JPH07109450B2 - Optical axis adjustment method for semiconductor lasers and optical fibers - Google Patents
Optical axis adjustment method for semiconductor lasers and optical fibersInfo
- Publication number
- JPH07109450B2 JPH07109450B2 JP12244289A JP12244289A JPH07109450B2 JP H07109450 B2 JPH07109450 B2 JP H07109450B2 JP 12244289 A JP12244289 A JP 12244289A JP 12244289 A JP12244289 A JP 12244289A JP H07109450 B2 JPH07109450 B2 JP H07109450B2
- Authority
- JP
- Japan
- Prior art keywords
- optical axis
- holder
- semiconductor laser
- optical
- optical fiber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Optical Couplings Of Light Guides (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、半導体レーザの光軸と光ファイバ光軸を合わ
せる半導体レーザ・光ファイバの光軸調整方法に関す
る。TECHNICAL FIELD The present invention relates to a semiconductor laser / optical fiber optical axis adjusting method for aligning an optical axis of a semiconductor laser with an optical axis of an optical fiber.
第3図は従来の半導体レーザ・光ファイバ光軸調整方法
の一例を示すフローチャート、第4図(a),(b),
(c)はそれぞれ第3図の方法に用いる光軸調整装置の
斜視図、要部の正面図および要部の平面図である。FIG. 3 is a flowchart showing an example of a conventional semiconductor laser / optical fiber optical axis adjusting method, and FIGS. 4 (a), (b),
(C) is a perspective view, a front view of a main part and a plan view of the main part of the optical axis adjusting device used in the method of FIG. 3, respectively.
第3図に示す手順S11では、半導体レーザを保持しホル
ダ固定沿具11に固定された第1のホルダ12と光ファイバ
15の端部を保持しXYステージ13,14上に固定された第2
のホルダ16とを互いの光軸に垂直な相対するホルダ端面
を接触させ、ホルダ固定治具11の3つのピン穴18を3本
の加圧アーム17に設けたテーパピン19で加圧し、ホルダ
端面を密着押圧状態とする。In step S11 shown in FIG. 3, the semiconductor laser is held and the first holder 12 fixed to the holder fixing tool 11 and the optical fiber.
The second, which holds the end of 15 and is fixed on the XY stages 13 and 14
The holder 16 and the holder 16 are brought into contact with each other at the holder end surfaces which are perpendicular to each other, and the three pin holes 18 of the holder fixing jig 11 are pressed by the taper pins 19 provided on the three pressing arms 17, so that the holder end surface is Are brought into close contact and pressed.
手順S12では、XYステージ13,14を動かして光ファイバ15
を透過した半導体レーザのレーザ光出力が最大となるよ
うに光軸に垂直な面内で第2のホルダ16の位置合わせを
行う。In step S12, the XY stages 13 and 14 are moved to move the optical fiber 15
The second holder 16 is aligned in a plane perpendicular to the optical axis so that the laser light output of the semiconductor laser that has passed through is maximized.
手順S13では、第1のホルダ12の半導体レーザと第2の
ホルダ16の光ファイバ15の光学的な結合効率を測定し、
判定値と比較し、判定値に達しない場合は、手順S12に
戻る。In step S13, the optical coupling efficiency between the semiconductor laser of the first holder 12 and the optical fiber 15 of the second holder 16 is measured,
When compared with the judgment value and the judgment value is not reached, the process returns to step S12.
実際には、光軸調整完了後にレーザ溶接により前記第1
のホルダと前記第2のホルダを固定するが、接触面が浮
いていると溶接時の位置ずれの大きな要因となるため、
第1,第2のホルダ12,16が1kg程度の押圧状態であるよう
にして位置合わせを行う。Actually, after the optical axis adjustment is completed, the first
The holder and the second holder are fixed. However, if the contact surface floats, it will be a major cause of positional deviation during welding.
Positioning is performed so that the first and second holders 12 and 16 are in a pressed state of about 1 kg.
上述した従来の半導体レーザ・光ファイバの光軸調整方
法は、半導体レーザを保持した第1のホルダ12と光ファ
イバ15を保持した第2のホルダ16とを互いに光軸に垂直
な端面で密着押圧状態として光軸に垂直な面間で位置合
わせを行うため、接触面の摩擦抵抗により固定側の第1
のホルダ12が移動側の第2のホルダ16に引きずられて動
き、又ひずみが開放された瞬間にスベリを生じXYステー
ジ13,14の移動量に対する第1のホルダ12と第2のホル
ダ16の相対的ズレ量が一致せず、手順S12の繰り返しと
なり、時間がかかる上、位置合わせの再現性が得られ
ず、概略のピーク位置探索にとどまるという欠点があっ
た。In the above-described conventional method for adjusting the optical axis of the semiconductor laser / optical fiber, the first holder 12 holding the semiconductor laser and the second holder 16 holding the optical fiber 15 are closely pressed by the end faces perpendicular to the optical axis. As the position is aligned between the surfaces perpendicular to the optical axis, the frictional resistance of the contact surface causes
Of the first holder 12 and the second holder 16 with respect to the movement amount of the XY stages 13 and 14 is caused by the second holder 16 on the moving side being dragged and moved, and at the moment the strain is released. The relative deviation amounts do not match, the step S12 is repeated, it takes time, reproducibility of alignment cannot be obtained, and there is a drawback that only a rough peak position search is performed.
本発明の半導体レーザ・光ファイバの光軸調整方法は、
半導体レーザを保持し光軸に垂直な端面を有す第1のホ
ルダと光ファイバを保持し光軸に垂直な端面を有す第2
のホルダとを互いの光軸に垂直な端面で密着押圧状態と
し、前記第1のホルダと前記第2のホルダの少なくとも
一方を光軸方向に微小振動させながら前記光ファイバを
透過した前記半導体レーザのレーザ光出力が最大となる
ように互いの光軸に垂直な端面間で前記第1および第2
のホルダの位置合わせすること特徴とする。A method for adjusting an optical axis of a semiconductor laser / optical fiber according to the present invention,
A first holder that holds a semiconductor laser and has an end face perpendicular to the optical axis, and a second holder that holds an optical fiber and has an end face perpendicular to the optical axis.
Of the semiconductor laser which has passed through the optical fiber while slightly pressing at least one of the first holder and the second holder in the optical axis direction by bringing the holder and the holder into close contact with each other by their end faces perpendicular to each other's optical axis. Of the first and second end faces perpendicular to each other's optical axis so that the laser light output of
The feature is that the holder is aligned.
次に、本発明の実施例について、図面を参照して詳細に
説明する。Next, embodiments of the present invention will be described in detail with reference to the drawings.
第1図は本発明の一実施例を示すフローチャート、第2
図(a),(b)はそれぞれ本実施例に使用する光軸調
整装置の斜視図およびアーム8の斜視図である。FIG. 1 is a flow chart showing an embodiment of the present invention,
(A) and (b) are respectively a perspective view of an optical axis adjusting device and a perspective view of an arm 8 used in this embodiment.
第1図に示す手順S1では、光ファイバ4を保持した第2
のホルダ3をXYステーシ5,6上に固定し、半導体レーザ
を保持した第1のホルダ2をアーム8を介してZステー
ジ7に支持されたホルダ固定治具1に固定した後、Zス
テージ7を垂直に下降させ、光軸に垂直なホルダ2,3の
端面を接触させ、接触後さらに微小ストロークZステー
ジ7を加工させホルダ2,3の端面を密着押圧状態とす
る。In step S1 shown in FIG. 1, the second optical fiber 4 is held.
The holder 3 is fixed on the XY stations 5 and 6, and the first holder 2 holding the semiconductor laser is fixed to the holder fixing jig 1 supported by the Z stage 7 via the arm 8, and then the Z stage 7 Is vertically lowered to bring the end surfaces of the holders 2 and 3 perpendicular to the optical axis into contact with each other, and after the contact, the fine stroke Z stage 7 is further processed to bring the end surfaces of the holders 2 and 3 into close contact with each other.
手順S2では、Zステージ7を微小ストロークより大きい
振幅で微小振動させながらXYステージ5,6を動かして光
ファイバ4を透過したホルダ2に保持された半導体レー
ザのレーザ光出力が最大となるように光軸に垂直な面内
で位置合わせを行う。In step S2, the XY stages 5 and 6 are moved while slightly vibrating the Z stage 7 with an amplitude larger than the minute stroke so that the laser light output of the semiconductor laser held by the holder 2 that has passed through the optical fiber 4 is maximized. Positioning is performed in a plane perpendicular to the optical axis.
手順S3では、第1のホルダ2の半導体レーザと第2のホ
ルダ3の光ファイバ4の光学的な結合効率を測定し、判
定値と比較し判定値に達しない場合は、手順S2に戻る。In step S3, the optical coupling efficiency between the semiconductor laser of the first holder 2 and the optical fiber 4 of the second holder 3 is measured and compared with the judgment value. If the judgment value is not reached, the process returns to step S2.
手順S2において、通常、後工程のレーザ溶接時にホルダ
2,3の接触面が浮いていると光軸ずれの大きな要因とな
りえるため、1kg程度の押圧状態にて光軸に垂直な面間
で位置合わせを行う。例えば分解能1μmのZステージ
7およびアーム8に幅b=20mm,高さh=10mm,長さl=
80mmの長方形断面の鋼材のはりを用いて、Zステージ7
の微小ストロークを5μmに設定すれば約1kgの押圧状
態となる。In step S2, the holder is usually used during laser welding in the subsequent process.
If the contact surfaces of 2 and 3 are floating, it can be a major factor of the optical axis shift, so align the surfaces perpendicular to the optical axis with a pressure of about 1 kg. For example, in the Z stage 7 and the arm 8 having a resolution of 1 μm, the width b = 20 mm, the height h = 10 mm, the length l =
Using a steel beam with a rectangular section of 80 mm, Z stage 7
If the minute stroke of is set to 5 μm, the pressed state will be about 1 kg.
一方、Zステージ7の微小振動については、振動振幅を
10μm(10パルス)に設定し、1kppsのパルスで駆動源
のパルスモータを駆動した場合、約50Hzの微小振動を与
え、ホルダ2,3の接触面が分離する時もある応力振幅を
与えることができる。通常の半導体レーザ・光ファイバ
の組立においては、光軸方向の位置ずれ許容範囲は光軸
に垂直な方向の位置ずれ許容範囲に比べ大きく10μm程
度のずれは結合効率にほとんど影響しないため、10μm
の微小振動は光軸位置合わせに影響せずホルダ2,3の接
触面の摩擦抵抗を低減・開放できる。On the other hand, for the small vibration of the Z stage 7, the vibration amplitude is
When set to 10 μm (10 pulses) and driving the pulse motor of the drive source with a pulse of 1 kpps, a minute vibration of about 50 Hz is given, and a certain stress amplitude can be given even when the contact surfaces of holders 2 and 3 separate. it can. In normal semiconductor laser / optical fiber assembly, the allowable range of misalignment in the optical axis direction is larger than the allowable range of misalignment in the direction perpendicular to the optical axis, and a deviation of about 10 μm has almost no effect on coupling efficiency.
The small vibration of does not affect the alignment of the optical axis, and the frictional resistance of the contact surfaces of the holders 2 and 3 can be reduced and released.
ところで光軸方向の微小振動はパルスステージ以外に超
音波振動子を用いることもでき、この場合には高周波の
微小振動を与えることができる。By the way, for the microvibration in the optical axis direction, an ultrasonic vibrator may be used instead of the pulse stage, and in this case, microvibration of high frequency can be applied.
本発明の半導体レーザ・光ファイバの光軸調整方法は、
半導体レーザを保持した第1のホルダと光ファイバを保
持した第2のホルダとを互いに光軸に垂直な端面で密着
押圧状態とし、光軸に垂直な面内で位置合わせを行う工
程において、第1のホルダと第2のホルダとの少なくと
も一方を光軸方向に微小振動させることにより前記両者
のホルダ接触面の摩擦抵抗を低減・開放できるという効
果がある。A method for adjusting an optical axis of a semiconductor laser / optical fiber according to the present invention,
In the step of bringing the first holder holding the semiconductor laser and the second holder holding the optical fiber into close contact with each other at their end faces perpendicular to the optical axis, and performing alignment in a plane perpendicular to the optical axis, By microvibrating at least one of the first holder and the second holder in the optical axis direction, there is an effect that the frictional resistance of the contact surfaces of the holders can be reduced and released.
第1図は本発明の一実施例を示すフローチャート、第2
図(a)および(b)はそれぞれ本実施例に使用する光
軸調整装置の斜視図およびアーム8の斜視図、第3図は
従来の半導体レーザ・光ファイバ光軸調整方法を示すフ
ローチャート、第4図(a),(b)および(c)はそ
れぞれ第3図に示す方法に使用する光軸調整装置の斜視
図、主要部の正面図および主要部の平面図である。 1,11……ホルダ固定治具、2,12……第1のホルダ、3,16
……第2のホルダ、4,15……光ファイバ、5,13……ステ
ージ、6,14……Yステージ、7……Zステージ、8……
アーム、17……加圧アーム、18……ピン穴、19……テー
パピン。FIG. 1 is a flow chart showing an embodiment of the present invention,
1A and 1B are a perspective view of an optical axis adjusting device and a perspective view of an arm 8 used in this embodiment, respectively. FIG. 3 is a flow chart showing a conventional semiconductor laser / optical fiber optical axis adjusting method, 4 (a), (b) and (c) are respectively a perspective view, a front view of the main part and a plan view of the main part of the optical axis adjusting device used in the method shown in FIG. 1,11 …… Holder fixing jig, 2,12 …… First holder, 3,16
…… Second holder, 4,15 …… Optical fiber, 5,13 …… Stage, 6,14 …… Y stage, 7 …… Z stage, 8 ……
Arm, 17 ... Pressurizing arm, 18 ... Pin hole, 19 ... Taper pin.
Claims (1)
有す第1のホルダと光ファイバを保持し光軸に垂直な端
面を有す第2のホルダとを互いの光軸に垂直な端面で密
着押圧状態とし、前記第1のホルダと前記第2のホルダ
の少なくとも一方を光軸方向に微小振動させながら前記
光ファイバを透過した前記半導体レーザのレーザ光出力
が最大となるように互いの光軸に垂直な端面間で前記第
1および第2のホルダの位置合わせすることを特徴とす
る半導体レーザ・光ファイバの光軸調整方法。1. A first holder, which holds a semiconductor laser and has an end face perpendicular to the optical axis, and a second holder, which holds an optical fiber and has an end face perpendicular to the optical axis, are perpendicular to each other's optical axis. The end face is closely contacted and pressed so that the laser light output of the semiconductor laser transmitted through the optical fiber is maximized while slightly vibrating at least one of the first holder and the second holder in the optical axis direction. A method for adjusting an optical axis of a semiconductor laser / optical fiber, characterized in that the first and second holders are aligned between end faces perpendicular to each other's optical axis.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12244289A JPH07109450B2 (en) | 1989-05-15 | 1989-05-15 | Optical axis adjustment method for semiconductor lasers and optical fibers |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12244289A JPH07109450B2 (en) | 1989-05-15 | 1989-05-15 | Optical axis adjustment method for semiconductor lasers and optical fibers |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH02300706A JPH02300706A (en) | 1990-12-12 |
JPH07109450B2 true JPH07109450B2 (en) | 1995-11-22 |
Family
ID=14835951
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12244289A Expired - Lifetime JPH07109450B2 (en) | 1989-05-15 | 1989-05-15 | Optical axis adjustment method for semiconductor lasers and optical fibers |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH07109450B2 (en) |
-
1989
- 1989-05-15 JP JP12244289A patent/JPH07109450B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH02300706A (en) | 1990-12-12 |
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