JPH07111789A - Transporter - Google Patents

Abstract

PURPOSE:To reduce the number of components for the facilitation of assembly and the downsizing of equipment, by supplying two-phase high-frequency voltage to a vibrating plate to produce multimode vibration, and moving a linear transporting member along a guide. CONSTITUTION:The title transporter includes a ring-shaped vibrating plate 5 secured on a base 1, and a linear moving rail 11 abutting on a point on the circumference of the vibrating plate 5. It is also provided with a guide rail 16 to guide the moving rail 11 in the direction of the arrow A, and a pressing member 7 that energyzes the moving rail 11 in the direction where it is urged against the vibrating plate 5. Two-phase high-frequency voltage is applied to the vibrating plate 5 to produce multimode vibration obtained by synthesizing radial vibration and non-axisymmetric in-plane vibration, and the moving rail 11 is thereby moved along the guide rail 16. Thus the title transporter is so designed that a single moving rail 11 will be transported; therefore, it is unnecessary to place a pair of guide rails on the circumference of a vibrating plate 5. This enables the reduction of the number of components and makes it unnecessary to mount components for one side of the vibrating plate 5.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a linear type conveying device which uses a piezoelectric element such as piezoelectric ceramics as a driving source and can obtain a high torque at a low speed.

[0002]

2. Description of the Related Art FIG. 4 is a plan view of a conventional conveying device, and FIG.
(A), (b) is a block diagram of a general piezoelectric element, FIG.
(A), (b) is a figure for demonstrating the operation principle of the conveyance apparatus using a piezoelectric element. A conventional transfer device will be described with reference to these drawings. In these figures, 5 is a diaphragm, 20 and 21 are a pair of guide guides that are arranged in parallel to each other with the diaphragm 5 interposed therebetween, and 22a and 22b are vertically installed on a base (not shown). A pair of front and rear holding members that hold both ends of the holding member 21.
2b has a holding groove 23 for holding the ends of the respective guides 20 and 21 on the opposite surface. The groove width of the holding groove 23 is larger than the width of the guide guides 20 and 21, so that the guide guides 20 and 21 can be slightly moved toward and away from each other.

Reference numeral 24 denotes a carrier table on which the vibrating plate 5 is mounted and which is conveyed in the direction of the arrow D. At both ends of the carrier table 24, a shaft 26 having an L shape in plan view and a bent portion provided upright on the carrier table 24. A lever 25 rotatably supported by the roller 25 and a roller 27 positioned outside the guide guides 20 and 21 so as to sandwich the vibration plate 1 rotatably provided at one end of the lever 25, and the roller 27. , 21 and a tension coil spring 28 for imparting a turning tendency to the lever 25 in the direction of pressing.

The vibrating plate 5 constitutes a stator of a linear type ultrasonic motor, and is formed in a ring shape as shown in FIG. 5 by a piezoelectric element which is uniformly polarized in the plate thickness direction over the entire circumference, and its surface is formed. Electrodes 5a and 5b divided into two in the circumferential direction
Is arranged and the lower surface is grounded. Electrodes 5a and 5b are 1
It is fan-shaped with an opening angle of 80 °, and the facing surfaces of both electrodes 5a, 5b are orthogonal to the transport direction D. The vibrating plate 5 is held by an appropriate soft member to prevent the vibration from being attenuated, and is disposed on the carrier 24. Note that P ₂ and P ₃ are mass points at which the diaphragm 5 and the guide guides 20 and 21 make line contact. Further, the electrodes 5a and 5b of the diaphragm 5 are connected to the high frequency power sources 34 and 3 respectively.
5 and are connected to each other with a temporal phase difference Φ = 9.
High frequency voltage sin ωt, c different by 0 ° or −90 °
osωt is applied.

Next, the operation of the carrying device having such a structure will be described. When high-frequency voltages sin ωt and cos ωt having a phase difference Φ = 90 ° are applied to the electrodes 5a and 5b of the diaphragm 5 by the high-frequency power sources 34 and 35, the diaphragm 5 expands and contracts and its inner diameter / outer diameter has a certain value (0. In the case of 27), the primary vibration (R, 1) in the radial direction and the non-axisymmetric in-plane vibration multimode vibration occur simultaneously. As shown in FIG. 5 (a), the primary vibration in the radial direction is arrows E ₁ and E ₂ , and when it extends in the E ₁ direction, the mass points P ₂ and P ₃ come into contact with the inner surfaces of the guides 20 and 21, and the arrows When contracted in the E ₂ direction, the mass points P ₂ , P
₃ is separated from the guide guides 20 and 21. On the other hand, the non-axisymmetric in-plane vibration (1, 1) is a standing wave that expands and contracts in the same direction as the conveying direction D and in the opposite direction as shown by arrows F ₁ and F ₂ in FIG. F ₂ is synchronized with E ₁ and F ₁ is synchronized with E ₂ . Both of these vibrations are standing waves, but if they are combined by interfering with each other, they become multi-mode vibrations with different amplitudes at each mass point on the outer peripheral surface of the vibration plate 5, and this vibration causes vibration plate 5 and the guide guide. The frictional force due to the contact with 20, 21 is converted into the carrying force of the carrying table 24.

That is, focusing on the mass points P ₁ and P ₂ that come into contact with the guides 20 and 21 among the mass points on the outer peripheral surface of the diaphragm 5, these mass points P ₂ and P ₃ are the multiple modes of the diaphragm 5 itself. As a result of the vibration, as shown in FIG. 6, an elliptic motion G ₁ is generated which rotates in the same direction as the vibration direction F ₂ of the mass points P ₂ and P ₃ . As described above, the two mass points P ₂ and P ₃ that perform this elliptic motion G ₁ are guided by the guides 20, when the diaphragm 5 extends in the direction of arrow E ₁ .
Contact 21, when contracted in an arrow E ₂ direction, guides 2
Since they are separated from 0 and 21, due to the frictional force between them at the time of abutment, the diaphragm 5 itself slightly moves in the rotation direction (direction of FIG. 6D) of the elliptic motion G ₁ of the mass points P ₂ and P ₃ , and When the material contracts in the E ₂ direction with the passage of time, the mass points P ₂ and P ₃ move away from the guides 20 and 21, so that the diaphragm 5 cannot be moved. By repeating such an operation, the diaphragm 5, In other words, the carrier table 24 integrated with this can be continuously moved in the carrying direction D at a constant speed.

When the relative phase of the high frequency voltage applied to each of the electrodes 5a and 5b is reversed (Φ = -90 °), the radial primary vibration of the diaphragm 5 and the asymmetric in-plane vibration cycle are opposite to each other. Therefore, the rotation direction of the elliptic motion of the mass points P ₂ and P _{3 is} the direction of FIG. 6G _2, and when the diaphragm 5 extends in the direction of the arrow E ₂ , the mass points P ₂ and P ₃ come into contact with the guides 20 and 21. Therefore, due to the frictional force at this time, the diaphragm 5 itself moves in the opposite direction to the above, and the carrier table 24 is returned to the initial position.

[0008]

However, in the above-described conventional transfer device, the vibration plate 5 is fixed to the transfer table 24, and the vibration plate 5 is also moved integrally with the transfer table 24. Board 5 with two guides 20,2
The structure is such that the diaphragm 5 is sandwiched by 1 and the vibrating plate 5 is pressed against the guide guides 20 and 21 from the outside of the guide guides 20 and 21 by the rollers 27 and the like. Therefore, the number of parts is increased and the size of the entire apparatus is increased. was there.

Therefore, the present invention has been made in view of the above-mentioned conventional drawbacks, and an object of the present invention is to reduce the number of parts to facilitate the assembling and to downsize the apparatus. To provide a device.

[0010]

In order to achieve this object, a conveying device according to the present invention is provided with a ring-shaped vibrating plate fixed to a base and a linear vibrating plate which abuts on a peripheral surface of the vibrating plate. A die conveying member, a guide guide that guides the linear die conveying member in the conveying direction, and a pressure contact member that biases the linear die conveying member in a direction in which the linear die conveying member is in pressure contact with the diaphragm. A high-frequency voltage is supplied to generate a multimode vibration by combining the radial vibration and the non-axisymmetric in-plane vibration, and the linear type conveying member is moved along the guide.

[0011]

According to the present invention, the multi-mode vibration is generated in the diaphragm by supplying the two-phase high-frequency voltage to the diaphragm, and the linear conveying member pressed against the diaphragm moves along the guide. .

[0012]

An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is an overall perspective view of a carrier device according to the present invention, and FIG.
Is also a plan view, and FIG. 3 is a sectional view taken along line III-III in FIG. In these figures, 1 is a long rectangular base, provided with a long groove 2 extending along the longitudinal direction,
A block 3 is formed so as to project at one end, and a stepped notch 4 is formed at the center of the block 3. Code 5
The vibrating plate 5 indicated by is a fan-shaped electrode 5a, similar to the prior art.
5b, and the electrodes 5a and 5b are fixed to the base 1 by screws so that they are opposed to each other in the left-right direction.

Reference numeral 7 denotes a fixed rail which is a pressing member having substantially the same length as the long groove 2 and is slidably fitted in the notch 4 in the direction of arrow B, and has a triangular cross section on the side surface on the diaphragm 5 side. A shaped pressing protrusion 8 is formed so as to project. Reference numeral 9 is a leaf spring whose both ends are bent and is fitted in the notch 4 to press the fixed rail 7 in the direction of arrow B. Reference numeral 10 is a flat plate-shaped lid member which is screwed to the block 3 and closes the notch 4. Reference numeral 11 denotes a movable rail that is a conveying member, and has a substantially same length as the fixed rail 7, a long groove 12 having a V-shaped cross section on one side surface, and a guide groove 13 having a reverse wedge-shaped cross section on the bottom surface. Each is formed over the entire longitudinal direction.

Reference numeral 14 denotes an actuator which is mounted on the upper surface of the movable rail 11 and drives a conveying member (not shown). Reference numeral 15 denotes a pair of actuating plates mounted at both ends of the movable rail 11. The movable rail 11 is the fixed rail 7
Thus, it is urged in the B direction by the peripheral surface P ₁ point of the diaphragm 5 so as to be orthogonal to the line connecting the center of the diaphragm 5 and the point P ₁ . Reference numeral 16 denotes a guide rail having a trapezoidal cross section, which is fitted and fixed in the long groove 2, and the guide groove 13 of the movable rail 11 is fitted to guide the movable rail 11 slidably in the direction of arrow A. Reference numeral 17 denotes a sensor attached to both ends of the base 1, which is provided with a groove 18 into which the operating plate 15 is fitted, and a light receiving / light emitting element (not shown) is buried with the groove 18 interposed therebetween.

Next, the operation of the carrying device having such a structure will be described. Phase difference Φ = by a high frequency power source (not shown)
The high-frequency voltage sinωt, cosωt of 90 ° is applied to the diaphragm 5
When it is applied to the electrodes 5a and 5b, the elliptic motion occurs on the surface of point P _{1 of the} diaphragm 5 as in the prior art described above. In the present invention, the diaphragm 5 is fixed, and at the point P _{1 of the} fixed diaphragm 5, the movable rail 11 is pressed perpendicularly to the point P ₁ and the center of the diaphragm 5,
The movable rail 11 is guided by the guide rail 16 and moves in the A direction. When the movable rail 11 moves to reach both end positions, the actuating plate 15 fits into the groove 18 of the sensor unit 17 and shields between the light-receiving and light-emitting elements, so that the sensor unit 17 does not apply the voltage to the electrodes 5a and 5b. A signal to stop is sent to stop the movement of the movable rail 11. Invert the relative phase of the high frequency voltage applied to each electrode 5a, 5b (Φ = -90 °)
Then, the movable rail 11 moves in the opposite direction.

As described above, since the movable rail 11 is guided by the guide rail 16 and the fixed rail 7 presses the movable rail 11 uniformly over the entire movable rail 11, a constant pressing force is always obtained. The movable rail 11 can be continuously moved at a constant speed. Further, since the movable rail 11 is arranged only on one side of the diaphragm 5, not only one rail, which is conventionally required by two, is not required, but not only the number of parts can be reduced, but also
It is possible to reduce the size of the device. Further, since the cross section of the guide rail 16 is trapezoidal and the cross section of the guide groove 13 of the movable rail 11 fitted into the guide rail 16 is an inverted wedge shape, the movement of the movable rail 11 in the C direction can be restricted, Along with smooth movement with little vertical movement,
Even when an external force is applied in the C direction, the movable rail 11 does not come off, and malfunctions can be prevented.

[0017]

As described above, according to the present invention, a ring-shaped vibrating plate fixed to a base, a linear type conveying member that abuts on a point on the peripheral surface of the vibrating plate, and this linear type conveying member. It is equipped with a guide that guides the member in the conveying direction, and a pressure contact member that urges the linear type transfer member in the direction in which it contacts the diaphragm. Since the multi-mode vibration is generated by the combination with the in-plane vibration and the linear type conveying member is moved along the guide guide, one linear type conveying member is conveyed. Compared with the conventional case where a pair of guide rails are required, the number of parts can be reduced, and it is not necessary to mount parts on one side of the diaphragm, so that the device can be downsized.

[Brief description of drawings]

FIG. 1 is an overall perspective view of a carrying device according to the present invention.

FIG. 2 is a plan view of a transfer device according to the present invention.

3 is a sectional view taken along line III-III in FIG.

FIG. 4 is a plan view of a conventional transfer device.

FIG. 5 is a configuration diagram of a general piezoelectric element.

FIG. 6 is a diagram illustrating an operating principle of a transfer device using a piezoelectric element.

[Explanation of symbols]

 1 Base 5 Vibration Plate 5a, 5b Piezoelectric Element 7 Fixed Rail 8 Pressing Protrusion 9 Leaf Spring 11 Movable Rail 12 Long Groove 13 Guide Groove 16 Guide Rail

Claims (1)

[Claims] 1. A ring-shaped diaphragm fixed to a base,
A linear-type conveying member that comes into contact with a point on the peripheral surface of the diaphragm, a guide guide that guides the linear-type conveying member in the conveying direction, and a pressure contact that urges the linear-type conveying member in a direction in which the linear-type conveyance member is pressed against the diaphragm. A high-frequency voltage of two phases is supplied to the diaphragm to generate multi-mode vibration by combining radial vibration and non-axisymmetric in-plane vibration, and the linear type transfer member is moved along a guide. A transport device characterized in that