JPH0694990B2 - Image heating device - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to an improvement of an image heating apparatus of an image furnace used for crystal growth of semiconductor materials and the like.

[Conventional technology]

Fig. 4 shows, for example, Individual Physics VOL 14, No. 10, 1979, pages 633 to 64
It is sectional drawing which shows the conventional image heating apparatus shown on page 0. In the figure, (1) is a spheroidal mirror having a spheroidal reflection surface inside, and (11) is the first spheroidal mirror (1).
A light source such as a halogen lamp or a xenon lamp that emits light (9) and is installed at the focal position of (12), a power source connected via a wire (13) for supplying power to this light source (11),
(8) is a sample placed on the second focus of the spheroidal mirror (1).

[Problems to be Solved by the Invention]

Since the conventional image heating apparatus is configured as described above, the light emitted from the light source is reflected by the spheroidal mirror (1) and focused on the surface of the sample (8). Therefore, the temperature of the sample (8) can be raised and melted to produce crystals.

However, since the halogen or xenon lamp is used as the light source, the light emitting area of the light source is as small as about 5 mm, so a small image is formed on the surface of the sample (8). For this reason, there was a problem that the temperature gradient was so tight that the sample (8) was cracked. For this reason, the conventional image heating device has been equipped with a mechanism for defocusing or with an after-heater to solve this problem. However, the attachment of these mechanisms greatly deteriorated the operability of the furnace, which was a big problem.

The present invention has been made in order to solve the above problems, and is to reduce the temperature gradient on the surface of the sample (8) by using a spherical microwave discharge plasma lamp as the light source.

[Means for Solving the Problems]

The microwave discharge plasma lamp image heating apparatus according to the present invention uses a microwave discharge plasma lamp as a light source.

[Action]

In the microwave discharge plasma lamp according to the present invention, since the light source has a spherical shape, the light distribution at the second focus can be made uniform, so that the temperature gradient is made gentle to prevent the occurrence of cracks.

〔Example〕

Hereinafter, a single elliptic microwave discharge image heating apparatus according to an embodiment of the present invention will be described with reference to the drawings.

FIG. 1 is a sectional view showing the structure of a single elliptical microwave discharge image heating apparatus according to an embodiment of the present invention. (1) is a spheroidal mirror, (2) is a hollow ball made of glass or translucent ceramic. A microwave discharge plasma lamp that encloses elements such as potassium in the inside of it and emits light (9) by emitting plasma by microwave heating, and (3) is a support made by rod-shaped ceramic with high thermal conductivity. A tool, (4) is a radio wave shielding plate attached with its disk-shaped periphery in contact with the inside of the spheroidal mirror (1), and (5) is an end of the spheroidal mirror (1) and a radio wave shielding plate (4). The formed cavity resonator, (6) is a waveguide attached to a hole formed in the end of the spheroidal mirror (1), and (7) is a high frequency wave attached to the other end of the waveguide (6). The transmitter, (8) is a rod-shaped sample placed at the second focal point of the spheroidal mirror (1). That.

In the figure, microwave power of several KW is applied to the cavity resonator (5) from the high frequency oscillator (7) at a high frequency such as 2 GHz via the waveguide (6). The microwave discharge plasma lamp (2) housed in the cavity resonator (5) produces plasma emission and emits intense light. This light is reflected by the inner surface of the spheroidal mirror (1) and focused on the sample (8) at the second focus. Here, the sample (8) is melted due to high heat.

A crystal grows when the sample (8) is rotated and pulled up slowly.

Since the emission spectrum of the microwave discharge plasma lamp (2) is concentrated in the near-infrared region, which is the wavelength of the sample (8), which has the highest absorptivity, it is possible to obtain a very high heating efficiency as compared with a xenon lamp or the like. Can be done.

Next, another embodiment of the present invention is shown in FIG. In the figure, (10) forms the cavity resonator (5) by bringing the open side peripheral edge of the cup-shaped radio wave shielding plate into contact with the first focal point side of the spheroidal mirror (1).

In another embodiment, the microwave discharge lamp (2) is placed inside the cup-shaped cavity resonator (5) to emit light.

In the other embodiment of the present invention, since the cavity resonator is cup-shaped, the same microwave discharge lamp can be applied to various spheroidal mirrors without being affected by the shape and size of the spheroidal mirror. I can do things. Further, since the shape and the emission spectrum of the microwave discharge lamp are changed according to the sample, replacement can be easily performed, which is a very effective means for processing the material.

For example, image heating of glass, which has been impossible in the past, becomes possible.

〔The invention's effect〕

As described above, according to the present invention, since the microwave discharge plasma lamp has a spherical light emission, the temperature gradient of the sample (8) is relaxed, clutter is prevented from occurring, and the light emission spectrum is concentrated in the near infrared region. The heating efficiency can be increased because of the presence of the above.

[Brief description of drawings]

1 is a sectional view showing an embodiment of the present invention, FIG. 2 is a drawing for explaining the structure of a microwave discharge lamp, FIG. 3 is a sectional view showing another embodiment of the present invention, and FIG. FIG. 5 is a view for explaining the structure of a microwave discharge lamp according to another embodiment of the present invention, and FIG. 5 is a sectional view showing a conventional image heating apparatus. In the figure, (1) is a spheroidal mirror, (2) is a microwave discharge plasma lamp, (3) is a support, (4) is a radio wave shielding plate, (5) is a cavity resonator, and (6) is a conductor. Wave tube,
(7) is a high frequency oscillator, (8) is a sample, (9) is light,
(10) is a cup-shaped radio wave shield. In the drawings, the same reference numerals indicate the same or corresponding parts.

Claims (1)

[Claims] 1. An ellipsoidal mirror having a spheroidal reflecting surface inside, a microwave discharge plasma lamp placed at a first focal point of the spheroidal mirror, and a support for supporting the microwave discharge plasma lamp. A radio wave shielding plate attached to the inner surface of the spheroidal mirror at the end on the first focal point side, and an empty space formed by the radio wave shielding plate and the spheroidal mirror for accommodating the microwave discharge plasma lamp. An image heating apparatus comprising: a body resonator; and a light emission drive means for driving the microwave discharge plasma lamp to emit light.