JPH07139469A - Support structure of diaphragm - Google Patents

Support structure of diaphragm

Info

Publication number
JPH07139469A
JPH07139469A JP28324293A JP28324293A JPH07139469A JP H07139469 A JPH07139469 A JP H07139469A JP 28324293 A JP28324293 A JP 28324293A JP 28324293 A JP28324293 A JP 28324293A JP H07139469 A JPH07139469 A JP H07139469A
Authority
JP
Japan
Prior art keywords
diaphragm
support
thickness direction
hydraulic oil
film thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP28324293A
Other languages
Japanese (ja)
Inventor
Yoshi Otsuka
好 大塚
Toshihiko Ito
猪頭  敏彦
Yasuyuki Sakakibara
康行 榊原
Kazuhide Watanabe
和英 渡辺
Akira Shibata
晃 柴田
Hiroshi Inoue
宏史 井上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Soken Inc
Original Assignee
Nippon Soken Inc
NipponDenso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Soken Inc, NipponDenso Co Ltd filed Critical Nippon Soken Inc
Priority to JP28324293A priority Critical patent/JPH07139469A/en
Publication of JPH07139469A publication Critical patent/JPH07139469A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To provide the highly reliable support structure of a diaphragm having no drag of the diaphragm and which can seal a fluid to be press-fed and an operation oil and not fatigue destroyed by repeating high stress. CONSTITUTION:A support part 201 is arranged on the position apart to the outer periphery side form a diaphragm movable part and the diaphragm is press-contacted in upper/lower direction and held in and supported by making film thickness direction compression amount of the diaphragm 1 in the support 201 large than the film thickness direction compression amount of the diaphragm in an adjacent part to the diaphragm movable part.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は例えばダイアフラムポン
プ等におけるダイアフラムの支持構造に関するものであ
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a diaphragm support structure for a diaphragm pump or the like.

【0002】[0002]

【従来の技術】作動油によりダイアフラムを変位させ、
ダイアフラムを介して被圧送流体を圧送するダイアフラ
ムポンプにおいては、ダイアフラムの変位によるダイア
フラムのひきずり防止、あるいは、被圧送流体および作
動油のシールのために、かみつきのよい形状の部材を高
い面圧で締めつけ、ダイアフラムを支持する必要があ
る。
2. Description of the Related Art A diaphragm is displaced by hydraulic oil,
In a diaphragm pump that pressure-feeds a fluid to be pressure-fed through a diaphragm, tighten a member with a good bite shape at a high surface pressure to prevent drag of the diaphragm due to displacement of the diaphragm or to seal the fluid to be pressurized and hydraulic oil. , It is necessary to support the diaphragm.

【0003】また、ダイアフラムは周辺部が固定されて
変位を繰り返すため、周辺部の応力振幅が大きく疲労破
壊を生じるという問題がある。この周辺部の応力を低減
するために、周辺部の変位を規制するように周辺部から
滑らかに立ち上がる、例えばR形状のストッパを設ける
ことが有効である。ところが図3の改良前のダイアフラ
ムの支持構造に示すようにR形状の端部で支持も兼ねる
と、R形状の端部での締めつけによりダイアフラムは塑
性変形を生じR形状による応力低減効果が半減し、ダイ
アフラムの信頼性が低下するという問題がある。
Further, since the diaphragm has its peripheral portion fixed and repeatedly displaced, there is a problem that the stress amplitude in the peripheral portion is large and fatigue fracture occurs. In order to reduce the stress in the peripheral portion, it is effective to provide a stopper having, for example, an R shape, which rises smoothly from the peripheral portion so as to regulate the displacement of the peripheral portion. However, as shown in the unsupported diaphragm support structure in FIG. 3, if it also serves as a support at the end of the R shape, the diaphragm is plastically deformed by tightening at the end of the R shape, and the stress reduction effect of the R shape is halved. However, there is a problem that the reliability of the diaphragm is reduced.

【0004】[0004]

【発明が解決しようとする課題】本発明はダイアフラム
のひきずりがなく、被圧送流体および作動油のシールが
でき、しかも高い応力の繰り返しによる疲労破壊をする
ことのない高い信頼性のあるダイアフラムの支持構造を
提供することを目的とする。
DISCLOSURE OF THE INVENTION The present invention is capable of supporting a diaphragm which is free from drag of the diaphragm, can seal the fluid to be pumped and hydraulic oil, and is free from fatigue fracture due to repeated high stress. It is intended to provide a structure.

【0005】[0005]

【課題の解決手段】本発明は前記目的を達成するために
ダイアフラム可動部よりも外周側に離れた位置に支持部
を設け、支持部におけるダイアフラムの膜厚方向圧縮量
を、ダイアフラム可動部に隣接する部分のダイアフラム
の膜厚方向圧縮量よりも大きくしてダイアフラム上下方
向に圧接して挟み込んで支持するダイアフラムの支持構
造を採用する。
In order to achieve the above-mentioned object, the present invention provides a support portion at a position distant from the diaphragm movable portion on the outer peripheral side, and the amount of compression of the diaphragm in the film thickness direction in the support portion is adjacent to the diaphragm movable portion. A diaphragm support structure is adopted in which the diaphragm is compressed more than the portion in the thickness direction of the diaphragm in the thickness direction and is supported by being pressed and held in the vertical direction of the diaphragm.

【0006】[0006]

【作用】支持部におけるダイアフラムの膜厚方向圧縮量
の方が、ダイアフラム可動部に隣接する部分のダイアフ
ラムの膜厚方向圧縮量よりも大きいのでダイアフラムの
ひきずり防止、および被圧送流体および作動油のシール
が確実かつ良好に行なえる。また、ダイアフラム可動部
に隣接する部分のダイアフラムの膜厚方向圧縮量の方が
支持部におけるダイアフラムの膜厚方向圧縮量よりも小
さいことになるので、ダイアフラム可動部に隣接する部
分のダイアフラムの応力が小さくなり、ダイアフラムの
疲労破壊をなくすことができる。
Since the amount of compression of the diaphragm in the film thickness direction in the support portion is larger than the amount of compression of the diaphragm in the film thickness direction of the portion adjacent to the diaphragm movable portion, the diaphragm is prevented from being dragged and the pressurized fluid and hydraulic oil are sealed. Can be done reliably and satisfactorily. Further, since the compression amount in the film thickness direction of the diaphragm in the portion adjacent to the diaphragm movable portion is smaller than the compression amount in the film thickness direction of the diaphragm in the support portion, the stress of the diaphragm in the portion adjacent to the diaphragm movable portion is reduced. It can be made smaller and fatigue failure of the diaphragm can be eliminated.

【0007】[0007]

【実施例】以下、本発明のダイアフラムの支持構造をダ
イアフラムポンプに適用した実施例により説明する。図
1は、本発明のダイアフラムの構造を適用したダイアフ
ラムポンプ、図2は図1中A部のダイアフラム支持部の
詳細図である。
EXAMPLES Examples of applying the diaphragm support structure of the present invention to a diaphragm pump will be described below. FIG. 1 is a diaphragm pump to which the structure of the diaphragm of the present invention is applied, and FIG. 2 is a detailed view of a diaphragm support portion A in FIG.

【0008】図1および図2を用いて本発明の実施例1
の構成を説明する。金属製、板厚0.1mm、可動部径
φ43mmのダイアフラム1は、支持部201とR形状
ストッパ202を有するアッパハウジング2と作動油3
の複数の戻り穴401を有するロアストッパ4との間に
挟まれており、リテーナ5とともに、アッパハウジング
2にねじ込むことで固定されている。R状ストッパ20
2は、ダイアフラム1の可動部径φ43mmから、内間
側に向けて立ち上がり、その曲率半径Rを、本実施例で
は70mmとした。
Embodiment 1 of the present invention with reference to FIGS. 1 and 2.
The configuration of will be described. The diaphragm 1, which is made of metal and has a plate thickness of 0.1 mm and a movable part diameter of 43 mm, includes an upper housing 2 having a support part 201 and an R-shaped stopper 202, and hydraulic oil 3.
It is sandwiched between the lower stopper 4 having a plurality of return holes 401 and is fixed by being screwed into the upper housing 2 together with the retainer 5. R-shaped stopper 20
No. 2 rises from the movable part diameter φ43 mm of the diaphragm 1 toward the inner side, and the radius of curvature R thereof is 70 mm in this embodiment.

【0009】また、支持部201は、図1中下方から見
ると図4の様に、アッパハウジング2の全周にわたって
形成され、その幅は0.5mmで、また、R状ストッパ
202よりも図2中で下方に0.02mmだけ突出して
いる。リテーナ5は、作動油室7、シリンダ502を有
し、シリンダ502には摺動自在に、プランジャ8が嵌
合され、またプランジャ8の下死点付近でのみ、作動油
室7とリテーナ5の外部を導通させる様にリセットポー
ト503が設けてある。
The support portion 201 is formed over the entire circumference of the upper housing 2 as shown in FIG. 4 when viewed from below in FIG. 1, and has a width of 0.5 mm and is larger than the R-shaped stopper 202. It projects 0.02 mm downward in No. 2. The retainer 5 has a hydraulic oil chamber 7 and a cylinder 502. A plunger 8 is slidably fitted in the cylinder 502, and the hydraulic oil chamber 7 and the retainer 5 are provided only near the bottom dead center of the plunger 8. A reset port 503 is provided to make the outside electrically conductive.

【0010】プランジャ8はスプリング9によって、図
中下方に付勢され、タペット10をカム11に押しつけ
ている。作動油室7、及びカム室12などロアハウジン
グ13の内部は、全て同一の作動油3で満たされてい
る。インレット14は調量用の電磁弁15を介して高圧
室203に連通し、高圧室203は吐出弁16に連通し
ている。
The plunger 8 is urged downward in the figure by a spring 9 to press the tappet 10 against the cam 11. The inside of the lower housing 13, such as the hydraulic oil chamber 7 and the cam chamber 12, is filled with the same hydraulic oil 3. The inlet 14 communicates with the high pressure chamber 203 via a solenoid valve 15 for metering, and the high pressure chamber 203 communicates with the discharge valve 16.

【0011】次に実施例1の作動について説明する。図
示しない駆動源によってカム11が回転し、プランジャ
8を図中上下に往復運動させる。プランジャ8の吐出行
程において、プランジャ8がリセットポート503を閉
じると、作動油室7内の作動油3が昇圧され、ダイアフ
ラム1を介して、高圧室203内の被圧送流体を昇圧
し、吐出弁16より吐出する。この時、電磁弁15は図
示しないコンピュータにより閉弁する様に制御されてい
る。
Next, the operation of the first embodiment will be described. The cam 11 is rotated by a drive source (not shown) to reciprocate the plunger 8 up and down in the figure. When the plunger 8 closes the reset port 503 in the discharge stroke of the plunger 8, the pressure of the hydraulic oil 3 in the hydraulic oil chamber 7 is increased, the pressure of the pressurized fluid in the high pressure chamber 203 is increased via the diaphragm 1, and the discharge valve It discharges from 16. At this time, the solenoid valve 15 is controlled to be closed by a computer (not shown).

【0012】吸入時には逆に、インレット14より被圧
送流体が流入し、開弁状態にある電磁弁15を通り、高
圧室203に流入する。同時にダイアフラム1は、変位
を小さくし、また、作動油3は戻り穴401を通り、ロ
アストッパ4の図中上部から作動油室7に戻る。以上の
作動において、ダイアフラム1は変位を繰り返すが、そ
の形態を以下に示す。
On the contrary, at the time of inhalation, the fluid to be pressure-fed from the inlet 14 flows into the high pressure chamber 203 through the electromagnetic valve 15 in the open state. At the same time, the displacement of the diaphragm 1 is reduced, and the hydraulic oil 3 passes through the return hole 401 and returns from the upper portion of the lower stopper 4 in the figure to the hydraulic oil chamber 7. In the above operation, the diaphragm 1 repeats displacement, and its form is shown below.

【0013】変形開始当初には、ダイアフラム1は外周
部から徐々にR状ストッパ202に接触し、変形が進行
するにつれて、ダイアフラム1とR状ストッパ202の
接触面が広がる。このとき、ダイアフラム1が応力を受
ける範囲も同様に広がる。つまり、R状ストッパ202
に規制されて、変形が中央部から外周部にかけての広範
囲で進行するため、応力が広範囲に分散されて、疲労破
壊の発生を防ぐことができる。
At the beginning of deformation, the diaphragm 1 gradually contacts the R-shaped stopper 202 from the outer peripheral portion, and the contact surface between the diaphragm 1 and the R-shaped stopper 202 widens as the deformation progresses. At this time, the range in which the diaphragm 1 receives stress also expands. That is, the R-shaped stopper 202
Since the deformation is controlled in a wide range from the central part to the outer peripheral part, the stress is dispersed in a wide range and the fatigue fracture can be prevented from occurring.

【0014】一方、変形の繰り返しによる疲労破壊の問
題とは別に、変形の繰り返しによっておこるダイアフラ
ム1の内周側へのひきずり防止、また、被圧送流体及び
作動油3のシール性確保の為に、ダイアフラム1の支持
には、高い面圧が必要であり、ダイアフラム1の支持の
為にリテーニングナット6を締めつけすぎると、ダイア
フラム1の支持部にダイアフラム1が塑性変形する程の
応力がかかるといった問題がある。
On the other hand, in addition to the problem of fatigue fracture due to repeated deformation, in order to prevent drag to the inner peripheral side of the diaphragm 1 caused by repeated deformation and to secure the sealing property of the fluid to be pressurized and the hydraulic oil 3. A high surface pressure is required to support the diaphragm 1, and if the retaining nut 6 is excessively tightened to support the diaphragm 1, a problem that the diaphragm 1 is plastically deformed is applied to the supporting portion of the diaphragm 1. There is.

【0015】図3に示すように、R状ストッパ202の
端部でダイアフラム1を支持することも考えられるが前
述の応力低減効果が半減するので、本実施例では、図2
に示すように、R状ストッパ202の外側に支持部20
1を配置し、支持部201をR状ストッパ202の端部
よりも図2中下方に0.02mmだけ突出させた。この
ため、ダイアフラム1の支持の為の締めつけによって支
持部201はダイアフラム1に食い込み大きな応力がか
かるが、ダイアフラム1の可動部はR状ストッパ202
の端部から内周側に離れた位置にあるので、ダイアフラ
ム1の支持による応力は、変位の繰り返しによる疲労破
壊には影響しない。
As shown in FIG. 3, it is conceivable to support the diaphragm 1 at the end of the R-shaped stopper 202, but since the above-mentioned stress reducing effect is halved, in the present embodiment, FIG.
As shown in FIG.
1 was disposed, and the supporting portion 201 was made to project downward from the end portion of the R-shaped stopper 202 by 0.02 mm in FIG. For this reason, the support portion 201 bites into the diaphragm 1 by the tightening for supporting the diaphragm 1 and a large stress is applied, but the movable portion of the diaphragm 1 has an R-shaped stopper 202.
Since it is located at a position distant from the end portion to the inner peripheral side, the stress due to the support of the diaphragm 1 does not affect the fatigue fracture due to repeated displacement.

【0016】以上の構成、はたらきにより、ダイアフラ
ム1のひきずり防止、シール性確保とR状ストッパ20
2による応力の低減が確実に行なわれる。なお、本実施
例ではダイアフラム1、R状ストッパ202、支持部2
01等の寸法を具体的に例示したが、勿論これに限定さ
れるものではなく、要求吐出量や体格等に応じて任意に
変更することもできる。
With the above-mentioned structure and functions, the diaphragm 1 is prevented from being dragged, the sealing property is secured, and the R-shaped stopper 20 is provided.
The stress due to 2 is surely reduced. In this embodiment, the diaphragm 1, the R-shaped stopper 202, the support portion 2
Although the dimensions 01 and the like have been specifically exemplified, the dimensions are not limited to these, and may be arbitrarily changed according to the required discharge amount, physique, and the like.

【0017】次に、本発明の実施例2について説明す
る。図5は本発明の実施例2の要部拡大断面図である。
図5において、支持部201は、アッパハウジング2に
加工することが困難な場合等には、図5の様に、ロアス
トッパ4に設けてもよい。この場合ロアストッパ4に設
けられた支持部201はロアストッパ4のダイアフラム
可動部に隣接する部分の板厚よりも0.02mmだけ図
中上方に突出させることになる。
Next, a second embodiment of the present invention will be described. FIG. 5 is an enlarged cross-sectional view of the essential parts of Embodiment 2 of the present invention.
In FIG. 5, the support portion 201 may be provided on the lower stopper 4 as shown in FIG. 5 when it is difficult to process the upper housing 2. In this case, the supporting portion 201 provided on the lower stopper 4 is made to project upward by 0.02 mm from the plate thickness of the portion of the lower stopper 4 adjacent to the diaphragm movable portion.

【0018】次に、本発明の実施例3について説明す
る。図6は本発明の実施例3で用いるダイアフラム1の
断面図を示すものである。図6の様に、ダイアフラム1
はゴム製にしてもよい。この場合、ダイアフラム1の両
面は、異種の流体にさらされるので、例えば、被圧送流
体がガソリンで作動油3がエンジンオイルならば、図6
の様に耐ガソリン性に優れるエピクロルヒドリンゴム1
01と、耐油性に優れる水素添加ニトリルゴム102を
溶着してはり合わせたダイアフラムが耐久性上、有利で
ある。
Next, a third embodiment of the present invention will be described. FIG. 6 is a sectional view of the diaphragm 1 used in the third embodiment of the present invention. Diaphragm 1 as shown in FIG.
May be made of rubber. In this case, since both surfaces of the diaphragm 1 are exposed to different kinds of fluid, for example, if the fluid to be pressure-fed is gasoline and the hydraulic oil 3 is engine oil, as shown in FIG.
Epichlorohydrin rubber with excellent gasoline resistance like 1
No. 01 and a hydrogenated nitrile rubber 102 having excellent oil resistance are welded and bonded to each other, which is advantageous in terms of durability.

【0019】次に、本発明の実施例4について説明す
る。図7は本発明の実施例4で用いるダイアフラム1の
断面図を示すものである。図7の様に、エピクロルヒド
リンゴム101と水素添加ニトリルゴム102の2種類
のゴムの間に金属ダイアフラム103を介在させるのも
信頼性向上において有効である。
Next, a fourth embodiment of the present invention will be described. FIG. 7 is a sectional view of the diaphragm 1 used in the fourth embodiment of the present invention. As shown in FIG. 7, interposing the metal diaphragm 103 between two types of rubber, the epichlorohydrin rubber 101 and the hydrogenated nitrile rubber 102, is also effective in improving reliability.

【0020】[0020]

【発明の効果】以上、本発明によればダイアフラムのひ
きずりがなく、シールが確実で、ダイアフラムの疲労破
壊が生じない高い信頼性のあるダイアフラムの支持構造
が得られる。
As described above, according to the present invention, it is possible to obtain a highly reliable diaphragm support structure in which the diaphragm is not dragged, the seal is reliable, and the diaphragm is not fatigue-damaged.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の実施例1のダイアフラムの構造を適用
したダイアフラムポンプの全体断面図
FIG. 1 is an overall sectional view of a diaphragm pump to which a diaphragm structure according to a first embodiment of the present invention is applied.

【図2】図1中のA部の拡大断面図FIG. 2 is an enlarged cross-sectional view of part A in FIG.

【図3】図2に対応する位置の改良前のダイアフラムの
支持構造を示す拡大断面図
FIG. 3 is an enlarged cross-sectional view showing a support structure of a diaphragm before improvement at a position corresponding to FIG.

【図4】実施例1のアッパハウジングの下面図FIG. 4 is a bottom view of the upper housing according to the first embodiment.

【図5】本発明の実施例2の図2に対応する位置の要部
拡大断面図
FIG. 5 is an enlarged cross-sectional view of a main part at a position corresponding to FIG. 2 of the second embodiment of the present invention.

【図6】本発明の実施例3で用いるダイアフラムの断面
FIG. 6 is a sectional view of a diaphragm used in a third embodiment of the present invention.

【図7】本発明の実施例4で用いるダイアフラムの断面
図である。
FIG. 7 is a sectional view of a diaphragm used in a fourth embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 ダイアフラム 101 エピクロルヒドリンゴム 102 水素添加ニトリルゴム 103 金属ダイアフラム 2 アッパハウジング 201 支持部 202 R状ストッパ 203 高圧室 3 作動油 4 ロアストッパ 401 戻り穴 5 リテーナ 502 シリンダ 503 リセットポート 6 リテーニングナット 7 作動油室 8 プランジャ 9 スプリング 10 タペット 11 カム 12 カム室 13 ロアハウジング 14 インレット 15 電磁弁 16 吐出弁 1 Diaphragm 101 Epichlorohydrin rubber 102 Hydrogenated nitrile rubber 103 Metal diaphragm 2 Upper housing 201 Support part 202 R-shaped stopper 203 High pressure chamber 3 Hydraulic oil 4 Lower stopper 401 Return hole 5 Retainer 502 Cylinder 503 Reset port 6 Retaining nut 7 Hydraulic oil chamber 8 Plunger 9 Spring 10 Tappet 11 Cam 12 Cam chamber 13 Lower housing 14 Inlet 15 Solenoid valve 16 Discharge valve

───────────────────────────────────────────────────── フロントページの続き (72)発明者 榊原 康行 愛知県西尾市下羽角町岩谷14番地 株式会 社日本自動車部品総合研究所内 (72)発明者 渡辺 和英 愛知県西尾市下羽角町岩谷14番地 株式会 社日本自動車部品総合研究所内 (72)発明者 柴田 晃 愛知県刈谷市昭和町1丁目1番地 日本電 装株式会社内 (72)発明者 井上 宏史 愛知県刈谷市昭和町1丁目1番地 日本電 装株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Yasuyuki Sakakibara 14 Iwatani, Shimohakaku-cho, Nishio-shi, Aichi Stock Company, Japan Automotive Parts Research Institute (72) Inventor Kazuhide Watanabe 14 Iwatani, Shimohakaku-cho, Nishio-shi, Aichi Stock Association (72) Inventor, Akira Shibata, 1-1, Showa-cho, Kariya, Aichi Prefecture, Nihon Denso Co., Ltd. (72) Inventor, Hiroshi Inoue, 1-1, Showa-cho, Kariya, Aichi Within the corporation

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 ダイアフラム可動部よりも外周側に離れ
た位置に支持部を設け、該支持部におけるダイアフラム
の膜厚方向圧縮量を前記ダイアフラム可動部に隣接する
部分の前記ダイアフラムの膜厚方向圧縮量よりも大きく
して、前記ダイアフラムを上下方向に圧接して挟み込ん
で支持することを特徴とするダイアフラムの支持構造。
1. A support part is provided at a position distant from the diaphragm movable part on the outer peripheral side, and a compression amount in the film thickness direction of the diaphragm in the support part is compressed in a film thickness direction of the diaphragm in a part adjacent to the diaphragm movable part. A support structure for a diaphragm, wherein the diaphragm is made larger than the amount to support the diaphragm by pressing it in the vertical direction and sandwiching it.
JP28324293A 1993-11-12 1993-11-12 Support structure of diaphragm Pending JPH07139469A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28324293A JPH07139469A (en) 1993-11-12 1993-11-12 Support structure of diaphragm

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28324293A JPH07139469A (en) 1993-11-12 1993-11-12 Support structure of diaphragm

Publications (1)

Publication Number Publication Date
JPH07139469A true JPH07139469A (en) 1995-05-30

Family

ID=17662934

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28324293A Pending JPH07139469A (en) 1993-11-12 1993-11-12 Support structure of diaphragm

Country Status (1)

Country Link
JP (1) JPH07139469A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002013478A (en) * 2000-06-28 2002-01-18 Tacmina Corp Reciprocating pump
KR102549044B1 (en) * 2022-03-28 2023-06-29 (주) 지티씨 Diaphragm compressor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002013478A (en) * 2000-06-28 2002-01-18 Tacmina Corp Reciprocating pump
KR102549044B1 (en) * 2022-03-28 2023-06-29 (주) 지티씨 Diaphragm compressor

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