JPH07136849A - Electric discharge machining and device therefor - Google Patents

Abstract

PURPOSE:To carry out the work for an insulating body and carry out the deep hole work having a depth of several mm-cm without installing a special processing device and process for forming an electric conductive layer on the surface of a workpiece. CONSTITUTION:Electric discharge is generated between an electrode 1 and the joint surface between a workpiece 10 consisting of an insulating a member and a workpiece 11 consisting of an electric conductive member, and the workpiece 10 consisting of an insulating member, workpiece 11 consisting of an electric conductive member, and the electrode 1 are shifted relatively in the parallel direction to the joint surface between the workpieces 10 and 11, and electric discharge is carried out between the workpieces 10 and 11.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electric discharge machining method for an insulating material and an apparatus therefor.

[0002]

2. Description of the Related Art Conventionally, as a method for electric discharge machining of an insulating material such as ceramics, for example, Japanese Patent Laid-Open No. 63-1501
No. 09 publication, forming a conductor film on the surface of an electric insulator, and performing electric discharge machining through a conductive layer in which carbon or the like in a machining liquid adheres to or is impregnated in the electric insulator by discharging between electrodes. It is shown. As a similar invention, Japanese Patent Application Laid-Open No. 4-41120 discloses an example in which a surface of an electric insulator is coated with a conductive film for processing. FIG. 6 shows an electric discharge machining method described in JP-A-63-150109. In the figure, 1 is an electrical insulator, 2 is a conductor layer, 3 is a processing electrode, and 4 is a conductor layer.

Next, the operation will be described. First, FIG.
As shown in (A), a conductor layer 2 is formed on the surface of the electrical insulator 1 to be processed. The conductor layer 2 is formed such that a conductor such as copper or iron is brought into close contact with the surface of the electric insulator 1 by means such as thermal spraying or vapor deposition. The thickness of the conductor layer 2 is 0.1 m.
A thickness of about m to 0.5 mm is used.

Next, the electrical insulator 1 having the conductor layer 2 formed on the surface thereof is placed on a machining table of an electric discharge machine, fixed on the machining table by a clamp jig, and then, as shown in FIG. Start electrical discharge machining as shown in B). That is, a machining voltage from an electric discharge machining power source device is applied between the conductor layer 2 and the machining electrode 3 to perform electric discharge machining in a machining fluid such as oil.

When the electric discharge machining is started, the conductor layer 2 is first processed as shown in FIG. 6 (C). Then, when the processing of the conductor layer 2 is completed, a portion facing the processing electrode 3 appears on the surface of the electric insulator 1, and the conductive layer 4 is formed on the portion. This conductive layer 4
Is formed by the machining powder generated by electric discharge machining or the carbon in the machining fluid deposited by the thermal energy of discharge adheres and further penetrates into the inside, or the surface of the electric insulator 1 It is a conductor that becomes high temperature due to the thermal energy of discharge. The conductive layer 4 expands as the electric discharge machining progresses, and when the machining of the conductor 2 is completed, the conductive layer 4 shown in FIG.
As shown in (C), the peripheral portion of the conductive layer 4 is in a state of being electrically connected to the conductive layer 2. Therefore, by generating an electric discharge between the conductive layer 4 and the processing electrode 3, the conductive layer 4, that is, the electrical insulator 1 is processed.

FIGS. 6 (D) and 6 (E) show a state in which the conductive layer 4 sequentially goes deeper and deeper as the processing progresses. In this manner, the formation of the conductive layer 4 and the electric discharge machining of the conductive layer 4 are repeatedly performed, whereby the machining of the electrical insulator 1 proceeds.

[0007]

The conventional electric discharge machine as described above is constructed as described above, and it is always necessary to previously form the conductive layer on the surface of the workpiece by thermal spraying, vapor deposition or the like. However, there is a problem in that a special processing device and process are required, and the cost increases. Further, in the conventional method, it is possible to machine a relatively shallow depth, but it is difficult to machine a shape having a deep machining depth, and there is a problem that the machining depth can be only a few mm at most. . That is, the formation of the conductive layer 4 is sufficient at the initial stage of processing the insulator, and the processing of the insulator 1 proceeds, but the processing depth is several meters.
When it is about m, the formation of the conductive layer 4 becomes insufficient and the processing does not proceed at all.

The present invention has been made in order to solve the above-described problems of the conventional ones, and without providing a special processing device or process for forming a conductive layer on the surface of a workpiece,
It is an object of the present invention to provide an electric discharge machining method and apparatus capable of machining an insulator and capable of machining a deep hole shape having a depth of several mm to several cm, which has been impossible in the past.

[0009]

According to the electric discharge machining method of the present invention, an electric discharge is generated between a joint surface between an insulator solid which is a workpiece and an electric conductor solid which is the workpiece, and the electrode. Along with the generation, the insulator solid, the conductor solid, and the electrode are relatively moved in a direction parallel to the joint surface between the insulator solid and the conductor solid, and the insulator solid and the conductor solid. Both are processed by electrical discharge machining.

Further, the electric discharge machining apparatus according to the present invention is configured so that an insulator solid, which is a work piece, and a conductive material solid, which is the work piece, are machined in a direction orthogonal to a relative movement direction between an electrode and the work piece. , A power source for applying a discharge voltage between the electrode and the junction between the insulating solid and the conductive solid, the insulating solid and the conductive solid, and the electrode, And a means for relatively moving the insulating solid and the conductive solid in a direction parallel to the joint surface.

Further, in the electric discharge machining method according to the present invention, an electric conductor solid, which is a workpiece, is brought into contact with the surface of the insulator solid, which is the workpiece, in a non-adhesive state, and the insulator solid and the electric conductor solid are contacted with each other. While generating an electric discharge between the contact portion and the electrode, with the progress of processing, the conductive solid, in the direction orthogonal to the relative feed direction of the electrode and the insulating solid, in the insulating solid While moving relative to
Electric discharge machining is performed.

Further, in the electric discharge machining method according to the present invention, the electric conductor solid, which is the workpiece, is brought into contact with the surface of the insulator solid, which is the workpiece, in a non-adhesive state, and first, the electric conductor solid and the electrode are contacted with each other. After performing electric discharge machining by generating an electric discharge between the conductive solids, the electric discharge is generated between the electrode and the contact portion between the insulating solid and the conductive solid, and the progress of the machining. Accordingly, the electric discharge machining is performed while the electric conductor solid is relatively moved with respect to the insulator solid in a direction orthogonal to the relative feed direction of the electrode and the insulator solid.

Furthermore, the electric discharge machine according to the present invention is
Holding means for holding an electrically conductive solid, which is a workpiece, in contact with the surface of an insulating solid, which is the workpiece in a non-adhesive state,
A power supply for applying a discharge voltage between the conductive solid and the electrode, and between the electrode and the junction between the insulating solid and the conductive solid, and the conductive solid with the progress of processing. Is provided with an electric conductor solid moving means for moving relative to the insulating solid in a direction orthogonal to the relative feed direction of the electrode and the insulating solid.

[0014]

In the electric discharge machining method according to the present invention, first, electric discharge is generated between the conductor solid and the electrode, and then, at a place closest to the conductor solid side of the insulator solid, the machining and the electrode material component Transfer is performed. After that, the transfer portion is also discharged, and the insulating solid is also processed by the impact of the discharge and the effect of heat. By the above sequence, solid processing of the insulator proceeds.

Further, in the electric discharge machining apparatus according to the present invention, by means of the joining means, the insulator solid, which is the workpiece, and the conductive material solid, which is the workpiece, are orthogonal to the relative movement direction of the electrode and the workpiece. After mechanically adhering in the direction of, the discharge voltage is applied between the electrode and the junction between the insulator solid and the conductor solid from the power source to generate discharge, and the insulator solid and the conductor solid , The electrodes are relatively moved in a direction parallel to the joint surface between the insulating solid and the conductive solid, and electric discharge machining is performed on both the insulating solid and the conductive solid.

Further, in the electric discharge machining method according to the present invention, electric discharge is generated between the conductor solid and the electrode, and then the insulator solid is closest to the conductor solid side, so that the machining and the electrode material composition of the electrode material component are affected by heat. Transfer is performed. After that, the transferred portion is also discharged, and the insulator solid is also processed by the impact of the discharge and the effect of heat. During the electric discharge machining, the conductive solid is moved relative to the insulating solid in a direction orthogonal to the relative feed direction between the electrode and the insulating solid, so that the conductive powder is always supplied to the inter-electrode portion. As a result, continuous processing of the insulator solid proceeds.

Further, in the electric discharge machining method according to the present invention, first, electric discharge is generated between the electric conductor solid and the electrode to perform electric discharge machining, and the electric conductor solid is perforated. After that, a discharge is generated between the conductive material solid and the electrode, and then processing and transfer of the electrode material component are performed by the heat effect at the position closest to the conductive material solid side of the insulating material solid. After that, the transferred portion is also discharged, and the insulator solid is also processed by the impact of the discharge and the effect of heat. In addition, after the conductor solid is penetrated,
Since the conductor solid is moved relative to the insulator solid in a direction orthogonal to the relative feed direction between the electrode and the insulator solid,
The electrically conductive powder is constantly supplied to the inter-electrode portion, and the continuous processing of the insulating solid proceeds.

Furthermore, the electric discharge machining apparatus according to the present invention is
By the holding means, after holding the conductive solid which is the workpiece in contact with the surface of the insulating solid which is the workpiece in a non-adhesive state, from the power supply, between the conductive solid and the electrode,
A discharge voltage is applied between the electrode and the junction between the insulator solid and the conductor solid to generate a discharge.
Further, the electric conductor solid moving means causes the electric conductor solid to move relative to the electric insulator solid in a direction orthogonal to the relative feed direction between the electrode and the electric insulator solid as the machining progresses, thereby causing discharge. Perform processing.

[0019]

【Example】

Example 1. Hereinafter, a first embodiment of the present invention will be described with reference to FIGS.
It will be explained based on. FIG. 1 is a block diagram showing a first embodiment of the present invention, and FIG. 2 is an operation explanatory view of the first embodiment of the present invention.
In the figure, 1 is an electrode made of copper, 10 is an insulating material workpiece made of sialon (insulating solid), 11 is an electrically conductive material workpiece made of nickel (electrically conductive solid), and 12 is a lateral restraint of the workpiece. The fixing member 13 is installed on the opposite side of the fixing member 12 with the workpieces 11 and 12 sandwiched therebetween, and is a crimping mechanism that mechanically adheres and fixes the insulating material workpiece 10 and the conductive material workpiece 11 to each other. Together with 12, the joining means is constituted. 14 is processing oil, 15 is processing power source, 4 is DC power source, 5 is resistance, 16 is switching element, 17a, 17
b, 18a and 18b are polarity switching contactors for switching the polarity of the machining power source, and 19 is a Z-axis motor for moving the electrode 1 in the direction of the arrow, which constitutes relative movement means between the electrode 1 and the workpiece.

Next, the operation will be described. Prior to processing, the insulating material workpiece 10 and the conductive material workpiece 11 are fixed members 1
2 and the crimping mechanism 13 are fixed in a mechanically crimped and joined state. Then, the electrode 1 is positioned at the joint portion between the insulating material workpiece 10 and the electrically conductive material workpiece 11, and processing is performed so that the electrode 1 is applied to the joint portion. Next, the processing principle will be described with reference to FIG. For example, when processing sialon as the insulating material workpiece 10 and nickel (Ni) as the electrically conductive material workpiece as shown in the figure, first,
As shown in (1), the electrode 1 is positioned at the joint between the insulating material workpiece 10 and the electrically conductive material workpiece 11, and a voltage is applied between the electrode 1 and the workpieces 10, 11. At that time, as the polarity, a voltage having the polarity of the electrode (−) is applied. With this voltage (2)
As shown in Fig. 3, first, electric discharge is generated only in the conductive material work piece (nickel), and then, as shown in (3), at the place closest to the metal side of the ceramics (sialon), processing and transfer of electrode material components due to heat influence. Is done. afterwards,
As shown in (4), the transfer area is also discharged.
As shown in (5), ceramics are also processed under the influence of electric shock and heat. The ceramics machining progresses as a result of the above continuation. This is because the skin effect causes an electric current to flow on the ceramics surface, causing an electric discharge on the ceramics side, so that the ceramics is also machined. When the ceramic surface after actual processing was analyzed by EPMA, it was confirmed that the ceramic surface contained a large amount of the component of copper (Cu) as an electrode material.

As described above, in the conventional method of forming a conductive film on the surface of an insulative workpiece and then performing the processing, as a result of performing the processing by the above method, a copper electrode having a diameter of 5 mm is used. A deep hole having a size of 10 mm or more could be processed.

In this processing method, the processing characteristics differ depending on the combination of materials to be processed. Table 1 shows combinations of materials and availability of processing.

[0023]

[Table 1]

Example 2. Next, a second embodiment of the present invention will be described with reference to FIGS. In the figure, 1 is an electrode,
10 is an insulating material work (insulating solid), 11 is a conductive material plate (electric conductive solid) provided on the upper surface of the insulating work 10 in a non-bonded state, 14 is a working fluid, 15 is a power source for processing, 20 Is a drive mechanism that holds the conductive material 11 on the upper surface of the insulating material workpiece 10 in a non-bonded state, and moves the conductive material 11 in the horizontal direction, and constitutes a holding means and a solid conductive material moving means. Two
1 is a conductive material powder generated by processing the conductive material plate 11,
A Z-axis motor 19 moves the electrode 1 in the direction of the arrow, and constitutes a relative moving means for moving the electrode 1 and the workpiece.

Next, the operation will be described. Prior to processing, the conductive material plate 11 is installed on the insulating material workpiece 10 and the processing is started. As shown in FIG. 4 (1), the processing is started from the processing of the conductive material plate 11, but at this stage, the processing proceeds in a state where the drive mechanism 20 does not horizontally move the conductive material plate 11. Next, as shown in FIG. 4B, after the electrode 1 penetrates the conductive material plate 11, the drive mechanism 2
When 0, the horizontal movement of the conductive material plate 11 is started. Figure 4
As can be seen from (3), since the conductive material powder 21 generated due to the processing of the conductive material plate 11 floats in the inter-electrode portion, the processing and the electrode material due to the thermal influence on the insulating material workpiece bonding surface. The transfer of the components takes place. After that, electric discharge is also performed on the transferred portion, and the insulating material workpiece 10 is also processed by the impact of the electric discharge and the effect of heat. After the processing of the insulator work 10 is started, the horizontal movement of the conductive material plate 11 is continuously performed as described above.
Since 1 is supplied, the continuous machining of the insulating material workpiece 10 proceeds.

When processed by the above method, φ2
With the relatively large electrode of 0 mm, it was possible to process the central portion of the insulator to a depth of 10 mm or more.

As the horizontal movement of the conductive material plate 10 is performed by oscillating movement as shown in FIG. 5, since the conductive material powder 21 is generated over the entire circumference of the electrode 1, It is possible to perform stable processing. Also,
At the initial stage of processing, electrical discharge machining is performed between the side surface of the conductive material plate 11 and the joint between the insulating material workpiece 10 and the electrode 1, and then the conductive material plate 11 is moved as described above to obtain the conductive material plate. The penetration processing of 11 may be eliminated.

[0028]

As described above, according to the present invention, an electric discharge is generated between the electrode and the joint surface between the insulating solid which is the workpiece and the conductive solid which is the workpiece. , The insulator solid, the conductor solid, and the electrode are relatively moved in a direction parallel to the joint surface of the insulator solid and the conductor solid, and both the insulator solid and the conductor solid. Since the electric discharge machining is performed on the insulator, the insulator can be processed without providing a special treatment device or process for forming a conductive layer on the insulator surface, and it is possible to perform machining by several mm, which was impossible in the past. A deep hole shape having a depth of several cm can be processed. Further, compared with the conventional method using electrolytic discharge, there is an effect that the working fluid can be easily managed and the working characteristics such as working speed and working accuracy can be dramatically improved. Furthermore, there is an effect that a uniform modified layer containing an electrode material can be easily formed on the surface of the insulator.

Further, according to the present invention, the electrically conductive solid which is the workpiece is brought into contact with the surface of the insulating solid which is the workpiece in a non-adhesive state, and the contact portion between the insulating solid and the electrically conductive solid. While generating electric discharge between the electrode and the electrode, as the machining progresses, the conductive solid is moved relative to the insulating solid in a direction orthogonal to the relative feed direction between the electrode and the insulating solid. In addition to the above effects, it is possible to process the insulating material even in an electrode having a larger processing area, and it is possible to perform processing to a deeper processing depth. . Further, there is an effect that it becomes possible to perform transfer processing with high precision even for electrodes having a complicated shape. Further, in the above invention, there is a shape restriction (since the conductive material is closely attached from the lateral direction, it can be processed only in the vicinity of the end face of the insulating material). There is also an effect that the shape can be processed with high accuracy.

[Brief description of drawings]

FIG. 1 is a diagram showing a configuration of a first exemplary embodiment of the present invention.

FIG. 2 is an operation explanatory diagram of the first embodiment of the present invention.

FIG. 3 is a diagram showing a configuration of a second exemplary embodiment of the present invention.

FIG. 4 is an operation explanatory diagram of the second embodiment of the present invention.

FIG. 5 is an operation explanatory diagram of the second embodiment of the present invention.

FIG. 6 is a diagram showing a conventional electric discharge machining method for an insulating material.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Electrode 10 Insulating material work piece 11 Electroconductive material work piece 12 Fixing member 13 Crimping mechanism 14 Processing oil 15 Processing power supply 16 Switching element 17a, 17b, 18a, 18b Polarity switching contactor 19 Z-axis motor 20 Drive mechanism 21 Conductive material powder

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Naotake Mohri 661-51 Yakuji Ishizaka, Tenpaku-ku, Nagoya City (72) Inventor Nagao Saito 9-12-12 Iwaseidai, Kasugai City, Aichi Prefecture (72) Inventor Takuji Maji Nagoya City East 5-14 Yanda Minami-ku, Mitsubishi Electric Co., Ltd. Nagoya Works

Claims (5)

[Claims] 1. In an electric discharge machining method for machining while applying a voltage between an electrode and a workpiece, a joint surface between an insulator solid that is the workpiece and a conductive solid that is the workpiece, While generating a discharge between the electrode, the insulating solid and the conductive solid, the electrode, relative movement in a direction parallel to the joint surface of the insulating solid and the conductive solid, An electric discharge machining method characterized by performing electric discharge machining on both the insulator solid and the conductor solid. 2. An electric discharge machining apparatus for machining while applying a voltage between an electrode and a workpiece, wherein an insulator solid, which is the workpiece, and a conductive material solid, which is the workpiece, are attached to the electrode and the workpiece. Joining means for mechanically adhering in a direction orthogonal to the relative movement direction to the workpiece, a power source for applying a discharge voltage between the electrode and the joining portion between the insulator solid and the conductor solid, and the insulation An electric discharge machine comprising: a solid material, a conductive solid material, and a means for relatively moving the electrode in a direction parallel to a joint surface between the insulating solid material and the conductive solid material. 3. An electric discharge machining method for machining while applying a voltage between an electrode and a work piece, wherein a conductive material solid, which is the work piece, is not adhered to a surface of an insulator solid, which is the work piece. And generate electric discharge between the electrode and the contact portion between the insulator solid and the conductor solid, and the progress of the machining causes the conductor solid to move relative to the electrode and the insulator solid. In the direction orthogonal to the feed direction,
An electric discharge machining method, wherein electric discharge machining is performed while moving relative to the insulating solid. 4. In an electric discharge machining method for machining while applying a voltage between an electrode and a workpiece, a conductive material solid, which is the workpiece, is not adhered to a surface of an insulating solid, which is the workpiece. , First, by generating an electric discharge between the conductor solid and the electrode to perform electric discharge machining to penetrate the conductor solid, and then a contact portion between the insulator solid and the conductor solid and the electrode. While generating an electric discharge between and, as the processing progresses, the solid conductive material,
An electric discharge machining method, characterized in that electric discharge machining is performed while moving relative to the insulator solid in a direction orthogonal to a relative feed direction of an electrode and the insulator solid. 5. In an electric discharge machining apparatus for machining while applying a voltage between an electrode and a work piece, a non-adhesive state in which a conductor solid, which is the work piece, is attached to a surface of an insulator solid, which is the work piece. Holding means for contacting and holding at, a power source for applying a discharge voltage between the conductive solid and the electrode, and a junction between the insulating solid and the conductive solid and the electrode, and With the progress of the conductive solid, in the direction orthogonal to the relative feed direction of the electrode and the insulating solid,
An electric discharge machine comprising: an electric conductor solid moving means for moving relative to the insulator solid.