JPH0713634A - Pressure regulator - Google Patents

Abstract

PURPOSE:To suppress the vibration of an elastic member generated at the time of liberating gas and to prevent the vibration of a diaphragm by additionally installing a vibration suppressing member for suppressing the vibration of the elastic member to the elastic member for applying pressure on one side of the diaphragm. CONSTITUTION:In this pressure regulator 30, when gaseous pressure inside a gas releasing space A becomes smaller than a prescribed pressure by a large spring 22, the large spring 22 is pressed, the diaphragm 10 is elastically deformed and thus, a valve mechanism 4 is opened and gas is released to a secondary side flow passage 3. At this time, conspicuous pressure fluctuation is generated inside the gas releasing space A, the diaphragm 10 is vibrated, the large spring 22 is expanded accompanying the above operation, a coating material 32 is deformed, the deformation of the large spring 22 is suppressed by deformation resistance generated along with the deformation and thus, the vibration of the diaphragm 10 is prevented. That is, the unrequired opening/closing of the valve mechanism 4 due to the conspicuous pressure fluctuation inside the gas releasing space A is prevented.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pressure regulator attached to a gas flow passage or the like to reduce the gas pressure in the gas flow passage to a preset value or less, and noise generated during the operation of this pressure regulator. The present invention relates to a pressure regulator suitable for preventing such problems.

[0002]

2. Description of the Related Art Generally, for example, in semiconductor manufacturing equipment,
Semiconductor material gas enclosed in a gas cylinder or the like is supplied from a cylinder cabinet into a semiconductor manufacturing chamber to manufacture a semiconductor. A pressure regulator is provided to reduce the gas pressure in the gas supply pipe of such a semiconductor manufacturing apparatus to a predetermined pressure value or less.

Conventionally, as such a pressure regulator, there is the following one. As shown in FIG. 3, the pressure regulator 1 includes a main body 5 including a valve mechanism 4 that discharges the gas in the primary side flow path (gas flow path) 2 to the secondary side flow path (gas flow path) 3.
The pressure adjusting unit 6 for adjusting the pressure value to be depressurized,
The main body 5 is integrated by screwing at the connecting portion 7.
A metal thin film diaphragm 10 is provided between the pressure adjusting unit 6 and the pressure adjusting unit 6. Further, each of the primary side flow passage 2 and the secondary side flow passage 3 is equipped with a pressure gauge (not shown) indicating the gas pressure in the flow passage.

The main body 5 has a bottomed cylindrical shape made of steel such as stainless steel, and has a large diameter hole 1 inside the opening 5a.
1 is formed, and the large diameter hole 11 is formed on the bottom 5b side.
Located on the same axis and coaxial with the inner diameter of the large diameter hole 1
A small diameter hole portion 12 smaller than the inner diameter of 1 is formed.
The large-diameter hole portion 11 and the small-diameter hole portion 12 have a communication hole 13 at the center.
It is partitioned by the nozzle 13 in which a is formed. And
A gas discharge space A is constituted by a space surrounded by the large diameter hole portion 11, the nozzle 13, and the diaphragm 10, and the secondary side flow path 3 communicates with the gas discharge space A, and the small diameter hole portion 1
The primary passage 2 is communicated with the second passage 2.

Inside the large diameter hole 11, the nozzle 13
On the side of the opening 5a of the main body 5, a nozzle retainer 14 for retaining the nozzle 13, a diaphragm 10 for closing the large-diameter hole 11 and a diaphragm retainer 15 for retaining the diaphragm 10 are sequentially arranged.

On the other hand, the small diameter hole 12 has a small spring 1
A seat 17 is provided which is urged toward the nozzle 13 by 6 and is movable in the small-diameter hole 12 along its axis. At the tip of the sheet 17, there is formed a tapered convex portion 17a that allows the communication hole 13a of the nozzle 13 to be opened and closed. Further, at the tip of the sheet 17, a rod-shaped stem 18 is provided, one end of which abuts on the tip of the convex portion 17a and the other of which abuts on the diaphragm 10. The nozzle 13, the small spring 16, the seat 17, and the stem 18 constitute a valve mechanism 4 which can be opened and closed.

Further, the pressure adjusting portion 6 is provided with a male screw member 19a extending in the axial direction thereof, and a pressure adjusting handle 19 which can be moved back and forth in the axial direction by rotating around the axial line, and a male screw member 19a. A disk-shaped iron receiving member 20 arranged at the tip portion, a tray 21 arranged on the inner peripheral side of the diaphragm retainer 15 and contacting the diaphragm 10, and a large spring interposed between the iron receiving plate 20 and the tray 21. (Elastic member) 22.

In the pressure regulator 1 having the above structure, the large spring 22 is provided on one side of the diaphragm 10.
The pressure from the diaphragm 1 is applied through the saucer 21, and the diaphragm 1
The gas pressure in the gas discharge space A is applied to the other side of 0. Then, when the gas pressure in the gas discharge space A becomes lower than the pressure by the large spring 22, the large spring 22 urges the diaphragm 10 to elastically deform, thereby pushing the seat 17 via the stem 18. Then, the seat 17 moves to the bottom portion 5b side of the main body 5 in the small diameter hole portion 12. Then, the convex portion 17a of the seat 17 that has blocked the communication hole 13a of the nozzle 13 moves, which causes the valve mechanism 4 to open, and the gas flows from the primary side flow path 2 to the communication hole 13a.
Through which the gas flows into the gas discharge space A and is discharged from the secondary side flow path 3. When the pressure in the gas release space A becomes higher than the pressure of the large spring 22, the pressure in the gas release space A causes the diaphragm 10 to return to its original state. Then, the seat 17 is urged by the small spring 16 to move to the nozzle 13 side, and the convex portion 17 a of the seat 17 is moved to the nozzle 13 side.
The communication hole 13a is closed, whereby the valve mechanism 4 is closed and the flow of gas from the primary side flow path 2 into the gas discharge space A is stopped.

As described above, the pressure regulator 1 has a structure in which the high-pressure gas in the primary side flow passage 2 is depressurized to a pressure set value determined by the large spring 22 or less and is discharged to the secondary side flow passage 3. ing. Further, by rotating the pressure adjusting handle 19 and moving the iron receiving member 20, the pressure applied by the large spring 22 is changed, whereby the pressure set value of the gas discharged from the gas discharging space A can be adjusted. ing.

[0010]

However, in the conventional pressure regulator 1 as described above, when the gas is discharged as described above, a significant pressure fluctuation occurs in the gas discharge space A, and the diaphragm 10 is changed. Vibration may occur. As a result, noise is generated, and the valve mechanism 4 unnecessarily opens and closes due to the vibration of the diaphragm 10, and the function of reducing the pressure to a predetermined pressure becomes unstable. Further, in a so-called automatic pressure regulator that automatically performs pressure adjustment, there is a problem in that the control system is disturbed and the original function may be lost. The present invention has been made in consideration of the above points, and an object of the present invention is to provide a pressure regulator capable of preventing vibration of the diaphragm at the time of gas release and stably exhibiting its function. .

[0011]

The invention according to claim 1 is
A pressure regulator that reduces the gas pressure in the gas flow path to a preset value or less by installing it in the gas flow path,
A main body having a valve mechanism for releasing the gas in the gas flow path,
A pressure regulator comprising: a pressure regulator for adjusting a pressure value to be reduced; and a diaphragm that separates the main body and the pressure regulator and opens and closes the valve mechanism. A vibration suppressing member for damping the vibration of the elastic member is attached to an elastic member that is disposed in the adjusting unit and applies a pressure to one side of the diaphragm.

According to a second aspect of the present invention, in the pressure regulator according to the first aspect, the elastic member is a spring,
Moreover, the vibration suppressing member is a flexible covering material for covering the spring.

According to a third aspect of the present invention, in the pressure regulator according to the first aspect, the elastic member is a spring,
In addition, the vibration suppressing member is an oil damper.

[0014]

According to the first aspect of the invention, the vibration suppressing member for damping the vibration of the elastic member is attached to the elastic member which is disposed in the pressure adjusting portion and applies pressure to one side of the diaphragm. The vibration suppressing member suppresses the vibration of the elastic member that occurs when a significant pressure fluctuation occurs in the gas discharging space when the gas is discharged, thereby preventing the vibration of the diaphragm.

According to a second aspect of the present invention, in the pressure regulator of the first aspect, the elastic member is a spring, and the vibration suppressing member is a flexible covering material for covering the spring. When the spring vibrates when the gas is released, the covering material bends, and the resistance force when the covering material bends suppresses the vibration of the spring.

According to the third aspect of the invention, in the pressure regulator of the first aspect, since the elastic member is the spring and the vibration suppressing member is the oil damper, the spring vibrates when the gas is discharged. Then, the vibration of the spring is dampened and suppressed by the oil damper.

[0017]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to Embodiments 1 and 2 shown in the drawings. First, here, in the pressure regulator according to the present invention, for example, a spring is applied as an elastic member, and as a vibration suppressing member of this spring,
A description will be given using Example 1 in the case where the covering material is applied. FIG. 1 shows an example of a pressure regulator according to the present invention. In this figure, parts common to FIG. 3 shown as a conventional example are designated by the same reference numerals, and description thereof will be omitted. As shown in FIG. 1, the pressure adjuster 30 includes a main body 5 provided with the valve mechanism 4, a pressure adjusting unit 31, and a thin metal film-like member disposed between the main body 5 and the pressure adjusting unit 31. It has a configuration including a diaphragm 10.

Similar to the pressure adjusting section 6 shown in FIG. 3, the pressure adjusting section 31 is provided with a male screw member 19a, and a pressure adjusting handle 19 which can be moved back and forth in the axial direction by rotating around the axis. , A disk-shaped iron receiving member 20 arranged at the tip of the male screw member 19a, and a diaphragm holder 15
It is composed of a receiving plate 21 which is arranged on the inner peripheral side and contacts the diaphragm 10, and a large spring (elastic member) 22 interposed between the iron receiving plate 20 and the receiving plate 21.

The large spring 22 is covered with a tubular covering material (vibration suppressing member) 32 made of, for example, a heat-shrinkable resin. At the time of manufacturing, the coating material 32 is passed through the large spring 22 inside and then heated and contracted to be brought into close contact with the outer peripheral surface of the large spring 22 and to be inserted between the coils of the large spring 22. It is in the state shown in FIG. In this state, the covering material 32 has elasticity and flexibility, that is, has flexibility.

Next, the operation of the pressure regulator 30 having such a structure will be described. In the pressure regulator 30, when the gas pressure in the gas discharge space A becomes lower than the pressure by the large spring 22, the large spring 22 urges the diaphragm 10 to elastically deform, thereby opening the valve mechanism 4. , Gas is discharged to the secondary side flow path 3. At this time, if a significant pressure fluctuation occurs in the gas discharge space A, the diaphragm 10 tends to vibrate. As the large spring 22 expands and contracts, the covering material 32 deforms,
Due to the deformation resistance caused by this deformation, the vibration of the large spring 22 is suppressed, whereby the diaphragm 1
Zero vibration is prevented. That is, unnecessary opening / closing of the valve mechanism 4 due to a significant pressure change in the gas discharge space A is prevented.

As described above, in the pressure regulator 30, when the gas is discharged, the vibration of the diaphragm 10 when a significant pressure change occurs in the gas discharge space A causes the covering material 32 attached to the large spring 22. To prevent. As a result, it is possible to prevent noise that has conventionally been generated at such times. Further, it is possible to prevent unnecessary opening and closing of the valve mechanism 4 due to a significant pressure change in the gas discharge space A, and it is possible to stably exhibit the original function of reducing the pressure to a predetermined pressure.

In the first embodiment, the covering material 32 is used.
Although a tube made of a heat-shrinkable resin is used for the above, the present invention is not limited to this, and it has elasticity and flexibility such as a commonly used insulating tape for covering electric wires and is bonded to the spring 22. A structure having flexibility in the state may be attached.

Next, a description will be given using a second embodiment in which a spring is applied as the elastic member and an oil damper is applied as the vibration suppressing member of the spring in the pressure regulator according to the present invention. Here, only the configuration different from the first embodiment described above will be described. Figure 2
Shows an example of a pressure regulator according to the present invention.

As shown in FIG. 2, the pressure adjusting section 41 of the pressure adjuster 40 is the pressure adjusting section 6, 31 shown in FIGS.
Similarly, the pressure adjusting handle 19, the iron receiving member 20, the tray 21, and the large spring 22 are included. Inside the large spring 22, the iron receiving plate 20 and the receiving plate 21 are provided.
Both ends are fixed to and, and an oil damper (vibration suppressing member) 42 is interposed along the axis of the large spring 22. The oil damper 42 serves to buffer the vibration between the two ends by viscous resistance of the oil, and a conventionally used one may be used.

Next, the operation of the pressure regulator 40 having such a structure will be described. In the pressure regulator 40, when a large pressure fluctuation occurs in the gas discharge space A when the gas is discharged, if the large spring 22 tries to expand and contract due to the vibration of the diaphragm 10, the large spring 22 is buffered by the oil damper 42. The vibration of 22 is suppressed, and thus the vibration of the diaphragm 10 is prevented.

As described above, in the pressure regulator 40, when the gas is discharged, the vibration of the diaphragm 10 when a significant pressure change occurs in the gas discharge space A causes the oil damper 42 attached to the large spring 22 to vibrate. Can be prevented. As a result, similarly to the first embodiment, it is possible to prevent the noise that has been conventionally generated, and to prevent unnecessary opening and closing of the valve mechanism 4 due to a significant pressure change in the gas discharge space A to prevent a predetermined pressure. The original function of reducing the pressure to
It can be demonstrated stably.

In the first or second embodiment, the pressure regulators 30 and 40 are configured to manually adjust the pressure set value. However, also in the so-called automatic pressure regulator, the large spring 22 has the covering material 32 and the oil. With the configuration in which the vibration suppressing member such as the damper 42 is additionally provided, the same effect as described above can be obtained. Further, the large spring 22 is used as the elastic member, and the covering material 3 is used as the vibration suppressing means.
2. Although the oil damper 42 is used, other components such as a combination of an air spring mechanism and an oil damper may be used as long as the vibration suppressing unit suppresses the vibration of the elastic member.

[0028]

As described above, according to the pressure regulator of the first aspect, when the gas is discharged, the vibration of the diaphragm when a significant pressure fluctuation occurs in the gas discharge space is suppressed by the elastic member. This is prevented by the vibration suppression member attached to the.
As a result, it is possible to prevent noise that has conventionally occurred at such times, and to prevent unnecessary opening and closing of the valve mechanism due to significant pressure fluctuations in the gas discharge space. The original function of decompressing can be stably exhibited. Further, even in the automatic pressure regulator, it is possible to prevent the control system from being hindered, and the original function can be stably exhibited.

According to the pressure regulator of the second aspect, when the spring vibrates when the gas is released, the flexible covering material for covering the spring bends, and the resistance when the covering material bends. Vibration of the spring is suppressed by the force. Therefore, the above-mentioned claim 1 can be realized, and since it suffices to cover the spring with the covering material, its manufacture is easy, and the above effect can be obtained at low cost.

According to the pressure regulator of the third aspect, when the spring vibrates when the gas is released, the oil damper damps the vibration of the spring, thereby suppressing the vibration of the spring. . Therefore,
The above-mentioned claim 1 can be realized, and since it is only necessary to provide an oil damper which is generally used, its manufacture is easy and the above effect can be obtained at low cost.

[Brief description of drawings]

FIG. 1 is a vertical sectional view showing an example of a pressure regulator according to the present invention.

FIG. 2 is a vertical cross-sectional view showing another example of the pressure regulator according to the present invention.

FIG. 3 is a vertical sectional view showing an example of a conventional pressure regulator.

[Explanation of symbols]

 2 Primary side flow path (gas flow path) 3 Secondary side flow path (gas flow path) 5 Main body 10 Diaphragm 22 Large spring (elastic member) 30,40 Pressure adjuster 31,41 Pressure adjuster 32 Coating material (vibration suppression) Member) 42 oil damper (vibration suppression member)

Claims (3)

[Claims] 1. A pressure regulator for reducing the gas pressure of a gas passage to a preset value or less by being attached to a gas passage or the like, and comprising a valve mechanism for releasing gas in the gas passage. A pressure regulator comprising a body, a pressure regulator for adjusting a pressure value to be reduced, and a diaphragm that separates the body and the pressure regulator and opens and closes the valve mechanism. Provided in the pressure adjusting unit,
A pressure regulator, wherein a vibration suppressing member that damps vibration of the elastic member is attached to an elastic member that applies pressure to one side of the diaphragm. 2. The pressure regulator according to claim 1, wherein the elastic member is a spring, and the vibration suppressing member is a flexible covering material that covers the spring. Pressure regulator. 3. The pressure regulator according to claim 1, wherein the elastic member is a spring and the vibration suppressing member is an oil damper.