JPH0711478Y2 - Gas laser tube - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial application] The present invention relates to a gas laser tube.

[Conventional technology]

 An example of the prior art is shown in FIG. 4 and FIG.

In FIGS. 4 and 5, reference numerals 1A and 1B are a pair of optical resonator mirrors forming an optical resonator, and 2A and 2B are optical resonator mirrors 1A.
.Metal support parts for holding and fixing 1B respectively, 3A
3B is a metal enclosure plate brazed to the metal support parts 2A and 2B and joined to both ends of the glass bulb 7. 4 is a metal exhaust pipe brazed to the metal enclosure plate 3B. 5 is an Al cathode. And is fixed to the metal support component 2B. Reference numeral 6 denotes a glass thin tube, one end of which is fixed to a glass bulb 7.

FIG. 5 is an enlarged view of part B in FIG.

In FIG. 4 and FIG. 5, the Al cathode has one end inserted into the inside of the metal supporting member 2B, and then the tip portion is spread from the outside by a jig so as to be closely attached to the inner surface of the metal supporting member 2B. At this contact portion, conduction is achieved with the metal support component 2B which is also the cathode electrode.

[Problems to be solved by the device]

In the conventional cathode fixing method described above, the Al cathode 5
The cathode is fixed and the metal body component 2B is energized by closely contacting the inner surface of the metal support component 2B with the metal support component 2B.When the contact portion changes in temperature, for example, the optical resonator mirror 1B is metal-supported. When the body part 2B is sealed with a low melting point glass, when the entire laser tube is baked in a furnace for degassing the glass part, the following state occurs.

That is, metals generally used for metal support parts 2A and 2B, 426 alloy (coefficient of thermal expansion α = 90 × 10 ⁻⁷ / ° C., 30 ° C. to 380 ° C.
℃), the metal used for the cathode, Al (coefficient of thermal expansion α = 29 × 10 ^-6 / ℃, 0 ℃ ~ 600 ℃) has a thermal expansion coefficient of 3
Since it is more than twice as large, the Al cathode tends to spread out at high temperature, but since the metal support part does not spread so much, the contact part receives a force inward. Where Al is 426
Since it is much softer than the alloy, the part that receives the force is apparently deformed inward as compared to the other parts that do not receive the force. From this state, the temperature is normal operating temperature (several 10
On the contrary, when the temperature drops to (° C.), the cathode contracts inward greatly, resulting in poor adhesion to the inner surface of the metal support component.

As described above, in the cathode fixing structure shown in FIGS. 4 and 5, when the cathode holding and fixing force and the electrical contact property are weakened after being subjected to the heat history, when the vibration and impact are received,
There is a drawback that instantaneous interruption of discharge occurs.

An object of the present invention is to solve the above problems and to provide a gas laser tube having high earthquake resistance and shock resistance, in which the holding and fixing force of the cathode is not weakened even when subjected to heat history.

[Means for Solving the Problems]

The present invention has a mirror for an optical resonator fixed to a metal support member at both ends of a glass bulb, and a gas laser tube having a glass thin tube and a cathode in the glass bulb. A donut plate-shaped metal member is connected to the cathode-side end face of the metal support component, and the cathode end is fitted to this metal support component to provide springiness for the protrusion and the soft Al and hard protrusion used for the cathode. The structure is characterized in that the cathode is held and fixed by meshing with each other to maintain electrical contact between the metal support component and the cathode.

〔Example〕

 Next, the present invention will be described with reference to the drawings.

FIG. 1 is a vertical sectional view of an embodiment of the present invention. FIG. 2 is a detailed view of part A of FIG. 1, FIG. 3 (a) is a plan view of the metal member 8, and FIGS. 3 (b) and 3 (c) are views showing how to mount the Al cathode. .

In FIGS. 1 to 3, 1A and 1B are a pair of mirrors forming an optical resonator, 2A and 2B are metal support parts for holding and fixing the optical resonator mirrors 1A and 1B, and 3A and 3B are metal supports. Metal enclosure plates brazed to the body parts 2A and 2B respectively and joined to both ends of the glass bulb 7 are metal exhaust pipes 4 attached to the metal enclosure plates 3B, and 5 are cathodes made of Al. It is fixed to the support part. Reference numeral 6 is a glass thin tube, one end of which is fixed to a glass bulb 7. Reference numeral 8 denotes a metal member made of a stainless steel plate, which has a ring shape with a plurality of protrusions 10 on the inner circumference as shown in FIG. 3 (a).
It is fixed to the metal support part 2B. 9 is an Al cathode 5
Is a press jig for closely contacting the inner surface of the metal support component 2B.

As shown in FIG. 3 (b), the contact of the cathode 5 should first be made.
The Al cathode 5 is inserted into the metal member 8 and the metal support component 2B. The metal member 8 is previously connected to the end surface of the metal supporting member 2B on the cathode side by spot welding at the X portion.

Then, the press jig 9 is pushed in as shown in FIG.
The tip part of the cathode 5 made of metal is deformed along the shape of the tip of the press jig 9 to bring the cathode 5 made of Al into close contact with the metal support component 2B.

The Al cathode 5 is pulled in the direction of the arrow in FIG. 3 (c) by the spring property of the metal member 8 and is fixed exactly to the metal support component. Further, since the cathode 5 made of Al is softer than the metallic member 8 made of stainless steel, the protrusion 10 of the metallic member 8 and the Al cathode are engaged with each other at the fitting portion between them, and the shift in the rotational direction can be suppressed. For this reason, the adhesion of the Al cathode is less likely to be lost even after the heat history is applied, and the electrical contact between the Al cathode 5 and the metal supporting member 2B can be maintained.

Incidentally, the metal member 8 has no protruding portion, and as shown in FIG.
It may be a doughnut-shaped one having an inner diameter smaller than the outer diameter of the cathode end portion and a notch 11 provided in the inner peripheral portion.

[Effect of device]

As described above, according to the present invention, the Al cathode is fitted with the metal support component in which the donut plate-shaped metal member having the plurality of protrusions on the inner diameter portion is connected to the end face on the cathode side, and the protrusions are formed. By holding and fixing by the elasticity of the aluminum and the engagement of the soft Al cathode and the hard protrusion, the cathode can be held and fixed and the electrical contact with the metal support parts can be maintained even if heat history is received, improving reliability. Has the effect of

[Brief description of drawings]

FIG. 1 shows an embodiment of the present invention, and FIG. 2 shows FIG. 1A.
3A is a plan view of the metal member 8, FIG.
3 (b) and 3 (c) are views showing a method of mounting the Al cathode 5, FIG. 4 is a view showing a method of fixing the cathode in the prior art, and FIG. 5 is a partial detailed view of part B in FIG. , FIG. 6 is a view showing another example of the metal member. In FIGS. 1 to 5, 1A and 1B are a pair of optical resonator mirrors forming an optical resonator, and 2A and 2B are optical resonator mirrors 1A.
.Metal support parts for holding and fixing 1B respectively, 3A
3B is a metal enclosure plate brazed to the metal support parts 2A and 2B, respectively, and is joined to both ends of the glass bulb 7, 4 is a metal exhaust pipe brazed to the metal enclosure plate 3B, and 5 is an Al cathode , 6 is a glass thin tube, 7 is a glass bulb, 8 is a metal member according to the present invention, 9 is an Al cathode 5 is a metal support part
It is a press jig for making close contact with the inner surface of 2B.

Claims (1)

[Scope of utility model registration request] 1. A gas laser tube in which a metal support part, which is attached to a metal enclosure plate fixed to an end of a glass bulb having a glass capillary inside and which holds an optical resonator mirror, also functions as an electrode, One end face of a metal member provided with a plurality of protrusions directed toward the center in an inner diameter part of a donut plate is connected to an end face of the metal support part on the glass bulb side, and the outer diameter of the tip part is the metal member. A cylindrical cathode larger than the diameter of a circle inscribed in the tip of the protrusion and smaller than the diameter of a circle passing through the center of the protrusion is inserted and arranged in the metal member, and on the inner peripheral surface of the metal support component. A gas laser tube characterized in that the cathode is held and fixed by pressing it.