JPH0713350A - Cleaning of substrate for electrophotographic photoreceptor - Google Patents

Abstract

PURPOSE:To obtain a cleaning method in which the sufficient cleaning power is secured and the coating film fault of a photosensitive layer is not generated, in the ultrasonic cleaning in water or in the aqueous group detergent for a substrate for electrophotographic photosensitive body. CONSTITUTION:A cleaning method for a base body for an electrophotographic photosensitive body is characterized that water or an aqueous group detergent is accommodated into a cleaning tank 1 having an ultrasonic vibrator element 6 arranged on the inside side surface, and a base body 3 for an electrophotographic photosensitive body is installed on a rotary board 7 which is installed in a turnable manner on the bottom plate of an elevator 8 which is supported on the elevator device installed outside the cleaning tank 1 and revolves by receiving the transmission from a driving means, and the elevator 8 is lowered into the cleaning tank 1, and the substrate 3 is ultrasonic-cleaned by operating the vibrator element 6, revolving the rotary board 7 in the circumferential direction by the driving means.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for cleaning a substrate for an electrophotographic photoreceptor.

[0002]

2. Description of the Related Art An electrophotographic photoreceptor is provided with an inorganic photoconductive photosensitive layer such as selenium or a photosensitive layer containing an organic charge generating substance and a charge transporting substance on a substrate. Since a coating film defect of the photosensitive layer occurs depending on the cleaning state of the substrate, sufficient cleaning power is required for cleaning the substrate. As the cleaning method, there is a method of applying ultrasonic vibration to the surface of the substrate. In this case, a chlorine-based or CFC-based organic solvent is mainly used as the cleaning agent.

[0003]

However, chlorine-based or freon-based organic solvents are strongly required to be regulated as emissions into the atmosphere and water as environmentally destructive substances. For example, organic solvents such as trichlorethylene and perchlorethylene are regulated as water pollutants.
Restrictions on the use of methylene chloride as ozone-depleting substances are set.

On the other hand, in ultrasonic cleaning, the cleaning power is improved by applying ultrasonic vibration to the surface of the object to be cleaned. The action of sound waves is much stronger than the action in an organic solvent, and cavitation is likely to occur.
In addition, when the cleaning power is divided into the cleaning power and the ultrasonic wave, the ultrasonic wave occupies a larger part. That is, the detergency differs greatly. Therefore, when performing ultrasonic cleaning in a water-based cleaning agent, it is necessary to apply ultrasonic waves to the object to be cleaned constantly.

However, while the action of ultrasonic cleaning in a water-based cleaning agent is strong, it lacks uniformity in strength at spatial positions in the cleaning tank. In particular, when the ultrasonic frequency is constant, a standing wave is generated in the cleaning tank, and the position where the action of ultrasonic waves is strong and the position where the ultrasonic wave is weak are fixed depending on the spatial position. For example, when the distance between the object to be cleaned and the ultrasonic oscillator (hereinafter, also referred to as an oscillator) is short, the action of ultrasonic waves is strong, and conversely, when the distance from the oscillator is long, the action is weak. Further, the surface of the object to be cleaned which faces the vibrator has a strong action, and the surface which does not face the vibrator has a weak action. Furthermore, when a standing wave is generated, the action is strong at the antinode of the standing wave and weak at the node of the standing wave.

Further, the action of ultrasonic waves greatly changes in water even with a slight change in the output of ultrasonic waves, so it is difficult to stabilize the action of ultrasonic waves in an aqueous cleaning agent. For example, a change in the output of the oscillator itself due to a change in ambient temperature changes the strength of ultrasonic waves.

Further, the difference in the distance between the vibrator and the object to be cleaned in the cleaning tank, the difference in the cleaning agent liquid depth, the difference in the cleaning agent liquid temperature, or the difference in the cleaning agent dissolved oxygen is observed from the oscillator. The acoustic impedance of the cleaning tank including the oscillator is changed, which changes the oscillator output.

In the ultrasonic cleaning of the electrophotographic photoconductor substrate, if the above-mentioned difference in the action of ultrasonic waves occurs, the cleaning power also becomes different, and by extension, the coating film of the photosensitive layer formed on the substrate. It causes defects.

An object of the present invention is to ultrasonically clean a substrate for an electrophotographic photoreceptor in water or a water-based cleaning agent (hereinafter, simply referred to as a water-based cleaning agent) without causing the above-mentioned problems of the prior art. Another object of the present invention is to obtain a cleaning method that secures sufficient cleaning power and does not cause coating film defects on the photosensitive layer.

[0010]

According to the present invention, in order to achieve the above object, the following three methods are provided as a method for cleaning a substrate for an electrophotographic photoreceptor. The first is to store the water-based cleaning agent in a cleaning tank in which an ultrasonic transducer is placed on the inner side surface,
The electrophotographic photoconductor substrate is placed on a rotary table that is rotatably attached to a bottom plate of an elevator supported by an elevating device provided outside the cleaning tank, and that is rotated by receiving a transmission from a driving unit. An electrophotographic photosensitive member characterized by lowering an elevator into a cleaning tank and ultrasonically cleaning the substrate by operating the ultrasonic vibrator while rotating the rotary table in the circumferential direction by the driving means. This is a method of cleaning a substrate. Second, the ultrasonic transducer is placed on the inner side surface and the bottom surface of the cleaning tank, and the water-based cleaning agent is stored in the cleaning tank. The elevator is rotatably attached to the bottom plate of the elevator supported by the lifting device provided outside the cleaning tank. The electrophotographic photoreceptor substrate is placed on a table, and the elevator is lowered into the cleaning tank. On the other hand, the back surface of the bottom plate of the elevator is provided with ultrasonic energy generated from the ultrasonic vibrator on the bottom surface of the cleaning tank. A conversion device for converting into rotary motion is provided in connection with the rotary table, and the ultrasonic table on the bottom surface of the cleaning tank is operated to rotate the rotary table in the circumferential direction via the conversion device, and at the same time, A method for cleaning a substrate for an electrophotographic photosensitive member is characterized in that the substrate is ultrasonically cleaned by operating an ultrasonic vibrator on the side surface of the cleaning tank. Thirdly, a rotary table rotatably attached to a bottom plate of an elevator supported by an elevating device provided outside the cleaning tank, in which a cleaning tank in which an ultrasonic transducer is disposed on the inner side is contained. Place the substrate for electrophotographic photoreceptor,
The elevator is lowered into the washing tank, and on the one hand, on the back surface of the elevator bottom plate, there is provided a rotating device having a rotating portion which is rotated by the water flow generated by the circulation of the water-based cleaning agent, connected to the same shaft as the rotating base. Yes, by circulating an aqueous cleaning agent by a pump provided outside the cleaning tank, the rotary table is rotated in the circumferential direction through the rotating device, and at the same time, the ultrasonic transducer on the side surface of the cleaning tank is operated. A method for cleaning a substrate for an electrophotographic photoreceptor, which comprises cleaning the substrate with ultrasonic waves.

[0011]

According to the first method, the substrate can be rotated in the circumferential direction at the position facing the ultrasonic transducer in the cleaning tank by transmitting the rotation of the driving means such as the electric motor into the cleaning tank. As a result, the distance between all the surfaces of the substrate and the ultrasonic transducer becomes constant, the action of ultrasonic waves is uniform over the entire surface of the substrate, and uniform cleaning power can be obtained. In the second method, the substrate can be rotated in the circumferential direction in the cleaning tank by using the vibration of the ultrasonic vibrator provided on the bottom surface of the cleaning tank as a driving source, and thus the same as the first method. The uniform cleaning power can be obtained. Further, in the third method, the substrate can be rotated in the circumferential direction in the cleaning tank by using the water flow generated by the circulation of the cleaning agent as a driving source, which enables uniform cleaning as in the first method. It is something that can gain strength.

[0012]

EXAMPLES The present invention will be specifically described below with reference to examples. [Example 1] In Fig. 1 (a), an ultrasonic transducer 6 is arranged on the inner side surface of a cleaning tank 1 containing a water-based cleaning agent 5, and a substrate 3 to be cleaned is placed outside the cleaning tank. Is mounted on a rotary table 7 rotatably mounted on a bottom plate 18 of an elevator 8 supported by a lifting device (not shown) provided on the elevator 8, lowered into the cleaning tank, and installed on the upper portion of the elevator 8. The shaft 9 for transmitting the rotation of the electric motor 2, the sprocket 10 attached to the tip of the shaft 9, the chain 11, and the sprocket 12 connected to the turntable 7 rotate in the circumferential direction 4. By rotating the base body 3 in this manner, all the surfaces of the base body 3 can face the vibrator 6.
At this time, by swinging the elevator 8 in the vertical direction 13, the base body 3 can be swung in the vertical direction while rotating. As the water-based cleaning agent 5, a cleaning agent mainly composed of polyethylene glycol alkylphenyl ether, sodium phosphate, fatty acid ester, and glycolate is diluted with water and used, and the liquid temperature is set to 40 ° C. by a heater (not shown). Keep the outer diameter φ80m on the base 3.
m, a length of 340 mm, and a thickness of 1.0 mm are used to mount the aluminum base on the turntable 7, and the ultrasonic frequency is 48K.
30 Hz in the circumferential direction 4 by using the oscillator 40 of Hz.
6 at the same time as rotating the elevator 8 in the vertical direction 13 with a swing width of 50 mm by the lifting device.
Immersion ultrasonic cleaning was performed for 0 seconds, followed by rinsing with a pure water shower device, and then the pure water adhering to the substrate surface was dried with a warm air dryer. Next, a solution prepared by dissolving 100 g of alcohol-soluble polyamide resin in 1500 g of methanol is applied onto the substrate 3 after ultrasonic cleaning by a dipping method, and dried at 100 ° C. for 5 minutes to give a film thickness of 0.1 μm.
To form an undercoat layer. Next, on this undercoat layer, 5 g of bisazo pigment and 800 g of cyclohexanone were mixed and dispersed in a ball mill for 10 hours to obtain a highly viscous cream-like dispersion liquid, and 1300 g of methyl isobutyl ketone was added to dilute the coating liquid. Is applied by the dipping method and the temperature is 100 ℃
And dried for 10 minutes to form a charge generation layer having a film thickness of 0.3 μm. The coating film was a glossy and uniform smooth film.
Next, a uniform solution of 300 g of the charge transport material, 800 g of the polycarbonate resin and 1000 g of methylene chloride was prepared as a coating solution, and the coating solution was coated on the above charge generating layer by a dipping method, and then at 30 ° C. at 30 ° C. After drying for a minute, a charge transport layer having a film thickness of 50 μm was formed. The function-separated electrophotographic photoconductor thus obtained is composed of a -6.0 KV scorotron type corona charging, image exposure with a halogen lamp, development with dry toner, image transfer onto plain paper, and cleaning with a blade or a mag brush. 1B, the number of defects on the images of the regions I, II, III, and IV in which the cylindrical photosensitive member was divided into four in the vertical direction by 90 degrees in the circumferential direction as shown in FIG. 1B was counted.

[Embodiment 2] In FIG. 2A, a vibrator 6 is arranged on the side surface and a vibrator 14 is arranged on the bottom surface in a cleaning tank 1 containing an aqueous cleaning agent 5, and the base 3 is a cleaning tank. The bottom surface of the bottom plate 18 of the elevator 8 is placed on a rotary table 7 rotatably attached to a bottom plate 18 of the elevator 8 supported by an elevating device (not shown) provided outside and lowered into the cleaning tank. The ultrasonic energy generated from the vibrator 14 and propagating in the water is converted into rotary motion by the device 20 for converting the ultrasonic energy into the rotary motion provided on the (bottom side of the cleaning tank) and is connected to the conversion device 20. The base 3 is rotated in the circumferential direction by rotating the rotating base 7 thereby. As a result, all the surfaces of the substrate 3 face the vibrator 6 on the side surface of the cleaning tank. At this time, the elevator 8 is swung in the vertical direction 13 so that the base 3 can be swung in the vertical direction while being rotated. 2B and 2C are detailed views of the ultrasonic energy-rotational motion conversion device 20. In FIG. 2B, the stater 21 has a hollow cylindrical shape, and the upper part thereof becomes thinner toward the tip of the horn part 22. The horn portions 22 are inclined at a constant angle 23 with respect to the vertical direction and are provided at regular intervals, and are in contact with the rotor 25 as shown in FIG. The bottom surface 24 of the statuser 21 is flat and receives ultrasonic waves from the lower part of the cleaning tank. The rotor 25 has a disk shape and the bottom surface 27 has a flat surface.
Is in contact with the upper surface of the horn portion 22. The operation of this device 20 is such that the ultrasonic vibration received on the bottom surface 24
1 propagates inside and is amplified by the horn unit 22. At this time, the horn portion 22 expands and contracts 26 in a direction inclined at a constant angle 23 with respect to the vertical direction, but due to the horizontal component 29 of the force 28 at the time of expansion, the rotor 25 and the rotary table 7 connected to the same axis as the rotor 25. Rotates in the circumferential direction. The rotation speed and the rotation torque at this time are the ultrasonic frequency received by the bottom surface 24 of the starter 21, the ultrasonic output, the shape of the horn portion 22, the inclination angle 23, the material of the stator 21, the rotor 2
5, the contact pressure of the stator 21 and the rotor 25 in the vertical direction, etc. are determined. In this example, the ultrasonic frequency is 28 KHz, the ultrasonic output is 600 W, and the shape of the horn portion becomes smaller from the root to the tip of the horn. The ratio is exponential, the tilt angle 23 is 35 degrees, the material of the starter 21 is copper, and the material of the rotor 25 is SUS30.
4. The contact pressure of the stator 21 and the rotor 25 in the vertical direction was set to 0.5 Kg / cm ² . Otherwise, ultrasonic cleaning was performed in the same manner as in Example 1, and the number of defects on the image was counted.

[Embodiment 3] FIGS. 3A and 3B.
In the cleaning tank 1, the vibrator 6 is disposed on the side surface of the cleaning tank in the cleaning tank 1 containing the water-based cleaning agent 5, and the substrate 3 is lifted by an elevator 8 supported by an elevating device (not shown) provided outside the cleaning tank. A device that is placed on a turntable 7 rotatably attached to a bottom plate 18 of the elevator, is lowered into the cleaning tank, and converts a water flow provided on the back surface (bottom surface of the cleaning tank) of the bottom plate 18 of the elevator 8 into rotational motion. The turntable 7 is rotated by 30. As a result, all the surfaces of the substrate 3 can face the vibrator 6 on the side surface of the cleaning tank. Also, at this time, the elevator 8
By swinging in the vertical direction, it is possible to swing in the vertical direction 13 while rotating the base body 3. The device 30 for converting a water flow into a rotary motion is such that a water flow 32 generated by circulating the water-based cleaning agent 5 by a pump 31 provided outside the cleaning tank hits a vane 33, and rotates around a rotary table 7 connected to the vane 33 on the same axis. Rotate in the direction. The rotation speed and the rotation torque at this time are determined by the amount of water in the water stream 32, the shape of the vanes 33, the number of vanes, etc. In this example, the amount of water in the water stream 32 is 20 liters / min, the shape of the vanes 33 is linear, and the number of vanes 33 is 6
It was a piece. Otherwise, ultrasonic cleaning was performed in the same manner as in Example 1, and the number of defects on the image was counted.

[Embodiment 4] In Embodiment 1, the rotation start position of the substrate 3 is set so that the center of the region I of the substrate 3 is the front face of the vibrator, and the rotation speed is 0.5 rpm. Ultrasonic cleaning was performed in the same manner as in 1, and the number of defects on the image was counted.

Comparative Example 1 In Example 1, ultrasonic cleaning was performed in the same manner as in Example 1 except that the substrate 3 was not rotated and the center of the region I of the substrate 3 was the front face of the vibrator. Then, the number of defects on the image was counted.

[Embodiment 5] A power meter 42 was connected to the power source 41 side of the oscillator 40 to display the input power of the oscillator 40 (see FIGS. 4 and 1). In this case, the liquid temperature of the water-based cleaning agent 5 was set to two levels of 35 ° C. and 45 ° C., and the output of the oscillator 40 was adjusted so that the indicated value of the power meter 42 at each liquid temperature was 1000 W. Otherwise, ultrasonic cleaning was performed in the same manner as in Example 1, and the number of defects on the image was counted.

[Sixth Embodiment] In the fifth embodiment, the power meter 4 is used.
An ammeter was used in place of 2, and adjustment was made so that the indicated value was 7.5 A. Others were ultrasonically cleaned in the same manner as in Example 5, and the number of defects on the image was counted.

[Seventh Embodiment] The oscillator 40 according to the first embodiment.
A high-frequency power meter 44 was connected between the ultrasonic transducer 6 and the ultrasonic transducer 6 to display the high-frequency oscillation power (see FIGS. 5 and 1). In this case, the liquid temperature of the water-based cleaning agent was set to two levels of 35 ° C. and 45 ° C., and the output of the oscillator 40 was adjusted so that the indicated value of the high frequency power meter 44 was 600 W at each liquid temperature. Otherwise, ultrasonic cleaning is performed in the same manner as in Example 1,
The number of defects on the image was counted.

[Embodiment 8] In Embodiment 7, an ammeter is used instead of the high frequency power meter 44, and the indicated value is 4.5 A.
Was adjusted so that Otherwise, ultrasonic cleaning was performed in the same manner as in Example 7, and the number of defects on the image was counted.

[Embodiment 9] The piezoelectric conversion element 45 is placed in the cleaning tank 1 in the embodiment 1, and the electric output of the piezoelectric conversion element 45 is displayed on the display device 46 provided outside the cleaning tank 1 ( (See FIGS. 6 and 1). Set the liquid temperature of the water-based cleaning agent to 35
The output of the oscillator 40 was adjusted so that the indicated value of the display device 46 would be 5 mV / V at two liquid temperatures of 45 ° C. and 45 ° C., respectively. Otherwise, ultrasonic cleaning was performed in the same manner as in Example 1, and the number of defects on the image was counted.

[Comparative Example 2] In Example 5, ultrasonic adjustment was performed in the same manner as in Example 1 except that the output adjustment was not performed, and the number of defects on the image was counted.

[Embodiment 10] Oscillator 4 in Embodiment 1
0 and the vibrator 6 are electrically connected to a high-frequency power meter 50, the high-frequency oscillation power of the oscillator 40 is measured by the power measuring unit 51 inside the high-frequency power meter 50, and the output thereof is set by the setting device 5.
3 is compared with the value in the comparator 52, and the automatic control output 5
4 is input to the oscillator 40 (see FIGS. 7 and 1). In the oscillator 40, a motor 55 is mechanically connected to an internal output setting device 43 (a variable resistor in this example), and the motor 55 has a PID auto-tuning circuit inside due to an automatic control output 54, and a PID parameter Is driven by a motor driver 56 that can set
By changing the output setting device 43, the output of the oscillator 40 becomes an output according to the setting device 53. In this example, the setting device 53 is set so that the output of the oscillator 40 becomes 600 W, and the water-based cleaning agent 5
The liquid temperature was set to two levels, 35 ° C. and 45 ° C., ultrasonic cleaning was performed in the same manner as in Example 1 except for the above, and the number of defects on the image was counted.

[Embodiment 11] Oscillator 4 in Embodiment 1
0 and the vibrator 6 are electrically connected to a high-frequency power meter 50, the high-frequency oscillation power of the oscillator 40 is measured by the power measuring unit 51 inside the high-frequency power meter 50, and the output thereof is set by the setter 5.
3 is compared with the value in the comparator 52, and the automatic control output 5
4 is input to the impedance matching device 60 (see FIG. 8). In the impedance matching device 60, a motor 62 is mechanically connected to an internal impedance adjuster 61 (variable capacitor in this example) by an LC circuit, and the motor 62 has a PID auto tuning circuit inside due to an automatic control output 54. , Is driven by a motor driver 63 that can set the PID parameters to optimum values,
The impedance adjuster 61 is changed to change the acoustic impedance viewed from the oscillator 40, and the output of the oscillator 40 becomes an output according to the setter 53. In this example, the oscillator 40
Is set to 600 W, the liquid temperature of the water-based cleaning agent 5 is set to two levels of 35 ° C. and 45 ° C., and ultrasonic cleaning is performed in the same manner as in Example 1 except for the above. The number of defects was counted.

[Embodiment 12] Oscillator 4 in Embodiment 1
0 and the vibrator 6 are electrically connected to a high-frequency power meter 50, the high-frequency oscillation power of the oscillator 40 is measured by the power measuring unit 51 inside the high-frequency power meter 50, and the output thereof is set by the setting device 5.
3 is compared with the value in the comparator 52, and the automatic control output 5
4 has a PID auto-tuning circuit inside, and PI
The D parameter is input to the motor controller 70 that can set the optimum value (see FIG. 9). The vibrator 6 is mechanically connected to a motor 71, and is fixed on a moving table 73 that moves back and forth in a direction 74 that adjusts a horizontal distance from the base body 3 by a slide device 72 that converts a rotary motion into a horizontal motion.
By changing the distance between the substrate 3 and the vibrator 6, the acoustic impedance viewed from the oscillator 40 is changed, and the oscillator 4
The output of 0 becomes an output according to the setter 53. In this example, the setting device 53 is set so that the output of the oscillator 40 is 600 W, the liquid temperature of the water-based cleaning agent 5 is set to two levels of 35 ° C. and 45 ° C., and ultrasonic cleaning is performed in the same manner as in Example 1. Then, the number of defects on the image was counted.

[Embodiment 13] Oscillator 4 in Embodiment 1
0 and the vibrator 6 are electrically connected to a high-frequency power meter 50, the high-frequency oscillation power of the oscillator 40 is measured by the power measuring unit 51 inside the high-frequency power meter 50, and the output thereof is set by the setting device 5.
3 is compared with the value in the comparator 52, and the automatic control output 5
4 is input to the cleaning tank liquid depth controller 80 (see FIG. 10).
The washing tank liquid depth 83 increases and decreases in the vertical direction 84 by sending and returning the washing agent in the stock tank 85 to and from the washing tank 1 by the increasing liquid pump 81 and the decreasing liquid pump 82, and viewed from the oscillator 40. By changing the acoustic impedance, the output of the oscillator 40 becomes an output according to the setter 53. In this example, the setting device 53 is set so that the output of the oscillator 40 is 600 W, the liquid temperature of the water-based cleaning agent 5 is set to two levels of 35 ° C. and 45 ° C., and ultrasonic cleaning is performed in the same manner as in Example 1. Then, the number of defects on the image was counted.

[Embodiment 14] Oscillator 4 in Embodiment 1
0 and the vibrator 6 are electrically connected to a high-frequency power meter 50, the high-frequency oscillation power of the oscillator 40 is measured by the power measuring unit 51 inside the high-frequency power meter 50, and the output thereof is set by the setting device 5.
The value of 3 and the value of 3 are compared by the comparator 52, and the feedback output 54 is input to the dissolved oxygen amount controller 90 (see FIG. 11). The water-based cleaning agent 5 is circulated in the order of the cleaning tank 1, the ejector 95, the pump 93, and the reaction tank 94 by the pump 93, and the valve 92 for adjusting the hydrogen generated by the hydrogen generator 91 by the dissolved oxygen amount controller 90. A reaction tank 94 which is sucked and mixed from an ejector 95 according to the opening degree, stirred by a pump 93, and filled with an oxygen / hydrogen reaction resin.
, The dissolved oxygen reacts with hydrogen to become water, and the dissolved oxygen is reduced. At this time, when the hydrogen supply amount is small, the dissolved oxygen amount is increased due to the stirring effect. In this way, the dissolved oxygen amount is adjusted by the hydrogen supply amount, the acoustic impedance seen from the oscillator 40 is changed, and the output of the oscillator 40 becomes an output according to the setter 53. In this example, the setting device 53 is set so that the output of the oscillator 40 becomes 600 W, the liquid temperature of the water-based cleaning liquid 5 is set to two levels of 35 ° C. and 45 ° C., and ultrasonic cleaning is performed in the same manner as in the first embodiment. Then, the number of defects on the image was counted.

[Embodiment 15] Oscillator 4 in Embodiment 1
The power meter 100 is connected to the power source 41 side of 0, the input power to the oscillator 40 is measured by the internal power measuring unit 101, the value with the setter 103 is compared with the comparator 102, and its automatic control output 104 Is input to the oscillator 40 (see FIG. 12). In the oscillator 40, a motor 55 is mechanically connected to an internal output setting device 43 (variable resistor in this example),
The motor 55 is driven by the motor driver 56 by the automatic control output 104, the output setting device 43 is changed, and the output of the oscillator 40 becomes an output according to the setting device 53. In this example, the setting device 53 is set so that the output of the oscillator 40 is 600 W, the liquid temperature of the water-based cleaning liquid 5 is set to two levels of 35 ° C. and 45 ° C., and ultrasonic cleaning is performed in the same manner as in the first embodiment. , The number of defects on the image was counted.

[Example 16] Cleaning tank 1 in Example 1
The piezoelectric conversion element 111 is placed inside and is connected to the ultrasonic sound pressure meter 110 installed outside the cleaning tank 1 to provide the piezoelectric conversion element 11
The electrical output of 1 is compared with the value of the setter 113 by the comparator 112, and the automatic control output 114 is input to the oscillator 40 (see FIG. 13). The oscillator 40 is an internal output setting device 4
The motor 55 is mechanically connected to the motor 3 (variable resistor in this example), and the motor 55 is automatically driven by the automatic control output 114.
Is driven by the motor driver 56 to change the output setter 43, and the output of the oscillator 40 becomes an output according to the setter 53. In this example, the setting device 53 is set so that the output of the oscillator 40 is 600 W, and the liquid temperature of the water-based cleaning liquid 5 is set to 3
Ultrasonic cleaning was performed in the same manner as in Example 1 except that the levels were 5 ° C. and 45 ° C., and the number of defects on the image was counted.

[Embodiment 17] Oscillator 4 in Embodiment 1
The oscillation frequency is 0 and the center frequency is 48 KH shown in FIG.
Frequency modulation with a width of ± 4 KHz was applied to z with a sweep period τ of 0.5 second, and otherwise, ultrasonic cleaning was performed in the same manner as in Example 1 and the number of defects on the image was counted. .

[Embodiment 18] The width of the modulation frequency in Embodiment 17 is ± 0.1 KHz with respect to the center frequency of 48 KHz.
Then, ultrasonic cleaning was performed in the same manner as in Example 17 except for the above, and the number of defects on the image was counted.

[Embodiment 19] The width of the modulation frequency in Embodiment 17 was set to ± 10 KHz with respect to the center frequency of 48 KHz, and the ultrasonic cleaning was carried out in the same manner as in Embodiment 17, except that the number of defects on the image was counted.

[Embodiment 20] The frequency modulation in Embodiment 17 was performed by setting the sweep period τ to 1 second and the ultrasonic cleaning was performed in the same manner as in Embodiment 17, except that the number of defects on the image was counted.

The results of counting defects on the images of the above Examples and Comparative Examples are shown in Tables 1- (1) to (3). The present invention is not limited to the above-described embodiment. For example, in the above-mentioned embodiment, the substrate 3 is washed in the cleaning tank in the vertical direction, but it is also possible to perform the cleaning in the horizontal direction. Further, the ultrasonic transducers 6 can be oscillated in the horizontal direction, the vertical direction, and other directions, and the number of units used can be two or more. Besides, although the electric motor 2 is installed outside the cleaning tank in the first embodiment, it may be mounted inside the cleaning tank, for example, at the bottom of the cleaning tank, and the drive can be transmitted to the inside of the cleaning tank by the shaft sealed. Further, although ultrasonic vibration is propagated in water in the second embodiment, it may be propagated only in solid such as metal. Further, the ammeter, the power meter, the high-frequency power meter, or the ultrasonic sound pressure meter in the fifth to sixteenth embodiments includes an oscillator, an impedance matching device, a distance controller, a cleaning tank liquid depth controller or a dissolved oxygen amount controller and its function. Can be included in either.

[0035]

[Table 1- (1)]

As is apparent from Table 1- (1), according to the three methods of the present invention shown in Examples 1 to 3, the number of defects in each region of the substrate is small, and uniform ultrasonic cleaning is performed. I know that it will be done. However, as seen in Comparative Example 1 and Example 4, when the substrate is not rotated or the rotation speed is too small, the number of defects is large, the variation between regions is large, and the cleaning is uneven. It can be seen that it becomes insufficient and therefore it is desirable to have a constant number of rotations for a constant cleaning time. According to the experiment, when the rotation speed of the substrate is X (rpm) and the ultrasonic cleaning time is T (second), 6
It has been found that it is preferable to set the range to satisfy the expression of 0 / T <X.

[0037]

[Table 1- (2)]

Further, as is clear from Table 1- (2),
According to Examples 5 to 9, changes in the ambient temperature of the cleaning tank by manually adjusting the current (power) input to the ultrasonic oscillator, the high frequency oscillation current (power), the ultrasonic sound pressure, and the like,
It can be seen that control can be performed so that uniform cleaning can be performed even if the output of the ultrasonic oscillator changes due to differences in the cleaning liquid depth, liquid temperature, and the amount of dissolved oxygen in the cleaning liquid. Furthermore, Example 1
According to 0 to 16, it can be seen that the output change of the ultrasonic oscillator can be automatically controlled.

[0039]

[Table 1- (3)]

Furthermore, as is clear from Table 1- (3), according to Examples 17 to 20, the oscillator in which the ultrasonic frequency is time-series modulated is used, or the width of the modulation frequency is changed.
Alternatively, by setting the frequency modulation sweep period in a specific range, the occurrence of standing waves in the cleaning tank can be prevented,
Uniform washing can be performed.

[0041]

INDUSTRIAL APPLICABILITY As described above, according to the present invention, in the ultrasonic cleaning method for the electrophotographic photoreceptor substrate in the aqueous cleaning agent, the cleaning power is excellent and the coating layer defects of the photosensitive layer are significantly reduced. An ultrasonic cleaning method is obtained.

[Brief description of drawings]

FIG. 1A is a front sectional view showing an apparatus configuration for carrying out an ultrasonic cleaning method of the present invention, and FIG. 1B is a front sectional view of a cylindrical substrate and a sectional view taken along the line AA.

FIG. 2 (a) is a front sectional view showing an apparatus configuration for carrying out another ultrasonic cleaning method of the present invention, and FIG. 2 (b) is a top view and an enlarged front view of an ultrasonic energy-rotational motion conversion apparatus. (C) is an enlarged view of the rotational motion converter in the B direction.

FIG. 3 (a) is a front sectional view showing an apparatus configuration for carrying out still another ultrasonic cleaning method of the present invention, and FIG. 3 (b) is a sectional view taken along line CC of the water flow-rotational motion converting apparatus.

FIG. 4 is an apparatus configuration diagram for explaining the outline of still another ultrasonic cleaning method of the present invention.

FIG. 5 is an apparatus configuration diagram for explaining the outline of still another ultrasonic cleaning method of the present invention.

FIG. 6 is an apparatus configuration diagram for explaining the outline of still another ultrasonic cleaning method of the present invention.

FIG. 7 is an apparatus configuration diagram for explaining the outline of still another ultrasonic cleaning method of the present invention.

FIG. 8 is an apparatus configuration diagram for explaining the outline of still another ultrasonic cleaning method of the present invention.

FIG. 9 is an apparatus configuration diagram for explaining the outline of still another ultrasonic cleaning method of the present invention.

FIG. 10 is an apparatus configuration diagram for explaining the outline of still another ultrasonic cleaning method of the present invention.

FIG. 11 is an apparatus configuration diagram for explaining the outline of still another ultrasonic cleaning method of the present invention.

FIG. 12 is an apparatus configuration diagram for explaining the outline of still another ultrasonic cleaning method of the present invention.

FIG. 13 is an apparatus configuration diagram for explaining the outline of still another ultrasonic cleaning method of the present invention.

FIG. 14 is a graph showing an oscillation frequency of an ultrasonic oscillator.

[Explanation of symbols]

 1 Cleaning Tank 2 Electric Motor 3 Cylindrical Substrate 6 Ultrasonic Transducer 7 Rotating Table 8 Elevator 20 Ultrasonic Energy-Rotary Motion Converter 22 Ultrasonic Horn Part 30 Water Flow-Rotary Motion Converter 31 Vanes 40 Ultrasonic Oscillator

Claims (3)

[Claims] 1. A cleaning tank having an ultrasonic transducer disposed on the inner side surface thereof contains water or a water-based cleaning agent, and is rotatably attached to a bottom plate of an elevator supported by an elevating device provided outside the cleaning tank. Further, the electrophotographic photosensitive member substrate is placed on a rotary table which is rotated by receiving the transmission from the driving means, the elevator is lowered in the cleaning tank, and the rotary table is rotated in the circumferential direction by the driving means. A method of cleaning a substrate for an electrophotographic photosensitive member, which comprises ultrasonically cleaning the substrate while operating the ultrasonic vibrator. 2. An ultrasonic transducer is provided in a cleaning tank having an inner side surface and a bottom portion for accommodating water or a water-based cleaning agent, and is rotatably attached to a bottom plate of an elevator supported by a lifting device provided outside the cleaning tank. The substrate for electrophotographic photoreceptor is placed on the rotating table, and the elevator is lowered into the cleaning tank. On the other hand, on the back surface of the bottom plate of the elevator, the ultrasonic wave generated from the ultrasonic transducer on the bottom surface of the cleaning tank is used. A conversion device for converting sonic energy into rotary motion is provided in connection with the rotary table,
By operating the ultrasonic vibrator on the bottom surface of the cleaning tank, the rotary table is rotated in the circumferential direction through the converter, and at the same time, the ultrasonic vibrator on the side surface of the cleaning tank is operated to ultrasonically rotate the substrate. A method for cleaning a substrate for an electrophotographic photoreceptor, which comprises cleaning. 3. An ultrasonic transducer is installed in a cleaning tank having an inner side surface and contains water or a water-based cleaning agent, and is rotatably attached to a bottom plate of an elevator supported by an elevating device provided outside the cleaning tank. A substrate for an electrophotographic photosensitive member is placed on a turntable, and an elevator is lowered into the cleaning tank. On the other hand, on the back surface of the elevator bottom plate, a rotating unit that is rotated by a water flow generated by circulation of water or a water-based cleaning agent. A rotary device having a rotary shaft having the same structure as that of the rotary base, and a pump provided outside the cleaning tank to circulate an aqueous cleaning agent to rotate the rotary base in the circumferential direction through the rotary device. ,
At the same time, an ultrasonic vibrator on the side surface of the cleaning tank is operated to ultrasonically clean the substrate, and a method for cleaning a substrate for an electrophotographic photosensitive member.