JPH07112079B2 - Multilayer piezoelectric actuator - Google Patents
Multilayer piezoelectric actuatorInfo
- Publication number
- JPH07112079B2 JPH07112079B2 JP1060800A JP6080089A JPH07112079B2 JP H07112079 B2 JPH07112079 B2 JP H07112079B2 JP 1060800 A JP1060800 A JP 1060800A JP 6080089 A JP6080089 A JP 6080089A JP H07112079 B2 JPH07112079 B2 JP H07112079B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric actuator
- laminated piezoelectric
- internal electrodes
- laminated
- pair
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000919 ceramic Substances 0.000 claims description 9
- 239000012169 petroleum derived wax Substances 0.000 claims description 7
- 235000019381 petroleum wax Nutrition 0.000 claims description 7
- 239000011347 resin Substances 0.000 description 8
- 229920005989 resin Polymers 0.000 description 8
- 238000009413 insulation Methods 0.000 description 7
- 230000007423 decrease Effects 0.000 description 5
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 4
- 229910052709 silver Inorganic materials 0.000 description 4
- 239000004332 silver Substances 0.000 description 4
- 230000032683 aging Effects 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 238000010276 construction Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910001252 Pd alloy Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- SWELZOZIOHGSPA-UHFFFAOYSA-N palladium silver Chemical compound [Pd].[Ag] SWELZOZIOHGSPA-UHFFFAOYSA-N 0.000 description 1
- 239000012188 paraffin wax Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 239000001993 wax Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
Description
【発明の詳細な説明】 ［産業上の利用分野］ 本発明は電気的エネルギーを受けると該電気的エネルギ
ーに比例する変位や力の機械的エネルギに変換する圧電
素子に関し、特に圧電素子を積層させた積層型圧電アク
チュエータに関する。Description: TECHNICAL FIELD The present invention relates to a piezoelectric element that converts electrical energy into mechanical energy such as displacement or force proportional to the electrical energy when the electrical energy is received. And a laminated piezoelectric actuator.
［従来の技術］ 従来、精密位置決め装置や精密Ｘ−Ｙテーブルのアクチ
ュエータとして、ボイスコイルモータやパルスモータ等
の電磁式アクチュエータが使用されていたが、近年、位
置決め精度、応答速度、消費電力等から前記電磁式アク
チュエータより優れている積層型圧電アクチュエータが
使用されつつある。[Prior Art] Conventionally, electromagnetic actuators such as voice coil motors and pulse motors have been used as actuators for precision positioning devices and precision XY tables, but in recent years, due to positioning accuracy, response speed, power consumption, etc. Stacked piezoelectric actuators, which are superior to the electromagnetic actuators, are being used.
積層型圧電アクチュエータは、圧電セラミックス板と内
部電極板とを交互に積層して、セラミックス積層体を成
している。The laminated piezoelectric actuator is formed by alternately laminating piezoelectric ceramic plates and internal electrode plates to form a ceramic laminated body.
前記積層型圧電アクチュエータでは、その変位方向と直
交する圧電セラミックス板の断面積と内部電極板の断面
積とを一致させる構成にすることにより、集中応力を無
くすことが可能であり、また、製造技術の進歩により、
発生する歪み量を大きくさせることが可能となってい
る。In the laminated piezoelectric actuator, it is possible to eliminate concentrated stress by making the cross-sectional area of the piezoelectric ceramic plate and the cross-sectional area of the internal electrode plate orthogonal to the displacement direction coincide with each other, and the manufacturing technique. The progress of
It is possible to increase the amount of strain generated.
第２図を参照すると、従来の積層型圧電アクチュエータ
２は、その側面に、互いに対向する一対の内部電極12及
び12′の縁部が露出した構造となっている。なお、第２
図において、13はガラス絶縁部、14は外部電極、15はリ
ード線である。この積層型圧電アクチュエータ２では上
述のように、その側面から内部電極12及び12′が露出し
ているので、他装置との電気的絶縁を確保するために
は、前記側面に絶縁物を形成しなければならない。この
ため、前記側面を有機系樹脂層（図示せず）で外装する
ことが一般に行われている。Referring to FIG. 2, the conventional laminated piezoelectric actuator 2 has a structure in which the edges of a pair of internal electrodes 12 and 12 'facing each other are exposed on the side surface thereof. The second
In the figure, 13 is a glass insulating part, 14 is an external electrode, and 15 is a lead wire. Since the internal electrodes 12 and 12 'are exposed from the side surface of the multilayer piezoelectric actuator 2 as described above, an insulator is formed on the side surface in order to ensure electrical insulation from other devices. There must be. Therefore, it is common practice to coat the side surface with an organic resin layer (not shown).
［発明が解決すしようとする課題］ しかしながら、積層型圧電アクチュエータの側面を有機
系樹脂層で外装しても、水分の侵入、透過を防止するこ
とは困難である。[Problems to be Solved by the Invention] However, even if the side surface of the laminated piezoelectric actuator is covered with an organic resin layer, it is difficult to prevent water from entering and permeating.
しかも、積層型圧電アクチュエータを高湿度環境下で長
時間使用すると、一対の内部電極12及び12′間の絶縁抵
抗が低下し、甚だしくは、ショートに至る。In addition, when the laminated piezoelectric actuator is used for a long time in a high humidity environment, the insulation resistance between the pair of internal electrodes 12 and 12 'is reduced, which causes a serious short circuit.
そこで、本発明の技術的課題は、水分の侵入、透過を防
止し、しかも高湿度環境下で長時間使用しても、内部電
極間の絶縁抵抗の低下を生じない積層型圧電アクチュエ
ータを提供することである。Therefore, a technical object of the present invention is to provide a laminated piezoelectric actuator which prevents intrusion and permeation of water and does not cause a decrease in insulation resistance between internal electrodes even when used for a long time in a high humidity environment. That is.
［課題を解決するための手段］ 本発明によれば、圧電性セラミックス部と該圧電性セラ
ミックス部中に互いに実質的に平行に配置された少なく
とも一対の内部電極とを有する積層型圧電アクチュエー
タであって、前記一対の内部電極は前記積層型圧電アク
チュエータの側面から外部に露出した縁部を有している
前記積層型圧電アクチュエータにおいて、 前記積層型圧電アクチュエータの少なくとも前記側面に
形成された石油ワックス層を有することを特徴とする積
層型圧電アクチュエータが得られる。[Means for Solving the Problems] According to the present invention, there is provided a laminated piezoelectric actuator having a piezoelectric ceramic portion and at least a pair of internal electrodes arranged substantially parallel to each other in the piezoelectric ceramic portion. In the laminated piezoelectric actuator, the pair of internal electrodes has an edge exposed to the outside from the side surface of the laminated piezoelectric actuator, wherein a petroleum wax layer formed on at least the side surface of the laminated piezoelectric actuator. A laminated piezoelectric actuator having the following is obtained.
［作用］ 従来の積層型圧電アクチュエータ２の高湿度環境下での
連続使用時の一対の内部電極間の絶縁抵抗の低下の原因
は、水分が前記有機系樹脂層を透過し、前記内部電極に
付着して、前記内部電極内に含まれる銀のイオン化を促
進することによると推定される。[Operation] The cause of the decrease in the insulation resistance between the pair of internal electrodes when the conventional laminated piezoelectric actuator 2 is continuously used in a high humidity environment is that moisture permeates the organic resin layer to the internal electrodes. It is presumed that it is attached to promote the ionization of silver contained in the internal electrode.
表面露出内部電極プラス側： Ag→Ag+＋ｅ 表面露出内部電極マイナス側： Ag+＋ｅ→Ag 即ち、上記反応が進行し、マイナス側の表面露出内部電
極の表面に銀が樹枝状に成長し、表面露出内部電極プラ
ス側とマイナス側との電極間の実質的な距離が短くな
り、一対の内部電極間の絶縁抵抗が低下する。その結
果、外部電極15間の絶縁抵抗が低下する。石油ワックス
層は前記内部電極への水分の付着を防止し、銀のイオン
化を防止する。Surface exposed internal electrode positive side: Ag → Ag + + e Surface exposed internal electrode negative side: Ag + + e → Ag That is, the above reaction proceeds, silver grows in a dendritic manner on the surface of the negative side surface exposed internal electrode, The substantial distance between the positive and negative electrodes of the surface exposed internal electrode is shortened, and the insulation resistance between the pair of internal electrodes is reduced. As a result, the insulation resistance between the external electrodes 15 decreases. The petroleum wax layer prevents water from adhering to the internal electrodes and prevents silver ionization.
［実施例］ 以下、本発明の実施例について図面を参照して説明す
る。[Embodiment] An embodiment of the present invention will be described below with reference to the drawings.
第１図に示すように、本発明に係る積層型圧電アクチュ
エータ１は、Pb｛（Ni・Nb）｝Ti・Zr｝03系圧電セラミ
ックス11を出発原料として、厚膜積層法により断面５×
5mm,長さ18mmの寸法の積層型圧電アクチュエータであ
る。内部電極12の材料は、銀−パラジウム合金を用い、
内部電極12及び12′間の間隔は115μｍ、内部電極積層
数は、150である。外部電極14は、銀ペーストを焼き付
けで形成してある。次に、この積層型圧電アクチュエー
タ１の四周面を第１表に示す有機系樹脂層25で被覆し、
しかる後に、この有機系樹脂表面を第１表に示す石油ワ
ックス層26で被覆した。使用した石油ワックス26は、パ
ラフィンワックス、マイクロクリスタンワックスであ
り、夫々JIS−Ｋ−2235規格の155P,180M種に相当する。As shown in FIG. 1, the laminated piezoelectric actuator 1 according to the present invention has a cross-section of 5 × cross section obtained by a thick film laminating method using Pb {(Ni · Nb)} Ti · Zr} 03 series piezoelectric ceramics 11 as a starting material.
This is a laminated piezoelectric actuator with dimensions of 5 mm and length of 18 mm. The material of the internal electrode 12 is a silver-palladium alloy,
The distance between the internal electrodes 12 and 12 'is 115 μm, and the number of laminated internal electrodes is 150. The external electrodes 14 are formed by baking a silver paste. Next, the four peripheral surfaces of this laminated piezoelectric actuator 1 are covered with the organic resin layer 25 shown in Table 1,
Thereafter, the surface of this organic resin was coated with a petroleum wax layer 26 shown in Table 1. The petroleum wax 26 used is paraffin wax and microcristan wax, which correspond to JIS-K-2235 standard 155P and 180M types, respectively.
第１表を参照して、No101とNo102は、従来の積層型圧電
アクチュエータ２であって、積層型圧電アクチュエータ
２の側面には有機系樹脂層25のみ被覆している。 With reference to Table 1, No. 101 and No. 102 are conventional laminated piezoelectric actuators 2, and the side surfaces of the laminated piezoelectric actuator 2 are covered only with the organic resin layer 25.
No103乃至No111は、本発明の積層型圧電アクチュエータ
１であって、積層型圧電アクチュエータ１の側面を有機
系樹脂層25及び石油ワックス26で被覆している。この積
層型圧電アクチュエータ１の高湿度環境下での信頼性を
調べるために、温度50℃、相対湿度95％の雰囲気中で直
流電圧100Vを連続印加するエージングを実施した。エー
ジングに供した試料数は、各実施例50個であり、その各
実施例の外部電極14間の絶縁抵抗が１桁以上低下した場
合を不良とみなし、エージング500時間後の不良発生率
を従来形（No101、No102）と本発明のもの（No103乃至N
o111）とで比較すると、本発明のものの不良発生率は、
従来形に比べ6/100以下となることが確認された。Nos. 103 to 111 are the laminated piezoelectric actuator 1 of the present invention, and the side surface of the laminated piezoelectric actuator 1 is covered with the organic resin layer 25 and the petroleum wax 26. In order to investigate the reliability of this laminated piezoelectric actuator 1 in a high humidity environment, aging was carried out by continuously applying a DC voltage of 100 V in an atmosphere of a temperature of 50 ° C. and a relative humidity of 95%. The number of samples subjected to aging is 50 in each of the examples, and a case where the insulation resistance between the external electrodes 14 in each example decreases by one digit or more is regarded as a defect, and the defect occurrence rate after 500 hours of aging is the conventional value. Shapes (No101, No102) and those of the present invention (No103 to N)
o111), the defect occurrence rate of the present invention is
It was confirmed to be 6/100 or less compared to the conventional type.
［発明の効果］ 以上説明したように、本発明によると、高湿度環境下
で、長時間使用しても、内部電極間の絶縁抵抗の低下が
生じない高信頼性の積層型圧電アクチュエータを提供で
きるという効果がある。[Effects of the Invention] As described above, according to the present invention, there is provided a highly reliable laminated piezoelectric actuator in which the insulation resistance between internal electrodes does not decrease even when used for a long time in a high humidity environment. The effect is that you can do it.
第１図（ａ）は本発明の一実施例による積層型圧電アク
チュエータの断面図、第１図（ｂ）は、第１図（ａ）の
積層型圧電アクチュエータのＡ−Ａ′断面図、第２図は
従来の積層型圧電アクチュエータの斜視図である。 １……本発明の一実施例による積層型圧電アクチュエー
タ、２……従来の積層型圧電アクチュエータ、11……圧
電セラミックス,12及び12′……内部電極、13……ガラ
ス絶縁部、14……外部電極、15……リード線、25……有
機系樹脂層、26……石油ワックス。1A is a sectional view of a laminated piezoelectric actuator according to an embodiment of the present invention, and FIG. 1B is a sectional view taken along the line AA ′ of the laminated piezoelectric actuator of FIG. 1A. FIG. 2 is a perspective view of a conventional laminated piezoelectric actuator. DESCRIPTION OF SYMBOLS 1 ... Multilayer piezoelectric actuator according to one embodiment of the present invention, 2 ... Conventional multilayer piezoelectric actuator, 11 ... Piezoelectric ceramics, 12 and 12 '... Internal electrodes, 13 ... Glass insulating part, 14 ... External electrode, 15 …… lead wire, 25 …… organic resin layer, 26 …… petroleum wax.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 長沢 潔 茨城県土浦市神立町650番地 日立建機株 式会社内 (72)発明者 緒方 浩二郎 茨城県土浦市神立町650番地 日立建機株 式会社内 (72)発明者 村山 健 茨城県土浦市神立町650番地 日立建機株 式会社内 (56)参考文献 特開 昭62−88382（ＪＰ，Ａ) 特開 昭57−196411（ＪＰ，Ａ) 特開 平２−125676（ＪＰ，Ａ) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Kiyoshi Nagasawa Kiyoshicho, Tsuchiura City, Ibaraki Prefecture, 650 Hitachi Construction Machinery Co., Ltd. (72) Inventor Ken Murayama Ken-cho, Tsuchiura City, Ibaraki Prefecture 650 Hitachi Construction Machinery Co., Ltd. (56) Reference JP 62-88382 (JP, A) JP 57-196411 (JP, A) JP-A-2-125676 (JP, A)
Claims (1)
クス部中に互いに実質的に平行に配置された少なくとも
一対の内部電極とを有する積層型圧電アクチュエータで
あって、前記一対の内部電極は前記積層型圧電アクチュ
エータの側面から外部に露出した縁部を有している前記
積層型圧電アクチュエータにおいて、 前記積層型圧電アクチュエータの少なくとも前記側面に
形成された石油ワックス層を有することを特徴とする積
層型圧電アクチュエータ。1. A laminated piezoelectric actuator having a piezoelectric ceramic portion and at least a pair of internal electrodes arranged substantially parallel to each other in the piezoelectric ceramic portion, wherein the pair of internal electrodes are the laminated layers. A laminated piezoelectric actuator having an edge exposed to the outside from a side surface of the laminated piezoelectric actuator, wherein the petroleum wax layer is formed on at least the side surface of the laminated piezoelectric actuator. Actuator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1060800A JPH07112079B2 (en) | 1989-03-15 | 1989-03-15 | Multilayer piezoelectric actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1060800A JPH07112079B2 (en) | 1989-03-15 | 1989-03-15 | Multilayer piezoelectric actuator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02240976A JPH02240976A (en) | 1990-09-25 |
| JPH07112079B2 true JPH07112079B2 (en) | 1995-11-29 |
Family
ID=13152761
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1060800A Expired - Fee Related JPH07112079B2 (en) | 1989-03-15 | 1989-03-15 | Multilayer piezoelectric actuator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07112079B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7023036B2 (en) | 2001-10-02 | 2006-04-04 | Matsushita Electric Industrial Co., Ltd. | Ferroelectric element and actuator using the same, and ink jet head and ink jet recording device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57196411A (en) * | 1981-05-28 | 1982-12-02 | Fujikura Ltd | Mixture for waterproof cable |
| JPH0680846B2 (en) * | 1985-10-15 | 1994-10-12 | 日本電気株式会社 | Electrostrictive effect element |
-
1989
- 1989-03-15 JP JP1060800A patent/JPH07112079B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02240976A (en) | 1990-09-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |