JPS60263487A - Ion laser device - Google Patents
Ion laser deviceInfo
- Publication number
- JPS60263487A JPS60263487A JP11959784A JP11959784A JPS60263487A JP S60263487 A JPS60263487 A JP S60263487A JP 11959784 A JP11959784 A JP 11959784A JP 11959784 A JP11959784 A JP 11959784A JP S60263487 A JPS60263487 A JP S60263487A
- Authority
- JP
- Japan
- Prior art keywords
- voltage
- current
- laser
- resistor
- supplied
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
- H01S3/131—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the active medium, e.g. by controlling the processes or apparatus for excitation
- H01S3/134—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the active medium, e.g. by controlling the processes or apparatus for excitation in gas lasers
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
（１）発明の属する分野
本発明は、イオンレーザ装置、特に光出力安定化と、遠
かく操作化とを図ったイオンレーザ装置に関する。DETAILED DESCRIPTION OF THE INVENTION (1) Field of the Invention The present invention relates to an ion laser device, and particularly to an ion laser device that is capable of stabilizing optical output and being remotely operable.
（２）従来の技術
従来、イオンレーザ装置では光出力の安定化を図るため
レーザ管の放ｔ′ｉＩＬ流を検出して放電電流が一定に
なるよう制御する帰還回路あるいは、レーザ出力の一部
を検出してそれが一定に彦るようにレーザ管の放ｉｔ電
流を制御する帰還回路が用いられている。すなわら第１
図に示すように直流電源１の一つの出力端をレーザ管９
のカソード１０に接続し、他端をトランジスタ２、電流
検出抵抗１５、トリガ回路１７とを通してレーザ管９の
アノード１１に接続する。そして切換スイッチ１６をＤ
側に閉じ、放電電流を電流検出抵抗１５で検出し、電流
検出抵抗１５０両端に現われる出力電圧ＶＭと基準電源
４を可変抵抗器１４で分圧した基準電圧Ｖ′ｓとの差電
圧を比較増幅器３で増幅し、トランジスタ２０ベースに
供給し、差電圧がＯになるように制御している。あるい
は、切換スイッチ１６をａ側に閉じ、レーザ光の１部を
光検出器６で検出し、抵抗５の両端に現われる出力電圧
■Ｌと基準電圧Ｖｓ′との差電圧を比較増幅ａ３で増幅
シ、トランジスタ２０ベースに供給し、差電圧が０にな
るように制御している。また最近では、レーザ出力１２
を遠かく操作する必要が鳴るため、比較増幅器３と基準
電圧ｖ８′を作り出すための可変仏抗器１４とを数１Ｏ
ＮＨなれた場所に、同様に切換スイッチ１６も数１（Ｎ
ｖｉはなれた場所に設置することがある。しかし、イオ
ンレーザ装置はレーザ管内の封入布ガスをイｉ オン化
するため、大電流のアーク放電をさせる。(2) Conventional technology Conventionally, in order to stabilize the optical output in an ion laser device, a feedback circuit that detects the emitted t'iIL current of the laser tube and controls the discharge current to be constant, or a part of the laser output is used. A feedback circuit is used to detect the current and control the emitted current of the laser tube so that it remains constant. In other words, the first
As shown in the figure, connect one output end of the DC power supply 1 to the laser tube 9.
The other end is connected to the anode 11 of the laser tube 9 through the transistor 2, the current detection resistor 15, and the trigger circuit 17. Then turn the changeover switch 16 to
The discharge current is detected by the current detection resistor 15, and the difference voltage between the output voltage VM appearing across the current detection resistor 150 and the reference voltage V's obtained by dividing the reference power supply 4 by the variable resistor 14 is detected by the comparison amplifier. 3 and is supplied to the base of the transistor 20, and the differential voltage is controlled to be O. Alternatively, the selector switch 16 is closed to the a side, a portion of the laser beam is detected by the photodetector 6, and the difference voltage between the output voltage L appearing across the resistor 5 and the reference voltage Vs' is amplified by the comparative amplifier a3. The voltage is supplied to the base of the transistor 20, and the differential voltage is controlled to be zero. Also, recently, laser output 12
Since it is necessary to operate the voltage from a distance, the comparator amplifier 3 and the variable resistor 14 for creating the reference voltage v8' are connected to
Similarly, the selector switch 16 is placed in a place familiar to the NH.
vi may be installed in a remote location. However, in order to ionize the gas sealed in the laser tube, the ion laser device generates a large current arc discharge.
そのため、前記可変抵抗器１４あるいは切換スイッチ１
６と比較増幅器３との間に雑音が混入しその信号が比較
増幅器３で増幅されトランジスタ２に供給されレーザ管
９のアノード１１、カソード１０間の放１を電流に雑音
が混入し、レーザ出力１２の雑音となる。Therefore, the variable resistor 14 or the changeover switch 1
6 and the comparison amplifier 3, the signal is amplified by the comparison amplifier 3 and supplied to the transistor 2, and the noise mixes into the current 1 between the anode 11 and the cathode 10 of the laser tube 9, causing the laser output. 12 noises.
（３）発明の目的
本発明の目的は、レーザ管の放電電流を検出あるいはレ
ーザ光の一部を検出し、その値が一定になるように放電
電流を制御する帰還回路を有するイオンレーザ装置にお
いて、制御信号が数１０Ｍはなれたところから送られて
もレーザ出力に外来雑音が混入しない、遠かく操作可能
なイオンレーザ装置を提供するためにある。(3) Purpose of the Invention The purpose of the present invention is to provide an ion laser device having a feedback circuit that detects the discharge current of a laser tube or detects a part of the laser beam and controls the discharge current so that its value is constant. The object of the present invention is to provide an ion laser device that can be operated remotely and does not have external noise mixed into the laser output even if a control signal is sent from a distance of several tens of meters.
（４）発明の構成および作用
次に第２図に示した実施例について本発明を具体的に説
明する。(4) Structure and operation of the invention Next, the present invention will be specifically explained with reference to the embodiment shown in FIG.
本発明によれば、直流電源１の一つの出力端をレーザ管
９０カソード１０に接続し、他端をトランジスタ２、電
流検出抵抗１５、トリガ回路１７とを通してレーザ管９
のアノードＩＩＫ接続すると、レーザ管９のアノード１
１とカソード１０間で放電し、光共振器７，７′によシ
レーザ光１２が発振する。そしてレーザ管の放電電流は
電流検出抵抗１５で検出され、電流検出抵抗１５０両端
に電流検出電圧Ｖ、を発生し、電流リレー２３の接点２
３“の＋８）を通して比較増幅器３に供給される。また
レーザ光１２の一部のレーザ光１３は光検出器６で検出
され抵抗５０両端に光出力電圧■Ｌを発生し、電流リレ
ー２３の接点２３′の（ｂ）に供給される。また基準電
源４の出力電圧は抵抗３５．３６と電流リレー２１，２
２．２３の接点２１Ｓ２２’、２３’のいづれかによシ
抵抗３６に並列接続される可変抵抗３７．３８．３９と
により分圧される基準電圧■８“となる。前記■Ｍとｖ
ｓ′との差電圧を比較増幅器３で増幅し、トランジスタ
２０ベースに供給し、差電圧が０になるよう圧制御する
。ここで基準電源２Ｂの出力電圧Ｖｓ＋＝ＩＶ、基準電
源２９の出力電圧Ｖｓ ｔ ＝ ５ Ｖ、基準電源３０
の出力電圧ｖｓ、−＝ｔｏｖと設定し、外部信号入力端
４０．４１に１．５■を供給すると比較増幅器２５によ
り電流リレー１８は動作５−
し、接点１８’、１８“、１８′″ はｌａ）側に閉じ
、電流リレー２１が動作し、接点２１′が閉じ、基準電
源４の出力電圧は抵抗３５と抵抗３６に並列に接続され
た可変抵抗３７とで分圧されたｖ８＃となる。同様に外
部信号入力端４０．４１に５．５ｖを供給すると比較増
幅器２６によシミ流リレー１９は動作し、接点１９，１
９，１９は（ａ）側に閉じ、を流リレー２２が動作し・
接点２２′が閉じ、基準電源４の出力電圧は抵抗３５と
抵抗３６に並列に接続された可変抵抗３８とで分圧され
たＶ８“となる。また同様に外部信号入力端４０．４１
に１０．５Ｖを供給すると、比較増幅器２７によシミ流
リレー２０は動作し、接点２０’、２０“、２０＃は（
ａ）側に閉じ、電流リレー２３が動作し、接点２３’、
２３“はｌａ）側に閉じ、前記光出力電圧ＶＬは比較増
幅器３に供給される。また基準電源４の出力電圧は抵抗
３５と抵抗３６に並列に接続された可変抵抗３９とで分
圧されたｖａ＃′となる。そして基準電源４、電流リレ
ー２１．２２，２３．分圧抵抗３５，３６． 可変６−
抵抗３７，３８，３９を比較増幅器３０近くに設置する
。According to the present invention, one output end of the DC power supply 1 is connected to the laser tube 90 cathode 10, and the other end is connected to the laser tube 90 through the transistor 2, the current detection resistor 15, and the trigger circuit 17.
When the anode IIK of the laser tube 9 is connected, the anode 1 of the laser tube 9
1 and the cathode 10, and a laser beam 12 is oscillated by the optical resonators 7 and 7'. The discharge current of the laser tube is detected by the current detection resistor 15, and a current detection voltage V is generated across the current detection resistor 150, and the current detection voltage V is generated at the contact 2 of the current relay 23.
A part of the laser beam 13 of the laser beam 12 is detected by the photodetector 6 and generates an optical output voltage L across the resistor 50, which is applied to the current relay 23. The output voltage of the reference power source 4 is supplied to the contact 23' (b).
The reference voltage ``8'' is divided by the variable resistor 37, 38, and 39 connected in parallel to the resistor 36 through either of the contacts 21S22' and 23' of 2.23.
The differential voltage with respect to s' is amplified by the comparator amplifier 3 and supplied to the base of the transistor 20, and the voltage is controlled so that the differential voltage becomes zero. Here, the output voltage of the reference power supply 2B is Vs+=IV, the output voltage of the reference power supply 29 is Vs t = 5 V, and the reference power supply 30 is
When the output voltage vs, -=tov is set and 1.5■ is supplied to the external signal input terminal 40.41, the current relay 18 is activated by the comparator amplifier 25, and the contacts 18', 18", 18'" is closed to the la) side, the current relay 21 operates, the contact 21' closes, and the output voltage of the reference power source 4 becomes v8#, which is divided by the variable resistor 37 connected in parallel to the resistor 35 and the resistor 36. Become. Similarly, when 5.5V is supplied to the external signal input terminal 40.41, the stain flow relay 19 is activated by the comparison amplifier 26, and the contacts 19, 1
9 and 19 are closed to the (a) side, and the flow relay 22 operates.
The contact 22' closes, and the output voltage of the reference power source 4 becomes V8'', which is divided by the resistor 35 and the variable resistor 38 connected in parallel to the resistor 36. Similarly, the external signal input terminal 40.41
When 10.5V is supplied to
a) side, the current relay 23 operates, and the contacts 23',
23" is closed to the la) side, and the optical output voltage VL is supplied to the comparator amplifier 3. The output voltage of the reference power source 4 is divided by a resistor 35 and a variable resistor 39 connected in parallel to the resistor 36. The reference power source 4, current relays 21, 22, 23, voltage dividing resistors 35, 36, and variable resistors 37, 38, 39 are installed near the comparator amplifier 30.
（５）効果の説明
以上説明したように、外部信号入力端４０゜４１が数１
０Ｍはなれていても、外部信号として例えば１．５Ｖ
、 ５．５Ｖ 、 １０．５Ｖの３段階の電圧を外部信
号入力端４０．４１に供給するととによυ、スタンバイ
状態、定電流動作状態、光フイードバツク動作状態に制
御することかできるよって基準電源４、電流リレー２１
，２２゜２３および分圧抵抗３５，３６、可変抵抗３７
゜３８．３９が比較増幅器３の近くに設置でき、ｖｓ、
Ｖｓ 、 Ｖ、および切換スイッチとしての接点２３
′に外来雑音が混入することを防止でき、レーザ出力１
２にも外来雑音が混入せずに、レーザ出力１２を遠かく
操作することが出来るイオンレーザ装置を得ることがで
きる。(5) Effect explanation As explained above, the external signal input terminal 40°41 is
Even if 0M is off, for example 1.5V as an external signal.
By supplying three voltage levels of , 5.5V, and 10.5V to the external signal input terminal 40.41, it is possible to control the standby state, constant current operation state, and optical feedback operation state. 4. Current relay 21
, 22° 23, voltage dividing resistors 35, 36, variable resistor 37
゜38.39 can be installed near the comparison amplifier 3, vs,
Vs, V, and contact 23 as a changeover switch
′ can be prevented from entering external noise, and the laser output 1
It is possible to obtain an ion laser device in which the laser output 12 can be controlled remotely without any external noise being mixed in.
ｉ。i.
第１図は従来のイオンレーザ装置を示すブロック図、第
２図は本発明のイオンレーザ装置を示すブロック図であ
る。
１．２４・・・・・・直流電源、２・・・・・・トラン
ジスタ、３．２５．２６．２７・・・・・・比較増幅器
、４．２８，２９゜３０・・・・・・基準電源、５．３
５，３６，３１．３２．３３・・・・・・抵抗、６・・
・・・・光検出器、７，７′・・・・・光共振器、８・
・・・・・ビームスプリッタ、９・・・・・・レーザ管
、１０・・・・・・カソード、１１・・・・・・アノー
ド、１２，１３・・・・・・レーザ光、１４，３７．３
８．３９・・・・・・可変抵抗器、１５・・・・・・電
流検出抵抗、１６・・・・・・切換スイッチ、１７・・
・・・・トリガ回路、１８．１８’、１８“、１８＃。
ＩＣｌ３ ＋１９．１９．２０，２０，２０ ．２Ｌ２
１’、 ２３ 、２３’、 ２３・・・・・・電流リレ
ー、２４・・・・・・電流リレー電源、４０．４１・・
・・・・外部信号入力端子。FIG. 1 is a block diagram showing a conventional ion laser device, and FIG. 2 is a block diagram showing an ion laser device of the present invention. 1.24...DC power supply, 2...Transistor, 3.25.26.27...Comparison amplifier, 4.28,29°30... Reference power supply, 5.3
5, 36, 31.32.33...Resistance, 6...
...Photodetector, 7,7'...Optical resonator, 8.
... Beam splitter, 9 ... Laser tube, 10 ... Cathode, 11 ... Anode, 12, 13 ... Laser light, 14, 37.3
8.39... Variable resistor, 15... Current detection resistor, 16... Changeover switch, 17...
...Trigger circuit, 18.18', 18", 18#. ICl3 +19.19.20,20,20.2L2
1', 23, 23', 23...Current relay, 24...Current relay power supply, 40.41...
...External signal input terminal.
Claims (1)
源と前記レーザ管の放電電流あるいはレーザ管からのレ
ーザ光の１部を検出し、その値が一定になるように放電
電流を制御する帰還回路を有するイオンレーザ装置にお
いて、前記放電電流検出電圧あるいはレーザ光の一部を
検出した光検出電圧と、基準電源と分圧抵抗によって作
られた基準電圧とを比較する比較増幅器と、前記放電電
流検出電圧と光検出電圧とを切換える電流リレー２３と
、前記分圧抵抗の並列抵抗を切換える電流リレー２１，
２２．２３と、収電流リレー２１，２２゜２３を駆動す
る電流リレー電源２４と、外部信号と基準電源２８．２
９．３０とを比較する比較増幅器２５．２６．２７と、
該比較増幅器２５ 、２６ 、２７によって駆動される
電流リレー１Ｂ、１９．２０とを具備することを特徴と
するイオンレーザ装置。A laser tube, a DC power supply that supplies the operating voltage of the laser tube, and a feedback device that detects the discharge current of the laser tube or a portion of the laser light from the laser tube and controls the discharge current so that the value remains constant. In an ion laser device having a circuit, a comparison amplifier that compares the discharge current detection voltage or a photodetection voltage obtained by detecting a part of the laser light with a reference voltage created by a reference power supply and a voltage dividing resistor; a current relay 23 that switches between a detection voltage and a photodetection voltage; a current relay 21 that switches a parallel resistance of the voltage dividing resistor;
22.23, a current relay power supply 24 that drives the current collection relays 21, 22, 23, and an external signal and reference power supply 28.2.
a comparison amplifier 25.26.27 for comparing with 9.30;
An ion laser device characterized by comprising current relays 1B, 19.20 driven by the comparison amplifiers 25, 26, 27.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11959784A JPS60263487A (en) | 1984-06-11 | 1984-06-11 | Ion laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11959784A JPS60263487A (en) | 1984-06-11 | 1984-06-11 | Ion laser device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60263487A true JPS60263487A (en) | 1985-12-26 |
Family
ID=14765326
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11959784A Pending JPS60263487A (en) | 1984-06-11 | 1984-06-11 | Ion laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60263487A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6355992A (en) * | 1986-08-26 | 1988-03-10 | Mitsubishi Electric Corp | Laser beam machining apparatus |
| JPH01111390A (en) * | 1987-10-26 | 1989-04-28 | Mitsubishi Electric Corp | Laser oscillator |
-
1984
- 1984-06-11 JP JP11959784A patent/JPS60263487A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6355992A (en) * | 1986-08-26 | 1988-03-10 | Mitsubishi Electric Corp | Laser beam machining apparatus |
| JPH01111390A (en) * | 1987-10-26 | 1989-04-28 | Mitsubishi Electric Corp | Laser oscillator |
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