JPH07103235A - Static pressure direct action gas bearing - Google Patents
Static pressure direct action gas bearingInfo
- Publication number
- JPH07103235A JPH07103235A JP25168693A JP25168693A JPH07103235A JP H07103235 A JPH07103235 A JP H07103235A JP 25168693 A JP25168693 A JP 25168693A JP 25168693 A JP25168693 A JP 25168693A JP H07103235 A JPH07103235 A JP H07103235A
- Authority
- JP
- Japan
- Prior art keywords
- movable body
- bearing
- gas
- static pressure
- pressure direct
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】この発明は、静圧直動気体軸受の
改良に関し、特に、加圧気体供給配管によって可動体の
作動が影響されることがないようにして性能の向上を図
ったものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement of a static pressure direct acting gas bearing, and more particularly, an improvement in performance by preventing the operation of a movable body from being affected by a pressurized gas supply pipe. Is.
【０００２】[0002]
【従来の技術】従来の静圧直動気体軸受としては、例え
ば図５ないし図７に示すようなものが知られている。こ
のものは、固定体１の外面に設けた一方の軸受面１ａ
が、可動体２の内面に設けた他方の軸受面２ａに軸受す
き間Ｓを介して対向している。その可動体２の内部には
通気孔３が設けてあり、その通気孔３は可動体２の内面
他方の軸受面２ａの上下左右の各面に取り付けられてい
る多孔質材４に連通している。そして、通気孔３から多
孔質材４を介して軸受すき間Ｓに気体を噴出させて流体
膜を形成することにより可動体２が非接触で支持される
ものである。2. Description of the Related Art As a conventional static pressure direct acting gas bearing, for example, those shown in FIGS. 5 to 7 are known. This is one bearing surface 1a provided on the outer surface of the fixed body 1.
Is opposed to the other bearing surface 2a provided on the inner surface of the movable body 2 via the bearing clearance S. A ventilation hole 3 is provided inside the movable body 2, and the ventilation hole 3 communicates with a porous material 4 attached to each of the upper, lower, left and right surfaces of the bearing surface 2a of the other inner surface of the movable body 2. There is. Then, the movable body 2 is supported in a non-contact manner by ejecting gas from the ventilation hole 3 through the porous material 4 into the bearing gap S to form a fluid film.
【０００３】上記従来例では、可動体２に加圧気体供給
口５を設け、これにエアチューブのような加圧気体配管
６を接続して、通気孔３への加圧気体の供給を行うよう
にしている。In the above conventional example, the movable body 2 is provided with the pressurized gas supply port 5, and the pressurized gas pipe 6 such as an air tube is connected to the movable body 2 to supply the pressurized gas to the ventilation hole 3. I am trying.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、可動体
２に加圧気体供給口５を設けて配管する従来の静圧直動
気体軸受では、可動体２の精密な位置決めを行う際に加
圧気体配管６の張力や弾性力が外乱として作用して、位
置決め精度不良を来すという問題点があった。また、静
圧直動気体軸受を例えばトルク測定器等に取り付けて使
用した場合には、加圧気体配管６の張力や弾性力が可動
体２の移動中に変動して、その結果可動体２の移動抵抗
が変化してしまい正確なトルクの検出ができないという
問題点があった。However, in the conventional static pressure direct acting gas bearing in which the movable body 2 is provided with the pressurized gas supply port 5 for piping, the pressurized gas is used when the movable body 2 is precisely positioned. There is a problem in that the tension or elastic force of the pipe 6 acts as a disturbance, resulting in poor positioning accuracy. Further, when the static pressure direct acting gas bearing is used by being attached to, for example, a torque measuring device, the tension or elastic force of the pressurized gas pipe 6 fluctuates during the movement of the movable body 2, and as a result, the movable body 2 However, there is a problem in that the moving resistance of the motor changes and the torque cannot be accurately detected.
【０００５】そこで、この発明は、上記従来技術の問題
点に着目してなされたもので、加圧気体配管を固定体に
取り付けることにより可動体の位置決めの外乱や移動抵
抗の変動を排除して、高精度の静圧直動気体軸受を提供
することを目的としている。Therefore, the present invention has been made in view of the above-mentioned problems of the prior art. By attaching the pressurized gas pipe to the fixed body, the disturbance of the positioning of the movable body and the fluctuation of the movement resistance are eliminated. , Is intended to provide a highly accurate static pressure direct acting gas bearing.
【０００６】[0006]
【課題を解決するための手段】この発明は、固定体に設
けた一方の軸受面が可動体に設けた他方の軸受面に軸受
すき間を介して対向し、前記可動体に設けた通気孔を介
して軸受すきまに気体を噴出する静圧直動気体軸受に係
り、前記可動体の他方の軸受面に軸方向溝状の凹部を設
け、該凹部は通気孔に連通し、前記固定体に設けた気体
供給孔は凹部に開口することを特徴とする。According to the present invention, one bearing surface provided on a fixed body is opposed to the other bearing surface provided on a movable body through a bearing gap, and a vent hole provided on the movable body is provided. A static pressure direct-acting gas bearing for injecting gas through the bearing clearance via an axial groove-shaped concave portion on the other bearing surface of the movable body, the concave portion communicating with a ventilation hole and provided on the fixed body. The gas supply hole is characterized by opening to the recess.
【０００７】[0007]
【作用】この発明の静圧直動気体軸受にあっては、固定
体に気体供給孔を設けて、これに加圧気体配管を接続し
ている。その加圧気体配管から固定体に送りこまれた加
圧気体は、気体供給孔を経て可動体に設けられた凹部に
供給される。そこから可動体内の通気孔を介して軸受す
き間に噴出し、流体膜を形成する。In the static pressure direct acting gas bearing of the present invention, the fixed body is provided with the gas supply hole, and the pressurized gas pipe is connected to this. The pressurized gas sent from the pressurized gas pipe to the fixed body is supplied to the recess provided in the movable body through the gas supply hole. From there, it jets out into the bearing gap through the ventilation hole in the movable body to form a fluid film.
【０００８】可動体は加圧気体配管から切り離されてい
るため、可動体の位置決め精度や可動体移動抵抗になん
らの影響も及ぼさない。Since the movable body is separated from the pressurized gas pipe, it does not affect the positioning accuracy of the movable body or the movable body movement resistance.
【０００９】[0009]
【実施例】以下、この発明の実施例を図面を参照して説
明する。図１ないし図４はこの発明の一実施例で、多孔
質形静圧直動気体軸受を示したものである。なお、従来
と同一または相当部分には同一の符号を付してある。角
柱状の固定体１の上下左右の平面状の外面が一方の軸受
面１ａになっている。その固定体１の一端面に気体供給
口５が設けられ、そこから続く気体供給孔１０が固定体
１の内部に設けられている。この気体供給孔１０は固定
体１の軸芯を通って、上下左右の一方の軸受面１ａのう
ちのいずれか一面に開口している。Embodiments of the present invention will be described below with reference to the drawings. 1 to 4 show an embodiment of the present invention and show a porous static pressure direct acting gas bearing. The same or corresponding parts as in the conventional case are designated by the same reference numerals. The top, bottom, left and right flat outer surfaces of the prismatic fixed body 1 are one bearing surface 1a. A gas supply port 5 is provided on one end surface of the fixed body 1, and a gas supply hole 10 continuing from the gas supply port 5 is provided inside the fixed body 1. The gas supply hole 10 passes through the shaft core of the fixed body 1 and opens on any one of the upper, lower, left and right bearing surfaces 1a.
【００１０】四角の枠形をした可動体２は、固定体１の
一方の軸受面１ａを囲む上下左右の平面状の内面が他方
の他方の軸受面２ａである。そのうちの前記気体供給孔
１０の開口１０ａと軸受すき間Ｓを介して向き合う軸受
面２ａには、気体連通溝として一本の凹部１１が設けら
れている。この凹部１１は固定体１に設けられた気体供
給孔１０の開口１０ａと対向していて、図３に示すよう
に軸方向に延び、可動体２の移動範囲の長さ以上の長さ
を有している。しかし、凹部１１の長さ方向の両端は閉
じられており、凹部１１と外部との間には固定体の軸受
面１ａと可動体の軸受面２ａとの間の微小な軸受すき間
ＳR （ラビリンスすき間）が介在している。In the movable body 2 having a rectangular frame shape, the inner surfaces of the upper, lower, left and right planes surrounding the one bearing surface 1a of the fixed body 1 are the other bearing surface 2a. The bearing surface 2a facing the opening 10a of the gas supply hole 10 through the bearing clearance S is provided with a single recess 11 as a gas communication groove. The concave portion 11 faces the opening 10a of the gas supply hole 10 provided in the fixed body 1, extends in the axial direction as shown in FIG. 3, and has a length equal to or longer than the moving range of the movable body 2. is doing. However, both ends in the longitudinal direction of the recess 11 are closed, and a minute bearing clearance S R (labyrinth) between the bearing surface 1a of the fixed body and the bearing surface 2a of the movable body is provided between the recess 11 and the outside. There is a gap.
【００１１】その凹部１１の両側に、可動体２と固定体
１との間の微小な軸受すき間ＳR （ラビリンスすき間）
を隔てて平行な二本の排気用凹溝１２が設けてある。こ
の排気用凹溝１２は、図４に示すように軸方向に延び
て、端部が外部に開放されている。なお、図２に示すよ
うに、可動体２の下側の他方の軸受面２ａにも一本の幅
広の排気用凹溝１３が設けられている。可動体２の内面
に取り付けた多孔質材４は、排気用凹溝１２，１３の外
側に間隔をおいて前後左右の四箇所に分散配置されてい
る。多孔質材４はまた、可動体２の左右両側の内面にも
設けられており、四面拘束形の静圧直動気体軸受が構成
されている。On both sides of the concave portion 11, a minute bearing clearance S R (labyrinth clearance) between the movable body 2 and the fixed body 1.
Two parallel exhaust grooves 12 are provided at a distance from each other. The exhaust groove 12 extends in the axial direction as shown in FIG. 4 and has an end open to the outside. As shown in FIG. 2, the other bearing surface 2a on the lower side of the movable body 2 is also provided with one wide exhaust groove 13. The porous material 4 attached to the inner surface of the movable body 2 is dispersed and arranged at four positions in the front, rear, left, and right at intervals outside the exhaust grooves 12, 13. The porous material 4 is also provided on the inner surfaces on both the left and right sides of the movable body 2, and constitutes a static pressure direct acting gas bearing of four-face restraint type.
【００１２】上記の凹部１１は、可動体２の内部に設け
られている通気孔３に連通し、この通気孔３を経て各多
孔質材４に通じている。次に作用を説明する。この静圧
直動気体軸受の場合、加圧気体配管６は固定体１の端面
の加圧気体供給口５に接続される。このように固定体１
に加圧気体配管を取り付けることにより、可動体は加圧
気体配管６から切り離される。そのため、可動体の位置
決め精度や可動体移動抵抗は、加圧気体配管６の影響を
全く受けない。The recess 11 communicates with a ventilation hole 3 provided inside the movable body 2, and communicates with each porous material 4 through the ventilation hole 3. Next, the operation will be described. In the case of this static pressure direct acting gas bearing, the pressurized gas pipe 6 is connected to the pressurized gas supply port 5 on the end surface of the fixed body 1. In this way the fixed body 1
The movable body is separated from the pressurized gas pipe 6 by attaching the pressurized gas pipe to. Therefore, the positioning accuracy of the movable body and the movable body movement resistance are not affected by the pressurized gas pipe 6.
【００１３】その加圧気体配管６から固定体１に送られ
た加圧気体は、気体供給孔１０を経て開口１０ａから可
動体２に設けられた凹部１１に供給される。凹部１１は
周りをラビリンスすき間ＳR で囲まれているため、大気
圧や排気用凹溝１２内の排気圧との差圧が確保できる。
こうして凹部１１に送られた加圧気体は、可動体内の通
気孔３を通って各多孔質材４に供給され、多孔質材４内
の微細気孔を経て適宜の圧力に絞られた後に他方の軸受
面２ａから軸受すき間Ｓに噴出し、流体膜を形成して可
動体２を非接触で支持する。軸受すき間Ｓ内に噴出した
流体は排気用凹溝１２，１３に抜け、前記凹部１１から
排気用凹溝１２に一部洩れ出た洩れ気体と共にその開放
端から外部に排出される。The pressurized gas sent from the pressurized gas pipe 6 to the fixed body 1 is supplied to the recess 11 provided in the movable body 2 through the gas supply hole 10 and the opening 10a. Since the recess 11 is surrounded by the labyrinth gap S R , it is possible to secure a pressure difference between the atmospheric pressure and the exhaust pressure in the exhaust groove 12.
The pressurized gas thus sent to the concave portion 11 is supplied to each porous material 4 through the vent holes 3 in the movable body, passes through the fine pores in the porous material 4 and is squeezed to an appropriate pressure, and then the other. It jets from the bearing surface 2a into the bearing gap S, forms a fluid film, and supports the movable body 2 in a non-contact manner. The fluid ejected into the bearing clearance S escapes into the exhaust grooves 12 and 13, and is discharged to the outside from the open end together with the leak gas partially leaked from the recess 11 into the exhaust groove 12.
【００１４】こうして非接触で支持された可動体２を移
動させても、加圧気体配管６が接続されていないためそ
の影響は皆無であって、可動体２は常に極めて微小な一
定の抵抗で安定して移動できる。したがって、例えばト
ルク測定器等に取り付けて使用すれば、極めて正確なト
ルクの検出が可能である。また移動する可動体２を、例
えば自動制御を利用して所定の位置に正確に位置決めし
て停止させる場合も、加圧気体配管６の張力や弾性力が
自動制御系に外乱として作用することがなく、位置決め
精度不良が生じない。Even if the movable body 2 supported in a non-contact manner is moved in this way, there is no effect because the pressurized gas pipe 6 is not connected, and the movable body 2 always has a very small constant resistance. You can move stably. Therefore, if it is used by being attached to, for example, a torque measuring device, it is possible to detect the torque very accurately. Also, when the moving movable body 2 is accurately positioned and stopped at a predetermined position using, for example, automatic control, the tension or elastic force of the pressurized gas pipe 6 may act as a disturbance on the automatic control system. And, the positioning accuracy does not deteriorate.
【００１５】なお、上記の実施例にあっては、固定体１
の気体供給孔１０の開口１０ａを一面だけに設けたもの
を説明したが、これに限定されず、一面以上の面に設け
ても良い。その場合、その開口１０ａを設けた面と対向
する可動体２の他方の軸受面２ａには上記同様に凹部１
１を設ける。また、多孔質材４の形状は角板状と限らず
円板等であっても良い。In the above embodiment, the fixed body 1
Although the gas supply hole 10 having the opening 10a provided on only one surface has been described, the present invention is not limited to this and may be provided on one or more surfaces. In that case, the concave portion 1 is formed on the other bearing surface 2a of the movable body 2 facing the surface provided with the opening 10a in the same manner as described above.
1 is set. Further, the shape of the porous material 4 is not limited to the rectangular plate shape, and may be a circular plate or the like.
【００１６】また、上記実施例では多孔質形の静圧直動
気体軸受に本発明を適用した場合のみを示したが、多数
孔形静圧直動気体軸受や表面絞り形静圧直動気体軸受な
どのその他のタイプのものにも適用可能である。また、
固定体１は角柱形状とは限らず、円柱形状などの場合に
も同様に適用することができる。Further, in the above embodiment, only the case where the present invention is applied to the porous type static pressure direct acting gas bearing is shown. However, a multi-hole type static pressure direct acting gas bearing and a surface drawing type static pressure direct acting gas are shown. It is also applicable to other types such as bearings. Also,
The fixed body 1 is not limited to the prismatic shape, but can be similarly applied to the case of a cylindrical shape or the like.
【００１７】[0017]
【発明の効果】以上説明したように、この発明によれ
ば、固定体に設けた一方の軸受面が可動体に設けた他方
の軸受面に軸受すきまを介して対向し、可動体に設けた
通気孔を介して軸受すき間に気体を噴出する静圧直動気
体軸受において、可動体の他方の軸受面に軸方向溝状の
凹部を設け、その凹部は通気孔に連通し、固定体に設け
た気体供給孔は凹部に開口する構成としたため、固定体
の気体供給孔に加圧気体配管を接続すれば可動体の凹部
から通気孔を経て軸受すき間に気体を供給することがで
きて、加圧気体配管と可動体とを切り離すことが可能に
なった。その結果、加圧気体配管に起因する可動体の位
置決めの外乱や移動抵抗の変動が排除され、高精度の静
圧直動気体軸受を提供することできるという効果を奏す
る。As described above, according to the present invention, one bearing surface provided on the fixed body is provided on the movable body so as to face the other bearing surface provided on the movable body through the bearing clearance. In a static pressure direct-acting gas bearing in which gas is ejected through a ventilation hole into a bearing clearance, an axial groove-shaped concave portion is provided on the other bearing surface of the movable body, and the concave portion is provided in the fixed body so as to communicate with the ventilation hole. Since the gas supply hole is configured to open in the concave portion, if a pressurized gas pipe is connected to the gas supply hole of the fixed body, gas can be supplied from the concave portion of the movable body to the bearing gap through the ventilation hole. It became possible to separate the pressurized gas pipe and the movable body. As a result, the disturbance of the positioning of the movable body and the fluctuation of the movement resistance due to the pressurized gas pipe are eliminated, and it is possible to provide a highly accurate static pressure direct acting gas bearing.
【図１】この発明の一実施例の外形側面図である。FIG. 1 is a side view showing the outer shape of an embodiment of the present invention.
【図２】図１の横断面図である。2 is a cross-sectional view of FIG.
【図３】図２のIII −III 線断面図である。3 is a sectional view taken along line III-III in FIG.
【図４】図２のIV−IV線断面図である。4 is a sectional view taken along line IV-IV in FIG.
【図５】従来の静圧直動気体軸受の外形側面図である。FIG. 5 is an external side view of a conventional static pressure direct acting gas bearing.
【図６】図５の横断面図である。6 is a cross-sectional view of FIG.
【図７】図６のVII −VII 線断面図である。7 is a sectional view taken along line VII-VII of FIG.
１ 固定体 １ａ 一方の軸受面 ２ 可動体 ２ａ 他方の軸受面 Ｓ 軸受すき間 ３ 通気孔 ６ 加圧気体配管 １０ 気体供給孔 １０ａ 開口 １１ 凹部 1 Fixed body 1a One bearing surface 2 Movable body 2a The other bearing surface S Bearing clearance 3 Vent hole 6 Pressurized gas pipe 10 Gas supply hole 10a Opening 11 Recess
Claims (1)
設けた他方の軸受面に軸受すき間を介して対向し、前記
可動体に設けた通気孔を介して軸受すき間に気体を噴出
する静圧直動気体軸受において、 前記可動体の他方の軸受面に軸方向溝状の凹部を設け、
該凹部は通気孔に連通し、前記固定体に設けた気体供給
孔は凹部に開口することを特徴とする静圧直動気体軸
受。1. One bearing surface provided on a fixed body faces the other bearing surface provided on a movable body through a bearing gap, and gas is ejected into the bearing gap through a ventilation hole provided on the movable body. In the static pressure direct-acting gas bearing, which is provided with an axial groove-shaped recess on the other bearing surface of the movable body,
The static pressure direct-acting gas bearing, wherein the concave portion communicates with a ventilation hole, and a gas supply hole provided in the fixed body opens in the concave portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25168693A JP3261823B2 (en) | 1993-10-07 | 1993-10-07 | Hydrostatic direct acting gas bearing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25168693A JP3261823B2 (en) | 1993-10-07 | 1993-10-07 | Hydrostatic direct acting gas bearing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07103235A true JPH07103235A (en) | 1995-04-18 |
| JP3261823B2 JP3261823B2 (en) | 2002-03-04 |
Family
ID=17226507
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25168693A Expired - Fee Related JP3261823B2 (en) | 1993-10-07 | 1993-10-07 | Hydrostatic direct acting gas bearing |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3261823B2 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000304048A (en) * | 1999-02-17 | 2000-10-31 | Toto Ltd | Hydrostatic gas bearing |
| US6288204B1 (en) | 1998-10-12 | 2001-09-11 | Mitsubishi Gas Chemical Company, Inc. | Branched polycarbonate resin and process for producing the same |
| WO2004100237A1 (en) * | 2003-05-12 | 2004-11-18 | Nikon Corporation | Stage apparatus, exposure apparatus, and device-producing method |
| JP2008175399A (en) * | 2008-04-07 | 2008-07-31 | Toto Ltd | Static pressure gas bearing |
| JP2013249930A (en) * | 2012-06-04 | 2013-12-12 | Canon Inc | Static pressure stage device |
-
1993
- 1993-10-07 JP JP25168693A patent/JP3261823B2/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6288204B1 (en) | 1998-10-12 | 2001-09-11 | Mitsubishi Gas Chemical Company, Inc. | Branched polycarbonate resin and process for producing the same |
| JP2000304048A (en) * | 1999-02-17 | 2000-10-31 | Toto Ltd | Hydrostatic gas bearing |
| WO2004100237A1 (en) * | 2003-05-12 | 2004-11-18 | Nikon Corporation | Stage apparatus, exposure apparatus, and device-producing method |
| JP2008175399A (en) * | 2008-04-07 | 2008-07-31 | Toto Ltd | Static pressure gas bearing |
| JP2013249930A (en) * | 2012-06-04 | 2013-12-12 | Canon Inc | Static pressure stage device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3261823B2 (en) | 2002-03-04 |
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