JPH07111370B2 - Signal transmission / reception characteristic pattern measuring device - Google Patents

Description

TECHNICAL FIELD OF THE INVENTION The present invention relates to a device for projecting a signal, or an element or a device on which a signal is incident, particularly an optical device or an optical device, for measuring or projecting an incident characteristic of light. A measuring device for displaying and / or recording a beam pattern or an incident beam pattern.

Here, the optical element or device means various semiconductor light emitting elements, various light emitting elements such as laser elements and various lamps, various semiconductor light receiving elements and light receiving elements such as various solar cells, optical lenses and optical filters, and the like. It means an element or device that acts as a medium of light, such as various devices using these.

(Prior Art) Conventionally, when measuring a beam pattern of an optical element or a device (hereinafter, referred to as an optical element, etc.), generally, the eighth pattern is used.
The method shown in the figure is adopted.

That is, light is projected from the DUT 11 such as a light emitting diode to the optical diffuser plate 12, and an image 13 captured on the diffuser plate 12 is projected.
Is captured by the TV camera 14 and analyzed by the monitor TV 15.

According to this conventional method, the image level range (dynamic range) that can be captured by the image tube or CCD image sensor used in the TV camera 14 is usually about 40 dB, so that the DUT 11 is, for example, a laser diode or the like. If the dynamic range of the light emission level is extremely wide, it is necessary to use the diaphragm or filter of the TV camera 14, and the image 16 projected on the monitor TV 15 by this is the projection level of the DUT 11. Since it is no longer an image that directly represents, it is necessary to consider the attenuation due to the diaphragm or filter when analyzing the image 16, not only the measurement method is complicated, but also it is difficult to obtain an accurate beam pattern. Therefore, it is extremely difficult to quantitatively obtain the measured value.

Further, the biggest drawback of the above-mentioned conventional method is that it is impossible to measure the light receiving characteristic pattern (light receiving beam pattern) of the light receiving element, because the image is taken.

(Object of the Invention) The present invention provides a signal transmission / reception characteristic pattern measuring device by a new mechanism, particularly a beam pattern measuring device such as an optical element, in order to solve the above-mentioned conventional drawbacks.
It is an object of the present invention to provide a measuring device which can obtain an accurate beam pattern even when the object to be measured is a light emitter, not to mention when it is a light emitter.

(Summary of the Invention) For the above-mentioned purpose, the present invention provides an object to be measured and a device for projecting light onto the object (when the object to be measured is an optical element for receiving light)
Alternatively, the object to be measured or the optical element is arranged so as to face an optical element having a high optical dynamic range for receiving the projection light from the object to be measured (when the object to be measured is an optical element for light emission). One or both of the supports of (1) and (2) are moved in a two-dimensional or three-dimensional space so that their relative positional relationship changes, and the beam pattern of the object to be measured is scanned in the two-dimensional or three-dimensional space. For example, the received or emitted light intensity (gain) at each measurement point on the scanning locus is analyzed by a personal computer or the like), and this is displayed and / or recorded along with the above scanning operation.

(Embodiment of the Invention) FIG. 1 is a diagram showing a device configuration of an embodiment of the present invention.
2 is an optical element or an optical element or an object to be measured (hereinafter, referred to as an example). An optical element is taken as an example.) 3 is a scanning mechanism for sequentially moving the optical element 2 to a plurality of measurement points defined for the DUT 1, and 4 is a light emitter of the DUT 1 or the optical element 2. A device (hereinafter, referred to as a drive / detector) having a light emitter drive unit that supplies light emission power to one side and a signal detection unit that detects a light reception signal from the side that is the light receiver, 5 is a personal computer Computer (hereinafter referred to as personal computer), 6
Is a recorder such as a plotter or printer.

The optical element 2 is a signal receiving element when the DUT 1 is an object that projects a signal (for example, a light emitting optical element), and an object that the DUT 1 receives a signal (for example, a light receiving optical element). ) Is a signal projecting element, and the signal receiving or signal projecting element is such that the signal incident area is narrow enough to be regarded as a dot with respect to the signal projecting range or the signal incident range of the DUT. Surface or signal projection surface.

The scanning mechanism 3 includes a base 31, a Z-axis scanning body 33 that moves in the Z-axis direction along a groove 32 provided in the base 31, and an X-axis along a groove 34 provided in the Z-axis scanning body 33. An X-axis scanning body 35 that moves in the axial direction, a Y-axis scanning body 37 that moves in the Y-axis direction along a groove 36 provided in the X-axis scanning body 35, and is also a support for the optical element 2, The device to be measured 1 is fixed to the base 31 and the optical device 2
Although not shown in the drawing, a stepping motor for driving the three scanning bodies 33, 35 and 37, and a control device for controlling the operation of the stepping motor (It consists of CPU, memory, etc.)

On the side supporting the optical element 2, the X-axis, Y-axis, and Z-axis 3
Instead of controlling the movement in all the directions of the axes, the uniaxial or biaxial directions may be scanned by the side supporting the DUT 1, that is, the movement of the support 38. Further, in some cases, scanning in only two axis directions may be sufficient, and in such a case, unnecessary axial directions may be fixedly controlled.

Further, the function of the scanning mechanism 3 can be assigned to the recording device 6, and the device configuration in this case is shown in FIG.

In FIG. 6, reference numeral 7 is an optical element, 8 is a recording pen, 9 is a recording paper, 10 is a support table on which the plotter 6 is placed and which supports the DUT 1, and other symbols. Are the same as in FIG.

The support base 10 includes a base 101 on which the plotter 6 is placed, and the base 101.
It is composed of a columnar body 102 that is fixed perpendicularly to the surface and a supporter 103 that projects from the columnar body 102 in the horizontal direction and is fixed, and that clamps and supports the DUT 1.

In the embodiment shown in FIG. 6, a plotter having a scanning mechanism that moves in two axial directions is used as the recorder 6. That is, the plotter 6 includes a pen support 61, a shaft 62 for guiding movement of the pen support 61 in the Y-axis direction, and a Y of the pen support 61.
The recording pen 8 placed in the pen stocker 64 has a two-axis scanning mechanism of the X-axis and the Y-axis by the groove 63 for guiding the axial movement.
Select (A plurality of different colors are placed.) Appropriately,
The pen support 61 is moved to the coordinates of the selected recording pen 8 and picked up and held by the pen support 61, and data is recorded on the recording paper 9 by the held recording pen 8.

As can be understood from the above description of the plotter 6, the shuff 62 moves in the X-axis direction along the groove 63, and the pen support 61 moves in the Y-axis direction along the shaft 62. The 61 can control movement in both directions of the X axis and the Y axis. The present invention can be implemented by using the XY scanning mechanism of the plotter 6 instead of the scanning mechanism 3. still,
When scanning data in three axis directions is required for measurement, the support base 10 is moved so that the support body 103 can be controlled to move vertically on the pillar body 102 of the support base 10 (that is, in the Z-axis direction). Just configure it.

Further, the movement control of the DUT 1 or the optical element 2 is performed based on the above-mentioned orthogonal two-axis or three-axis coordinates, or a so-called AZ-EL turn control for turning control about a vertical axis and a horizontal axis. There is.

That is, the AZ-EL mechanism 11 as shown in FIG. 7 is fixed to the Y-axis scanning body 37 or the support body 38 (103 in FIG. 6), and the support body 111 is azimuthally centered on the AZ axis 112. And / or
This is a method of turning around the EL axis 113 in the direction of depression. A variety of scanning patterns can be obtained by combining the AZ-EL turn control and the movement control in the directions of the three orthogonal axes.

The personal computer 5 alternately receives the detection signal sent from the signal detection unit of the drive / detector 4 and sends the drive command signal to the scanning mechanism 3 to determine each measurement point determined for the DUT 1. In which the operation of storing the detection signal level from the signal detection unit is performed for all of the measurement points, and the signal processing unit that stores the measurement data obtained thereby, based on the measurement data stored and held in the signal processing unit. In addition, the plotter 6 naturally has a display unit for stereoscopically displaying the signal transmission characteristic pattern or the signal reception characteristic pattern of the DUT 1, and the plotter 6 naturally constitutes a recording unit for recording the characteristic pattern.

(Operation of Embodiment) FIG. 2 is a flow chart mainly showing the operation control of the scanning mechanism 3 in the control of the personal computer 5, and FIGS. 3 (A) and 3 (B).
Is a diagram showing an example of a scanning mode in the scanning mechanism 3, FIG. 4 (A),
5B and FIGS. 5A and 5B are diagrams showing a measurement example and a measurement pattern display example, respectively.

The device to be measured 1 is a light emitting element (for example, a semiconductor laser diode), the optical element 2 is a light receiving element (for example, a phototransistor), and the operation of obtaining the projection light beam pattern of the light emitting element 1 will be described below as an example. The operation will be described.
In the following description, the embodiment of FIG. 1 is described unless otherwise specified, and the AZ-EL mechanism of FIG. 7 is not used.

The light emitting element 1 to be measured is mounted on the support 38 of the scanning mechanism 3.
The light-receiving element 2 is fixed to the Y-axis scanning body 37 of the scanning mechanism 3, the light-emitting element 1 is the output terminal of the light-emitting body driving section of the drive detector 4, and the light-receiving element 2 is the signal of the drive / detector 4. The personal computer 5 and the scanning mechanism 3 are connected to each other, and a movement command is sent from the personal computer 5 to the scanning mechanism 3 for scanning. A movement completion signal is sent from the mechanism 3 to the personal computer 5, the personal computer 5 and the drive / detector 4 are connected to each other, the detection signal from the drive / detector 4 is read by the personal computer 5, and The recording data is sent from the personal computer 5 to the recording device 6 because it is mutually connected to the recording device 6.

FIG. 3 (A) shows a scanning mode in the case where scanning is performed over the entire scannable area of the scanning mechanism 3 (hereinafter referred to as full-area scanning), and FIG. 3 (B) is shown in FIG. 3 (B).
2 shows a scanning mode (hereinafter, referred to as partial area scanning) when scanning is performed in a partial area of the scannable area. That is, the space surrounded by the points O, A, B, C, D, E, F, G is the scannable area, and is the scanning range of the entire area scan, and the points H, J, K, L, M, N ,
The space surrounded by R and S is the scanning range of partial area scanning.
The point P is the center point of the scanning range in the partial area scanning. The coordinates are as shown in FIGS. 3A and 3B, and the point O is the origin.

The measurement is started by instructing the measurement start from the keyboard 51 of the personal computer 5.

When the measurement starts, first scan the scanning range with the keyboard 51.
Input by scanning. The scanning range is input by inputting the coordinates of the scanning range boundary points (for example, point O and point F in the case of whole area scanning, and point H and point R in the case of partial area scanning) (however, This method cannot be used when the scanning range is set after setting the point P shown in FIG. 3B.), The type of scanning (full area scanning, partial area scanning, or partial area scanning). In the case of, the range of types) is determined in advance, and a method of inputting a code indicating the type, or a method of inputting the number of scans in the X-axis, Y-axis, and Z-axis directions There is.

When the scanning range is input, the personal computer 5 determines whether the input scanning range is the entire area scanning or the partial area scanning. In the former case, the scanning range setting operation is performed, and in the latter case, the keyboard is operated. The coordinates of the predicted center point of the scanning range from 51 (3rd
It waits for the input of the predicted coordinates of the point P shown in FIG. The input of the predicted center point is such that each axis scanning body 33, 35, 37 of the scanning mechanism 3 is moved to the input coordinates and the light receiving level of the light receiving element 2 at the moving point is displayed on the display surface 52 of the personal computer 5. If
By repeating the input of the predicted center point, the predicted center point can be brought closer to the scanning range center point P. When the predicted center point of the scanning range is input, the process proceeds to detection control of the scanning range center point P.

The detection of the scanning range center point P is performed by the following routine, for example. That is, the light receiving level of the light receiving element 2 is measured and stored at a plurality of points within a preset range around the coordinates of the predicted center point, and the point having the highest light receiving level is set as the point P, for example. The measurement operation in this routine is performed under the same control as that after the "sending movement command to the scanning mechanism" control which will be described later with reference to FIG.

In some cases, the predicted center point may be directly regarded as the scanning range center point P, and in such a case, the scanning range center point detection routine may be omitted.

Next, the control of the personal computer 5 enters the scanning range setting. This scanning range is set in the case of full-area scanning, for example, the coordinates (0,0,0) of the point O (origin) shown in FIG. The coordinates are shown below. The same applies) and point F
The coordinates (l, m, n) are stored in the memory area set for the control of the scanning mechanism 3, and in the case of partial area scanning, the point P shown in FIG. So that the coordinates (X ₀ , Y ₀ , Z ₀ ) of the point H come to the center of the scanning range input from the keyboard 51, for example, the coordinates (i ₁ , j ₁ , k ₁ ) of the point H and the coordinates (i _{2 of the} point R. , j ₂ , k ₂ ) to obtain the coordinate (i ₁ , j
_This is performed by storing ₁ , k ₁ ) and (i ₂ , j ₂ , k ₂ ) in the memory area.

The above-mentioned control is performed by the fact that the point P is a floating point. However, when such a point P is not required, the scanning range is input by the coordinates from the keyboard 51,
This may be suddenly stored in the memory area to set the scanning range. Also, in setting the scanning range,
In the above control, the entire area scan is performed over the entire range in all three axes as shown in FIG.
As shown in FIG. 3 (B), partial area scanning is performed by scanning a partial range in all three directions, but one or two of the three axes are scanned over the entire range, and the remaining You may make it scan a partial range about 2 axes or 1 axis of.

Further, in the case of two-dimensional scanning, the coordinates of the axis in the direction not required may be fixed and set. That is, in FIG. 3 (A), when the scanning range input operation is performed, for example, the coordinates (0,0,0),
If you enter (l, m, o) (that is, fix the Z coordinate at 0), the scan is done only on the plane OABC, and the third
In FIG. 3B, if coordinates (i ₁ , j ₂ , k ₁ ) and (i ₁ , j ₁ , k ₂ ) are input in the scanning range input operation (that is, the X coordinate is fixed to i ₁₎ . Scanning) is performed only on the plane HLSM.

When the setting of the scanning range is completed, the personal computer 5 performs control to set the coordinates that are the starting point of scanning within the scanning range, that is, the initial position coordinates. The initial position coordinate is the origin O (0,0,0) in the case of full area scanning, the point closest to the origin O in the case of partial area scanning, and the point H in the example shown in FIG. 3 (B).
Select (i ₁ , j ₁ , k ₁ ).

Next, the personal computer 5 sends a movement command to the scanning mechanism 3.

The first move command is the initial position coordinate, that is, the coordinate (0,0,0) of the origin O in the case of full area scanning, and the coordinate of the point H (i ₁ , j _{1 in} the case of partial area scanning). , k ₁ ). Upon receiving this movement command, the scanning mechanism 3 drives the scanning bodies 33, 35 and 37 of each axis by its own control operation to move the light receiving element 2 to a position corresponding to the coordinates of the origin O or the point H. The personal computer 5 is in a waiting state while the scanning mechanism 3 is operating. That is, when the scanning mechanism 3 completes the movement of the light receiving element 2 to the scanning start point, it sends a movement completion signal to the personal computer 5, and in response to this, the personal computer 5 receives light from the light receiving element 2 at the scanning start point from the drive / detector 4. The level, that is, the measured value is read and stored.

When the storage of the measured values is completed, the personal computer 5 determines whether or not there is a movement command that has not been sent, and in this case, the origin O or the point H.
Since the measurement at the (scanning start point) has just ended, there is a move command that has not been sent, and a new move command is sent to the scanning mechanism 3. The new movement command is a coordinate indicating the next measurement point of the (previous measurement point) (in this case, the scanning start point), for example, (1,0,0) or (i ₁ for scanning in the X-axis direction.
+ ₁ , j ₁ , k ₁ ). When you receive a new move command,
The scanning mechanism 3 drives the scanning bodies 33, 35 and 37 of the respective axes again to move the light receiving element 2 to a new measurement point corresponding to the movement command. Thereafter, in the same manner as described above, reading and storage of measured values, determination of presence / absence of unsent movement command, transmission of movement command to scanning mechanism 3, reception of movement completion signal, and waiting until then are repeated and input from keyboard 51. The measurement operation is repeated for all measurement points within the scanned range.

Since the light receiving element 2 has a signal incident surface that is narrow enough to be regarded as a dot with respect to the width of the signal projection range (light emitting beam width) of the light emitting element 1 as the DUT, the light receiving element 2 at each measurement point. The light reception level (measurement value) of the signal received by the light source is the level of the component of the signal projected from the light emitting element 1 in the direction of the measurement point at that time.

The control from the determination of the presence or absence of the unsent movement command to the transmission of a new movement command is performed as follows, for example.

That is, the personal computer 5 calculates the number of measurement points in each axis direction from the input scanning range, and presets the value of a counter (normally set by software) set in each axis direction to the number of measurement points. Then, the value of the counter is decremented by 1 each time the measured value is stored,
The measurement is repeated until the counter values are all zero. At the same time, the movement command is updated by adding 1 to the coordinate value in the scanning direction, and the updated movement command is sent to the scanning mechanism 3.

When all the movement commands are transmitted and the measurement is completed at all the measurement points in the scanning range, the personal computer 5 stores and holds the measurement values at each measurement point as measurement data, and proceeds to the next routine. Here, the next routine is a routine for displaying the measurement data on the display surface 52 and / or a recording routine for sending the measurement data to the recorder 6 for recording, and these routines are appropriately known control. Can be done in any way.

Next, the operation of the embodiment shown in FIG. 6 will be described.

In the embodiment shown in FIG. 6, one of the optical elements 2 and 7 is a light emitting element and the other is a light receiving element. When the DUT 1 is a light emitting element, the light receiving element side is selected as the optical element 2 or 7.
If the DUT 1 is a light receiving element, the light emitting element side is controlled to be selected. The optical element 2 is connected to the outside via the pen support 61 by, for example, the control device of the plotter 6 if the optical element 2 is a light emitting element, the drive / detector 4 is used, and if it is a light receiving element, the personal computer 5 is used. Is set to each.

In this embodiment, the measurement is started, and first, the keyboard 51 is used to instruct the recording operation or the measurement operation,
When the measurement operation is instructed, the selection data of the optical element 2 or 7 is input together with the input of the scanning range data.

At the time of measurement operation, the plotter 6 selects the optical element 2 or 7 (light receiving element or light emitting element) based on the above-mentioned input data, and the pen support 61 is moved to the selected optical element 2 or 7 of the pen stocker 64. The pen support 61 is controlled to move to the position and the selected optical element 2 or 7 is picked up and held.

After the above control, the measurement operation is performed between the personal computer 5 and the plotter 6 under the same control as shown in FIG.

When the measurement operation is completed and the recording operation (recording routine) is started, the pen support 61 appropriately selects and holds the recording pen 8 instead of the optical element 2, and sequentially reads the measured values stored in the personal computer 5. And records on the recording paper 9.

As shown in FIG. 4 (A), FIG. 4 (B) shows the object to be measured as a combination of the light emitting element 1 and the lens 12, and the scanning direction is the biaxial direction of the X axis and the Y axis (two-dimensional scanning). 3) shows an example in which the measurement data is three-dimensionally shown or recorded, and FIG. 5B shows a combination body similar to the above as shown in FIG. An example is shown in which the measurement data obtained by measurement in the three axis directions of the Z axis and the Z axis (three-dimensional scanning) are three-dimensionally displayed or recorded. From the measurement data displayed or recorded in this way, the radiation beam characteristics of the light passing through the lens 12, the relationship between the distance between the light receiving surface and the light projecting point and the light receiving intensity (level), etc. can be accurately grasped. .

Further, when the AZ-EL mechanism 11 shown in FIG. 7 is used, if the program is slightly changed and the movement command is replaced with rectangular coordinates, or the polar coordinates can be input at the same time as the rectangular coordinates, the above-mentioned embodiment can be obtained. In the same manner, measurement data obtained by scanning in the azimuth angle and the tilt angle direction can be obtained.

The above embodiment is an example in which the present invention is applied to the measurement of the characteristics of the optical element or device. For example, in the case of measuring the coupling characteristics between the transmission coil and the reception coil of the device that exchanges information by electromagnetic inductive coupling. The present invention can be implemented even when measuring, for example, directional characteristics of a voice device such as a speaker, a microphone, etc., and the difference of the object to be measured does not change the gist of the present invention.

(Effects of the Invention) As described above in detail, according to the present invention, the object to be measured or the element facing the object is scanned in the two-dimensional or three-dimensional space to store and hold the measured values at the respective measurement points. The measurement data can be obtained regardless of whether the DUT is a light emitter or a light receiver, and the measurement data can be grasped quantitatively and accurately, and the time required for measurement is extremely short. This has the effect of being good.

Further, if the XY scanning mechanism of the recorder (plotter) is used, the present invention can be carried out by setting software, and as the hardware, a simple structure for supporting the object to be measured is used. The effect of being good is also obtained.

[Brief description of drawings]

FIG. 1 is a perspective view showing a device configuration of an embodiment of the present invention, and FIG.
FIG. 4 is a flow chart for explaining the operation of the embodiment shown in FIG. 1, FIGS. 3 (A) and 3 (B) are diagrams showing examples of scanning modes, and FIG.
Figures (A) and (B) and Figures 5 (A) and (B) are diagrams showing a measurement form and a measurement pattern display example, and Figures 6 and 7 are perspective views showing essential parts of other examples. FIG. 8 is a perspective view showing an example of a conventional measuring method. (Main symbols) 1: Object to be measured (light emitting element), 2: Optical element (light receiving element), 3: Scanning mechanism, 31: Base, 33: Z-axis scanning body, 35: X-axis scanning body, 37: Y Axial scanning body, 4: Drive / detector, 5: PC, 6: Recorder, 61: Pen support, 62: Y-axis movement guide shaft, 63: X-axis movement guide groove, 7: Optical element, 10 : Support, 11: AZ-EL mechanism.

Claims (6)

[Claims] 1. A signal receiving element or a signal projecting element having a signal incident surface or a signal projecting surface that is narrow enough to be regarded as a dot with respect to the width of the signal projecting area or the signal incident area of the device under test, A pair of supports for arranging and supporting the DUT and the element such that their signal incident surfaces and signal projection surfaces face each other, and the relative positional relationship between the DUT and the element are two-dimensional. Alternatively, a scanning mechanism for driving one or both of the pair of supports so as to move to a plurality of measurement points defined in a three-dimensional space, and a scanning side of the DUT or the element. From the signal detection unit at each measurement point by alternately performing a signal detection unit that detects an incident signal from an object, reception of the detection signal from the signal detection unit, and transmission of a drive command signal to the scanning mechanism. Detection signal level of Is performed for all the above measurement points, and the signal processing unit that stores and holds the measurement data obtained thereby, and the signal transmission of the measured object based on the above measurement data that is stored and held in the signal processing unit. A signal transmission / reception characteristic pattern measuring device configured with a display recording unit that stereoscopically displays and / or records a characteristic pattern or a signal reception characteristic pattern. 2. The transmission / reception characteristics according to claim 1, wherein the scanning mechanism is configured so that one of the pair of supports is fixed and the other is moved in the biaxial or triaxial directions of orthogonal coordinates. Pattern measuring device. 3. One of the pair of supports is moved in the uniaxial or biaxial directions of the orthogonal coordinates, and the other is moved in the uniaxial or biaxial direction different from the moving direction of the one of the supports. The signal transmission / reception characteristic pattern measuring device according to claim 1, wherein the scanning mechanism is configured as described above. 4. A signal transmission / reception characteristic pattern according to claim 1, wherein the scanning mechanism is configured so that one of the pair of supports is fixed and the other is rotatably moved about the AZ axis and the EL axis. Measuring device. 5. The scanning mechanism is configured so that one of the pair of supports is rotated around the AZ axis and / or the EL axis, and either one of them is moved in the direction of at least one of the orthogonal coordinates. A signal transmission / reception characteristic pattern measurement device according to the first section. 6. A plotter that scans in two axial directions is used as a recording unit of a signal processing unit, and a scanning mechanism of the plotter scans and drives an object to be measured or an element arranged opposite to the object to be measured. A signal transmission / reception characteristic pattern measuring device according to claim 1.