JPH07112431A - Cutter blade control method for slicing machine - Google Patents

Abstract

PURPOSE:To perform slicing work with constantly high precision even when cutting resistance changes due to abrasion of a cutter by a method wherein a pressing force of a core to be sprayed to a cutter blade is controlled for correcting a displacement when the displacement of the cutter blade can not be corrected by controlling the number of revolutions. CONSTITUTION:When a position detector 18 detects a displacement of a cutter blade 7 during cutting operation of a work 9, the correcting number of revolutions is calculated at a drive motor correcting revolutions calculator 21 of a controller 20 in accordance with the quantity of displacement, outputted to a drive motor rotation command section 23 so as to increase/decrease the number of revolutions, and a tension is changed by a centrifugal force and the position of the cutter blade 7 is controlled so as to be in an OK area. When the position of the butter blade 7 does not return to the OK area even when the number of revolutions is changed, a correcting pressure is outputted to an air pressing force controller 24 from an air pressing force correcting pressure calculator 22 of the controller 20, an air pressure to be sprayed to an air pressure point of the cutter blade 7 from an air nozzle 16 is controlled, so that the position of the cutter blade 7 comes to be the OK area.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cutter blade control method for a slicing machine for slicing a work.

[0002]

2. Description of the Related Art Conventionally, a slicing machine for slicing a semiconductor ingot to produce a wafer used for an integrated circuit or the like uses a cutter blade made of a thin metal plate. The cutter blade is attached to the chuck body attached to the main shaft in a tensioned state, and is configured to rotate the chuck body at high speed and slice the work by the cutter provided on the inner peripheral surface of the cutter blade. ing. Further, if the cutter blade loosens during slicing of the work, it will greatly affect the processing accuracy.Therefore, air is blown to the cutter blade during processing to remove the slack of the blade, and the blade pressure is controlled by controlling the air pressure. There has been proposed a method of controlling the plane position, a method of changing the blade tension by centrifugal force by controlling the rotational speed of the blade, for example, as disclosed in Japanese Patent Application Laid-Open No. 3-272809.

[0003]

However, in the former method of controlling the air pressure, when the depressurization at the pressurizing point becomes large,
Since the tension of the cutter blade is lowered and the cutter blade is easily displaced due to cutting resistance, the tension becomes unstable and there is a problem that high precision machining cannot be performed. The latter method is a control method for bending the machining shape, so if the tension of the cutter blade is not controlled, it is necessary to increase or decrease the number of revolutions beyond the adaptability of the cutting conditions of the work, resulting in machining accuracy. There was a problem such as shortening the life of the cutter blade. The present invention has been made to improve such a problem, and by combining the rotation speed control of the cutter blade and the air pressure point control, the cutter blade control method of the slicing machine is configured to control the tension of the cutter blade. Provide
This enables highly accurate processing.

[0004]

In order to achieve the above object, the present invention provides a slicing machine for slicing a work by the cutter blade by rotating a chuck body to which a cutter blade is attached at a high speed by a rotary drive source, When the cutter blade is displaced due to cutting resistance during machining of the workpiece, the rotation speed of the rotary drive motor is controlled according to the displacement amount to correct the displacement of the cutter blade and the displacement of the cutter blade is corrected by controlling the rotation speed. When it is not possible, the displacement of the cutter blade is corrected by controlling the pressure of the air blown onto the cutter blade.

[0005]

[Operation] With the above configuration, even if the cutting resistance or the like changes due to wear of the cutter or the like, highly accurate slicing can always be performed.

[0006]

Embodiment An embodiment of the present invention will be described in detail with reference to the drawings. In FIG. 1, reference numeral 1 is a slicing machine, and a headstock 2 is provided on a bed 1a via a gantry 1b, and a main spindle 5 rotated by a rotary drive motor 3 via an endless belt 4 is provided on the headstock 2. It is provided. A chuck body 6 is attached to the main shaft 5, and a cutter blade 7 is attached to the chuck body 6 in a tensioned state by a blade pressing ring 8. The cutter blade 7 is formed of a thin plate, has a circular hole 7a formed in the center thereof, and a cutter 7b for slicing the work 9 is provided on the inner peripheral surface of the circular hole 7a.

A guide rail 1c is laid on the bed 1a in a direction orthogonal to the main shaft 5, and a table 10 is movably mounted on the guide rail 1c. A feed screw shaft 13 rotated by a cutting shaft feed motor 12 is provided in an upper portion of the table 10 in a direction parallel to the main shaft 5, and the work holding table provided on the table 10 by the feed screw shaft 13 is provided. 14 is movable in the axial direction of the spindle 5, and the work holding table 1
A work 9 to be sliced is mounted on the workpiece 4.

On the other hand, in the vicinity of the cutter blade 7 attached to the chuck body 6, as shown in FIG. 2, for example, air nozzles 16 are installed at four places, and the air pressure points of the cutter blade 7 from these air nozzles 16 are set. P ₁ ~ P
It is designed to blow air on ₄ . Further, a position detector 17 for detecting the position of the cutter blade 6 is installed near each air nozzle 16, and the position data detected by these position detectors 17 is controlled by the control unit via the detected displacement determination unit 19. It will be sent to 20.

The control unit 20 has a rotary drive motor correction rotation speed calculation unit 21 and an air pressure correction pressure calculation unit 22, and the correction rotation speed calculated by the rotation drive motor correction rotation speed calculation unit 21 is The rotary drive motor rotation command unit 23 in the control unit 20 outputs the rotary drive motor 3 to the rotary drive motor 3 to control the drive motor 3, and the air pressure correction pressure calculation unit 22.
The correction pressure calculated in step (3) is output to the air pressure control section 24 interposed between the air source (not shown) and the air nozzle 16, and the air pressure control section 24 is controlled.

Next, the operation will be described. The work holding table 14
The cutter blade reference (0 point) position at the start of the processing cycle for slicing the work 9 attached to the blade changes with each processing cycle as shown in FIG. 4, but the blade reference position at the start at each processing cycle Is read as 0 point in the control unit 20. FIG. 5 shows an example of the judgment steps of the detected displacement data judgment unit 19, and in this case it is divided into seven steps, but the number of steps is not limited. Next, while rotating the main shaft 5 by the rotary drive motor 3, each air pressure point P _{1 of the} cutter blade 7 is applied from each air nozzle 16 to each other.
Air is blown to P ₄ to start slicing the work 9.

During the cutting of the work 9, the position detector 17 detects that the cutter blade 7 has been displaced from the OK region to the + OK or -OK region of FIG. 5 due to cutting resistance or the like. The rotational speed of the rotational drive motor 3 is calculated by the rotational drive motor correction rotational operation unit 21 of 20 and is output to the rotational drive motor rotation command unit 23. The rotational speed of the rotational drive motor 3 is increased or decreased by the rotational drive motor rotation command unit 23. As a result, the tension of the cutter blade 7 attached to the chuck body 6 is changed by the centrifugal force generated in the chuck body 6, and the position of the cutter blade 7 is controlled to be in the OK region.

On the other hand, when the position of the cutter blade 7 does not return to the OK region even if the number of rotations of the rotary drive motor 3 is increased or decreased, the air pressure correction pressure calculation unit 22 of the control unit 20 transfers the air pressure control unit 24 to the air pressure control unit 24. The correction pressure is output and the air pressure blown from the air nozzle 16 to the air pressure points P _{1 to} P _{4 of the} cutter blade 7 is controlled. As a result, even if the position of the cutter blade 7 does not return to the OK region only by controlling the rotation speed, the position of the cutter blade 7 becomes the OK region due to the control of the air pressure, and the cutter blade 7 is displaced due to a change in cutting resistance or the like. However, since the slice can always be performed in the OK area, highly accurate processing becomes possible.

[0013]

As described above in detail, the present invention controls the rotation of the cutter blade according to the amount of displacement when the cutter blade is displaced due to cutting resistance or the like during machining of the workpiece, and the displacement is controlled by controlling the number of revolutions. If it cannot be corrected, the pressure of the air blown to the cutter blade is controlled to correct the displacement of the cutter blade, so highly accurate slicing is always possible even if the cutting resistance changes due to wear of the cutter. become.

Further, by setting the position of the cutter blade, which is the sum of the displacement amount of the cutter blade due to the centrifugal force and the displacement amount of the cutter blade due to air pressure, as the cutter blade reference position of the machining cycle, the machining start for each machining cycle is started. Since the blade tension at the time can be managed in almost the same state, the control management width becomes smaller and the control becomes stable, and first, with respect to the displacement of the cutter blade that occurs during machining, the responsive rotation control is gentle. Since this is done, smooth plane control is possible.

[Brief description of drawings]

FIG. 1 is a configuration diagram of a slicing machine for carrying out the method of the present invention.

FIG. 2 is a front view of a slicing machine for carrying out the method of the present invention.

FIG. 3 is a block diagram showing a control system of a slicing machine for carrying out the method of the present invention.

FIG. 4 is an explanatory diagram showing a control method of the present invention.

FIG. 5 is an explanatory diagram showing a control method of the present invention.

[Explanation of symbols]

3 ... rotary drive motor, 6 ... chuck body, 7 ... cutter blade, 9 ... work.

Claims (2)

[Claims] 1. A slicing machine in which a chuck body 6 having a cutter blade 7 attached thereto is rotated at a high speed by a rotary drive motor 3 to slice a workpiece 9 by the cutter blade 7, and a cutter is used due to cutting resistance during processing of the workpiece 9. When the blade 7 is displaced, the rotational speed of the rotary drive motor 3 is controlled according to the displacement amount to correct the displacement of the cutter blade 7, and when the displacement of the cutter blade 7 cannot be corrected by controlling the rotational speed, the cutter is moved. By controlling the pressure of the air blown onto the blade 7,
A cutter blade control method for a slicing machine, characterized in that the displacement of the cutter blade 7 is corrected. 2. A cutter blade 7 is rotated at a reference speed at the start of a machining cycle, and air having a constant pressure is blown onto the cutter blade 7 to set the position of the cutter blade 7 at a reference point of the machining cycle. The method of controlling a cutter blade according to claim 1, wherein