JPH07132267A - Washing method for coating applying head having slit nozzle - Google Patents

Washing method for coating applying head having slit nozzle

Info

Publication number
JPH07132267A
JPH07132267A JP30344293A JP30344293A JPH07132267A JP H07132267 A JPH07132267 A JP H07132267A JP 30344293 A JP30344293 A JP 30344293A JP 30344293 A JP30344293 A JP 30344293A JP H07132267 A JPH07132267 A JP H07132267A
Authority
JP
Japan
Prior art keywords
coating
cleaning
liquid
slit nozzle
coating head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP30344293A
Other languages
Japanese (ja)
Inventor
Koji Takatani
幸司 高谷
Nobuyuki Taniguchi
信行 谷口
Shigeo Itano
重夫 板野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Nippon Steel Corp
Original Assignee
Mitsubishi Heavy Industries Ltd
Sumitomo Metal Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd, Sumitomo Metal Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP30344293A priority Critical patent/JPH07132267A/en
Publication of JPH07132267A publication Critical patent/JPH07132267A/en
Withdrawn legal-status Critical Current

Links

Abstract

PURPOSE:To establish the means for easily and efficiently washing the inside of the 'coating applying head having a slit nozzle', such as extrusion type coating applying head. CONSTITUTION:A washing liquid is supplied from a coating liquid supplying pipe 4 connecting to the coating applying head 1 and an inert gas is blown into the washing liquid passing this coating liquid supplying pipe 4 at the time of washing the inside of the 'coating applying head 1 of a type to execute coating application while discharging the coating liquid from the slit nozzle'. The inside of the coating applying head is washed by discharging the liquid mixture composed of the washing liquid and the inert gas from the slit nozzle 6.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、エクストル−ジョン
型塗布ヘッドやスライド型塗布ヘッド等のような“スリ
ットノズルを有した塗布ヘッド”の内部を効率的に洗浄
する方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for efficiently cleaning the inside of a "coating head having a slit nozzle" such as an extrusion type coating head and a slide type coating head.

【0002】[0002]

【従来技術とその課題】近年、プラスチックフィルム,
紙,布あるいは金属等から成る帯状材料の表面に塗料や
磁性材料等の塗布液を連続的に塗布する手段として、エ
クストル−ジョン型塗布ヘッドやスライド型塗布ヘッド
等のような“スリットノズルから塗布液を吐出させつつ
塗布を行う形式の塗布ヘッド”を使用した塗装法が採用
されるようになってきた。
2. Description of the Related Art In recent years, plastic films,
As a means for continuously applying a coating liquid such as paint or magnetic material to the surface of a strip-shaped material made of paper, cloth, metal, etc., it is applied from “slit nozzle” such as extrusion type coating head or slide type coating head. A coating method using a coating head of a type that performs coating while discharging a liquid has been adopted.

【0003】ただ、このような“スリットノズルを有し
た塗布ヘッド”中でもエクストル−ジョン型塗布ヘッド
(ダイコ−タ−又はリップコ−タ−とも呼ばれる)に対
しては特に大きな期待が寄せられており、このエクスト
ル−ジョン型塗布ヘッドを使った塗装手段としてこれま
でにも様々な提案がなされ、例えば特開平2−1725
69号公報,実開平2−17259号公報あるいは特開
平3−38271号公報等にも見られるように、塗布の
形態に関しても幾つかの異なった様式が試みられてき
た。
However, among such "coating heads having slit nozzles", there are particularly great expectations for extrusion type coating heads (also called die coaters or lip coaters). Various proposals have been made so far as a coating means using this extrusion type coating head, for example, Japanese Patent Laid-Open No. 2-1725.
As seen in Japanese Patent No. 69, Japanese Utility Model Laid-Open No. 2-17259, Japanese Patent Laid-Open No. 3-38271, and the like, several different modes have been tried for the coating form.

【0004】図3に示したのは、上記エクストル−ジョ
ン型塗布ヘッドを使った塗装形態の極く基本的な例の1
つである。即ち、図3はエクストル−ジョン型塗布ヘッ
ド1を使った塗装手段の1例に係る概要説明図であり、
バッキングロ−ル2に沿って走行する帯状被塗工材3の
表面に対向させてエクストル−ジョン型塗布ヘッド1を
近接配置し、塗布液供給管4を通してエクストル−ジョ
ン型塗布ヘッド1内へ供給された塗布液をスリットノズ
ルから一定流量で吐出させて帯状被塗工材面に塗布する
ことにより塗膜5を形成する様子を示している。
FIG. 3 shows a very basic example 1 of the coating form using the extrusion-type coating head.
Is one. That is, FIG. 3 is a schematic explanatory diagram relating to an example of a coating means using the extrusion-type coating head 1.
The extrusion type coating head 1 is disposed in close proximity to the surface of the strip-shaped coating material 3 traveling along the backing roll 2, and is supplied into the extrusion type coating head 1 through the coating liquid supply pipe 4. It shows a state in which the coating film 5 is formed by discharging the applied coating liquid from the slit nozzle at a constant flow rate and applying it to the surface of the strip-shaped coating material.

【0005】ここで、図4は上記エクストル−ジョン型
塗布ヘッド1の内部構造を示した断面概要図であるが、
このエクストル−ジョン型塗布ヘッドに限らず、“スリ
ットノズルを有した塗布ヘッド”ではヘッドの先端に開
口するスリット6は均一な塗布を行うためその間隔(ギ
ャップ)を非常に狭く設定するのが一般的である。なぜ
なら、塗布液がこのスリット部を通過するときの流通抵
抗を大きくし、これによりマニホ−ルド7内の圧力が均
一に保たれるようにして、スリット6からの塗布液の吐
出流量が幅方向で均一化されるようにするためである。
Here, FIG. 4 is a schematic sectional view showing the internal structure of the extrusion-type coating head 1.
Not only in this extrusion type coating head, but in a "coating head having a slit nozzle", the slits 6 opening at the tip of the head are generally set to have a very narrow interval (gap) for uniform coating. Target. This is because the flow resistance when the coating liquid passes through the slit portion is increased so that the pressure in the manifold 7 is kept uniform, and the discharge flow rate of the coating liquid from the slit 6 is the width direction. This is to make the temperature uniform.

【0006】従って、このエクストル−ジョン型塗布ヘ
ッド1では微小なすき間部(スリット部)が内部構造の
重要な地位を占めているが、このような微小なすき間部
が存在するが故に、塗布液の交換等で塗布ヘッド内部を
洗浄する必要が生じた際の洗浄性が非常に悪いという問
題を有していた。つまり、塗布ヘッド内部の洗浄には、
塗布液の代わりに洗浄液を供給して内部に残留する塗布
液を洗い流す方法が一般的に採用されるが、微小なすき
間であるスリット部に付着した塗布液は洗浄液流によっ
ても容易に除去されず、これを速やかに洗い流すことは
実際には極めて難しいことであった。勿論、これはエク
ストル−ジョン型塗布ヘッドだけの問題ではなく、その
他の例えばスライド型塗布ヘッド等のような“スリット
ノズルを有した塗布ヘッド”に共通する問題でもあっ
た。
Therefore, in the extrusion-type coating head 1, the minute gaps (slits) occupy an important position in the internal structure. However, since such minute gaps are present, the coating liquid is present. However, there is a problem that the cleaning performance is very poor when it is necessary to clean the inside of the coating head due to replacement or the like. In other words, for cleaning the inside of the coating head,
A method of supplying a cleaning liquid instead of the coating liquid to wash away the coating liquid remaining inside is generally adopted, but the coating liquid adhering to the slit part, which is a minute gap, is not easily removed by the cleaning liquid flow. , It was actually extremely difficult to wash it off quickly. Of course, this is not only a problem of the extrusion type coating head, but also a problem common to other "coating heads having a slit nozzle" such as a slide type coating head.

【0007】もっとも、洗浄時の上記問題点を解消する
ためにスリット部を分割・解体してから洗浄を行うこと
も可能であり、実際にもこのような洗浄方法が採られる
ことも少なくなかったが、この場合には洗浄自体は容易
となるものの次のような別の問題が生じた。即ち、均一
な塗布を行うためには塗布ヘッド先端のスリットギャッ
プを均一に設定することが極めて重要であることは言う
までもないが、上述のようにスリット部を分割・解体し
て洗浄を行った場合には組み立て後のギャップ調整に非
常な時間と労力が必要となり、これが塗布作業能率の著
しい悪化につながるので実際的な洗浄手段とは言えなか
った。
However, in order to solve the above-mentioned problems during cleaning, it is possible to divide and disassemble the slit portion before cleaning, and in practice, such a cleaning method is often adopted. However, in this case, although the cleaning itself becomes easy, another problem as described below occurs. That is, it is needless to say that it is extremely important to set the slit gap at the tip of the coating head uniformly in order to perform uniform coating, but when the slit portion is divided and disassembled for cleaning as described above. However, it requires a great deal of time and labor to adjust the gap after assembly, which leads to a marked deterioration in the coating work efficiency, so it cannot be said to be a practical cleaning means.

【0008】このようなことから、本発明が目的とした
のは、エクストル−ジョン型塗布ヘッドを始めとする
“スリットノズルを有した塗布ヘッド”の内部を容易に
かつ効率良く洗浄できる手段を確立することであった。
In view of the above, the object of the present invention is to establish means for easily and efficiently cleaning the inside of an "application head having a slit nozzle" such as an extrusion type application head. Was to do.

【0009】[0009]

【課題を解決するための手段】そこで、本発明者等は上
記目的を達成すべく数多くの実験を繰り返しながら研究
を重ねた結果、次のような知見を得たのである。即ち、
塗布ヘッドを分割・解体することなしにその微小なすき
間部へ洗浄液を通過させる手段にて洗浄を行う場合、そ
の洗浄を効率的に行なわしめるためには洗浄液が塗布ヘ
ッド内の微小すき間を通過する際の液流乱れを大きくし
てやる必要がある。しかしながら、塗布ヘッドでは元々
スリットノズル部(微小間隙部)を通過する流体が層流
となるように設計されており、そのため洗浄時において
も洗浄液流の乱れの程度は非常に小さく、これが洗浄効
率悪化の大きな原因となっている。
Therefore, the inventors of the present invention have obtained the following findings as a result of repeated studies while repeating many experiments in order to achieve the above object. That is,
When cleaning is performed by means of passing the cleaning liquid to the minute gaps without dividing and disassembling the coating head, the cleaning liquid passes through the minute gaps in the coating head in order to perform the cleaning efficiently. It is necessary to increase the turbulence of the liquid flow. However, the coating head is originally designed so that the fluid passing through the slit nozzle portion (minute gap portion) becomes a laminar flow, and therefore the degree of turbulence of the cleaning liquid flow is extremely small even during cleaning, which deteriorates the cleaning efficiency. Is a major cause of

【0010】なお、洗浄液の流量を多少増加させても液
流乱れはそれほど顕著に増加しない上に、前述した如く
塗布ヘッド内は流通抵抗は大きくなるように設計されて
いることもあって洗浄液の流量を増大することすら困難
であった。
Even if the flow rate of the cleaning liquid is increased to some extent, the turbulence of the liquid flow does not significantly increase, and as described above, the flow resistance of the cleaning liquid in the coating head is designed to be large. Even increasing the flow rate was difficult.

【0011】ところが、塗布ヘッド内へ洗浄液を送り込
んで内部を洗浄する際に該洗浄液の中へ不活性な気体を
吹き込んでやると、洗浄液流が気泡流化し、この気泡に
よる攪拌効果によって洗浄液流の“乱流の程度”が著し
く増加する。そして、この結果、塗布ヘッド内部の洗浄
性が飛躍的に向上し、微小なすき間部(スリット部)等
に付着している残留塗布液の速やかな洗い流しが可能と
なることが明らかとなった。
However, when an inert gas is blown into the cleaning liquid when the cleaning liquid is fed into the coating head to clean the inside, the cleaning liquid flow becomes a bubbling flow, and the agitation effect of the bubbles causes the cleaning liquid flow to flow. The "degree of turbulence" increases significantly. As a result, it has been clarified that the cleaning property inside the coating head is remarkably improved, and the residual coating liquid adhering to the minute gaps (slits) and the like can be quickly washed away.

【0012】本発明は、上記知見事項等を基に完成され
たものであり、「“スリットノズルから塗布液を吐出さ
せつつ塗布を行う形式の塗布ヘッド”の内部を洗浄する
に際して、 該塗布ヘッドにつながる塗布液供給管から塗
布ヘッド内へ洗浄液を供給すると共に、 この塗布液供給
管を通過する洗浄液内に不活性ガスを吹き込み、 これら
洗浄液と不活性ガスとの混合液をスリットノズルから排
出させることによって、 スリットノズルを有した塗布ヘ
ッド内部を高い洗浄効率で速やかに洗浄できるようにし
た点」に大きな特徴を有している。なお、洗浄液内に吹
き込む不活性ガスとしてはN2 ガス,Arガス等の何れで
あっても良い。
The present invention has been completed on the basis of the above-mentioned findings and the like. When cleaning the inside of a "coating head of the type that performs coating while discharging a coating solution from a slit nozzle", The cleaning liquid is supplied into the coating head from the coating liquid supply pipe connected to, and an inert gas is blown into the cleaning liquid passing through the coating liquid supply pipe to discharge the mixed liquid of the cleaning liquid and the inert gas from the slit nozzle. By doing so, the inside of the coating head having the slit nozzle can be quickly cleaned with high cleaning efficiency. " The inert gas blown into the cleaning liquid may be N 2 gas, Ar gas, or the like.

【0013】[0013]

【作用】さて、先にも述べたように、洗浄液で微小なす
き間部を洗浄する際の洗浄効率を高めるためには“洗浄
液が前記微小すき間部を通過する際の液流乱れ”を大き
くする必要があるが、この“流体の流れにおける乱れの
程度”は、一般的には次式で算出されるレイノルズ数R
e で表される。
As described above, in order to enhance the cleaning efficiency when cleaning the minute gaps with the cleaning liquid, "the turbulence of the liquid flow when the cleaning liquid passes through the minute gaps" is increased. Although it is necessary, this “degree of turbulence in the fluid flow” is generally calculated by the following formula, Reynolds number R
Represented by e.

【0014】ここで、塗布ヘッドの場合には上記式にお
ける「代表長さ」はスリット部の微小間隙(スリットギ
ャップ)となるため、レイノルズ数Re を増加させる手
立ては、洗浄液を変更しない限りその流速を高めるしか
ない。しかし、塗布ヘッドでは、スリットノズル幅方向
での塗布液吐出量の均一性を高めるために液体の流通抵
抗が大きくなるように設計されており、従って洗浄液の
流量を多くしてその流速を顕著に増加させることはほぼ
無理な構造となっている。
Here, in the case of the coating head, the "representative length" in the above formula is a minute gap (slit gap) in the slit portion, so the means for increasing the Reynolds number Re is the flow velocity unless the cleaning liquid is changed. There is no choice but to raise. However, the coating head is designed to have a large flow resistance of the liquid in order to increase the uniformity of the amount of the coating liquid discharged in the width direction of the slit nozzle. Therefore, the flow rate of the cleaning liquid is increased to make the flow velocity remarkable. It is almost impossible to increase.

【0015】そこで、本発明では、図1に例示するよう
に、例えば塗布ヘッド1につながる塗布液供給管4にガ
ス吹き込みパイプ8等を連結し、このガス吹き込みパイ
プ8を通じて洗浄液中へN2 ガスやArガス等の不活性ガ
スを吹き込む手立てを採用する。この不活性ガスの吹き
込みは、塗布ヘッド1内へ供給される洗浄液流を“不活
性ガスの気泡を含む混合流”とするので、含まれる気泡
が前記レイノルズ数Reとは直接的に係わりなく混合流
の流れを乱流化させる。そのため、通常では層流となる
スリットノズル部においても気泡を含む洗浄液の乱流が
通過することとなり、スリットノズル部内壁の洗浄性は
著しく向上して“洗浄時間の大幅な短縮”や“残留塗布
液のより完全な洗浄”が達成される。
Therefore, in the present invention, as illustrated in FIG. 1, for example, a gas blowing pipe 8 is connected to the coating liquid supply pipe 4 connected to the coating head 1, and N 2 gas is introduced into the cleaning liquid through the gas blowing pipe 8. Adopting a method of blowing an inert gas such as Ar gas. The blowing of the inert gas causes the cleaning liquid flow supplied into the coating head 1 to be a “mixed flow containing bubbles of the inert gas”, and thus the contained bubbles are mixed directly with the Reynolds number Re. Makes the flow turbulent. Therefore, the turbulent flow of the cleaning liquid containing air bubbles also passes through the slit nozzle, which is normally a laminar flow, which significantly improves the cleaning performance of the inner wall of the slit nozzle, resulting in a “significant reduction in cleaning time” and “residual application A more thorough cleaning of the liquid is achieved.

【0016】[0016]

【実施例】この例では、塗装鋼板の塗装に使用する前記
図1に示す構造のエクストル−ジョン型塗布ヘッド1
(スリットギャップL1: 0.5mm, スリット幅L2: 1000m
m )を使用し、塗料替えに際しての内部の洗浄試験を行
った。なお、塗料替えの前まで使用していた塗料の性状
は下記の通りであった。 密度:1.4g/cm3, 表面張力:30dyn/cm, 不揮発成分:65wt%, 粘度:314cp 。 そして、塗料替えに際して使用した洗浄液は下記の性状
を有していた。 密度:0.81g/cm3, 表面張力:26.9dyn/cm, 沸点:79.6℃(大気圧), 粘度:0.42 cp 。
EXAMPLE In this example, an extrusion type coating head 1 having the structure shown in FIG. 1 used for coating a coated steel sheet.
(Slit gap L 1 : 0.5 mm, slit width L 2 : 1000 m
m) was used to perform an internal cleaning test when changing paints. The properties of the paint used before the change of paint were as follows. Density: 1.4 g / cm 3 , surface tension: 30 dyn / cm, nonvolatile component: 65 wt%, viscosity: 314 cp. The cleaning liquid used for changing the paint had the following properties. Density: 0.81g / cm 3 , surface tension: 26.9dyn / cm, boiling point: 79.6 ° C (atmospheric pressure), viscosity: 0.42 cp.

【0017】塗布ヘッド内部の洗浄は、塗布液供給管4
から 3.0 l/minの流量で洗浄液を供給すると共に、ガス
吹き込みパイプ8より 1.0 Nl/min の吹き込み量でこの
洗浄液中にN2 ガス(不活性ガス)を吹き込みながら、
これら洗浄液と不活性ガスとの混合液をスリット6から
排出させる手法によった。
The inside of the coating head is cleaned by the coating liquid supply pipe 4
While supplying the cleaning liquid at a flow rate of 3.0 l / min from the gas injection pipe 8 while blowing N 2 gas (inert gas) into the cleaning liquid at a rate of 1.0 Nl / min,
A method of discharging the mixed liquid of the cleaning liquid and the inert gas from the slit 6 was used.

【0018】この時の“排出された洗浄液中の塗料濃
度”の時間変化を図2に示す。また、比較のため、不活
性ガスの吹き込みを行わずに洗浄液のみで洗浄した場合
の調査結果も図2に併記した。図2に示される調査結果
からも、洗浄液中に不活性ガス(N2 ガス)を吹き込む
ことにより洗浄時間が大幅に短縮されることが確認でき
る。
FIG. 2 shows the time variation of the "paint concentration in the discharged cleaning liquid" at this time. Further, for comparison, the results of the investigation in the case of cleaning with only the cleaning liquid without blowing the inert gas are also shown in FIG. From the survey results shown in FIG. 2, it can be confirmed that the cleaning time is significantly shortened by blowing an inert gas (N 2 gas) into the cleaning liquid.

【0019】[0019]

【効果の総括】以上に説明した如く、この発明によれ
ば、“微小間隙のスリットノズル部を有した塗布ヘッ
ド”を分解することなしに、しかも短時間で効率的に洗
浄することが可能となるなど、産業上有用な効果がもた
らされる。
[Summary of Effects] As described above, according to the present invention, it is possible to perform efficient cleaning in a short time without disassembling the "application head having a slit nozzle portion with a minute gap". It brings about useful effects in industry.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明法を実施するためのエクストル−ジョン
型塗布ヘッドの1例に係る概要説明図である。
FIG. 1 is a schematic explanatory diagram relating to an example of an extrusion-type coating head for carrying out the method of the present invention.

【図2】塗布ヘッド内を通過して排出された洗浄液中の
塗料濃度の時間変化を示したグラフである。
FIG. 2 is a graph showing the change over time in the concentration of paint in the cleaning liquid discharged through the coating head.

【図3】エクストル−ジョン型塗布ヘッドを使った塗装
法の1例に係る概要説明図である。
FIG. 3 is a schematic explanatory diagram related to an example of a coating method using an extrusion-type coating head.

【図4】図3に示したエクストル−ジョン型塗布ヘッド
の内部構造を示す断面概要図である。
4 is a schematic cross-sectional view showing the internal structure of the extrusion-type coating head shown in FIG.

【符号の説明】[Explanation of symbols]

1 エクストル−ジョン型塗布ヘッド 2 バッキングロ−ル 3 帯状被塗工材 4 塗布液供給管 5 塗膜 6 スリット 7 マニホ−ルド 8 ガス吹き込みパイプ DESCRIPTION OF SYMBOLS 1 Extrusion type coating head 2 Backing roll 3 Band-shaped coating material 4 Coating liquid supply pipe 5 Coating film 6 Slit 7 Manifold 8 Gas blowing pipe

───────────────────────────────────────────────────── フロントページの続き (72)発明者 板野 重夫 広島県広島市西区観音新町四丁目6番22号 三菱重工業株式会社広島研究所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Shigeo Itano 4-6-22 Kannon Shinmachi, Nishi-ku, Hiroshima City, Hiroshima Prefecture Mitsubishi Heavy Industries Ltd. Hiroshima Research Laboratory

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 “スリットノズルから塗布液を吐出させ
つつ塗布を行う形式の塗布ヘッド”の内部を洗浄するに
際して、該塗布ヘッドにつながる塗布液供給管から塗布
ヘッド内へ洗浄液を供給すると共に、この塗布液供給管
を通過する洗浄液内に不活性ガスを吹き込み、これら洗
浄液と不活性ガスとの混合液をスリットノズルから排出
させることを特徴とする、スリットノズルを有した塗布
ヘッドの洗浄方法。
1. When cleaning the inside of a "coating head of the type that performs coating while discharging the coating solution from a slit nozzle", while supplying the cleaning solution into the coating head from a coating solution supply pipe connected to the coating head, A method for cleaning a coating head having a slit nozzle, comprising injecting an inert gas into the cleaning liquid passing through the coating liquid supply pipe, and discharging a mixed liquid of the cleaning liquid and the inert gas from a slit nozzle.
JP30344293A 1993-11-09 1993-11-09 Washing method for coating applying head having slit nozzle Withdrawn JPH07132267A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30344293A JPH07132267A (en) 1993-11-09 1993-11-09 Washing method for coating applying head having slit nozzle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30344293A JPH07132267A (en) 1993-11-09 1993-11-09 Washing method for coating applying head having slit nozzle

Publications (1)

Publication Number Publication Date
JPH07132267A true JPH07132267A (en) 1995-05-23

Family

ID=17921050

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30344293A Withdrawn JPH07132267A (en) 1993-11-09 1993-11-09 Washing method for coating applying head having slit nozzle

Country Status (1)

Country Link
JP (1) JPH07132267A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005131637A (en) * 2003-10-09 2005-05-26 Toppan Printing Co Ltd Coating apparatus having cleaning mechanism
JP2006075691A (en) * 2004-09-08 2006-03-23 Toppan Printing Co Ltd Coating apparatus having washing mechanism and washing method
WO2007111055A1 (en) * 2006-03-24 2007-10-04 Tokyo Ohka Kogyo Co., Ltd. Method of washing slit nozzle
KR100803148B1 (en) * 2007-03-16 2008-02-14 세메스 주식회사 Chemical solution knife
JP2008110310A (en) * 2006-10-31 2008-05-15 Toppan Printing Co Ltd Coating apparatus and die head cleaning method
JP2010250157A (en) * 2009-04-17 2010-11-04 Toppan Printing Co Ltd Slit coater

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005131637A (en) * 2003-10-09 2005-05-26 Toppan Printing Co Ltd Coating apparatus having cleaning mechanism
JP2006075691A (en) * 2004-09-08 2006-03-23 Toppan Printing Co Ltd Coating apparatus having washing mechanism and washing method
WO2007111055A1 (en) * 2006-03-24 2007-10-04 Tokyo Ohka Kogyo Co., Ltd. Method of washing slit nozzle
JP2008110310A (en) * 2006-10-31 2008-05-15 Toppan Printing Co Ltd Coating apparatus and die head cleaning method
KR100803148B1 (en) * 2007-03-16 2008-02-14 세메스 주식회사 Chemical solution knife
JP2010250157A (en) * 2009-04-17 2010-11-04 Toppan Printing Co Ltd Slit coater

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