configuration of the vibration wave motor for high precision control in this embodiment.

In FIG. 1, reference numeral 23 is a relay member in which a laser rotary encoder 20 which is a high-precision and high-power shaft encoder is fixed by a screw 24, and an input shaft 20a of the encoder 20 is a first rotary shaft 10 of a vibration wave motor. The ball bearing 11 is also inserted into the inner diameter fitting portion of the one end 110b, and the other end 23a is abutted against the wall surface 103a of the housing 103 and fixed to the housing 103 with the screw 25.

As described above, the laser rotary encoder 20
Input shaft 20a supporting a rotating disk (not shown)
Is inserted into the highly coaxial inner diameter fitting portion 110c of the rotary shaft 110 with a small gap, to eliminate the inclination with respect to the rotary shaft 110, and to include an encoder housing 20b including a detector, a signal processing circuit, and the like (not shown) of the encoder. The relay member 23
Is fixed to the housing 103 of the vibration wave motor via the screw shaft, and the screw 26 is screwed into the screw hole 110d of the rotary shaft 110 using the hole 23b of the relay member 23 to input the input shaft 20 of the encoder 20.
a is fixed.

The second ball bearing 12 for urging the axial load of the pressurizing means provided at the center of the housing cover 8.
The basic rated load of is at least lower than the basic rated load of the first ball bearing 11 provided in the central portion of the housing 103. Further, the relay member 23 may be made of a material having at least a vibration damping function such as a polymer material, if necessary, so as to remove the minute vibration in the axial direction of the high frequency generated by the vibration wave motor.

The driving frequency in the vibration wave motor for high precision control having the shaft encoder having the above-mentioned structure is fixed to the resonance frequency, and the phase difference between the A phase and the B phase is fixed to 90 °. The output voltage of the vibration detection electrode was set to be the same, driving was performed under conditions of 33.3 rpm and no load, and the rotation accuracy was evaluated.

The wow and flutter value in this rotation speed control is input to the wide band slatter meter, and the cutoff frequency 50
The value at 0 Hz was measured.

The shaft encoder used is a commercially available resolution of 81,000 PPR, a high accuracy of cumulative error of 10 seconds or less,
With an ultra high resolution laser rotary encoder (LRE),
Control pulse is divided by 81,000PPR, 1
0.125 PPR (1/8) and 3.375 PPR (1
/ 24), the LRE original pulse number of 81,000 PPR was used for wow and flutter observation.

The measurement result satisfies the target accuracy of 0.02% RMS in any control pulse, and the wow and flutter accuracy does not substantially change within the range of the number of control pulses used for measurement, and the accumulated error of the encoder is important. I understood.

The laser rotary encoder 20 may be attached as shown in FIG.

In FIG. 6, a relay member 23 is fixed to a laser rotary encoder 20 which is a high-precision and high-resolution shaft encoder by a screw 24, and an input shaft 20a of the encoder 20 is applied to a pressing means of a rotary shaft 10 of a vibration wave motor. Is inserted into the inner diameter fitting portion 110c on the other end side 110b supported by the second ball bearing 12 for urging the axial load of
The other end 23a is abutted against the wall surface 8a of the housing cover 8 and fixed to the housing cover 8 with a screw 25.

As described above, the laser rotary encoder 20
The input shaft 20a for supporting a rotating disk (not shown) of the rotation detecting means is inserted into the inner diameter fitting portion 110c having a high degree of coaxiality of the rotating shaft 110 with a small clearance so as to eliminate the inclination with respect to the rotating shaft 10 and the rotation detecting means. An encoder housing 20b including a detector and a signal processing circuit (not shown) is fixed to the housing cover 8 of the vibration wave motor via the relay member 23, and the screw 26 is rotated using the hole 23b of the relay member 23. The input shaft 20a of the encoder 20 is fixed by being screwed into the screw hole 110a of the shaft 110.

A vibration wave motor for high-precision control equipped with the shaft encoder having the above structure was driven under the condition of no load of 33.3 rpm to evaluate the rotation accuracy.

The measurement result is 81,000 PPR, 10.1.
The target accuracy of 0.02% RMS was satisfied for both the control pulses of 25 PPR and 3.375 PPR.

FIG. 5 is a vertical cross-sectional view showing an embodiment of a vibration wave motor to which a disc separation type encoder according to the present invention is attached.

In the figure, 1 is a piezoelectric element, 2 is a vibrating body, 5 is a support, 6 is a sliding body, 7 is a moving body, 8 is a casing, 9 is a screw, 1
1 is a first ball bearing, 12 is a second ball bearing, 14
Is a compression spring member, 15 is an intermediate member, 17 is an elastic sheet member, 18 is a tension washer, 19 is a flexible printed circuit board, 21 is a reinforcing plate, 22 is a connector, and the above configuration is the vibration wave motor of FIG. This is the same as the example, and detailed description is omitted.

Reference numeral 210 denotes a rotary shaft supported by the first ball bearing 11 and the second ball bearing 12 similar to the embodiment of FIG. 1, and a rotary disk of a disk separation type encoder described later is fixed to one end 210b. The fixed portion 210c is formed to have a high degree of coaxiality.

Reference numeral 203 designates a housing having substantially the same shape as the housing 3 of the embodiment shown in FIG. 1, and has a wall surface 203a and an outer diameter fitting portion 203b at one end.
And are formed.

Reference numeral 32 is a disk-separated type encoder which is composed of a rotary disk 30 and an encoder housing 31 including a detector and a signal processing circuit.

In this embodiment, the disc separation type encoder is an optical encoder, and the rotating disc is a cylindrical lattice in which an optical lattice serving as a rotation angle scale is provided on the inner surface of the cylinder, and there is no whirling of the shaft center and the rotating shaft 210. Is coaxially fixed to the fixed portion 210c of the one end 210b having a high coaxiality.

On the other hand, the encoder housing 31 including the detection portion of the disc-separated encoder 32, the signal processing circuit, etc. is processed with high accuracy of coaxiality and squareness with the rotating shaft 210,
Further, the wall surface 203 of the housing 203 of the assembled vibration wave motor
a and the outer diameter fitting portion 203b, is fixed to the housing 203 with the screw 33, and is fixed to the rotating shaft 210. The encoder housing 31 including the detecting portion and the signal processing circuit for the rotating disk 30 of the cylindrical lattice is fixed to the rotating shaft 210. Position correctly and configure a high precision and high resolution encoder.

The vibration wave motor of FIG. 5 to which the above-mentioned disc-separated encoder 32 is attached is driven under the conditions of 33.3 rpm and no load as in the embodiment of FIG. 1, and the wow and flutter value at that time is driven. Was input to the flutter meter and evaluated.

The disc-separated encoder used was a commercially available "Torbot interference system" with a resolution of 3,600 PPR,
A relatively low cost high resolution optical encoder (TRE) with a cumulative error of about 100 seconds used a control pulse of 3,600 PPR for measurement.

In the observation of the wow and flutter value in this measurement, the inner diameter fitting portion 210a and the screw hole 210d on the output shaft side of the rotary shaft 210 and the embodiment of FIG. Using the same relay member 23 as above, the laser rotary encoder 20 which is a shaft encoder is mounted on the output shaft side of the vibration wave motor, and the total number of pulses (81,000 P
It was observed by PR).

The measurement result was about 0.17% RMS, which satisfied the target accuracy of 0.2% RMS (however, 500 Hz or less).

As shown in FIG. 7, the disc-separated encoder can be mounted in the opposite manner to the embodiment shown in FIG.

FIG. 7 is a vertical cross-sectional view showing an embodiment of a vibration wave motor to which a disc separation type encoder according to the present invention is attached.

In the figure, 1 is a piezoelectric element, 2 is a vibrating body, 3 is a housing, 5 is a support, 6 is a sliding body, 7 is a moving body, 9 is a screw,
11 is a first ball bearing, 12 is a second ball bearing, 1
4 is a compression spring member, 15 is an intermediate member, 17 is an elastic sheet member, 18 is a tightening washer, 19 is a flexible printed board, 21 is a reinforcing plate, 22 is a connector, and the above components are the same as those in the embodiment of FIG. However, detailed description is omitted.

Reference numeral 310 denotes a rotary shaft supported by the first ball bearing 11 and the second ball bearing 12 as in the embodiment of FIG. 5, and the other end side 310b is provided with a rotary disk of a disk separation type encoder described later. The fixing portion 310c to be fixed is formed to have high coaxiality.

Reference numeral 8 is a housing cover having substantially the same shape as the housing cover 8 of the embodiment shown in FIG. 5, and the wall surface 108a and the outer diameter fitting portion 1 are provided at the other end.
08b are formed.

Reference numeral 32 is a disk-separated type encoder which is composed of a rotary disk 30 and an encoder housing 31 including a detector and a signal processing circuit.

The disc-separated encoder in this embodiment is an optical encoder, and the rotary disc is a cylindrical lattice having an optical lattice on the inner surface of the cylinder, which serves as a rotational angle scale, and has no whirling of the shaft center and a rotating shaft. It is concentrically fixed to the fixed portion 310c of the other end side 310b having a high coaxiality of 310.

On the other hand, the encoder housing 31 including the detection portion of the disc-separated encoder 32, the signal processing circuit, and the like is processed with high accuracy of coaxiality and squareness with the rotating shaft 310,
Further, it is positioned by the wall surface 108a and the outer diameter fitting portion 108b of the housing cover 108 of the assembled vibration wave motor, is fixed to the housing cover 108 by the screw 33, and is fixed to the rotating shaft 310 to be the rotating disk 30 of the cylindrical lattice. The encoder housing 31 including the detection unit, the signal processing circuit, and the like is correctly positioned to form a high-precision and high-resolution encoder.

The vibration wave motor of FIG. 7 to which the disc-separated encoder 32 is attached is driven under the condition of 33.3 rpm and no load as in the embodiment of FIG. 5, and the wow and flutter value at that time is fluttered. Input into the meter and evaluate.

In the observation of the wow and flutter value in this measurement, as shown by the dotted line in the embodiment of FIG. 7, the inner diameter fitting portion 310a and the screw hole 310d on the output shaft side of the rotary shaft 310 and the embodiment of FIG. A laser rotary encoder 20 which is a shaft encoder is installed on the output shaft side of the vibration wave motor by using the same relay member 23 as described above, and the total number of pulses (81,000 PP) is obtained.
R).

The measurement result was about 0.18% RMS, which satisfied the target accuracy of 0.2% RMS (however, 500 Mz or less).

The main design specifications of the vibration wave motors of the embodiments shown in FIGS. 1 and 6 and FIGS. 5 and 7 are shown in the table below.

[0067]

[Table 1]

[0068]

EFFECTS OF THE INVENTION For example, a commercially available high-precision and high-resolution shaft encoder is replaceably attached to the high-precision vibration wave motor of the present invention, and in the vibration wave motor with a built-in encoder, high-precision positioning or rotation speed control of a function is performed. It is possible to easily obtain a vibration wave motor for high precision control capable of achieving the above, and it is possible to provide a vibration wave motor for control that meets the accuracy and price required by the user.

Further, even when the light source or the bearing of the expensive expensive high-precision and high-resolution shaft encoder is deteriorated and repair is required, the shaft encoder can be easily replaced. A vibration wave motor for control that is inexpensive and easy to use is obtained.

Next, a vibration wave motor for high precision control can be easily obtained by attaching, for example, a commercially available, relatively inexpensive, high precision and high resolution disc separation type encoder to the high precision vibration wave motor of the present invention.

An encoder suitable for the required accuracy and price can be selected from various commercially available disc-separated encoders, and a low-priced control vibration wave motor that is easy to repair can be obtained by incorporating the encoder.

[Brief description of drawings]

FIG. 1 is a vertical cross-sectional view of a vibration wave motor showing a first embodiment of the present invention.

FIG. 2 is a front view of the vibrator shown in FIG.

FIG. 3 is a front view of the compression spring member of FIG.

FIG. 4 shows a stator, (a) is a plan view showing an electrode configuration, and (b) is a developed side view of the stator.

FIG. 5 is a longitudinal sectional view of a vibration wave motor showing a second embodiment of the present invention.

6 is a longitudinal sectional view of a vibration wave motor showing a modification of the embodiment shown in FIG.

7 is a longitudinal sectional view of a vibration wave motor showing a modification of the embodiment shown in FIG.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Piezoelectric element 2 ... Oscillator 103, 203 ... Housing 7 ... Moving body 8 ... Housing cover 110, 21
0 ... Rotating shaft 11 ... 1st ball bearing 12 ... 2nd ball bearing 14 ... Compression spring member 20 ... Shaft encoder 23 ... Relay member 30 ... Cylindrical lattice 31 ... Encoder housing 32 ... Disk separation type encoder

Claims (10)

[Claims] 1. A casing, a vibrating body which is supported by the casing and generates a progressive vibration wave, and pressure-contacts the vibrating body by a pressurizing means, so that the progressive vibration wave of the vibrating body causes friction. In the vibration wave motor having a moving body which is rotated by driving and a rotating shaft which is connected to the moving body so as to take out the rotation of the moving body and whose both ends are supported by first and second ball bearings, the pressing means A vibration wave motor, wherein a rotating shaft on the side supported by the second ball bearing for urging the axial load is used as an output shaft. 2. The vibration wave motor according to claim 1, wherein the magnitude of the basic load rating of the second ball bearing is greater than or at least equal to the magnitude of the basic load rating of the first ball bearing. . 3. The vibration wave motor according to claim 1, wherein an input shaft for fixing the rotating disk of the shaft encoder is directly connected to one end of the rotating shaft supported by the first ball bearing. 4. The vibration wave motor according to claim 1, wherein an encoder housing including a detection unit of a shaft encoder, a signal processing circuit, and the like is fixed to the housing via a relay member. 5. The vibration wave motor according to claim 1, wherein a rotary disc of a disc-separated encoder is fixed to one end of the rotary shaft supported by the first ball bearing. 6. The vibration wave motor according to claim 5, wherein an encoder housing including a detection unit of the disk-separated encoder and a signal processing circuit is fixed to the housing. 7. A vibrating body, a moving body which is brought into pressure contact with the vibrating body by a pressing means, is rotated by frictional drive by a progressive vibration wave of the vibrating body, and a rotational force of the moving body is taken out. A both-end supporting rotary shaft, which is connected to the moving body and is supported on the output shaft side by the first ball bearing and on the other end side by the second ball bearing for urging the axial load of the pressing means. In the vibration wave motor, an input shaft for fixing a rotating disk of a shaft encoder is directly connected to a side of the rotating shaft supported by the second ball bearing. 8. A housing and a vibrating body supported by the housing,
In a vibration wave motor including a moving body that makes pressure contact with the vibrating body, a rotating shaft connected to the moving body, and a housing cover fixed to the housing, a relay member is provided on the housing cover. A vibration wave motor characterized in that an encoder casing including a detection unit of a shaft encoder, a signal processing circuit, and the like is fixed via a shaft. 9. A housing and a vibrating body supported by the housing,
A casing cover of the casing, a moving body that makes pressure contact with the vibrating body, and a first ball bearing that is connected to the moving body and urges the output shaft side to the axial load of the pressing means. In a vibration wave motor having both ends supporting a rotary shaft whose other end is supported by a second ball bearing, a rotary disk of a disk-separated encoder is fixed to a side of the rotary shaft supported by the second ball bearing. A vibration wave motor characterized in that 10. The vibration wave motor according to claim 9, wherein an encoder housing including a detection unit of the disk-separated encoder, a signal processing circuit, and the like is fixed to the housing cover.