JPH069266B2 - DC high voltage pulse generator for gas laser - Google Patents

Description

The present invention relates to a DC high voltage pulse generation circuit for a gas laser. Conventionally, in a gal laser device that requires a DC high-voltage pulse, the output power is controlled by a saturable reactor SR as shown in FIG. 1, and the control AC by the saturable reactor SR is raised by a step-up transformer T. , A vacuum tube V that floats the rectified and smoothed output
A DC high voltage pulse was obtained by opening and closing T.
In the conventional circuit, since the operating frequency is the commercial power frequency AC, the response of the control circuit becomes slow, the large size of the transformer T cannot be avoided, and the vacuum tube VT is used as a switch, so that the operating life is short and uneconomical. . It is an object of the present invention to try to solve these. FIG. 2 is a basic circuit block diagram of the present invention. In the figure, (a) is a direct current power supply (b) is a main pulse generating circuit section, (c) is an auxiliary pulse generating circuit section, and (d) is a gas laser tube with a burden resistance. Ballast resistance for stable control in the region, (e) is stray capacitance of the load line or smoothing capacitor (f) is gas laser tube load. In the main pulse generation circuit section (b), 1 is an inverter circuit section,
2 is a step-up transformer, 3 is a high-voltage rectifier circuit, and in the auxiliary circuit section (c), 4 is a DC-DC converter, 5
Is a switch unit composed of a discharging capacitor, a thyristor switch and a diode, 6 is a step-up transformer, 7
Is a high voltage rectifier circuit. Furthermore, the inverter circuit unit 1 can be applied with a full bridge configuration (b) half bridge configuration (c) push-pull configuration as shown in FIG. 5 and DC as shown in FIG.
-DC converter (CONV1) and inverter circuit I
It can also be configured by a combination of V1). As an example of this case (CONV1), the step-down converter of FIG. 4 can be considered. FIG. 6 and FIG. 7 are circuit diagrams of one embodiment of the present invention and operation waveform diagrams of respective parts thereof, in which (a) is a DC power supply, and the inverter circuit part 1 of the main pulse generating circuit part (b) is a step-down converter CONV1. And fribridge switch configuration INV1
And a step-down converter CON so that a desired load current output can be obtained by the control circuit CONT.
Control the output voltage of V1. Full bridge switch IN
V1 converts a DC voltage into a high frequency AC carrier. If the operation of the full bridge switch INV1 is repeatedly stopped at a desired time interval, a square wave current pulse can be obtained by the condenser e of the step-up transformer 2 and the high voltage rectifier circuit 3. The output of the main pulse generation circuit section (b) is connected in parallel with the auxiliary pulse generation circuit section (c). The DC-DC converter unit 4 of the auxiliary pulse generation circuit unit c employs a step-down converter to charge the discharging capacitor C. In the thyristor switch THY, when the main pulse circuit section (b) is synchronized with the operation stop and is triggered during the operation, the electric charge of the discharging capacitor C is discharged in the order of C-THY-the primary coil n ₁ of the step-up transformer 6. A high voltage pulse is generated on the secondary side n ₂ of the step-up transformer 6. The high voltage pulse is superimposed on the rising portion of the square wave pulse of the main pulse generating circuit section b through the high voltage rectifying circuit. FIG. 7 shows an example of the output waveform. I ₀₂ is an auxiliary pulse current (Fig. A) I ₀₁ is a main pulse current (Fig. B) I is a combined current waveform of I ₀₁ and I ₀₂ (Fig. C). In the output current waveform I ₀₁ (Fig. D), the carrier frequency component is smoothed by the filter condenser (e), and the waveform required for the gas laser is obtained. According to the present invention, the conversion frequency of the DC high-voltage pulse current high-voltage power supply circuit for gas laser can be increased, so that the response speed can be increased and the size can be reduced. In addition, the adoption of semiconductor switches will prolong the service life. Since the DC high-voltage pulse for pulser mode operation is controlled on the primary side of the step-up transformer, that is, the low-voltage side, a DC high-voltage pulse generation circuit can be realized relatively easily with inexpensive parts.
Moreover, it is possible to output continuously from the pulsar mode to the CW mode.

[Brief description of drawings]

FIG. 1 is a conventional circuit diagram, FIG. 2 is a basic block diagram of the present invention, FIGS. 3 to 5 are circuit diagrams of respective parts applied to the present invention, and FIGS. 6 and 7 are one example of the present invention. It is an example circuit diagram and an operation waveform diagram of each part. In the figure, 1 is an inverter circuit section,
2, 6 are step-up transformers, 3 and 7 are high-voltage rectification circuit units, 4 is a converter unit, 5 is a switch unit, (a) is a DC power supply, (b) is a main pulse generation circuit unit, and (c) is an auxiliary pulse generation. Circuit part, (d)
Is a ballast resistor, (e) is a capacitor, and (f) is a gas laser tube (load).

Claims (1)

[Claims] 1. A DC power supply circuit comprising a DC power supply circuit and an inverter circuit section for converting its DC output to high frequency AC, a step-up transformer and a high-voltage rectifier circuit, wherein the inverter circuit section is controlled on the primary side of the step-up transformer. A DC-DC converter for converting a DC input from a main pulse generating circuit section for generating a DC high voltage and a DC power supply circuit to an arbitrary DC voltage, a capacitor for charging an output of the converter, and a charge for the capacitor rapidly. A DC high-voltage pulse generation circuit for a gas laser, which is characterized in that an auxiliary pulse generation circuit consisting of a discharging thyristor switch, a step-up transformer, and a high-voltage rectification circuit unit is connected in parallel to generate a high-voltage output.