JPH07106660A - Piezoelectric device - Google Patents
Piezoelectric deviceInfo
- Publication number
- JPH07106660A JPH07106660A JP5247939A JP24793993A JPH07106660A JP H07106660 A JPH07106660 A JP H07106660A JP 5247939 A JP5247939 A JP 5247939A JP 24793993 A JP24793993 A JP 24793993A JP H07106660 A JPH07106660 A JP H07106660A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- axis
- plate
- vibration
- nodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 claims abstract description 18
- 239000013078 crystal Substances 0.000 claims abstract description 15
- 230000010287 polarization Effects 0.000 claims description 5
- 230000002269 spontaneous effect Effects 0.000 claims description 5
- 230000006866 deterioration Effects 0.000 abstract description 6
- 229910052751 metal Inorganic materials 0.000 abstract description 5
- 239000002184 metal Substances 0.000 abstract description 5
- 230000010355 oscillation Effects 0.000 abstract 4
- 239000000919 ceramic Substances 0.000 description 11
- 238000010586 diagram Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 238000009826 distribution Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は，ニオブ酸リチウム単結
晶を用いた圧電デバイスに関し，特に支持の容易な圧電
方形板のラーメモード振動を利用した圧電振動子，圧電
トランス，および圧電フィルタ等の圧電デバイスに関す
るものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric device using a lithium niobate single crystal, and more particularly to a piezoelectric vibrator, a piezoelectric transformer, a piezoelectric filter, etc. using the Lame mode vibration of a piezoelectric square plate that can be easily supported. The present invention relates to a piezoelectric device.
【０００２】[0002]
【従来の技術】液晶ディスプレイのバックライト点灯や
複写機のトナー帯電用などに，大きな電流値は必要とし
ないが，１ｋＶ程度の高電圧を必要とする機器は多くあ
る。現在，一般的には電磁トランスを使用しているが，
発生電磁ノイズの減少や低消費電力化，機器の小型低背
化などの要求により，圧電トランスの実用化の検討がな
されている。2. Description of the Related Art There are many devices that require a high voltage of about 1 kV, although they do not require a large current value for lighting a backlight of a liquid crystal display or charging a toner of a copying machine. Currently, electromagnetic transformers are generally used,
Due to demands such as reduction of generated electromagnetic noise, reduction of power consumption, and reduction in size and height of equipment, practical application of piezoelectric transformers is being studied.
【０００３】図６は従来の圧電トランスに用いられてい
る圧電振動子の構造の概略斜視図である。図６におい
て，圧電セラミックス矩形板６１には，長さ方向のおよ
そ半分の部分に厚さ方向に互いに対向する電極６２およ
び６３が夫々形成されている。また，圧電セラミックス
矩形板６１の電極６２および６３が形成された部分と反
対側の端面には，端面電極６４が形成されている。圧電
セラミックス矩形板６１は，矢印で示すように，電極６
２，６３の部分は厚さ方向に分極され，端面電極６４と
電極６２，６３との間の部分は，矢印で示すように，圧
電セラミックス矩形板の長さ方向に分極されている。FIG. 6 is a schematic perspective view of the structure of a piezoelectric vibrator used in a conventional piezoelectric transformer. In FIG. 6, a piezoelectric ceramic rectangular plate 61 is provided with electrodes 62 and 63, which are opposed to each other in the thickness direction, at approximately half the length thereof. An end face electrode 64 is formed on the end face of the piezoelectric ceramic rectangular plate 61 opposite to the portion where the electrodes 62 and 63 are formed. The piezoelectric ceramic rectangular plate 61 has electrodes 6 as shown by arrows.
The portions 2 and 63 are polarized in the thickness direction, and the portion between the end surface electrode 64 and the electrodes 62 and 63 is polarized in the length direction of the piezoelectric ceramic rectangular plate as shown by the arrow.
【０００４】図７は図６の圧電振動子を用いた圧電トラ
ンスの動作原理の説明図であり，図７（ａ）は圧電セラ
ミックス矩形板の断面図，図７（ｂ）は圧電セラミック
ス矩形板が長さ方向振動の１波長共振モードで振動して
いる場合の変位分布であり，図７（ｃ）はその時の歪分
布を示している。図７（ａ）において電極６３をアース
端子とし，電極６２に圧電セラミックス矩形板の長さ方
向振動の１波長共振モードの共振周波数に等しい周波数
の電圧を印加すると矩形板は，図７（ｂ）及び（ｃ）に
示すように振動する。この時，電極６３と端面電極６４
との間には圧電効果により電圧を発生する。ここで，電
極６２に印加した入力電圧と端面電極６４に発生した出
力電圧について説明すると，電極６２と電極６３の対向
間隔は電極６３と端面電極６４との間隔に比べて十分に
小さく，電極６２，６３の面積は端面電極６４の面積よ
り充分に大きいため，入力側の静電容量は出力側の静電
容量に比べて充分大きな値となる。従って，入力側に低
い電圧を印加して振動子を振動した場合，出力側に大き
な電圧が発生する。7A and 7B are explanatory views of the operation principle of the piezoelectric transformer using the piezoelectric vibrator of FIG. 6, FIG. 7A is a sectional view of the piezoelectric ceramic rectangular plate, and FIG. 7B is a piezoelectric ceramic rectangular plate. Is the displacement distribution in the case of vibrating in the one-wavelength resonance mode of the longitudinal vibration, and FIG. 7C shows the strain distribution at that time. In FIG. 7 (a), when the electrode 63 is used as a ground terminal and a voltage having a frequency equal to the resonance frequency of the one-wavelength resonance mode of the longitudinal vibration of the piezoelectric ceramic rectangular plate is applied to the electrode 62, the rectangular plate becomes as shown in FIG. 7 (b). And vibrate as shown in (c). At this time, the electrode 63 and the end surface electrode 64
A voltage is generated between and due to the piezoelectric effect. Here, the input voltage applied to the electrode 62 and the output voltage generated at the end surface electrode 64 will be described. The facing distance between the electrode 62 and the electrode 63 is sufficiently smaller than the distance between the electrode 63 and the end surface electrode 64. , 63 is sufficiently larger than the area of the end surface electrode 64, the electrostatic capacitance on the input side is sufficiently larger than the electrostatic capacitance on the output side. Therefore, when a low voltage is applied to the input side to vibrate the vibrator, a large voltage is generated on the output side.
【０００５】[0005]
【発明が解決しようとする課題】図６および図７に示し
た従来の電圧トランスにおいては，振動に影響を与えな
いように振動子を支持するためには図７に示した７１の
振動の節の部分で支持する必要がある。一方，前述した
ように出力電圧は振動振幅の最も大きな端面から取り出
す必要があるため，リード線の重さによる振動子特性の
変化，および，振動によるリード線取り出し部の断線な
ど，特性の劣化と信頼性の低下を招くという問題点があ
り，特に出力端子の取り出し部に導電ゴムなどの振動に
与える影響の小さい材料を用いたり，端面電極として圧
電セラミックスとの密着性の高い電極を形成したりする
などの特別の工程を必要としていた。In the conventional voltage transformer shown in FIGS. 6 and 7, in order to support the vibrator so as not to affect the vibration, the vibration node 71 shown in FIG. 7 is used. Need to support in the part. On the other hand, as described above, the output voltage must be taken out from the end face with the largest vibration amplitude, so there is a change in the oscillator characteristics due to the weight of the lead wire, and deterioration of the characteristics such as disconnection of the lead wire takeout part due to vibration. There is a problem that it causes a decrease in reliability. In particular, a material such as conductive rubber that has a small effect on vibration is used for the extraction part of the output terminal, or an electrode with high adhesion with piezoelectric ceramics is formed as an end surface electrode. It required a special process such as doing.
【０００６】そこで，本発明の技術的課題は，かかる従
来技術の問題点を解決すべく，支持が容易で，支持によ
る特性の劣化と信頼性の低下を来たさない圧電デバイス
を提供することにある。In view of the above, the technical problem of the present invention is to provide a piezoelectric device which is easy to support and does not cause deterioration of characteristics and deterioration of reliability due to the support in order to solve the problems of the prior art. It is in.
【０００７】[0007]
【課題を解決するための手段】本発明によれば，自発分
極軸をＺ軸として有するニオブ酸リチウム圧電単結晶に
おいて，座標軸をＸ軸のまわりに１２０〜１７０°回転
し，さらにそのＺ軸（Ｚ′軸）のまわりに−２０〜２０
°回転した座標系（Ｘ′，Ｙ″，Ｚ′）において，前記
ニオブ酸リチウム圧電単結晶の板面がＸ′軸とＺ軸に平
行になるように切り出された圧電振動板を備え，前記圧
電振動板は，正方形板を一単位として少なくとも１単位
の前記正方形板からなるように形成されるとともに前記
正方形板の四隅が振動の節となるラーメモード振動を行
うことを特徴とする圧電デバイスが得られる。According to the present invention, in a lithium niobate piezoelectric single crystal having a spontaneous polarization axis as the Z axis, the coordinate axis is rotated by 120 to 170 ° around the X axis, and the Z axis ( Around the Z'axis) -20 to 20
In a rotated coordinate system (X ′, Y ″, Z ′), a piezoelectric vibrating plate cut out so that the plate surface of the lithium niobate piezoelectric single crystal is parallel to the X ′ axis and the Z axis is provided. The piezoelectric vibrating plate is formed so that at least one unit of the square plate is a square plate, and the piezoelectric device performs Lame mode vibration in which four corners of the square plate are nodes of vibration. can get.
【０００８】本発明によれば，前記圧電デバイスにおい
て，前記圧電振動板の振動の節のうちの少なくとも１つ
を支持するとともに，前記振動の節のうちの少なくとも
２つに電気的入力端子と電気的出力端子を形成したこと
を特徴とする圧電デバイスが得られる。本発明によれ
ば，前記したいずれかの圧電デバイスにおいて，前記圧
電振動板は，縦と横の寸法比が１：２である矩形板であ
り，前記振動板の表裏をなす両面の電極のうちの少なく
とも一方を二分割して，前記振動板の振動の節のいずれ
かに延長し，電気的入力端子と電気的出力端子とした構
造を有することを特徴とする圧電デバイスが得られる。According to the present invention, in the piezoelectric device, at least one of the vibration nodes of the piezoelectric vibrating plate is supported, and at least two of the vibration nodes are electrically connected to the electrical input terminals. A piezoelectric device is obtained in which a dynamic output terminal is formed. According to the present invention, in any one of the above-described piezoelectric devices, the piezoelectric vibrating plate is a rectangular plate having a longitudinal and lateral dimensional ratio of 1: 2. A piezoelectric device having a structure in which at least one of the two is divided into two and extended to any one of the vibration nodes of the diaphragm to form an electric input terminal and an electric output terminal.
【０００９】[0009]
【作用】一般に，圧電振動子や圧電トランスの支持は，
電気機械的品質係数（Ｑ）の低下や共振周波数の変化を
生じさせないように振動の節で行うことが望ましいが，
実際の支持は必ずしも容易ではない。本発明では，圧電
振動板として面内で等方性の矩形板で，縦と横の寸法比
が整数比のものを用いているので，四隅が振動しないラ
ーメモードと呼ばれる面内振動が存在し，この振動モー
ドを利用して振動子の支持を容易としたものである。[Operation] Generally, the support of the piezoelectric vibrator and the piezoelectric transformer is
It is desirable to do this at the vibration node so that the electromechanical quality factor (Q) does not decrease and the resonance frequency does not change.
Actual support is not always easy. In the present invention, a rectangular plate that is isotropic in the plane is used as the piezoelectric vibrating plate, and the longitudinal and lateral dimension ratios are integer ratios. Therefore, there exists in-plane vibration called Lame mode in which the four corners do not vibrate. By using this vibration mode, it is easy to support the vibrator.
【００１０】[0010]
【実施例】以下，本発明の実施例について，図面を参照
して説明する。Embodiments of the present invention will be described below with reference to the drawings.
【００１１】図１は，本発明の実施例に係る圧電トラン
スを示す図で，圧電振動板の電極の取り出しと支持構造
を示している。図１に示すように，圧電振動板として所
定の回転角度から切り出した矩形状のニオブ酸リチウム
の矩形板１１の表面の左右に２分割電極１２が夫々形成
されて矩形板振動子が構成されている。この矩形板振動
子の振動の節であるニオブ酸リチウムの矩形板１１の四
隅を支持するとともに電気的接続を得る金属支持板１４
を介して，絶縁体で形成された支持枠１３によって支持
されている。金属支持板１４は，枠上に形成した電極ラ
ンド１５に電気的に接続されている。FIG. 1 is a diagram showing a piezoelectric transformer according to an embodiment of the present invention, and shows a structure for taking out and supporting electrodes of a piezoelectric diaphragm. As shown in FIG. 1, a rectangular plate vibrator is formed by forming two divided electrodes 12 on the left and right of the surface of a rectangular plate 11 of rectangular lithium niobate cut out from a predetermined rotation angle as a piezoelectric vibrating plate. There is. A metal supporting plate 14 for supporting the four corners of the rectangular plate 11 of lithium niobate, which is a node of vibration of the rectangular plate vibrator, and for obtaining electrical connection.
It is supported by a support frame 13 formed of an insulator. The metal support plate 14 is electrically connected to the electrode lands 15 formed on the frame.
【００１２】図２は本発明の実施例に係る圧電トランス
の概略構成を示す図で，（ａ）は正面図，（ｂ）は側面
図である。図２に示したように，圧電振動板として縦と
横の寸法比が１：２である方形板２０を用いて方形板ラ
ーメモード振動子を構成し，表裏両面の電極のうち一方
は両方の電極を二分割して２分割電極２１，２２とし，
電気的入力端子２１ａと出力端子２２ａを設けた構造と
することで圧電トランスが構成されている。2A and 2B are views showing a schematic structure of a piezoelectric transformer according to an embodiment of the present invention. FIG. 2A is a front view and FIG. 2B is a side view. As shown in FIG. 2, a rectangular plate Lame mode oscillator is constructed by using a rectangular plate 20 having a longitudinal and lateral dimensional ratio of 1: 2 as a piezoelectric vibrating plate, and one of the electrodes on both the front and back sides has both electrodes. The electrode is divided into two to form two divided electrodes 21 and 22,
The piezoelectric transformer is configured by providing the electric input terminal 21a and the output terminal 22a.
【００１３】図３は比較例に係る正方形板振動子の最低
次ラーメモード振動を示す図である。図３に示すよう
に，最低次ラーメモード振動は，点線３１と一点鎖線３
２で示されている。また，正方形板振動子の四隅３３が
振動の節になっている。しかし，この振動モードは等体
積的振動であるため，全面電極を有する圧電セラミック
の矩形板では励振できない。FIG. 3 is a diagram showing the lowest-order Lame mode vibration of the square plate vibrator according to the comparative example. As shown in FIG. 3, the lowest-order Lame mode vibration is shown by the dotted line 31 and the chain line 3
2 is shown. Further, the four corners 33 of the square plate vibrator are nodes of vibration. However, since this vibration mode is equal volume vibration, it cannot be excited by a rectangular plate of piezoelectric ceramic having a full-face electrode.
【００１４】ここで，図１及び図２で示した圧電振動板
の形成方法について説明する。この圧電振動板は，異方
性を持つニオブ酸リチウム単結晶板用い，自発分極軸
（Ｚ軸）を基準として，座標軸をＸ軸のまわりに１２０
〜１７０°回転し，さらにそのＺ軸（Ｚ′軸）のまわり
に−２０〜２０°回転した座標系（Ｘ′，Ｙ″，Ｚ′）
において，板面がＸ′軸とＺ′軸に平行になるように切
り出されることにより得られている。この圧電振動板で
は，図３の例とは異なり，縦と横の寸法比がほぼ等しい
ような正方形板で，四隅が振動の節となるラーメモード
振動を励振することができる。Here, a method of forming the piezoelectric vibrating plate shown in FIGS. 1 and 2 will be described. This piezoelectric vibrating plate uses a lithium niobate single crystal plate having anisotropy, and the coordinate axis is 120 around the X axis with reference to the spontaneous polarization axis (Z axis).
Coordinate system (X ', Y ", Z') rotated by ~ 170 ° and further rotated by -20 ~ 20 ° around its Z axis (Z 'axis).
At, the plate surface is cut out so as to be parallel to the X'axis and the Z'axis. Unlike the example of FIG. 3, this piezoelectric vibrating plate is a square plate having substantially the same vertical and horizontal dimensional ratios and can excite Lame mode vibration having four corners as vibration nodes.
【００１５】図４は，図１及び図２で示した圧電振動板
に用いられるニオブ酸リチウム単結晶回転Ｙ板の弾性コ
ンブライアンスＳ11，Ｓ33の回転角度依存性を示す図で
ある。ラーメモード振動を励振するためにはＳ11とＳ33
がほぼ等しくなることが必要で，図４から明らかに，回
転角度９０°と１５５°付近でこの条件が充たされる。
しかし，ラーメモードの最低次等価回路定数から容量比
を計算すると，回転角度９０°の時，容量比は無限大と
なり振動を励振できない。回転角度１５５°の時，容量
比は６．４とかなり小さくなり，圧電的に強く励振でき
ることが明らかである。実際に用いるニオブ酸リチウム
単結晶矩形板は，結晶の回転や切り出し加工の誤差を考
慮し，かつ安定して励振できる角度範囲として，少なく
ともＸ軸を中心に１２０〜１７０°の回転範囲，さらに
Ｘ軸と直交するＺ′軸を中心に−２０〜２０°の回転範
囲で切り出されていることが妥当である。FIG. 4 is a diagram showing the rotation angle dependence of the elastic confrances S 11 , S 33 of the lithium niobate single crystal rotating Y plate used in the piezoelectric vibrating plate shown in FIGS. 1 and 2. To excite the Lame mode vibration, S 11 and S 33
Are required to be substantially equal to each other, and it is clear from FIG. 4 that this condition is satisfied near the rotation angles of 90 ° and 155 °.
However, when the capacity ratio is calculated from the lowest-order equivalent circuit constant of the Lame mode, the capacity ratio becomes infinite at the rotation angle of 90 °, and the vibration cannot be excited. When the rotation angle is 155 °, the capacity ratio is 6.4, which is considerably small, and it is clear that strong piezoelectric excitation is possible. The lithium niobate single crystal rectangular plate actually used has a rotation range of at least 120 to 170 ° around the X-axis, and an X-axis rotation range of at least 120 ° to 170 ° as the angular range in which the rotation and the cutting process of the crystal are taken into consideration and stable excitation is possible. It is appropriate to be cut out within a rotation range of −20 to 20 ° around the Z ′ axis orthogonal to the axis.
【００１６】また，図５（ａ），（ｂ）及び（ｃ）は，
本発明に用いられる圧電振動板の種々の例を示してい
る。図示の点線５１と一点鎖線５２で示すように，正方
形板を一単位として，この正方形板を縦横に複数並べた
形でも，ラーメモード振動を励振することが可能である
ことがわかる。ここで，圧電振動板を圧電振動子，圧電
トランスおよび圧電フィルタ等の圧電デバイスに用いた
場合においては，圧電振動板の支持の影響を避けるた
め，ラーメモード振動の節５３の一部またはすべてで支
持する構造とすることが好ましい。尚，上記した実施例
においては，圧電振動板は一体物であるが，同一寸法の
正方形板の端部を接着剤等で縦横に並べて貼り合わせて
構成することも可能である。5 (a), (b) and (c),
The various examples of the piezoelectric diaphragm used for this invention are shown. As shown by the dotted line 51 and the dot-dash line 52 in the figure, it is understood that it is possible to excite the Lame mode vibration even with a square plate as a unit and a plurality of square plates arranged vertically and horizontally. Here, when the piezoelectric diaphragm is used for a piezoelectric device such as a piezoelectric vibrator, a piezoelectric transformer, and a piezoelectric filter, in order to avoid the influence of the support of the piezoelectric diaphragm, some or all of the nodes 53 of the Lame mode vibration are used. A supporting structure is preferable. In the above-mentioned embodiment, the piezoelectric vibrating plate is an integral body, but it is also possible to arrange the end portions of square plates of the same size in a row and column by an adhesive or the like and stick them together.
【００１７】以下に，製造の具体例を挙げて，本発明の
圧電デバイスの一つである圧電トランスについて，詳細
に説明する。The piezoelectric transformer, which is one of the piezoelectric devices of the present invention, will be described in detail below with reference to specific manufacturing examples.
【００１８】市販のニオブ酸リチウム単結晶板を用い
て，自発分極軸（Ｚ軸）を基準としてＸ軸を中心に１５
５°回転し，さらにＸ軸と直交するＺ′軸を中心に５°
回転して，縦と横の寸法が１０ｍｍ×２０ｍｍで，厚さ
が０．５ｍｍの板を切り出した。該方形板の片面にアル
ミニウムを装着し寸法９ｍｍ×１９ｍｍの方形の電極を
形成し，もう片方の面に周囲と電極間隔を１ｍｍあけて
同様に寸法８．５ｍｍ×８．５ｍｍの電極を２ケ並べて
形成した。次に電極を形成した方形板の四隅を支持した
枠に固定して電気端子を支持を介して接続した圧電トラ
ンスとした。支持前後の電気特性の変化を下表１に示
す。２ケ形成した８．５ｍｍ×８．５ｍｍの電極の片方
を電気的入力端子として，もう一方の８．５ｍｍ×８．
５ｍｍの電極を出力端子としたときの共振周波数の入力
電圧と出力電圧の測定結果，および昇圧比を下表２に示
す。Using a commercially available lithium niobate single crystal plate, with the spontaneous polarization axis (Z axis) as a reference, with the X axis as the center, 15
Rotate 5 °, 5 ° centered on Z'axis which is orthogonal to X axis
By rotating, a plate having a length and width of 10 mm × 20 mm and a thickness of 0.5 mm was cut out. Aluminum is attached to one side of the square plate to form a square electrode with a size of 9 mm × 19 mm, and the other side is spaced by 1 mm from the surroundings to form an electrode gap of 2 mm, and similarly two electrodes with a size of 8.5 mm × 8.5 mm are formed. Formed side by side. Next, a rectangular plate on which electrodes were formed was fixed to a frame that supported the four corners of the rectangular plate to form a piezoelectric transformer in which electric terminals were connected via the supports. The changes in electrical characteristics before and after supporting are shown in Table 1 below. One of the 8.5 mm × 8.5 mm electrodes formed was used as an electrical input terminal, and the other 8.5 mm × 8.
Table 2 below shows the measurement results of the input voltage and the output voltage at the resonance frequency and the step-up ratio when a 5 mm electrode was used as the output terminal.
【００１９】[0019]
【表１】 [Table 1]
【００２０】[0020]
【表２】 [Table 2]
【００２１】上記表１より明らかに，本構造の圧電トラ
ンスでは支持前後の電気特性の変化がわずかであり，四
隅を支持することでラーメモード振動の節の一部を支持
していることがわかる。また，表２より明らかに共振周
波数の０．２Ｖ〜１．０Ｖの入力電圧時に９８Ｖ〜４９
５Ｖの高電圧の出力が得られ，圧電トランスとして約５
００の昇圧比が得られた。It is clear from Table 1 above that the piezoelectric transformer of this structure has a slight change in the electrical characteristics before and after being supported, and that it supports a part of the nodes of the Lame mode vibration by supporting the four corners. . Also, from Table 2, it is apparent that the resonance frequency is 98V to 49V at an input voltage of 0.2V to 1.0V.
A high voltage output of 5V is obtained, and it is about 5 as a piezoelectric transformer.
A step-up ratio of 00 was obtained.
【００２２】以上，述べた具体例は，圧電トランスに関
する説明であるが，圧電振動子や圧電フィルタなどの他
の圧電デバイスに関しても同様の効果が得られること
は，容易に推測できる。Although the specific examples described above are for the piezoelectric transformer, it can be easily inferred that similar effects can be obtained for other piezoelectric devices such as a piezoelectric vibrator and a piezoelectric filter.
【００２３】[0023]
【発明の効果】以上説明したように，本発明のラーメモ
ード振動を利用したニオブ酸リチウム単結晶圧電デバイ
スによれば，支持が容易で，支持による特性の劣化と信
頼性の低下を来たさない圧電振動子，圧電トランスおよ
び圧電フィルタ等の圧電デバイスを得ることが可能であ
る。As described above, according to the lithium niobate single crystal piezoelectric device utilizing the Lame mode vibration of the present invention, it is easy to support, and the deterioration of the characteristics and the deterioration of the reliability are caused by the support. It is possible to obtain piezoelectric devices such as piezoelectric vibrators, piezoelectric transformers, and piezoelectric filters.
【図１】本発明の実施例に係る圧電トランスの圧電振動
板の電極の取り出しと支持の状態の一例を示す図であ
る。FIG. 1 is a diagram showing an example of a state where electrodes of a piezoelectric diaphragm of a piezoelectric transformer according to an embodiment of the present invention are taken out and supported.
【図２】本発明の実施例に係る圧電トランスの概略構成
を示す図である。FIG. 2 is a diagram showing a schematic configuration of a piezoelectric transformer according to an embodiment of the present invention.
【図３】比較例に係る正方形板振動子の最低次ラーメモ
ード振動を示す図である。FIG. 3 is a diagram showing a lowest-order Lame mode vibration of a square plate vibrator according to a comparative example.
【図４】本発明に用いられるニオブ酸リチウム単結晶回
転Ｙ板の弾性コンプライアンスＳ11，Ｓ33の回転角度依
存性を示す図である。FIG. 4 is a diagram showing the rotation angle dependence of elastic compliances S 11 and S 33 of a lithium niobate single crystal rotating Y plate used in the present invention.
【図５】本発明に用いられる圧電振動板の種々の例を示
す図である。FIG. 5 is a diagram showing various examples of piezoelectric diaphragms used in the present invention.
【図６】従来例に係る圧電トランスの構造の概略斜視図
である。FIG. 6 is a schematic perspective view of a structure of a piezoelectric transformer according to a conventional example.
【図７】（ａ）は圧電セラミックス矩形板の断面図，
（ｂ）は圧電セラミックス矩形板が長さ方向振動の１波
長共振モードで振動している場合の変位分布，７１は振
動の節，（ｃ）はその時の歪分布。FIG. 7A is a sectional view of a piezoelectric ceramic rectangular plate,
(B) is the displacement distribution when the piezoelectric ceramic rectangular plate is vibrating in the one-wavelength resonance mode of longitudinal vibration, 71 is the node of vibration, and (c) is the strain distribution at that time.
１１ ニオブ酸リチウムの矩形板 １２ ２分割電極 １４ 金属支持板 １３ 支持枠 １５ 電極ランド ２０ 矩形板 ２１，２２ ２分割電極 ２１ａ 入力端子 ２２ａ 出力端子 ６１ 矩形板 ６２，６３ ６４ 端面電極 11 Lithium Niobate Rectangular Plate 12 2 Split Electrode 14 Metal Support Plate 13 Support Frame 15 Electrode Land 20 Rectangular Plate 21,22 2 Split Electrode 21a Input Terminal 22a Output Terminal 61 Rectangular Plate 62, 63 64 End Surface Electrode
─────────────────────────────────────────────────────
─────────────────────────────────────────────────── ───
【手続補正書】[Procedure amendment]
【提出日】平成６年７月２１日[Submission date] July 21, 1994
【手続補正１】[Procedure Amendment 1]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】請求項１[Name of item to be corrected] Claim 1
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【手続補正２】[Procedure Amendment 2]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】０００７[Correction target item name] 0007
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【０００７】[0007]
【課題を解決するための手段】本発明によれば，自発分
極軸をＺ軸として有するニオブ酸リチウム圧電単結晶に
おいて，座標軸をＸ軸のまわりに１２０〜１７０°回転
した座標系（Ｘ′，Ｙ′，Ｚ′）を，さらにそのＺ′軸
のまわりに−２０〜２０°回転した座標系（Ｘ′，
Ｙ″，Ｚ′）において，前記ニオブ酸リチウム圧電単結
晶の板面がＸ′軸と前記Ｚ′軸に平行になるように切り
出された圧電振動板を備え，前記圧電振動板は，正方形
板を一単位として少なくとも１単位の前記正方形板から
なるように形成されるとともに前記正方形板の四隅が振
動の節となるラーメモード振動を行うことを特徴とする
圧電デバイスが得られる。According to the present invention SUMMARY OF], in lithium niobate piezoelectric single crystal having a spontaneous polarization axis as Z-axis, coordinates 120-170 was ° rotation <br/> about the X-axis coordinate axes The coordinate system (X ', Y', Z ') is further rotated about its Z'axis by -20 to 20 ° (X', Y ', Z') .
Y ″, Z ′) is provided with a piezoelectric vibrating plate cut out so that the plate surface of the lithium niobate piezoelectric single crystal is parallel to the X ′ axis and the Z ′ axis , and the piezoelectric vibrating plate is a square plate. The piezoelectric device is characterized in that it is formed to have at least one unit of the square plate as one unit, and that the Lame mode vibration in which the four corners of the square plate become nodes of vibration is performed.
Claims (3)
リチウム圧電単結晶において，座標軸をＸ軸のまわりに
１２０〜１７０°回転し，さらにそのＺ軸（Ｚ′軸）の
まわりに−２０〜２０°回転した座標系（Ｘ′，Ｙ″，
Ｚ′）において，前記ニオブ酸リチウム圧電単結晶の板
面がＸ′軸とＺ軸に平行になるように切り出された圧電
振動板を備え，前記圧電振動板は，正方形板を一単位と
して少なくとも１単位の前記正方形板からなるように形
成されるとともに前記正方形板の四隅が振動の節となる
ラーメモード振動を行うことを特徴とする圧電デバイ
ス。1. In a lithium niobate piezoelectric single crystal having a spontaneous polarization axis as a Z axis, the coordinate axis is rotated about 120 degrees to 170 degrees about the X axis, and further about -20 to about the Z axis (Z 'axis). Coordinate system rotated by 20 ° (X ′, Y ″,
Z ′) is provided with a piezoelectric diaphragm cut out so that the plate surface of the lithium niobate piezoelectric single crystal is parallel to the X ′ axis and the Z axis, and the piezoelectric diaphragm has at least a square plate as one unit. A piezoelectric device, wherein the piezoelectric device is formed so as to include one unit of the square plate and performs Lame mode vibration in which four corners of the square plate serve as nodes of vibration.
て，前記圧電振動板の振動の節のうちの少なくとも１つ
を支持するとともに，前記振動の節のうちの少なくとも
２つに電気的入力端子と電気的出力端子を形成したこと
を特徴とする圧電デバイス。2. The piezoelectric device according to claim 1, wherein at least one of the vibration nodes of the piezoelectric diaphragm is supported, and at least two of the vibration nodes have an electric input terminal. A piezoelectric device having an electrical output terminal.
いて，前記圧電振動板は，縦と横の寸法比が１：２であ
る矩形板であり，前記振動板の表裏をなす両面の電極の
うちの少なくとも一方を二分割して，前記振動板の振動
の節のいずれかに延長し，電気的入力端子と電気的出力
端子とした構造を有することを特徴とする圧電デバイ
ス。3. The piezoelectric device according to claim 1, wherein the piezoelectric vibrating plate is a rectangular plate having a longitudinal and lateral dimensional ratio of 1: 2, and electrodes on both sides of the vibrating plate are provided on both sides. A piezoelectric device having a structure in which at least one of them is divided into two and extended to any one of vibration nodes of the diaphragm to form an electric input terminal and an electric output terminal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5247939A JP2819493B2 (en) | 1993-10-04 | 1993-10-04 | Piezo device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5247939A JP2819493B2 (en) | 1993-10-04 | 1993-10-04 | Piezo device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07106660A true JPH07106660A (en) | 1995-04-21 |
| JP2819493B2 JP2819493B2 (en) | 1998-10-30 |
Family
ID=17170805
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5247939A Expired - Lifetime JP2819493B2 (en) | 1993-10-04 | 1993-10-04 | Piezo device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2819493B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0744593A2 (en) * | 1995-04-03 | 1996-11-27 | Murata Manufacturing Co., Ltd. | Vibrating gyroscope |
| WO2012131825A1 (en) | 2011-03-31 | 2012-10-04 | Ｎｅｃカシオモバイルコミュニケーションズ株式会社 | Oscillator and electronic device |
-
1993
- 1993-10-04 JP JP5247939A patent/JP2819493B2/en not_active Expired - Lifetime
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0744593A2 (en) * | 1995-04-03 | 1996-11-27 | Murata Manufacturing Co., Ltd. | Vibrating gyroscope |
| EP0744593A3 (en) * | 1995-04-03 | 1997-08-20 | Murata Manufacturing Co | Vibrating gyroscope |
| US5912528A (en) * | 1995-04-03 | 1999-06-15 | Murata Manufacturing Co., Ltd. | Vibrating gyroscope |
| WO2012131825A1 (en) | 2011-03-31 | 2012-10-04 | Ｎｅｃカシオモバイルコミュニケーションズ株式会社 | Oscillator and electronic device |
| CN103460719A (en) * | 2011-03-31 | 2013-12-18 | Nec卡西欧移动通信株式会社 | Oscillator and electronic device |
| EP2693773A1 (en) * | 2011-03-31 | 2014-02-05 | NEC CASIO Mobile Communications, Ltd. | Oscillator and electronic device |
| EP2693773A4 (en) * | 2011-03-31 | 2014-09-03 | Nec Casio Mobile Comm Ltd | Oscillator and electronic device |
| EP2897381A1 (en) | 2011-03-31 | 2015-07-22 | NEC CASIO Mobile Communications, Ltd. | Oscillator and electronic device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2819493B2 (en) | 1998-10-30 |
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