JPH07111287A - Lot organizing method and equipment - Google Patents

Abstract

PURPOSE:To prevent defective products due to intermixed product lots by inputting data of the origin of organizing and the object of organizing before lot organizing, checking whether both data coincide each other upon completion of the input, and stopping organizing sequence if they do not coincide. CONSTITUTION:A data processing equipment 40 properly designates each empty cassette 20 for the object of division based on the data related to a lot organizing plant transmitted and also designates the product name and the number of sheets of wafer to be housed in each empty cassette. Upon completion of data input, the data processing equipment 40 checks whether the product name and the number of sheets of wafer input for the origin of division coincide with the product name and the total number of sheets of wafer input for the object of division and, if nonconformity occurs, then the division work sequence is stopped. By doing this, improperness in the lot organizing work due to input errors during previous data input or due to setting errors for works by the origin of organizing can be avoided.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a lot organization technique, and more particularly to a technique in which a plurality of works are organized into lots under predetermined conditions. For example, in a semiconductor manufacturing process, semiconductor wafers are processed under the same processing conditions. It is related to effective technology used to organize into lots.

[0002]

2. Description of the Related Art Generally, in a semiconductor manufacturing process, a plurality of semiconductor wafers (hereinafter referred to as "wafers") as works are organized into one lot and handled. When the wafers as works are lot-organized in this way, a wafer lot-organizing device or a wafer rearranging device may be used.

Conventionally, such a wafer lot forming and rearranging apparatus is disclosed in Japanese Patent Application Laid-Open No. 62-252148. That is, in this wafer lot forming and rearranging apparatus, the wafer identification number of the wafer is recognized by the recognition camera, and the wafer is moved according to the number, and the rotary stage is rotated, so that the wafer is predetermined. The cassette is configured to be accommodated at a predetermined position, and the lot formation work is automatically performed while reducing the influence on the wafer.

An example of a wafer rearrangement apparatus other than the above is described in Japanese Patent Laid-Open No. 60-201641.

By the way, for a product suitable for mass production of a small variety of products such as a semiconductor memory device (memory) such as a RAM (random access memory), lot formation is carried out at the time of loading a wafer as a work, There is little need to reorganize the lot.

However, for products requiring high-mix low-volume production, such as mask ROM (read only memory) and specially ordered semiconductor integrated circuit devices (hereinafter referred to as ASICs), wafer lines as works are used. If the lots organized at the time of input are kept as they are, productivity will be extremely reduced. That is, in mask ROMs and ASICs, many kinds of wafers of one kind do not reach the normal number of wafers per lot (25 pieces), so that the production line handling 25 pieces per lot is not fully utilized. .

Therefore, it is conceivable to increase the productivity by executing the following lot organization method after the wafer is loaded. For example, when a mask ROM or ASIC product wafer is put into a custom process after passing through the master process, one lot of wafers in the master process is divided into a plurality of groups according to the processing conditions of the custom process. By synthesizing groups having the same processing conditions into one lot, handling in the custom process is performed in units of 25 sheets per lot as much as possible. After passing through the custom process, the synthesized lots are re-divided, and the wafers that have been subjected to the same treatment are re-synthesized and reorganized into 25 lots as much as possible.

Then, such lot organization after the wafer is loaded can be executed by using a lot organization apparatus having a wafer identification code recognition apparatus and a data processing apparatus for processing this recognition information as data. Conceivable. For example, when implementing the lot dividing method, it is considered that the following work will be performed.

(1) First, the cassette containing the wafer to be divided is set on the loading side, and the empty cassette as the division destination is set on the unloading side.

(2) Information regarding the set division-source lot is input to the computer of the lot organization device, and information regarding the division-destination lot to be organized by division is also input to the computer.

(3) Then, by the start switch,
When the division organization sequence is started, one wafer is addressed from the division source cassette to the wafer identification code recognition device and the wafer identification code is recognized. The recognized wafer identification code is input to the computer.

(4) Based on the inputted wafer identification code, the division destination cassette is designated by the computer. The wafer is accommodated in the designated division cassette by the handling device.

[0013]

However, in the above-described lot organization method, since the mixture generated by the lot organization work cannot be detected, there is a risk of producing a defective product.

For example, as a knitting condition, when a condition other than the same kind is prohibited, even if a different kind is erroneously set in the cassette, the knitting sequence proceeds as it is.

Further, even if the input of the information concerning the lot composition is properly executed, even if the set cassette is incorrect, the error cannot be detected and the composition sequence proceeds as it is.

Even if the information regarding the lot organization is properly executed and the setting of the cassette is properly executed, if the different kinds of wafers are already mixed in the cassette, the mixing is performed. Cannot be detected, the knitting sequence will proceed as it is.

An object of the present invention is to provide a lot organization technique capable of detecting a lot mixture due to a lot organization error in a lot organization work and preventing product defects due to the lot mixture.

The above and other objects and novel features of the present invention will be apparent from the description of this specification and the accompanying drawings.

[0019]

The typical ones of the inventions disclosed in the present application will be outlined below.

That is, in a lot organization method in which a plurality of works are organized into lots under predetermined conditions, each work is provided with a unique optically readable identification code. In the lot organization method in which the identification code attached to each work is read, and the work group is organized in each lot according to preset conditions based on the read identification code, the lot formation is performed before the lot formation. The original and composition data are entered, and after the completion of the input, it is checked whether the entered composition data and the entered composition data match, and if they do not, composition It is characterized in that the sequence is stopped.

Further, data of a knitting source and a knitting destination are input before the lot knitting, and when the identification code is read, the identification code actually read and the data of the work of the knitting source input earlier are read. It is characterized in that whether or not they match, and if there is no match, the knitting sequence is stopped.

[0022]

According to the above-mentioned first means, the data of the knitting source and the knitting destination are input before the lot knitting, and after the input is completed, the data of the knitting source input and the data of the knitting destination input. Are checked, and if they do not match, the knitting sequence is stopped, so input mistakes at the time of previous data entry and improper lot knitting work due to setting mistakes of the knitting source work are avoided. can do.

Further, according to the above-mentioned second means, the data of the knitting source and the knitting destination are input before the lot knitting,
When reading the identification code attached to the work, it is checked whether the actually read identification code and the data of the work of the knitting source entered earlier match, and if there is no match, the sequence Since the setting is stopped, it is possible to avoid the setting error of the knitting source work and the inadequacy of the lot knitting work due to the mixing of works of different lots in the knitting source work group.

[0024]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a schematic view showing a wafer lot forming apparatus according to an embodiment of the present invention, and FIG. 2 is a perspective view thereof. FIG. 3 is a schematic plan view showing a wafer. FIG. 4 is a perspective view showing the cassette. FIG. 5 and subsequent figures are explanatory diagrams showing a wafer lot organization method according to an embodiment of the present invention.

In the present embodiment, the wafer lot formation apparatus 11 according to the present invention sequentially reads the identification code attached to the surface of the wafer 1 as a work as shown in FIG. 25 wafers as
Are organized into one lot.

As shown in FIG. 3, the identification code 4
Is arranged at a position opposite to the orientation flat 3 on the first main surface 2 of the wafer 1, and is drawn by numbers and English letters by using a means such as an etching method or a laser marking method.

In the present embodiment, the identification code 4 is an identification code (hereinafter referred to as a lot code) 5 for displaying the lot number of the wafer 1, and an identification code (hereinafter, referred to as a lot code) for displaying the individual wafer number in the lot. Wafer code) 6 and a product name identification code (hereinafter referred to as product name code) 7 that displays the name of the product to be manufactured by this wafer.

Wafer lot forming apparatus 1 according to the present embodiment
1 includes a machine frame 12 formed in a substantially box shape, and on this machine frame 12, four loading / unloading type stations 13, 14, 15,
16, an articulated robot (hereinafter referred to as a robot) 21 as a transfer device, and an identification code reading device 30 are provided.

The first station 13 is arranged at one side position in the central portion of the machine frame 12. The second station 14, the third station 15 and the fourth station 16 are arranged side by side on one side of the machine frame 12. In FIG. 1, each station 13, 14, 1 is represented as typically represented by the first station 13.
Reference numerals 5 and 16 are provided with an elevator 18 controlled by a controller 19 so that one wafer 1 can be handed over to an empty cassette 20 placed on the elevator 18 under the control of the elevator 18. Has been done.

By the way, as shown in FIG. 4, each cassette 20 has a large number of holding grooves (slots) S1 to S.
A large number of wafers (25 in this embodiment) are arranged in a row, and a plurality of wafers (one lot in this embodiment) are inserted into the holding grooves. Are to be stored in a regularly arranged state.

The robot 21 serving as a transfer device has a machine frame 12
It is arranged at one side position in the upper central portion. The robot 21 has an arm 2 controlled by a controller 22.
3, a grip 24 for holding the wafer 1 is provided at the tip of the arm 23. By operating the arm 23 controlled by the controller 22, the robot 21 picks up one wafer 1 from the actual cassette at the predetermined station at the grip 24 and conveys it to the identification code reading device 30, and further, the wafer 1 is identified by the identification code. It is configured to be conveyed from the reading device 30 to another station and accommodated in a slot of an empty cassette held in the station.

The identification code reading device 30 includes a machine frame 12
It is arranged at a substantially central position in the upper rear portion. The identification code reading device 30 is provided with an alignment device 31, and the alignment device 31 is configured to hold the wafer 1 and perform alignment work and yawing correction work via the controller 32. There is.

A stand is erected on the machine frame 12 on the alignment device 31, and the lighting device 3 is mounted on the stand.
3 and a television camera 35 as an image capturing device are supported. A light source 34 is optically connected to the illuminating device 33, and the light from the light source 34 is dimmed by the illuminating device 33 toward the stage of the alignment device 31 for irradiation. The television camera 35 is configured to capture the identification code 4 of the wafer 1 illuminated on the stage of the alignment apparatus 31.

An identification code recognition device 36 is electrically connected to the television camera 35. The identification code recognition device 36 is composed of an image processing device and the like, and the television camera 3 is provided.
The identification code 4 attached to the wafer 1 can be recognized based on the image pickup signal from the image pickup device 5. A monitor 37 is connected to the identification code recognition device 36,
The monitor 37 monitors the shooting condition of the television camera 35.

Further, the identification code recognizing device 36 is connected to a memory 38 as a recording means for successively recording the identification code, and the memory 38 successively outputs the identification code 4 recognized by the identification code recognizing device 36. It is configured to record. This memory 38 is connected to a data processing device 40 constructed from a computer or the like, and the data recorded in the memory 38 is read out by the data processing device 40 at any time. The memory 38 may be installed on the data processing device 40 side.

In the present embodiment, the data processing device 40 is configured to execute various calculations, collation and command operations, which will be described later, based on the data read from the memory 38.

Here, the lot organization device 1 according to the above configuration
The identification code reading operation of No. 1 will be described in advance. In the wafer lot formation device 11, the actual cassette 17 in which the wafers 1 that have passed through the master process are stored is, for example, the first station 1 out of the four stations 13 to 16.
3 on the elevator 18. When the real cassette 17 is supplied onto the elevator 18 of the first station 13, the robot 21 operates the arm 23 to address one wafer 1 in the real cassette 17, holds it with the grip 24, and takes it out from the real cassette 17. , And is sequentially supplied to the stage 31 of the first identification code reading device 30.

On the stage of the alignment device 31, the wafer 1 is supported horizontally, and the illumination device 33 of the identification code reading device 30 and the television camera 3 are provided.
Faced with 5. When the wafer 1 is faced to the television camera 35, the identification code 4 is read by the identification code reading device 30 according to the flow chart shown in FIG.
Is read.

The identification code 4 thus read
Is recorded in the memory 38 connected to the identification code recognition device 36. Then, based on the recorded data, a wafer knitting operation is performed as described later. The image captured by the television camera 35 is displayed on the monitor 37 and is monitored by the operator as needed.

When the identification code 4 is read,
The wafer 1 is, for example, the second station 1 designated by the controller 22 among the first to fourth stations 13 to 16.
4 is carried by the robot 21 and is inserted into a predetermined slot Sn in the empty cassette 20 supplied onto the elevator 18 of the station 14 as shown in FIG.

Now, for example, the identification code reading device 30
When the number of the wafer code 6 of the identification code 4 read by N is N0.1, the elevator 18 is sent one pitch by the instruction of the controller 19 of the second station 14 that has been transported, and the elevator 18 is moved to the first position in the empty cassette 20. 1
The slot S1 is set to the insertion operation position S0. Then, when the first slot S1 is set to the insertion operation position, the wafer code N transferred by the robot 21.
O. One wafer 1 is inserted into this first slot S1.

Next, when the number of the wafer code 6 of the identification code 4 read by the identification code reading device 30 is N0.3, the second station 1
In response to a command from the controller 19 of No. 4, the elevator 18 is further fed by two pitches, and the third slot S3 of the empty cassette 20 is set to the insertion operation position S0. Subsequently, the wafer code N transferred by the robot 21
The wafer 1 of 0.3 is inserted into the third slot S3.

Next, the number of the wafer code 6 of the identification code 4 read by the identification code reading device 30 is NO. If it is 2, the elevator 18 is sent so as to be returned by one pitch according to a command from the controller 19 of the second station 14, and the second in the empty cassette 20 is sent.
The slot S2 is set to the insertion operation position S0. Subsequently, the wafer code N transferred by the robot 21
The wafer 1 of 0.2 is inserted into the second slot S2.

By repeating such an operation, the wafer 1 group of the designated wafer code 6 is moved into the empty cassette 20 of the second station 14 for each wafer code 6.
It is also possible to arrange and accommodate the slots according to the slot numbers. That is, in such a case, the wafer of wafer code N0.1 is stored in the first slot S1.
The wafer having the wafer code N0.2 is placed in the second slot S2, and the wafer code N0. That is, n wafers have been inserted.

With the above operation, the identification code reading work and the lot organization work are carried out. At the same time as these works, the processing of each wafer and the lot in the memory 38 are performed in the memory 38 based on the reading data of the identification code reading device 30. A history file is virtually created (not shown).

Next, the operation of the wafer lot formation device 11 having the above-described configuration will be described to use the wafer lot formation device according to the embodiment of the present invention. The case will be described with reference to the flowcharts of FIGS. 6 and 8.

Further, here, a mask ROM which is a product
A case will be described in which the wafer lot organization device 11 having the above-described configuration is used to perform a wafer lot organization method on a wafer group for which a (read-only memory) is manufactured. As described above, the mask ROM may be produced in various kinds in small quantities, and in the so-called pre-process, the pre-process is common as the master process or the base process, and the post-process is individualized or dedicated as the castas process. Has been converted.

Although not shown in FIGS. 6 and 8,
Before being put into the master process of the production line, the identification code 4 including the lot code 5, the wafer code 6 and the product name code 7 is attached to each wafer 1 in the step of attaching the identification code and the lot packing process in the cassette. Or suitable means such as laser engraving or the like. Then, 25 wafers 1 per lot are stored in the cassette for each lot code 5. In the case of normal wafer production, 25 per lot
Although integrated production is performed with a single wafer, it is desirable to reorganize lots in a custom process in the production of mask ROM, for example.

Therefore, in the mask ROM production line, a cassette group in which a predetermined number (25 sheets) of wafers 1 are stored for each lot is passed through the master process and then put into the first process of the custom process. The lot reorganizing apparatus 11 for wafers reorganizes lots according to processing conditions.

Here, first, as shown in FIG. A wafer group of an actual cassette (hereinafter referred to as a first actual cassette M1) accommodating a wafer group of one master lot is divided into a first empty cassette A, a second empty cassette B, and a third empty cassette C. The case will be described. The first real cassette M1 contains 25 wafers for manufacturing the first type, and the lot code is NO.
It is 1. One wafer of the first type is stored in the first empty cassette A.
It is assumed that 0 wafers are accommodated, 10 wafers of the first type are accommodated in the second empty cassette B, and 5 wafers of the first type are accommodated in the third empty cassette C.

First, according to the flow chart shown in FIG. 6, as shown in FIG. An actual cassette M1 containing a wafer group of one master lot M1 is set in the first station 13 of the lot formation device 11. Further, the first empty cassette A is set in the second station 14, the second empty cassette B is set in the third station 15, and the third empty cassette C is set in the fourth station 16.

At this time, the product name code and the number of wafers displayed on the first original cassette M1 of the division source are input to the data processing device 40 as data on the lot of the division source. In this embodiment, the first real cassette M1 to be divided
The product name of the wafer in is the first type, and the number of wafers is 25.

Incidentally, the first actual cassette M1 is provided with a so-called control card for displaying the history of the accommodated wafers, and this card contains the number of wafers currently accommodated in the actual cassette M1 and the product name code. , Displayed as part of production information. Therefore, by inputting the information displayed on the control card, the product name code and the number of wafers relating to the lot stored in the actual cassette M1 can be input to the data processing device 40. Then, the information can be input to the data processing device 40 by the operator operating the keyboard while reading the control card.
In addition, bar code readers and optical character readers (OC
It is also possible to automatically input information by reading the information on the control card using a pattern reading device such as R).

In the data processing device 40, the product name code and the number of wafers to be divided and stored in the first empty cassette A, the second empty cassette B, and the third empty cassette C, which are the division destinations, respectively, are It is entered as data regarding lots. In the present embodiment, the product name of the wafer to be accommodated in the first empty cassette A is the first type, and the number of wafers is 10. The product name of the wafers to be accommodated in the second empty cassette B is the first type, and the number of wafers is 10. Furthermore, the product name of the wafers to be accommodated in the third empty cassette C is the first type, and the number of wafers is 5.

Incidentally, the data regarding the wafer to be divided is automatically input based on the data from the host computer (not shown) to which the data processing device 40 is connected. That is, a production plan or the like is preset in the host computer, and data relating to the lot organization plan based on this production plan or the like is transmitted to the data processing device 40. Then, the data processing device 40 appropriately designates the first empty cassette A, the second empty cassette B, or the third empty cassette C of the division destination based on the transmitted data regarding the lot organization plan, and
The name and number of wafers to be accommodated in each of the empty cassettes A, B and C are designated.

After the above data input, the data processor 40 inputs the product name and number of wafers of the input division source,
It is checked whether or not the input product name and total number of wafers to be divided match. When the product name and the number of wafers of the division source and the product name and the total number of the wafers of the division target match, the data processing device 40 advances the division work sequence shown in FIG. .

However, if they do not match, the data processing device 40 stops the division work sequence.
That is, when the product name and number of wafers to be divided and the product name and total number of wafers to be divided do not match,
At the time of previous data input to the data processing device 40,
It is estimated that there is an input error or the setting of the first actual cassette M1 is incorrect, so that the sequence proceeds thereafter. In other words, if the division work sequence proceeds with an error, proper lot organization cannot be ensured and desired production cannot be ensured, so that the occurrence of this situation can be avoided.

In this embodiment, the product name of the wafer in the first actual cassette M1 to be divided is the first product type, and the number of wafers is 25. Further, the product name of the wafer in the first empty cassette A of the first division destination is the first type, the number of wafers is 10, and the product name of the wafer in the second empty cassette B of the second division destination is the first type. Then, the number of wafers is 10, the product name of the wafer in the third empty cassette C of the third division destination is the first type, and the number of wafers is 10. Therefore, when the product names of the division source and the division destination are the same in the first type and the number of the division source and the total number of the division destination are 25, the division work sequence proceeds. It will be. However, if there is a mismatch, the split work sequence will be stopped.

Then, one wafer is delivered from the first actual cassette M1 set in the first station 13 according to the flow chart shown in FIG.
Identification code 4 by the code reading device 30 described above
Are sequentially read while the first, second, and third empty cassettes A designated by the data processing device 40 are divided,
They are changed to B and C respectively.

For example, N in the first actual cassette M1
O. 1-NO. After the identification code 4 is read by the reading device 30, 10 wafers of 10 are transferred to the first empty cassette A. Further, the NO. 11-NO. After 10 wafers of 20 are read with the identification code 4 by the reading device 30,
It is transferred to the second empty cassette B. Further, the NO. 21-NO. After the identification code 4 is read by the reading device 30, the five wafers 25 are transferred to the third empty cassette C.

At the time of reading the identification code 4 of each wafer, the data processing device 40 uses the product name code 7 and the lot code 5 of the read identification code 4 and the product name code of the previously input division source wafer. And it is checked whether the lot code and the lot code match. When the read product name code 7 and lot code 5 match the input product name code and lot code of the division source, the data processing device 40 causes the division work sequence shown in FIG. Is advanced.

However, if they do not match, the data processing device 40 stops the division work sequence.
That is, when the read product name code 7 and lot code 5 do not match the input product name code and lot code of the division source, there is an error in the setting of the first actual cassette M1, or Since it is estimated that wafers of different lots are mixed in the one actual cassette M1, the progress of the division work sequence thereafter is stopped. In other words, if the division work sequence proceeds with an error, proper lot organization cannot be ensured and desired production cannot be ensured, so that the occurrence of this situation can be avoided.

In this embodiment, the product name of the wafer in the first actual cassette M1 to be divided is the first product type, and the lot code is N0.1. Therefore, all the wafers to be read by the code reading device 30 should have the product name code 7 as the first type and the lot code N0.1. That is, when the product name code 7 of the wafer read by the code reading device 30 is the first type and the lot code is N0.1, the division work sequence is advanced. However, the code reading device 3
When the product name code 7 of the wafer read by 0 is not the first type or the lot code is not N0.1, the division work sequence is stopped.

Next, the wafer combining operation will be described with reference to FIGS. 8 and 9. Here, as shown in FIG. The wafer group of the actual cassette (hereinafter referred to as the second actual cassette M2) accommodating the wafer group of the two master lots, NO. A wafer group of an actual cassette (hereinafter, referred to as a third actual cassette M3) accommodating wafer groups of 3 master lots, and NO. A case will be described in which a wafer group of an actual cassette (hereinafter, referred to as a fourth actual cassette M4) accommodating a wafer group of four master lots is transferred to the fourth empty cassette D and synthesized.

The second real cassette M2 contains 25 wafers for manufacturing the second product, and the third real cassette M3 contains 25 wafers for manufacturing the third product. It is assumed that the fourth actual cassette M4 contains 25 wafers for manufacturing the third type. In addition, the fourth empty cassette D contains 10 wafers of the second type,
It is assumed that 10 wafers of the third type should be accommodated and 5 wafers of the fourth type should be accommodated.

First, by the synthesizing work sequence shown in FIG. 8, the fourth empty cassette D is moved to the first station 1 in the lot forming apparatus 11 as shown in FIG.
Set to 3. Further, the second actual cassette M2 is set in the second station 14, the third actual cassette M3 is set in the third station 15,
The fourth actual cassette M4 is set in the fourth station 16.

At this time, the product name code of the wafers to be accommodated in the fourth empty cassette D to be combined and the number of wafers are input to the data processing device 40 as data regarding the lot to be combined. In the present embodiment, the fourth empty cassette D, which is the synthesis destination, accommodates 10 wafers of the second kind, 10 wafers of the third kind, and 5 wafers of the fourth kind.

Further, the data processing device 40 has the product name code and the number of wafers to be transferred from the second original cassette M2, the third actual cassette M3, and the fourth actual cassette M4, which are synthesis sources, to the fourth empty cassette D, respectively. , Is input as data regarding the lot to be divided. In this embodiment, the product name of the wafer to be transferred from the second actual cassette M2 to the fourth empty cassette D is the second type, and the number of wafers is 10. The product name of the wafer to be transferred from the third actual cassette M3 to the fourth empty cassette D is the third type, and the number of wafers is 10
It is a sheet. Further, the product name of the wafer to be transferred from the fourth actual cassette M4 to the fourth empty cassette D is the fourth type, and the number of wafers is five.

By the way, the data regarding these wafers of the synthesis source and the synthesis destination are automatically input based on the data from the host computer (not shown) to which the data processing device 40 is connected. . That is, a production plan or the like is preset in the host computer, and data relating to the lot organization plan based on this production plan or the like is transmitted to the data processing device 40. Then, the data processing device 40, based on the transmitted data regarding the lot organization plan, synthesizes the actual cassette M.
2, M3, or M4 is designated as appropriate, and the product name and the number of wafers to be accommodated in the fourth empty cassette D are designated.

After the above data input, the data processor 40 inputs the product name and the number of the input wafers to be combined,
It is checked whether or not the input product name and total number of the original wafers match. When the product name and the number of wafers to be combined match the product name and total number of the wafers to be combined, the data processing device 40 advances the combination operation sequence shown in FIG.

However, if they do not match, the data processing device 40 stops the composition work sequence.
That is, when the product name and the number of wafers to be combined do not match the product name and total number of the wafers to be combined,
At the time of previous data input to the data processing device 40,
There is an input error, or the real cassette M2 of the synthesis source,
Since it is estimated that the setting of M3 or M4 is incorrect, the progress of the synthesis work sequence thereafter is stopped. In other words, if the synthesizing work sequence proceeds with an error, proper lot organization cannot be ensured and desired production cannot be ensured, so that this situation is avoided in advance.

Next, the second to fourth stations 14, 1
Actual cassette M set to 5 and 16 respectively
One wafer is delivered from 2, M3, and M4, and the identification code 4 is sequentially read by the code reading device 30 described above, and the number of wafers designated by the data processing device 40 is the fourth empty space of the synthesis destination. They are transferred to cassette D respectively.

For example, in the second actual cassette M2 set in the second station 14, the NO. 1 to N
O. After the identification code 4 is read by the reading device 30, 10 wafers of 10 are transferred to the fourth empty cassette D set in the first station.
Further, the No. in the third actual cassette M3 set in the third station. 1-NO. After the identification code 4 is read by the reading device 30, 10 wafers of 10 are transferred to the fourth empty cassette D. Further, the NO. 4 in the fourth actual cassette M4 set in the fourth station. 1-NO. Five wafers No. 5 are read with the identification code 4 by the reading device 30, and then transferred to the fourth empty cassette D.

At the time of reading the identification code 4 of each wafer, the data processing device 40 uses the product name code 7 and the lot code 5 of the read identification code 4 and the product name code of the original wafer to be input. And it is checked whether the lot code and the lot code match. If the read product name code 7 and lot code 5 match the product name code and lot code of the composition source, the data processing device 40 advances the composition work sequence shown in FIG. It

However, if they do not match, the data processing device 40 stops the composition work sequence.
That is, when the read product name code 7 and lot code 5 and the original product name code and lot code do not match, the actual cassettes M2, M3, and M4
Setting is wrong or the actual cassette M
Since it is estimated that wafers of different lots are mixed in 2, M3, and M4, the progress of the synthesis work sequence thereafter is stopped. In other words, if the synthesizing work sequence proceeds with an error, proper lot organization cannot be ensured and desired production cannot be ensured, so that this situation is avoided in advance.

In this embodiment, the product name of the wafer in the second real cassette M2 of the first synthesis source is the first product type, and the lot code is N0.2. Therefore, the wafer delivered from the second actual cassette M2 has the second product name code 7 to be read by the code reading device 30.
The lot code should be N0.2 in the product type. That is, the product name code 7 of the wafer read by the code reading device 30 is the second type, and the lot code is N0.
If 2, then the composition work sequence will proceed. However, when the product name code 7 of the wafer read by the code reading device 30 is not the second type or the lot code is not N0.2, the synthesis work sequence is stopped.

The same applies to the third real cassette M3 of the second synthesizing source and the fourth real cassette M4 of the third synthesizing source as well as the second real cassette M2 of the first synthesizing source.

According to the above-mentioned embodiment, the following effects can be obtained. (1) After inputting the data of the knitting source and the knitting destination, it is checked whether or not the input product name and number of the knitting source wafers match the input product name and total number of the knitting destination wafers. By stopping the knitting sequence when they do not match, it is possible to avoid an improper lot knitting operation due to an input error at the time of previous data input or an actual cassette setting error.

(2) When the identification code of each wafer is read at the time of executing the knitting work, the product name code and the lot code of the read identification codes and the product name code and the lot code of the wafer that is the knitting source inputted earlier Check if they match with each other, and if they do not match, stop the knitting sequence to set the actual cassette or the lot due to mixed wafers in different lots Inappropriate knitting work can be avoided.

(3) By preventing the mistakes in the lot organization work due to the above (1) and (2), it is possible to avoid mixing of wafer types as workpieces with each other, resulting in yield and productivity. Can be improved.

(4) Since each wafer as a work is given a unique identification code, it is possible to identify wafers organized in one lot.
The wafer group in the lot can be divided into a plurality of groups, and the lot configuration can be reorganized.

(5) By storing the identification code of each wafer organized in each lot in the recording means,
Even if the divided group is synthesized in another lot, the wafers included in the lot after the synthesis can be distinguished from each other, so that the lot can be re-divided and re-synthesized.

(6) By realizing the lot reorganization, the optimum lot can be organized in the mask ROM, ASIC, etc. wafers of high-mix low-volume production, which reduces productivity in high-mix low-volume production. Can be prevented.

(7) Further, by reducing the number of lots, it is possible to realize a reduction in setup time, a reduction in work completion, a reduction in the in-process lot storage location, and the like.

Although the invention made by the present inventor has been specifically described based on the embodiments, the present invention is not limited to the above embodiments, and various modifications can be made without departing from the scope of the invention. Needless to say.

For example, the specific structure of the wafer lot formation device and the specific structure of the wafer lot formation method are not limited to those in the above-described embodiment, but can be appropriately selected according to the usage conditions, environment, and the like. .

The identification code reading device for reading the identification code attached to the wafer is not limited to one unit, and may be two or more units.

Further, the number of stations for loading and unloading wafers is not limited to four, and two or more stations may be installed.

In the above description, the case where the invention made by the present inventor is mainly applied to the wafer lot organization technology which is the field of application which is the background of the invention has been described.
Not limited to this, data storage media such as floppy disks, hard disks, and compact disks, liquid crystal panels, and other lot organization technologies for work that are produced in lots and can be assigned identification codes Can be applied.

[0090]

The effects obtained by the typical ones of the inventions disclosed in the present application will be briefly described as follows.

The data of the knitting source and the knitting destination are input before the lot knitting, and after the input is completed, it is checked whether the data of the knitting source input and the data of the knitting destination input match. By stopping the knitting sequence when they do not match, it is possible to avoid an improper lot knitting work due to an input error in the previous data input or a setting error of the knitting source work.

The data of the knitting source and the knitting destination are input before the lot knitting, and when the identification code attached to the work is read, the identification code actually read and the data of the work of the knitting source input earlier are read. Check whether or not they match, and if they do not match, stop the knitting sequence to set the knitting source work, or that the work group of the knitting source contains workpieces with different lots. It is possible to avoid the inadequacy of the lot organization work due to.

By preventing the mistakes in the lot organization work described above, it is possible to avoid mixing of the work types with each other, and as a result, the yield and the productivity can be improved.

[Brief description of drawings]

FIG. 1 is a schematic view showing a wafer lot organization device according to an embodiment of the present invention.

FIG. 2 is a perspective view thereof.

FIG. 3 is a schematic plan view showing a wafer.

FIG. 4 is a perspective view showing a cassette.

FIG. 5 is a flowchart showing an operation of reading an identification code.

FIG. 6 is a flowchart showing a lot dividing method when the lot organization device according to the embodiment of the present invention is used.

FIG. 7 is a schematic diagram thereof.

FIG. 8 is a flowchart showing a lot combining method when the lot organization device according to the embodiment of the present invention is used.

FIG. 9 is a schematic diagram thereof.

[Explanation of symbols]

1 ... Wafer, 2 ... First main surface, 3 ... Orientation flat, 4 ... Identification code, 5 ... Lot code, 6 ... Wafer code, 7 ... Product name code, 11 ... Wafer lot forming device, 12 ... Machine frame, 13 ... 1st station, 14 ... 2nd station, 15 ... 3rd station, 16 ... 4th
Station, 17 ... Actual cassette, 18 ... Conveyor, 1
9 ... Controller, 20 ... Empty cassette, 21 ... Robot, 22 ... Controller, 23 ... Arm, 24 ... Grip, 30 ... First identification code reading device, 31 ... Alignment device, 32 ... Controller, 33 ... Illumination device, 3
4 ... Light source, 35 ... Television camera, 36 ... Identification code recognition device, 37 ... Monitor, 38 ... Memory, 40 ... Data processing device, M1 ... First real cassette, M2 ... Second real cassette, M3 ... Third real cassette , M4 ... 4th real cassette, A
... 1st empty cassette, B ... 2nd empty cassette, C ... 3rd empty cassette, D ... 4th empty cassette.

Claims (4)

[Claims] 1. A lot organization method in which a plurality of works are organized into lots according to predetermined conditions, each work is provided with a unique optically readable identification code,
After that, at the time of lot organization, the identification code attached to each work is read respectively, and in the lot organization method in which a work group is organized in each lot for each preset condition based on the read identification code, The data of the knitting source and the knitting destination are input before the lot knitting, and after the input is completed, it is verified whether or not the data of the knitting source input and the data of the knitting destination input are matched and do not match. The lot formation method is characterized in that the formation sequence is stopped. 2. A lot organization method in which a plurality of works are organized into lots according to predetermined conditions, each work is provided with a unique optically readable identification code,
Thereafter, at the time of lot organization, the identification code attached to each work is read respectively, and in a lot organization method in which a work group is organized in each lot for each preset condition based on the read identification code, Data of the knitting source and the knitting destination are input before the lot knitting, and at the time of reading the identification code, whether or not the actually read identification code and the data of the knitting source input earlier match each other. A lot forming method characterized in that the knitting sequence is stopped in the case of collation and inconsistency. 3. A lot forming apparatus in which a plurality of works are formed into lots for each predetermined condition, and an actual cassette storing a plurality of works each having a unique optically readable identification code is supplied. Loader, an unloader to which a cassette is supplied separately from the loader, a reading device that optically reads the identification code attached to each work, and a work is taken out from the actual cassette of the loader to identify the work. A conveying device that conveys the work whose identification code is read to the cassette of the unloader while being conveyed to the code reading device, and a data processing device that is connected to the identification code reading device and into which lot organization data is input. The data processing device is equipped with data of the organization source and organization destination before the lot organization. After the input is completed, it is checked whether the input knitting source data and the input knitting destination data match, and if they do not match, the knitting sequence is stopped. Lot formation device characterized by being performed. 4. A lot forming apparatus in which a plurality of works are formed into lots for each predetermined condition, and an actual cassette storing a plurality of works each having a unique optically readable identification code is supplied. Loader, an unloader to which a cassette is supplied separately from the loader, a reading device that optically reads the identification code attached to each work, and a work is taken out from the actual cassette of the loader to identify the work. A conveyance device that conveys the work whose identification code has been read to the cassette of the unloader while being conveyed to the code reading device, and a data processing device that is connected to the identification code reading device and into which lot organization data is input. The data processing device actually reads the identification code when reading the identification code. It is characterized in that it is configured to check whether or not the identified code and the data of the work of the knitting source previously input match, and if they do not match, stop the knitting sequence. Lot formation device.