JPH07122051A - Hermeticity measuring machine - Google Patents

Abstract

PURPOSE:To eliminate the need for a hole for measuring hermeticitiy, to reduce the cost of production and to enable measurement even with a small-sized electronic device. CONSTITUTION:This hermeticitiy measuring machine has a first hermetic vessel 10, a compressor 13 for changing the air pressure in the hermetic vessel 10, a first valve 14 capable of communicating the compressor 12 and the hermetic vessel 10, a pressure gage 16 for measuring the air pressure in the hermetic vessel 10, a second hermetic vessel 20 housing a measuring object 18 therein and a second valve 22 capable of communicating the hermetic vessel 20 and the hermetic vessel 10.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sealing degree measuring machine,
Specifically, the present invention relates to a sealing degree measuring device suitable for measuring the sealing degree of a small electronic device.

[0002]

2. Description of the Related Art Conventionally, this type of hermeticity measuring machine has been used, for example, for selecting defective products of a magnetic disk device which requires airtightness inside. Then, a hole for measuring the degree of sealing is provided in the magnetic disk device, and a predetermined pressure is applied from the hole to measure a pressure change caused by a leak in a certain time.

[0003]

This conventional sealing degree measuring machine has the following problems.

An extra cost is required to provide the holes for measuring the degree of sealing.

In a small electronic device, a measurement hole cannot be provided, and the degree of sealing cannot be measured.

[0006]

SUMMARY OF THE INVENTION Therefore, a hole for measuring the degree of sealing is unnecessary,
An object of the present invention is to provide a hermeticity measuring machine which can reduce the manufacturing cost and can measure even a small electronic device.

[0007]

[Means for Solving the Problems] A sealing degree measuring machine according to the present invention is made to achieve the above object,
A first closed container; a compressor for changing the atmospheric pressure in the first closed container; a first valve that allows the compressor and the first closed container to communicate with each other;
A pressure gauge for measuring the atmospheric pressure in the closed container, a second closed container for accommodating an object to be measured, and a second closed container for allowing communication between the second closed container and the first closed container. It is equipped with a valve.

Further, a pressure gauge for measuring the atmospheric pressure in the second closed container may be provided.

[0009]

The first valve is opened to connect the compressor to the first closed container. Subsequently, the air pressure inside the first closed container is changed by the compressor. While measuring the atmospheric pressure in the first closed container with a pressure gauge, when the atmospheric pressure in the first closed container reaches a certain value, the first valve is closed to establish communication between the compressor and the first closed container. To release.
Next, the second valve is opened so that the second closed container having the measurement object housed therein and the first closed container are in communication with each other.
Then, the atmospheric pressure in the first closed container instantly becomes equal to the atmospheric pressure in the second closed container. This causes a difference between the atmospheric pressure inside the object to be measured and the atmospheric pressure inside the first and second closed containers. After that, a leak occurs due to the degree of sealing inside the measurement object, and the atmospheric pressure inside the first and second sealed containers changes. By grasping this change with a pressure gauge, the degree of sealing of the measurement object is measured.

If a pressure gauge for measuring the atmospheric pressure in the second closed container is provided, the second valve is opened to equalize the atmospheric pressures in the first and second closed containers before the second Close the valve. Thereby, the influence of the atmospheric pressure due to the leak is limited to the inside of the second closed container.

[0011]

FIG. 1 is a schematic sectional view showing an embodiment of the sealing degree measuring machine according to claim 1. Hereinafter, description will be given with reference to this drawing.

The hermeticity measuring machine according to the first aspect of the present invention is such that the first hermetic container 10, the compressor 12 for changing the air pressure in the hermetic container 10, and the first hermetic container 10 for making the compressor 12 and the hermetic container 10 communicate with each other. The valve 14, the pressure gauge 16 for measuring the atmospheric pressure in the closed container 10, the second closed container 20 for containing the measurement object 18 therein, and the second closed container 20 for allowing the closed container 10 and the closed container 10 to communicate with each other. And a valve 22 of.

That is, the compressor 12 has a valve 14
The closed container 10 is connected to the closed container 20 via a valve 22, and the closed container 10 is connected to the closed container 20 via a valve 22. Also,
The closed container 20 is provided with a lid 20 a for containing the measurement object 18.

Next, the operation of the sealing degree measuring machine of FIG. 1 will be described.

First, the object to be measured 18 is placed in a closed container 20 and sealed so that air does not leak. Subsequently, with the valve 22 closed and the valve 14 opened, the pressure in the closed container 10 is increased or decreased by the compressor 12 to be changed to a predetermined value. And the closed container 10
After confirming with the pressure gauge 16 that the inside has reached the predetermined pressure,
Close valve 14. Next, when the valve 22 is opened, the internal pressures of the closed container 20 and the closed container 10 instantly reach a value determined by the internal volume and pressure of the respective containers and the volume of the measuring object 18. Then, since a pressure difference occurs between the inside of the measuring object 18 and the inside of the closed container 20, the measuring object 1 gradually increases depending on the degree of sealing of the measuring object 18.
Leak occurs within 8. Closed container 20 due to this leak
And the pressure change in the closed container 10 is measured by the pressure gauge 16,
The pressure is measured when the pressure reaches a predetermined pressure or after a lapse of a predetermined time.

FIG. 2 is a schematic sectional view showing an embodiment of the sealing degree measuring machine according to the present invention. Hereinafter, description will be given with reference to this drawing. However, the same parts as those in FIG.

In the sealing degree measuring machine according to the second aspect, a pressure gauge 24 for measuring the atmospheric pressure in the closed container 20 is provided. When a pressure leak occurs from the measuring object 18,
If the volume in which the measurement target 18 is sealed is large, there is a problem that the influence of the leak on the pressure change becomes small. Therefore, the valve 22 is opened and the closed container 2 is opened.
After the internal pressures of 0 and the closed container 10 become equal,
Close the valve 22. As a result, the pressure change due to the leak is limited to the closed container 20, so that the pressure change can be measured with the pressure gauge 24, which enables more precise measurement.

[0018]

As described above, according to the sealing degree measuring machine of the present invention, the sealing degree is measured by changing the pressure of the measurement environment, not by changing the pressure inside the object to be measured. Therefore, the hole for measuring the degree of sealing can be eliminated. Therefore, the cost associated with providing the hole for measuring the degree of sealing can be eliminated, and the degree of sealing of a microminiature magnetic disk device or the like in which no hole can be provided can be measured.

[Brief description of drawings]

FIG. 1 is a schematic sectional view showing an embodiment of a sealing degree measuring machine according to claim 1.

FIG. 2 is a schematic sectional view showing an embodiment of the sealing degree measuring machine according to claim 2;

[Explanation of symbols]

 10 1st airtight container 12 Compressor 14 1st valve 16 Pressure gauge (1st pressure gauge) 18 Measurement object 20 2nd airtight container 22 2nd valve 24 2nd pressure gauge

Claims (2)

[Claims] 1. A first closed container, a compressor for changing the atmospheric pressure in the first closed container, a first valve for allowing the compressor and the first closed container to communicate with each other, and A pressure gauge for measuring the atmospheric pressure in the first closed container, a second closed container for accommodating an object to be measured, and a second closed container for allowing communication between the second closed container and the first closed container. A sealing degree measuring machine, which is equipped with a valve. 2. A first closed container, a compressor for changing the atmospheric pressure in the first closed container, a first valve for allowing the compressor and the first closed container to communicate with each other, and A first pressure gauge for measuring the atmospheric pressure in the first closed container, a second closed container for accommodating an object to be measured, and a communication between the second closed container and the first closed container. And a second pressure gauge for measuring the atmospheric pressure in the second closed container.