JPH0714087B2 - Ion laser device - Google Patents
Ion laser deviceInfo
- Publication number
- JPH0714087B2 JPH0714087B2 JP59096011A JP9601184A JPH0714087B2 JP H0714087 B2 JPH0714087 B2 JP H0714087B2 JP 59096011 A JP59096011 A JP 59096011A JP 9601184 A JP9601184 A JP 9601184A JP H0714087 B2 JPH0714087 B2 JP H0714087B2
- Authority
- JP
- Japan
- Prior art keywords
- laser
- voltage
- laser device
- current relay
- resistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Lasers (AREA)
Description
【発明の詳細な説明】 （１）発明の属する分野 本発明は、イオンレーザ装置、特に光出力の安定化と遠
かく操作化を図ったイオンレーザ装置に関する。Description: (1) Field of the Invention The present invention relates to an ion laser device, and more particularly, to an ion laser device for stabilizing the light output and operating remotely.
（２）従来の技術 従来、イオンレーザ装置では光出力の安定化を図るた
め、レーザ出力の一部を検出してそれが一定になるよう
にレーザ管の放電電流を制御する帰還回路が用いられて
いる。すなわち第１図に示すように、直流電源１の一つ
の出力端をレーザ管９のカソード10に接続し他端をトラ
ンジスタ２を通してレーザ管９のアノード11に接続す
る。そしてレーザ光12の一部のレーザ光13を光検出器６
で検出し、抵抗５の両端に現われる出力電圧Voと基準電
源４を可変抵抗器14で分圧した基準電圧Vs′との差電圧
を比較増幅器３で増幅し、トランジスタ２のベースに供
給し、差電圧が０になるように制御している。また、最
近ではレーザ出力12を遠かく操作する必要が有るため、
比較増幅器３と基準電圧Vs′を作り出すための可変抵抗
器14を数10Mはなれた場所に設置することがある。しか
し、イオンレーザ装置はレーザ管内の封入希ガスをイオ
ン化するため、大電流のアーク放電をさせる。そのた
め、前記可変抵抗器14と比較増幅器３との間に雑音が混
入し、その信号が比較増幅器３で増幅されトランジスタ
２に供給されレーザ管９のアノード11,カソード10間の
放電電流に雑音が混入し、レーザ出力12の雑音となる。(2) Conventional Technology Conventionally, in order to stabilize the optical output, an ion laser device uses a feedback circuit that detects a part of the laser output and controls the discharge current of the laser tube so that it becomes constant. ing. That is, as shown in FIG. 1, one output end of the DC power supply 1 is connected to the cathode 10 of the laser tube 9 and the other end is connected to the anode 11 of the laser tube 9 through the transistor 2. Then, the laser light 13 which is a part of the laser light 12 is detected by the photodetector 6
Detected by, the difference voltage between the output voltage Vo appearing across the resistor 5 and the reference voltage Vs' obtained by dividing the reference power source 4 by the variable resistor 14 is amplified by the comparison amplifier 3 and supplied to the base of the transistor 2. The difference voltage is controlled so as to be zero. In addition, recently it is necessary to operate the laser output 12 far,
The comparator amplifier 3 and the variable resistor 14 for generating the reference voltage Vs' may be installed at a place apart by several 10M. However, since the ion laser device ionizes the enclosed rare gas in the laser tube, it causes a large current arc discharge. Therefore, noise is mixed between the variable resistor 14 and the comparison amplifier 3, the signal is amplified by the comparison amplifier 3 and is supplied to the transistor 2, and noise is generated in the discharge current between the anode 11 and the cathode 10 of the laser tube 9. It mixes and becomes noise of the laser output 12.
（３）発明の目的 本発明の目的は、レーザ管からのレーザ出力光の一部を
検出し、その値が一定になるように放電電流を制御する
帰還回路を有するイオンレーザ装置において、制御信号
が数10Mはなれたところから送られてもレーザ出力に外
来雑音が混入しない、遠かく操作可能なイオンレーザ装
置を提供することである。(3) Object of the Invention An object of the present invention is to provide a control signal in an ion laser device having a feedback circuit for detecting a part of laser output light from a laser tube and controlling a discharge current so that the value becomes constant. The objective is to provide an ion laser device that can be operated far away so that external noise is not mixed into the laser output even if it is sent from a distance of several tens of meters.
（４）発明の実施例 次に第２図に示した実施例について本発明を具体的に説
明する。(4) Embodiment of the Invention Next, the present invention will be specifically described with reference to the embodiment shown in FIG.
本発明によれば、直流電源１の一つの出力端をレーザ管
９のカソード10に接続し、他端をトランジスタ２を通し
てレーザ管９のアノード11に接続すると、レーザ管９の
アノード11とカソード10間で放電し、光共振器7,7′に
よりレーザ光12が発振する。そして、レーザ光12の一部
のレーザ光13は光検出器６で検出され抵抗５の両端に光
出力電圧Voを発生し、その光出力電圧Voは比較増幅器３
に供給される。また基準電源４の出力電圧は抵抗15,16
と電流リレー接点20′,21′,22′のいづれかにより抵抗
16に並列接続される抵抗17,18,19とにより分圧される基
準電圧Vs″となる。前記VoとVs″との差電圧を比較増幅
器３で増幅し、トランジスタ２のペースに供給し、差電
圧が０になるように制御する。そして基準電源4,電流リ
レー20,20′,21,21′,22,22′および分圧抵抗15,16,17,
18,19を比較増幅器３の近くに設置する。ここで、電流
リレー電源24を切換スイッチ23によりａに接続すると、
電流リレー20が動作し、接点20′が閉じ、基準電源４の
出力電圧は抵抗15と抵抗16に並列に接続された抵抗17と
で分圧されたVs″となる、同様に切換スイッチ23をｂに
接続すると、電流リレー21が動作し接点21′が閉じ、基
準電源４の出力電圧は抵抗15と抵抗16に並列に接続され
た抵抗18とで分圧されたVsとなる、同様に切換スイッ
チ23をＣに接続すると、電流リレー22が動作し接点22′
が閉じ基準電源４の出力電圧は抵抗15と抵抗16に並列に
接続された抵抗19とで分圧されたVs′となる。According to the present invention, when one output end of the DC power supply 1 is connected to the cathode 10 of the laser tube 9 and the other end is connected to the anode 11 of the laser tube 9 through the transistor 2, the anode 11 and the cathode 10 of the laser tube 9 are connected. The laser beam 12 is oscillated by the optical resonators 7 and 7 '. Then, a part of the laser light 12 of the laser light 12 is detected by the photodetector 6 to generate a light output voltage Vo across the resistor 5, and the light output voltage Vo is generated by the comparison amplifier 3
Is supplied to. In addition, the output voltage of the reference power source 4 is 15/16
And current relay contacts 20 ', 21', 22 '
The reference voltage Vs ″ is divided by resistors 17, 18, and 19 connected in parallel with 16. The difference voltage between Vo and Vs ″ is amplified by the comparison amplifier 3 and supplied to the pace of the transistor 2. Control is performed so that the differential voltage becomes zero. And the reference power source 4, the current relays 20, 20 ', 21, 21', 22, 22 'and the voltage dividing resistors 15, 16, 17,
18 and 19 are installed near the comparison amplifier 3. Here, if the current relay power supply 24 is connected to a by the changeover switch 23,
The current relay 20 operates, the contact 20 ′ is closed, and the output voltage of the reference power source 4 becomes Vs ″ divided by the resistor 15 and the resistor 17 connected in parallel with the resistor 16. Similarly, the changeover switch 23 is turned on. When connected to b, the current relay 21 operates and the contact 21 'is closed, and the output voltage of the reference power source 4 becomes Vs divided by the resistor 15 and the resistor 18 connected in parallel with the resistor 16, and similarly switched. When switch 23 is connected to C, current relay 22 operates and contacts 22 '
Is closed and the output voltage of the reference power supply 4 becomes Vs' divided by the resistor 15 and the resistor 19 connected in parallel with the resistor 16.
（５）効果の説明 以上説明したように、基準電源4,電流リレー20,20′,2
1,21′,22,22′および分圧抵抗15,16,17,18,19が比較増
幅器３の近くに設置でき、Vs″,Vs,Vs′に外来雑音
が混入することを防止でき、レーザ出力12にも外来雑音
は混入させずに、切換スイッチ23を遠かく操作すること
により、レーザ出力12を変化させることが出来る。イオ
ンレーザ装置を得ることができる。(5) Description of effects As described above, the reference power source 4, the current relays 20, 20 ', 2
1,21 ', 22,22' and voltage dividing resistors 15,16,17,18,19 can be installed near the comparison amplifier 3 to prevent external noise from mixing in Vs ", Vs, Vs'. The laser output 12 can be changed by operating the changeover switch 23 far away without mixing external noise into the laser output 12. It is possible to obtain an ion laser device.
第１図は従来のイオンレーザ装置を示すブロック図、第
２図は本発明のイオンレーザ装置を示すブロック図であ
る。 １……直流電源、２……トランジスタ、３……比較増幅
器、４……基準電源、5,15,16,17,18,19……抵抗、６…
…光検出器、7,7′……光共振器、８……ビームスプリ
ッタ、９……レーザ管、10……カソード、11……アノー
ド、12,13……レーザ光、14……可変抵抗器、20,20′,2
1,21′,22,22′……電流リレー、23……切換スイッチ、
24……電流リレー電源。FIG. 1 is a block diagram showing a conventional ion laser device, and FIG. 2 is a block diagram showing an ion laser device of the present invention. 1 ... DC power supply, 2 ... transistor, 3 ... comparison amplifier, 4 ... reference power supply, 5,15,16,17,18,19 ... resistor, 6 ...
… Photodetector, 7,7 ′ …… Optical resonator, 8 …… Beam splitter, 9 …… Laser tube, 10 …… Cathode, 11 …… Anode, 12,13 …… Laser light, 14 …… Variable resistance Bowl, 20,20 ', 2
1,21 ′, 22,22 ′ …… Current relay, 23 …… Changeover switch,
24 …… Current relay power supply.
Claims (1)
給する直流電源と、前記レーザ管からのレーザ光の１部
を検出し、その値が一定になるように放電電流を制御す
る帰還回路とを有するイオンレーザ装置において、前記
レーザ光の一部を検出した光検出電圧と基準電源と分圧
抵抗によって作られた基準電圧とを比較する比較増幅器
と、前記分圧抵抗の並列抵抗を切換える電流リレーと、
該電流リレーの電源を切換える切換スイッチとを具備
し、かつ前記電流リレーは前記比較増幅器の近くに配置
されるとともに前記切換スイッチから遠く離れて配置さ
れていることを特徴とするイオンレーザ装置。1. A laser tube, a DC power supply for supplying an operating voltage of the laser tube, and a feedback for detecting a part of laser light from the laser tube and controlling a discharge current so that the value becomes constant. In an ion laser device having a circuit, a parallel amplifier of a comparator amplifier for comparing a photodetection voltage that detects a part of the laser light and a reference voltage generated by a reference power source and a voltage dividing resistor, A current relay that switches
An ion laser device, comprising: a changeover switch for changing over a power source of the current relay, wherein the current relay is arranged near the comparison amplifier and far away from the changeover switch.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59096011A JPH0714087B2 (en) | 1984-05-14 | 1984-05-14 | Ion laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59096011A JPH0714087B2 (en) | 1984-05-14 | 1984-05-14 | Ion laser device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60240177A JPS60240177A (en) | 1985-11-29 |
| JPH0714087B2 true JPH0714087B2 (en) | 1995-02-15 |
Family
ID=14153246
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59096011A Expired - Lifetime JPH0714087B2 (en) | 1984-05-14 | 1984-05-14 | Ion laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0714087B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0626270B2 (en) * | 1987-10-26 | 1994-04-06 | 三菱電機株式会社 | Laser oscillator |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57104287A (en) * | 1980-12-22 | 1982-06-29 | Sumitomo Electric Ind Ltd | Laser output controlling device |
| JPS58151083A (en) * | 1982-03-03 | 1983-09-08 | Toshiba Corp | Transverse flow type gas laser device |
-
1984
- 1984-05-14 JP JP59096011A patent/JPH0714087B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60240177A (en) | 1985-11-29 |
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