JPH07115054A - Moving stage device - Google Patents

Abstract

PURPOSE:To accelerate realization of high speed for positioning by preventing rotation vibration of a stand. CONSTITUTION:A Y stage reciprocally moves in Y axis direction by a Y driving cylinder 3 on a base 1, and an X stage 4 reciprocally moves by an X drive cylinder 5 along X guide members 2a, 2b on a guide surface 2c of the Y stage 2. Movement of the X stage 4 is detected by an X position sensor 8 and fed back to the X cylinder 5. The X position sensor 8 is provided on the same side as a drive device of the X drive cylinder 5 with respect to a plane parallel to the guide surface 2c of the Y stage 2 passing through a center of gravity of the X stage 4 and a plane parallel to a guide surface of the X guide members 2a, 2b passing through a center of gravity.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a moving stage apparatus used in semiconductor exposure apparatuses, various precision processing machines, various precision measuring instruments and the like.

[0002]

2. Description of the Related Art In an exposure apparatus, various precision processing machines or various precision measuring instruments used in semiconductor manufacturing, it is required to position a substrate such as a wafer to be exposed, an object to be processed or an object to be measured with high accuracy. In addition, in recent years, it has been desired to speed up positioning for improving throughput. FIG. 9 shows a conventional example of a moving stage device used in an exposure apparatus, which includes a base 101 having a horizontal guide surface 101a and a pair of Y guide members 101b and 101c which are integral with the base 101. A Y stage 102 that is reciprocally movable in one of two axes (hereinafter, referred to as “Y axis”) orthogonal to each other in a horizontal plane, a Y drive cylinder 103 that moves the Y stage 102 in the Y axis direction, and a Y stage 102. A pair of X guide members 102a, 10 that are integrated
An X stage 104 that can reciprocate in the direction of the other of the two axes (hereinafter referred to as the "X axis") along 2b.
And an X drive cylinder 105 that moves this in the X-axis direction
And a holding plate 106 provided on the surface of the X stage 104.
The holding plate 106 is made of a wafer W by vacuum suction force.
_{Adsorb 0} .

The Y stage 102 is supported by a static pressure bearing device (not shown) on the guide surface 101a of the base 101 and the Y guide members 101b and 101c in a non-contact manner. Similarly, the X stage 104 is also supported by a static pressure bearing device (not shown). The guide surface 102c of the stage 102 and the X guide members 102a and 102b are supported in a non-contact manner.

The holding board 106 comprises an X mirror 106a extending in the Y-axis direction and a Y mirror 106b extending in the X-axis direction, and the holding board 1 is reflected by the reflected light from the X mirror 106a.
An X interferometer 107a for detecting the position of 06 in the X-axis direction,
Each output of the Y interferometer 107b that detects the position of the holding plate 106 in the Y-axis direction by the reflected light of the Y mirror 106b is fed back to each control device of the X drive cylinder 105 and the Y drive cylinder 103 as a monitor signal. .

That is, the Y drive cylinder 103 and the X drive cylinder 105 are respectively driven based on a command signal sent from a command line (not shown), and when the holding plate 106 moves by this, the movement amount of the holding plate 106 is changed by the X interference. The total amount is monitored by the total 107a and the Y interferometer 107b, the drive amounts of the X drive cylinder 105 and the Y drive cylinder 103 are controlled based on these outputs, and the holding plate 106 is positioned.

In the above moving stage apparatus, it is necessary to design so that the driving force in the X-axis direction by the X driving cylinder 105 acts on the center of gravity of the X stage 104. The reason is that if the center of gravity of the X stage 104 deviates from the action axis of the driving force of the X drive cylinder 105, the X stage 10
When the X stage 104 is tilted due to the rotation moment generated in No. 4, an imbalance (local increase / decrease) occurs in the preload of the above-mentioned hydrostatic bearing device, which causes rotational vibration in the X stage 104. Is. Such rotational vibration becomes a big obstacle especially when speeding up positioning. Further, for the same reason, the driving force in the Y-axis direction generated by the Y driving cylinder 103 is applied to the X stage 104.
It is necessary to design it so as to act on the center of gravity of the entire Y stage 102 including the holding board 106.

[0007]

However, according to the above-mentioned conventional technique, if the driving force in the X-axis direction by the X-driving cylinder acts on the center of gravity of the X-stage as described above, The mounting position and the disposition position of the connecting portion of the rod with respect to the X stage are significantly restricted, which makes it difficult to design the entire moving stage device and increases the manufacturing cost of the moving stage device. The same applies to the Y drive cylinder. Further, it is not easy to accurately determine the center of gravity of the X stage and the Y stage at the design stage. Further, when the rotational vibration as described above occurs in the X stage, as shown in FIG. 8, the detection position of the monitor signal by the X mirror 106a, that is, the reflection point of the X mirror 106a is the driving force F _x of the X driving cylinder 105. If it is arranged in a position that moves in the opposite direction, the X interferometer 107a
The rotation vibration is enhanced by the feedback of the monitor signal due to, and the rotation vibration of the X stage 104 may be further increased. The same applies to the Y stage.

The present invention has been made in view of the above problems of the prior art, in which the driving force of a driving device such as an X driving cylinder or a Y driving cylinder is applied to a moving table such as an X stage or a Y stage. It is an object of the present invention to provide a moving stage device that can avoid generation of large rotational vibrations on a moving table even if it is not designed to act on the center of gravity.

[0009]

In order to achieve the above object, the moving stage device of the present invention is a moving stage supported by a static pressure bearing means in a non-contact manner on a guide surface, and the moving stage is provided with the guide surface. Drive means for moving in a predetermined axial direction along with, detection means for detecting the amount of movement of the moving table, and control means for controlling the drive means based on the output thereof,
The detection means is configured to detect the amount of movement of the movable table on the same side as the axis of action of the driving force of the driving means with respect to a plane that passes through the center of gravity of the movable table and is parallel to the guide surface. It is characterized by being

[0010]

According to the above apparatus, since the detecting means detects the moving amount of the moving table on the same side as the axis of action of the driving force of the driving means with respect to the plane passing through the center of gravity of the moving table and parallel to the guide surface, The direction of the movement amount detected by the detection means is the same as the driving force. When the action axis of the driving force is deviated from the center of gravity of the moving table, a rotational moment is generated, which causes the moving table to tilt, causing an imbalance in the preload of the hydrostatic bearing means and causing the rotational vibration of the moving table. Although there is a tendency, at this time, the rotational vibration can be rapidly attenuated by detecting the amount of movement of the movable table by the detecting means and negatively feeding back the output thereof to the driving means. Therefore, even if the axis of action of the driving force is deviated from the center of gravity of the moving table, there is no possibility of generating large rotational vibration.

[0011]

Embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a perspective view showing a first embodiment,
The moving stage device E-1 of the present embodiment has a horizontal guide surface 1
One of the two axes orthogonal to each other in the horizontal plane along the guide surface of the base 1 having a and the pair of Y guide members 1b and 1c that are the second guide surfaces integrally provided with the base 1 (hereinafter,
It is called "Y-axis". ), A Y stage 2 that is a movable table that is reciprocally movable, a Y drive cylinder 3 that is a drive unit that moves the Y stage 2 in the Y axis direction, and a second guide integrally provided with the Y stage 2. The guide surface 2c of the Y stage 2 along the guide surfaces of the pair of X guide members 2a and 2b, which are the surfaces.
An X stage 4, which is a movable table, which is reciprocally movable in the other direction of the two axes (hereinafter, referred to as "X axis"), and an X drive cylinder 5 which is a drive unit for moving the X stage in the X axis direction. And a holding plate 6 supported by the X stage. The holding plate 6 sucks the wafer W ₁ by a vacuum suction force. The guide surface of each Y guide member 1b, 1c and the guide surface of each X guide member 2a, 2b are perpendicular to the guide surface 1a of the base 1, and the guide surface 2c of the Y stage 2 is parallel to this.

The Y stage 2 has a guide surface 1a of the base 1 and each Y guide member 1 by means of static pressure bearing means (not shown).
b and 1c are respectively supported in a non-contact manner on the guide surfaces, and similarly, the X stage 4 is also supported by a static pressure bearing means (not shown) in the Y direction.
The guide surface 2c of the stage 2 and the guide surfaces of the X guide members 2a and 2b are supported in a non-contact manner.

The base 1 is a Y scale 1 extending in the Y axis direction.
The Y position sensor 7, which has d and is a detection means attached to the Y stage 2, slides on the Y scale 1d to detect the amount of movement of the Y stage 2 in the Y axis direction. Further, the Y stage 2 has an X scale 2d extending in the X axis direction, and the X position sensor 8 which is a detection means attached to the X stage 4 is
The amount of movement of the X stage 4 in the X axis direction is detected by sliding on the X scale 2d.

The mounting position of the X position sensor 8 on the X stage 4 is, as shown in FIG. 2, the center of gravity G ₁ of the X stage 4.
To a plane parallel to the guide surface 2c of the Y stage 2 (XY plane) and a plane parallel to the guide surface of the X guide members 2a and 2b (XZ plane) that passes through the center of gravity G ₁ of the X stage 4. It is provided on the same side as the axis of action of the driving force F _x of the X drive cylinder 5. The output of the X position sensor 8 is fed back (negative feedback) to the control device which is the control means of the X drive cylinder 5 to control the X drive cylinder 5. Even if a rotational moment about the Z axis is generated in the X stage 4 due to the imbalance of the preload of the hydrostatic bearing means,
Since the X position sensor 8 is on the same side of the XZ plane as the acting axis of the driving force F _x of the X drive cylinder 5 as shown in Fig. 5, the movement amount of the X stage 4 detected by the X position sensor 8 is X. In the same direction as the driving force of the drive cylinder 5,
Therefore, if the output of the X position sensor 8 is fed back to control the X drive cylinder 5, the rotational vibration due to the rotation moment can be attenuated by the drive force F _x of the X drive cylinder 5. Even when a rotational moment about the Y axis is generated in the X stage 4, the X position sensor 8 causes the driving force F _{x of the} X driving cylinder 5 with respect to the XY plane as described above.
Since it is on the same side as the action axis of, the rotational vibration can be damped by feeding back the output of the X position sensor 8. That is, even if the center of gravity G ₁ of the X stage 4 is deviated from the axis of action of the driving force F _x of the X driving cylinder 5, if the X position sensor 8 for generating the monitor signal is attached at the above position, a large rotation is generated. There is no risk of vibration.

Further, as shown in FIG. 4, the mounting position of the Y position sensor 7 with respect to the Y stage 2 is also a plane (XY which passes through the center of gravity G ₂ of the Y stage 2 and is parallel to the guide surface 1a of the base 1).
And a plane (YZ plane) that passes through the center of gravity G ₂ of the Y stage 2 and is parallel to the guide surfaces of the Y guide members 1b and 1c, and is provided on the same side as the action axis of the driving force F _y of the Y drive cylinder 3. To be The output of the Y position sensor 7 is used as the Y drive cylinder 3
By feeding back to the control device, which is the control means, the rotational vibration of the Y stage 2 can be prevented as described above.

According to this embodiment, the rotational vibration of the X stage and the Y stage can be prevented only by limiting the mounting position of the position sensor as described above, so that the center of gravity of both stages moves the driving force. Need not be on the axis of action of. Therefore, the design of the moving stage device does not become complicated due to the vibration isolation, and as a result, it is possible to realize the moving stage device which can accelerate the positioning speed and have a low manufacturing cost.

FIG. 5 shows a second embodiment. The moving stage device E-2 of this embodiment is different from the Y scale 1d and the Y position sensor 7 of the first embodiment in that the rod of the Y drive cylinder 3 is used. A Y mirror 11d and a Y interferometer 17 that receives the reflected light are used coaxially with the X scale 2d and the X position sensor 8 of the first embodiment. X mirror 1 provided above
2d and an X interferometer 18 for receiving the reflected light thereof are used. Base 1, Y stage 2, Y drive cylinder 3,
The X stage 4, the X drive cylinder 5, the holding plate 6 and the like are the same as those in the first embodiment, and are therefore denoted by the same reference numerals and the description thereof will be omitted. A part of the reflected light received by the X interferometer 18 is irradiated on the reference mirror 19 fixed to the base 1, and is reflected toward the X interferometer 18 again. As a result, Y for the Y guide members 1b and 1c
It is possible to monitor the displacement of the stage 2 in the X-axis direction. Further, the holding board 6 has an L-shaped mirror 16 integrated with the holding board 6, and the laser beam reflected by the L-shaped mirror 16 is detected by an interferometer (not shown) to directly monitor the final position of the holding board 6. be able to. In this embodiment, since the Y mirror 11d and the X mirror 12d are arranged on the action axes of the driving forces of the Y drive cylinder 3 and the X drive cylinder 5, respectively, a more accurate monitor signal can be fed back. Since the other points are the same as those in the first embodiment, the description thereof will be omitted.

FIG. 6 shows a modification of the second embodiment, in which a holding plate 26 similar to the holding plates 6 of the first and second embodiments is provided with a tilt mechanism 26 for finely adjusting the tilt angle.
In addition, the X tilt interferometer 28 and the Y tilt interferometer monitor the tilt angle of the holding plate 26 after the fine adjustment by the tilt mechanism 26a by the laser light reflected by the L-shaped mirror 36 integrated with the holding plate 26. 27 is provided,
As shown in FIG. 7, the outputs of both of them are configured to be fed back to the control devices C ₁ and C ₂ which are the control means of the X drive cylinder 5 and the Y drive cylinder 3, respectively. The control circuit of FIG. 7 sends a predetermined command signal to the control device C.
Command line D sent to ₁ or C ₂ and X interferometer 18
Alternatively, the first feedback line L ₁ for negatively feeding back the output of the Y interferometer 17 and the output of the X tilt interferometer 28 or the Y tilt interferometer 27 may be used as the first feedback line L _1.
The second feed bag line L that feeds back negatively to the upstream side
₂ consists of X drive cylinder 5 and Y drive cylinder 3
Respectively move the X stage 4 and the Y stage 2 based on the command signal and the monitor signals negatively fed back by the first and second feedback lines L ₁ and L ₂ .

[0020]

Since the present invention is configured as described above, it has the following effects.

Even if the driving force of the driving device such as the X driving cylinder or the Y driving cylinder is not designed to act on the center of gravity of the moving stage such as the X stage or the Y stage, a large rotational vibration occurs in the moving stage. Can be avoided. As a result, it is possible to realize a moving stage device that is suitable for high-speed positioning, has a simple design, and is inexpensive to manufacture.

[Brief description of drawings]

FIG. 1 is a perspective view showing a first embodiment.

FIG. 2 is an explanatory diagram illustrating a relationship between an action axis of a driving force by an X drive cylinder, a center of gravity of an X stage, and an X position sensor according to the first embodiment.

FIG. 3 is an explanatory diagram illustrating a state in which a rotational moment is generated on the X stage.

FIG. 4 is an explanatory diagram illustrating a relationship between an acting axis of a driving force by a Y driving cylinder, a center of gravity of a Y stage, and a Y position sensor according to the first embodiment.

FIG. 5 is a perspective view showing a second embodiment.

FIG. 6 is a perspective view showing a modification of the second embodiment.

7 is an explanatory diagram illustrating a control circuit of the device in FIG.

FIG. 8 is an explanatory diagram illustrating a state in which a rotational moment is generated in the X stage in the conventional example.

FIG. 9 is a perspective view showing a conventional example.

[Explanation of symbols]

 1 Base 1d Y Scale 2 Y Stage 2d X Scale 3 Y Drive Cylinder 4 X Stage 5 X Drive Cylinder 6,26 Holding Board 7 Y Position Sensor 8 X Position Sensor 11d Y Mirror 12d X Mirror 17 Y Interferometer 18 X Interferometer

Claims (4)

[Claims] 1. A movable table supported by a hydrostatic bearing means in a non-contact manner on a guide surface, a driving means for moving the movable table in a predetermined axial direction along the guide surface, and a movement amount of the movable table. And a control means for controlling the driving means on the basis of the output thereof, the detection means driving the driving means with respect to a plane passing through the center of gravity of the movable table and parallel to the guide surface. The moving stage apparatus is configured to detect the moving amount of the moving table on the same side as the action axis of the driving force of the moving stage. 2. The moving table is supported by the second hydrostatic bearing means on the second guide surface in a non-contact manner, and the detecting means is
It is configured to detect the amount of movement of the movable table on the same side as the working axis of the driving means with respect to a second plane that passes through the center of gravity of the movable table and is parallel to the second guide surface. The movable stage apparatus according to claim 1, wherein the movable stage apparatus is a movable stage apparatus. 3. The moving stage apparatus according to claim 1, wherein the detecting means has a position sensor provided on or near the action axis of the driving force. 4. The movement according to claim 1, wherein the detection means has a mirror provided on or near the axis of action of the driving force, and an interferometer for receiving the reflected light thereof. Stage device.