JPH07141703A - Inspecting method and production of optical recording medium - Google Patents
Inspecting method and production of optical recording mediumInfo
- Publication number
- JPH07141703A JPH07141703A JP29070393A JP29070393A JPH07141703A JP H07141703 A JPH07141703 A JP H07141703A JP 29070393 A JP29070393 A JP 29070393A JP 29070393 A JP29070393 A JP 29070393A JP H07141703 A JPH07141703 A JP H07141703A
- Authority
- JP
- Japan
- Prior art keywords
- protective layer
- film thickness
- recording medium
- optical recording
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、光記録媒体の検査方法
および製造方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical recording medium inspection method and manufacturing method.
【０００２】[0002]
【従来の技術】光記録媒体は、基板上に保護層、記録層
などの各層が順次形成されたものである。各層の中で保
護層の膜厚が最も厚いので、保護層の膜厚の管理は光記
録媒体の性能を管理する上で非常に重要なことである。
従来は、基板上に保護層、記録層等の各層を形成するプ
ロセスにおいて、光記録媒体の一片を取りだし、分光光
度計により基板からの反射光を任意の一波長において測
定し反射率を検出することにより、保護層の光学的膜厚
を求め、その光学的膜厚の値が設定値に対して正しいか
を確認していた。また、保護層の膜厚が異なると基板側
から光記録媒体を見た場合に色相が変わることを利用し
て、色相を目視で調べ光学的膜厚が設定値に対して正し
いかを確認していた。2. Description of the Related Art An optical recording medium is one in which layers such as a protective layer and a recording layer are sequentially formed on a substrate. Since the thickness of the protective layer is the largest among the layers, controlling the thickness of the protective layer is very important for controlling the performance of the optical recording medium.
Conventionally, in the process of forming each layer such as a protective layer and a recording layer on a substrate, one piece of an optical recording medium is taken out, and a spectrophotometer measures the reflected light from the substrate at an arbitrary wavelength to detect the reflectance. Thus, the optical film thickness of the protective layer was obtained, and it was confirmed whether the value of the optical film thickness was correct with respect to the set value. In addition, by utilizing the fact that the hue changes when the optical recording medium is viewed from the substrate side when the thickness of the protective layer is different, the hue is visually inspected to confirm whether the optical thickness is correct with respect to the set value. Was there.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、従来技
術で保護層の膜厚の管理を行う場合、光記録媒体の反射
率測定を生産ラインで実行することは非常に手数がかか
るという難点があった。また、膜厚に対応する反射率変
化が小さく、例えば、２００ｎｍ程度第１保護層の膜厚
が変わっても反射率はほぼ変わらないため、反射率と膜
厚の対応がとれにくく、膜厚の精密な管理が難しいとい
う難点もあった。さらに、光記録媒体の色相から膜厚の
管理を行う場合、色の判定を目視で行うため個人差が生
じ易く、知覚的な違いを定量的に表すことができないた
め、保護層の膜厚の管理は困難であった。However, when the film thickness of the protective layer is controlled by the prior art, it is very troublesome to measure the reflectance of the optical recording medium on the production line. . In addition, the reflectance change corresponding to the film thickness is small, for example, even if the film thickness of the first protective layer changes by about 200 nm, the reflectivity hardly changes. There was also the drawback that precise management was difficult. Further, when the film thickness is controlled from the hue of the optical recording medium, the color judgment is performed visually, so individual differences are likely to occur, and perceptual differences cannot be quantitatively expressed. It was difficult to manage.
【０００４】本発明は、これらの諸欠点に鑑み創案され
たものであって、光記録媒体の保護層の光学的膜厚に基
づく色相の変化を定量的に管理することにより、光記録
媒体製造時の保護層の膜厚の補正ならびに管理が可能な
光記録媒体の検査方法および製造方法を提供することを
目的とする。The present invention was devised in view of these drawbacks, and manufactures an optical recording medium by quantitatively controlling the change in hue based on the optical film thickness of the protective layer of the optical recording medium. An object of the present invention is to provide an inspection method and a manufacturing method for an optical recording medium, which can correct and control the film thickness of a protective layer at the time.
【０００５】[0005]
【課題を解決するための手段】かかる本発明の目的は、
以下の光記録媒体の検査方法および製造方法により達成
される。The object of the present invention is as follows.
This is achieved by the following optical recording medium inspection method and manufacturing method.
【０００６】基板上に少なくとも保護層と記録層を順
次積層した光記録媒体の検査方法において、波長の異な
る複数の光を照射し、基板からの反射光を測定すること
により保護層の光学的膜厚を検査することを特徴とする
光記録媒体の検査方法。In an inspection method for an optical recording medium in which at least a protective layer and a recording layer are sequentially laminated on a substrate, a plurality of light beams having different wavelengths are irradiated and the reflected light from the substrate is measured to form an optical film of the protective layer. A method for inspecting an optical recording medium, which comprises inspecting a thickness.
【０００７】基板上に少なくとも保護層と記録層を順
次積層した光記録媒体の製造方法において、下記の
（１）〜（４）の工程を含むことを特徴とする光記録媒
体の製造方法。A method for manufacturing an optical recording medium in which at least a protective layer and a recording layer are sequentially laminated on a substrate, including the following steps (1) to (4).
【０００８】（１）基板上に保護層を形成する第一工
程。(1) A first step of forming a protective layer on a substrate.
【０００９】（２）保護層上に記録層を形成する第二工
程。(2) A second step of forming a recording layer on the protective layer.
【００１０】（３）波長の異なる複数の光を照射し、基
板からの反射光を測定することにより前記保護層の光学
的膜厚を検査する第三工程。(3) A third step of inspecting the optical film thickness of the protective layer by irradiating a plurality of lights having different wavelengths and measuring the light reflected from the substrate.
【００１１】（４）前記第三工程で得られた保護層の光
学的膜厚に関する情報を、前記第一工程にフィードバッ
クし、保護層の膜厚形成条件を修正する第四工程。(4) A fourth step of feeding back the information about the optical film thickness of the protective layer obtained in the third step to the first step and correcting the film forming conditions of the protective layer.
【００１２】本発明における光記録媒体は、基板上に少
なくとも保護層と記録層を順次積層したものであり、好
ましくは、基板上に、保護層、記録層、反射層を順次積
層したものであり、より好ましくは、図１に示されるよ
うに、基板１上に、第一保護層２、記録層３、第二保護
層４、反射層５を順次積層したものである。通常、膜厚
は、第一保護層：１００〜５００ｎｍ、記録層：１０〜
３０ｎｍ、第二保護層：１０〜３０ｎｍ、反射層：１０
〜２００ｎｍ程度である。各層の材質としては、基板：
ガラス、ポリカーボネート、ポリメチル・メタクリレー
ト、ポリオレフィン樹脂、エポキシ樹脂、ポリイミド樹
脂、保護層：ＺｎＳ、ＳｉＯ2 、窒化シリコン、酸化ア
ルミニウムなどの無機薄膜、ＺｎＳとＳｉＯ2 の混合
膜、ＺｎＳとＳｉＯ2 と炭素の混合膜、記録層：Ｐｄ−
Ｇｅ−Ｓｂ−Ｔｅ合金、Ｎｂ−Ｇｅ−Ｓｂ−Ｔｅ合金、
Ｐｔ−Ｇｅ−Ｓｂ−Ｔｅ合金、Ｎｉ−Ｇｅ−Ｓｂ−Ｔｅ
合金、Ｇｅ−Ｓｂ−Ｔｅ合金、Ｃｏ−Ｇｅ−Ｓｂ−Ｔｅ
合金、Ｉｎ−Ｓｂ−Ｔｅ合金、Ｉｎ−Ｓｅ合金、反射
層：Ａｌ、Ａｕなどの金属、およびこれらを主成分とす
る合金、より具体的にはＡｌにＳｉ、Ｍｇ、Ｃｕ、Ｐ
ｄ、Ｔｉ、Ｃｒ、Ｈｆ、Ｔａ、Ｎｂ、Ｍｎなどの少なく
とも一種の元素を合計で５原子％以下１原子％以上加え
た合金、あるいは、ＡｕにＣｒ、Ａｇ、Ｃｕ、Ｐｄ、Ｐ
ｔ、Ｎｉなどの少なくとも一種の元素を合計で２０原子
％以下１原子％以上加えた合金などが例としてあげられ
るが、これらに限定されない。The optical recording medium of the present invention is one in which at least a protective layer and a recording layer are sequentially laminated on a substrate, and preferably, a protective layer, a recording layer and a reflective layer are sequentially laminated on a substrate. More preferably, as shown in FIG. 1, the first protective layer 2, the recording layer 3, the second protective layer 4, and the reflective layer 5 are sequentially laminated on the substrate 1. Usually, the film thickness is 100 to 500 nm for the first protective layer and 10 to 10 for the recording layer.
30 nm, second protective layer: 10 to 30 nm, reflective layer: 10
Is about 200 nm. The material of each layer is the substrate:
Glass, polycarbonate, polymethyl methacrylate, polyolefin resin, epoxy resin, polyimide resin, the protective layer: ZnS, SiO 2, silicon nitride, an inorganic thin film such as aluminum oxide, ZnS and SiO 2 mixed film, ZnS and SiO 2 and carbon Mixed film, recording layer: Pd-
Ge-Sb-Te alloy, Nb-Ge-Sb-Te alloy,
Pt-Ge-Sb-Te alloy, Ni-Ge-Sb-Te
Alloy, Ge-Sb-Te alloy, Co-Ge-Sb-Te
Alloys, In-Sb-Te alloys, In-Se alloys, reflective layers: metals such as Al and Au, and alloys containing these as the main components, more specifically, Al with Si, Mg, Cu and P.
An alloy in which at least one element such as d, Ti, Cr, Hf, Ta, Nb, and Mn is added in a total amount of 5 atomic% or less and 1 atomic% or more, or Au, Cr, Ag, Cu, Pd, P
Examples thereof include, but are not limited to, alloys in which at least one element such as t and Ni is added in a total amount of 20 atom% or less and 1 atom% or more.
【００１３】本発明の光記録媒体の検査方法は、波長の
異なる複数の光を照射し、基板からの反射光を測定する
ことにより、保護層の光学的膜厚を検査することを特徴
とする。The method of inspecting an optical recording medium of the present invention is characterized in that the optical film thickness of the protective layer is inspected by irradiating a plurality of lights having different wavelengths and measuring the reflected light from the substrate. .
【００１４】基板からの反射光は、図１に示されるよう
に、保護層の先の記録層の手前で反射されたものである
ので、基板からの反射光を測定することにより検出され
る反射率は保護層の膜厚と相関関係がある。上述した通
り、２０ｎｍ程度膜厚が変化しても反射率はほぼ変わら
ないが、反射率と保護層の膜厚との相関関係は測定波長
に依存するので、本発明のように波長の異なる複数の光
を照射し反射率を検出すれば、反射率の微小な変化から
正確な光学的膜厚の管理が可能となる。ここで、光学的
膜厚とは、以上のような反射率の測定から求められる保
護層の膜厚のことをさし、実際の保護層の膜厚と一対一
に対応しているものである。As shown in FIG. 1, since the reflected light from the substrate is reflected before the recording layer ahead of the protective layer, the reflected light detected by measuring the reflected light from the substrate. The rate is correlated with the film thickness of the protective layer. As described above, the reflectance does not change substantially even if the film thickness changes by about 20 nm, but since the correlation between the reflectance and the film thickness of the protective layer depends on the measurement wavelength, a plurality of different wavelengths as in the present invention are used. If the reflectance is detected by irradiating the above light, it becomes possible to accurately control the optical film thickness from a minute change in the reflectance. Here, the optical film thickness refers to the film thickness of the protective layer obtained from the above-described reflectance measurement, and has a one-to-one correspondence with the actual film thickness of the protective layer. .
【００１５】波長の異なる複数の光を照射し、基板から
の反射光を測定することにより保護層の光学的膜厚を検
査する方法として、最も好ましいのは、色彩色差計を用
いる方法である。色彩色差計とは、波長の異なる複数の
光を照射し、測定試料からの反射光を測定し反射率を検
出する手段と、該反射率の値から測定試料の色相、彩
度、明度に基づく三刺激値を求める手段とを備えるもの
である。The most preferable method for inspecting the optical film thickness of the protective layer by irradiating a plurality of lights having different wavelengths and measuring the reflected light from the substrate is to use a colorimeter. The colorimeter is based on the means for irradiating a plurality of lights having different wavelengths, measuring the reflected light from the measurement sample to detect the reflectance, and the hue, saturation, and brightness of the measurement sample from the value of the reflectance. And means for obtaining tristimulus values.
【００１６】測定原理の一例について簡単に述べる。す
なわち、人間の目の分光感度（国際照明委員会（ＣＩ
Ｅ）１９３１）等色関数である可視領域に相当する等色
関数ｘ2 λ（Ｘの長波長側ピーク）、ｙλ、ｚλの感度
をもつセンサにより測定試料からの反射光を測定すると
共に、ｘ2 λ、ｙλ、ｚλ、の感度をもつセンサで照明
光源を直接測定して、試料の三刺激値Ｘ、Ｙ、Ｚを算出
し各種の色度を演算する。三刺激値Ｘ、Ｙ、Ｚは、色
相、彩度、明度の３つの独立変数に基づくものであり、
これらから各種の色度（表色系色度）を算出する。表色
系色度は、ＣＩＥに基づきＸＹＺ表色系（ＪＩＳ Ｚ８
７１）やＬ* ａ* ｂ* 表色系（ＪＩＳ Ｚ８７２９）や
ＵＣＳ（ＪＩＳ Ｚ８７２９）、などがある。このよう
に基板からの反射光を色度という数値で管理することに
より、保護層の光学的膜厚を間接的に数値で管理・検査
できる。色彩色差計としては、反射物体色ＣＩＥ表色系
デジタル色彩色差計ＣＲ−３００（ミノルタ（株）製）
などが挙げられる。An example of the measurement principle will be briefly described. That is, the spectral sensitivity of the human eye (International Commission on Illumination (CI
E) 1931) The reflected light from the measurement sample is measured by a sensor having sensitivity of color matching function x 2 λ (peak on the long wavelength side of X), y λ, z λ corresponding to the visible region which is a color matching function, and x The illumination light source is directly measured by a sensor having a sensitivity of 2 λ, y λ, z λ, and tristimulus values X, Y and Z of the sample are calculated to calculate various chromaticities. The tristimulus values X, Y, and Z are based on three independent variables of hue, saturation, and lightness,
Various chromaticities (colorimetric chromaticities) are calculated from these. The chromaticity of the color system is based on CIE and is based on the XYZ color system (JIS Z8
71), L * a * b * color system (JIS Z8729) and UCS (JIS Z8729). By thus controlling the reflected light from the substrate with a numerical value called chromaticity, the optical film thickness of the protective layer can be indirectly controlled and inspected with a numerical value. As the color difference meter, a reflection object color CIE color system digital color difference meter CR-300 (manufactured by Minolta Co., Ltd.)
And so on.
【００１７】このように色彩色差計を用いて光記録媒体
の検査を行うと、短時間で精度良く検査することができ
る。また、光学的膜厚に関するデータの管理、光記録媒
体の品質の管理を容易に行うことができる。この場合に
コンピュータを用いれば、さらに管理は容易になる。When the optical recording medium is inspected by using the colorimeter as described above, the inspection can be performed accurately in a short time. Further, it is possible to easily manage the data regarding the optical film thickness and the quality of the optical recording medium. If a computer is used in this case, management becomes easier.
【００１８】本発明の光記録媒体の製造方法は、基板上
に保護層を形成し、該保護層上に記録層を形成した後、
上述の光記録媒体の検査方法により検査し、それによっ
て得られた保護層の光学的膜厚に関する情報を、保護層
形成工程にフィードバックし、保護層の膜厚形成条件
（例えば、スパッタリングで形成する場合にはその条
件）を修正することを特徴とする。すなわち、あらかじ
め、最良の光記録媒体の検査結果または最初に製造した
光記録媒体の検査結果を設定値として定めておき、その
値からずれた場合に膜厚形成条件を修正する。厚い方向
にずれていれば薄くなるように、薄い方向にずれていれ
ば厚くなるように条件を修正する。このような修正を行
いながら光記録媒体を製造すれば、一定品質の光記録媒
体を安定して製造できるので生産性が向上する。The method for producing an optical recording medium of the present invention comprises forming a protective layer on a substrate, forming a recording layer on the protective layer,
The information about the optical film thickness of the protective layer obtained by the inspection method of the optical recording medium described above is fed back to the protective layer forming step, and the film forming condition of the protective layer (for example, the film is formed by sputtering). In that case, the condition) is corrected. That is, the best inspection result of the optical recording medium or the inspection result of the first manufactured optical recording medium is set in advance as a set value, and the film thickness forming condition is corrected when deviating from the set value. The condition is corrected so that the thickness shifts in the thicker direction and the thickness shifts in the thinner direction. If an optical recording medium is manufactured while making such corrections, an optical recording medium of constant quality can be stably manufactured, so that productivity is improved.
【００１９】つまり、従来は一波長における反射率の測
定を分光光度計によって行っていたので、保護層の光学
的膜厚の検査を生産ラインで行うことは困難であった
が、本発明の検査方法、特に色彩色差計を用いた検査方
法を使用することにより、保護層の光学的膜厚の検査を
生産ラインで行うことが可能となる。That is, in the past, since the reflectance at one wavelength was measured by a spectrophotometer, it was difficult to inspect the optical film thickness of the protective layer on the production line. By using the method, particularly the inspection method using a color difference meter, it becomes possible to inspect the optical film thickness of the protective layer on the production line.
【００２０】[0020]
【実施例】以下に本発明を実施例に基づいて説明する。EXAMPLES The present invention will be described below based on examples.
【００２１】実施例１ 光記録媒体の各層の膜厚は、水晶振動子式膜厚計により
モニターした。Example 1 The film thickness of each layer of the optical recording medium was monitored by a crystal oscillator type film thickness meter.
【００２２】透明基板上にスパッタリング装置によって
第１保護層は70.6ＺｎＳ26.4ＳｉＯ2 3.0 Ｃ（ａｔ％）
混合膜を１８６．５〜３９２．９ｎｍ任意に変えて形成
し、記録層は0.08Ｐｄ0.5 Ｎｂ19.0Ｇｅ25.4Ｓｂ55.0Ｔ
ｅ（ａｔ％）合金を２４ｎｍ形成し、第２保護層は72.8
ＺｎＳ27.2ＳｉＯ2 （ａｔ％）混合膜を２６ｎｍ形成
し、反射層は0.2 Ｐｄ1.4 Ｈｆ98.3Ａｌ（ａｔ％）合金
を１２０〜１４０ｎｍ形成し、スピンコートによってア
クリル酸エステル系紫外線硬化樹脂を８μｍ形成し、光
記録媒体を得た。The first protective layer was 70.6 ZnS 26.4 SiO 2 3.0 C (at%) on the transparent substrate by a sputtering device.
The mixed film was formed by arbitrarily changing 186.5 to 392.9 nm, and the recording layer was 0.08Pd0.5Nb19.0Ge25.4Sb55.0T.
e (at%) alloy is formed to 24 nm, and the second protective layer is 72.8
ZnS27.2SiO 2 (at%) mixed film was 26nm formation, reflective layer is 0.2 Pd1.4 Hf98.3Al (at%) alloy 120~140nm formation, 8 [mu] m form acrylate-based ultraviolet curable resin by spin-coating Then, an optical recording medium was obtained.
【００２３】得られた光記録媒体を反射物体色ＣＩＥ表
色系デジタル色彩色差計ＣＲ−３００（ミノルタ（株）
製）によって、基板側の表色系色度を測定した。表１に
第１保護層膜厚を変えた時の光記録媒体のＬ* ａ* ｂ*
表色の結果を示す。図２に色度図を示す。The obtained optical recording medium was used as a reflection object color CIE color system digital color difference meter CR-300 (Minolta Co., Ltd.).
Manufactured) to measure the chromaticity of the color system on the substrate side. Table 1 shows L * a * b * of the optical recording medium when the thickness of the first protective layer is changed .
The result of the color is shown. A chromaticity diagram is shown in FIG.
【００２４】第１保護層の膜厚を１８６．５ｎｍの赤色
から膜厚を厚くしていくと、赤紫−紫−青紫−青−緑−
黄緑の３９２．９ｎｍまで順に色の変化が色度図から確
認でき色相を数値で管理することができた。また、第１
保護層の膜厚差が１０ｎｍになると、実際にこの差を段
差計あるいはエリプソメータにより膜厚を測定しても手
間と、１検体あたりの測定時間が３０〜６０分かかり、
膜厚差が明確でないこともある。しかし、色彩色差計を
用いると、図２に示すように第１保護層の膜厚差が１０
〜２０ｎｍであっても非常に簡単に測定ができ、３秒で
精度良い膜厚値が得られた。When the thickness of the first protective layer is increased from red of 186.5 nm to red, the purple-purple-blue-purple-blue-green-
From the chromaticity diagram, it was possible to confirm the change in color in order up to 392.9 nm of yellowish green, and it was possible to manage the hue numerically. Also, the first
When the film thickness difference of the protective layer becomes 10 nm, even if the film thickness is actually measured by a step gauge or an ellipsometer, it takes time and 30 to 60 minutes per sample,
The difference in film thickness may not be clear. However, when a color difference meter is used, the film thickness difference of the first protective layer is 10 as shown in FIG.
Even if the thickness is up to 20 nm, the measurement can be performed very easily, and the accurate film thickness value was obtained in 3 seconds.
【００２５】以上に述べてきたように従来技術では、目
視で色の判別をする際個人差が生じ、また知覚的な違い
を表すことができず色合わせのための第１保護層膜厚の
決定が困難であったが、本発明によると、短時間で検査
を行うことができ、かつ色を数値化して色相の判別をす
るので保護層の光学的膜厚の管理・検査が容易になる。As described above, according to the prior art, there are individual differences when visually distinguishing colors, and it is not possible to express perceptual differences, and the thickness of the first protective layer film for color matching is set. Although it was difficult to determine, according to the present invention, the inspection can be performed in a short time, and the hue is discriminated by digitizing the color, so that the management and inspection of the optical film thickness of the protective layer are facilitated. .
【００２６】[0026]
【表１】 実施例２ 実施例１において、第１保護層の膜厚を２００ｎｍと固
定した以外同様にして、光記録媒体の製造および検査を
行った。それと同時に、検査によって得られた保護層の
光学的膜厚に関する情報を、保護層形成工程にフィード
バックし、保護層形成のスパッタリング条件を修正し
た。その結果、光記録媒体は安定した性能のものが得ら
れ、生産の収率が向上した。[Table 1] Example 2 An optical recording medium was manufactured and inspected in the same manner as in Example 1 except that the thickness of the first protective layer was fixed to 200 nm. At the same time, the information on the optical film thickness of the protective layer obtained by the inspection was fed back to the protective layer forming step to correct the sputtering conditions for forming the protective layer. As a result, an optical recording medium with stable performance was obtained and the production yield was improved.
【００２７】[0027]
【発明の効果】本発明の光記録媒体の検査方法によれ
ば、保護層の形成状態を短時間で精度よく検査すること
ができ、保護層の光学的膜厚の管理・検査も容易にな
る。この検査を公知の自動測定可能な色彩色差計を用い
て行えば、さらに短時間で精度よく検査ができ、かつ光
学的膜厚のデータ管理、品質管理が容易に行える。この
場合、コンピュータを用いてデータ管理、品質管理がで
きる。この検査方法を光記録媒体の製造方法に適用し、
保護層形成工程へフィードバックすることによって生産
の収率が向上する。According to the method for inspecting an optical recording medium of the present invention, the state of formation of the protective layer can be inspected accurately in a short time, and the optical thickness of the protective layer can be easily controlled and inspected. . If this inspection is carried out using a known colorimeter capable of automatic measurement, the inspection can be performed more accurately in a shorter time, and the optical film thickness data management and quality control can be easily performed. In this case, data management and quality control can be performed using a computer. Applying this inspection method to the optical recording medium manufacturing method,
By feeding back to the protective layer forming process, the production yield is improved.
【図１】本発明にかかる光記録媒体の一例を表す概略断
面図である。FIG. 1 is a schematic sectional view showing an example of an optical recording medium according to the present invention.
【図２】本発明にかかる光記録媒体の検査結果の一例を
表す色度図である。FIG. 2 is a chromaticity diagram showing an example of an inspection result of an optical recording medium according to the present invention.
Claims (4)
積層した光記録媒体の検査方法において、波長の異なる
複数の光を照射し、基板からの反射光を測定することに
より保護層の光学的膜厚を検査することを特徴とする光
記録媒体の検査方法。1. A method for inspecting an optical recording medium comprising a substrate and at least a protective layer and a recording layer sequentially laminated on the substrate. A method for inspecting an optical recording medium, which comprises inspecting a film thickness.
からの反射光を測定し反射率を検出する手段と、該反射
率の値から測定試料の色相、彩度、明度に基づく三刺激
値を求める手段とを備える色彩色差計を用いて、保護層
の光学的膜厚を検査することを特徴とする請求項１記載
の光記録媒体の検査方法。2. A means for irradiating a plurality of lights having different wavelengths and measuring the reflected light from the measurement sample to detect the reflectance, and three means based on the hue, saturation and lightness of the measurement sample from the value of the reflectance. The optical recording medium inspection method according to claim 1, wherein an optical film thickness of the protective layer is inspected by using a color difference meter provided with a means for obtaining a stimulus value.
積層した光記録媒体の製造方法において、下記の（１）
〜（４）の工程を含むことを特徴とする光記録媒体の製
造方法。 （１）基板上に保護層を形成する第一工程。 （２）保護層上に記録層を形成する第二工程。 （３）波長の異なる複数の光を照射し、基板からの反射
光を測定することにより前記保護層の光学的膜厚を検査
する第三工程。 （４）前記第三工程で得られた保護層の光学的膜厚に関
する情報を、前記第一工程にフィードバックし、保護層
の膜厚形成条件を修正する第四工程。3. A method of manufacturing an optical recording medium in which at least a protective layer and a recording layer are sequentially laminated on a substrate, wherein
A method for manufacturing an optical recording medium, including the steps (4) to (4). (1) A first step of forming a protective layer on a substrate. (2) A second step of forming a recording layer on the protective layer. (3) A third step of inspecting the optical film thickness of the protective layer by irradiating a plurality of lights having different wavelengths and measuring the reflected light from the substrate. (4) A fourth step of feeding back the information about the optical film thickness of the protective layer obtained in the third step to the first step and correcting the film thickness forming condition of the protective layer.
の光を照射し、測定試料からの反射光を測定し反射率を
検出する手段と、該反射率の値から測定試料の色相、彩
度、明度に基づく三刺激値を求める手段とを備える色彩
色差計を用いて、保護層の光学的膜厚を検査することを
特徴とする請求項３記載の光記録媒体の製造方法。4. In the third step, means for irradiating a plurality of lights having different wavelengths, measuring the reflected light from the measurement sample to detect the reflectance, and the hue and color of the measurement sample from the value of the reflectance. 4. The method for manufacturing an optical recording medium according to claim 3, wherein an optical film thickness of the protective layer is inspected by using a color difference meter equipped with a means for obtaining a tristimulus value based on the degree and brightness.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5290703A JP2973803B2 (en) | 1993-11-19 | 1993-11-19 | Inspection method and manufacturing method for optical recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5290703A JP2973803B2 (en) | 1993-11-19 | 1993-11-19 | Inspection method and manufacturing method for optical recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07141703A true JPH07141703A (en) | 1995-06-02 |
| JP2973803B2 JP2973803B2 (en) | 1999-11-08 |
Family
ID=17759424
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5290703A Expired - Fee Related JP2973803B2 (en) | 1993-11-19 | 1993-11-19 | Inspection method and manufacturing method for optical recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2973803B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008114471A1 (en) * | 2007-02-20 | 2008-09-25 | Mitsubishi Heavy Industries, Ltd. | Film thickness measuring method, its apparatus, and manufacturing system for thin-film device |
| WO2010013429A1 (en) * | 2008-07-30 | 2010-02-04 | 株式会社ニレコ | Film thickness measuring device and film thickness measuring method |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007101525A (en) | 2005-09-06 | 2007-04-19 | Ricoh Co Ltd | Inspecting method of optical recording medium |
| WO2012140693A1 (en) * | 2011-04-12 | 2012-10-18 | 株式会社ニレコ | Film thickness measuring device and film thickness measuring method |
-
1993
- 1993-11-19 JP JP5290703A patent/JP2973803B2/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008114471A1 (en) * | 2007-02-20 | 2008-09-25 | Mitsubishi Heavy Industries, Ltd. | Film thickness measuring method, its apparatus, and manufacturing system for thin-film device |
| US8184303B2 (en) | 2007-02-20 | 2012-05-22 | Mitsubishi Heavy Industries, Ltd. | Film-thickness measurement method and apparatus therefor, and thin-film device fabrication system |
| WO2010013429A1 (en) * | 2008-07-30 | 2010-02-04 | 株式会社ニレコ | Film thickness measuring device and film thickness measuring method |
| JP4482618B2 (en) * | 2008-07-30 | 2010-06-16 | 株式会社ニレコ | Film thickness measuring apparatus and film thickness measuring method |
| JPWO2010013429A1 (en) * | 2008-07-30 | 2012-01-05 | 株式会社ニレコ | Film thickness measuring apparatus and film thickness measuring method |
| US8339617B2 (en) | 2008-07-30 | 2012-12-25 | Nireco Corporation | Film thickness measuring device and film thickness measuring method |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2973803B2 (en) | 1999-11-08 |
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