JPH0691254B2 - Thin film transistor integrated circuit - Google Patents

Thin film transistor integrated circuit

Info

Publication number
JPH0691254B2
JPH0691254B2 JP61107910A JP10791086A JPH0691254B2 JP H0691254 B2 JPH0691254 B2 JP H0691254B2 JP 61107910 A JP61107910 A JP 61107910A JP 10791086 A JP10791086 A JP 10791086A JP H0691254 B2 JPH0691254 B2 JP H0691254B2
Authority
JP
Japan
Prior art keywords
thin film
fet
gate
film transistor
drain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61107910A
Other languages
Japanese (ja)
Other versions
JPS62264655A (en
Inventor
謙一 藤井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP61107910A priority Critical patent/JPH0691254B2/en
Publication of JPS62264655A publication Critical patent/JPS62264655A/en
Publication of JPH0691254B2 publication Critical patent/JPH0691254B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
    • H01L27/12Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、液晶表示器や撮像装置等に用いられる薄膜ト
ランジスタ集積回路に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thin film transistor integrated circuit used in a liquid crystal display, an image pickup device or the like.

従来の技術 近年、薄膜トランジスタやその集積回路は、液晶表示器
の画素選択のためや、シフトレジスタ等を含む周辺回路
として、あるいは画像読取り用の撮像装置としてなど利
用が広まりつつある。
2. Description of the Related Art In recent years, thin film transistors and integrated circuits thereof have been widely used for selecting pixels of liquid crystal displays, as peripheral circuits including shift registers, or as image pickup devices for image reading.

以下図面を参照しながら、上述した従来の薄膜トランジ
スタ集積回路についてその一例を説明する。
An example of the above-described conventional thin film transistor integrated circuit will be described below with reference to the drawings.

従来、たとえば液晶表示器の画素選択のためには、第2
図に示すような薄膜トランジスタを単体でマトリクス状
に配列して用いている。その動作方法としては、電界効
果トランジスタ(以下FETと称する)のゲートに充分な
電圧が印加され、FETのドレインとソース間の抵抗が下
がるとソースに接続された画素電極に電流が流れ込み液
晶が立上るという動作方法を用いていた。たとえば、
「日経エレクトロニクス」1982年12月20日号,105〜179
ページ。
Conventionally, for example, for pixel selection of a liquid crystal display, a second
Thin film transistors as shown in the figure are used by arranging them in a matrix form. As its operation method, when a sufficient voltage is applied to the gate of a field effect transistor (hereinafter referred to as FET) and the resistance between the drain and source of the FET decreases, current flows into the pixel electrode connected to the source and the liquid crystal rises. He used the method of climbing. For example,
Nikkei Electronics, December 20, 1982, 105-179
page.

発明が解決しようとする問題点 しかしながら上記のような構成では、FETのON抵抗を下
げるためには、ゲート幅とゲートチャンネル長の比、す
なわちW/L比を大きくする必要があるため、ゲートとド
レインの短絡が生じる危険性が高く、この現象が起こる
とゲートのバスラインとドレインのバスラインが両方と
も不良になっていた。また、ゲート電圧を上げていった
ときのドレイン電流の上昇の程度が比較的ゆるやかであ
り、液晶のON・OFFの必要なドレイン電流の比として104
を得るためにはゲート電圧を幅広く可変する必要があっ
た。
Problems to be Solved by the Invention However, in the above configuration, in order to reduce the ON resistance of the FET, it is necessary to increase the ratio of the gate width to the gate channel length, that is, the W / L ratio. There is a high risk of a drain short circuit, and when this phenomenon occurs, both the gate bus line and the drain bus line are defective. In addition, the increase in drain current when the gate voltage is increased is relatively gradual, and the drain current ratio required to turn on / off the liquid crystal is 10 4
In order to obtain, it was necessary to change the gate voltage widely.

本発明は上記問題点に鑑み、ゲートバスとドレインバス
の短絡が起こりにくく、かつ、ドレイン電流のON・OFF
比を得るゲート電圧の変化幅が狭い薄膜トランジスタ集
積回路を提供するものである。
In view of the above problems, the present invention is unlikely to cause a short circuit between the gate bus and the drain bus, and is capable of turning on / off the drain current.
Provided is a thin film transistor integrated circuit having a narrow variation range of a gate voltage for obtaining a ratio.

問題点を解決するための手段 上記問題点を解決するために本発明の薄膜トランジスタ
集積回路は、FETを3個用い、第1のFETのドレインと、
第2のFETのゲートおよびソースと、第3のFETのゲート
を接続してあり、第2のFETのドレインと、第3のFETの
ドレインを接続してあり、第1のFETのソースと、第3
のFETのソースを接続するという構成を備えたものであ
る。
Means for Solving the Problems In order to solve the above problems, the thin film transistor integrated circuit of the present invention uses three FETs, and the drain of the first FET,
The gate and the source of the second FET are connected to the gate of the third FET, the drain of the second FET is connected to the drain of the third FET, and the source of the first FET is connected to Third
It has a configuration that connects the source of the FET.

作用 本発明は上記した構成によって、第1のFETのゲートと
第3のFETのドレインが短絡するためには、第1のFETの
ゲート・ドレイン間と第2のFETのゲート・ドレイン間
が同時に短絡するか、第1のFETのゲート・ドレイン間
と第3のFETのゲート・ドレイン間が同時に短絡する必
要があり、従来例のような単一のFETの場合に比べて短
絡不良が起こりにくくなる。さらに、ON抵抗を下げるた
めには第3のFETのW/L比のみ大きくして、第1および第
2のFETのW/L比はある程度まで小さくできるため、第1
のFETのゲート・ソース間の短絡不良も起こりにくくな
る。
Action According to the present invention, in order to short-circuit the gate of the first FET and the drain of the third FET with the above-described configuration, the gate and drain of the first FET and the gate and drain of the second FET are simultaneously disconnected. It is necessary to short-circuit or the gate and drain of the 1st FET and the gate and drain of the 3rd FET at the same time, so short circuit failure is less likely to occur than in the case of a single FET like the conventional example. Become. Further, in order to reduce the ON resistance, only the W / L ratio of the third FET can be increased, and the W / L ratio of the first and second FETs can be decreased to some extent.
The short circuit between the gate and the source of the FET is less likely to occur.

次に、第3のFETのゲートの電位を、第1のFETと第2の
FETよりなるインバータの出力電圧によって制御するた
め、第1のFETのゲート電圧により第3のFETのドレイン
・ソース間電流は、ONとOFFの間の遷移が急峻になり、
従って、狭いゲート電圧の幅でドレイン電流をON・OFF
できる。
Next, the gate potential of the third FET is set to the first FET and the second FET.
Since it is controlled by the output voltage of the inverter composed of FET, the gate voltage of the first FET causes the drain-source current of the third FET to have a sharp transition between ON and OFF,
Therefore, the drain current can be turned on and off with a narrow gate voltage width.
it can.

実施例 以下本発明の一実施例の薄膜トランジスタ集積回路につ
いて、図面を参照しながら説明する。
Embodiment Hereinafter, a thin film transistor integrated circuit according to an embodiment of the present invention will be described with reference to the drawings.

第1図は本発明の薄膜トランジスタ集積回路の回路図で
ある。第1図において、Q1は第1のFET、Q2は第2のFE
T、Q3は第3のFET、Aは中間ノード点である。本発明の
一実施例では、Q1,Q2およびQ3のW/L比を各々、0.75,0.
75,15に設計し、アモルファスシリコン薄膜を活性層、
窒化シリコン薄膜をゲート絶縁膜とする薄膜トランジス
タにより構成した。
FIG. 1 is a circuit diagram of a thin film transistor integrated circuit of the present invention. In FIG. 1, Q 1 is the first FET and Q 2 is the second FE.
T and Q 3 are the third FET, and A is the intermediate node point. In one embodiment of the present invention, the W / L ratios of Q 1 , Q 2 and Q 3 are 0.75,0.
Designed to 75,15, an amorphous silicon thin film as an active layer,
It was composed of a thin film transistor using a silicon nitride thin film as a gate insulating film.

以上のように構成された薄膜トランジスタ集積回路につ
いて、その動作を説明すると、Q1のゲート電圧が十分負
の大きな値にあるとき、Q1はOFF状態であり、A点の電
圧は、Q3のドレイン電圧をQ1のOFF抵抗と、Q2の抵抗で
分割した電位になる。Q2のゲートはソースと同電位にあ
るため、ゲート電位が負の値であるQ1のOFF抵抗が、Q2
の抵抗より大きくなる。本実施例ではQ1,Q2のW/L比が
同一のため約1桁Q1のOFF抵抗が高くなっており、A点
の電位はQ3をONにするのに十分な値となる。次にQ1のゲ
ート電位がQ1をONする程度に正側に大きくなると、A点
の電位は急激に小さくなり、Q3はOFF状態となる。さら
に、Q1のゲート電圧が再び負側になると、Q1はOFFし、
A点の電圧が立上るためQ3は再びON状態となる。
The operation of the thin film transistor integrated circuit configured as described above will be described. When the gate voltage of Q 1 has a sufficiently large negative value, Q 1 is in the OFF state, and the voltage at the point A is Q 3 The drain voltage is the potential divided by the OFF resistance of Q 1 and the resistance of Q 2 . Since the gate of Q 2 is in the source and the same potential, OFF resistance for Q 1 gate potential is a negative value, Q 2
Greater than the resistance of. In this embodiment, since the W / L ratios of Q 1 and Q 2 are the same, the OFF resistance of Q 1 is high by about one digit, and the potential at point A is a value sufficient to turn ON Q 3. . Next, when the gate potential of the Q 1 is increased to the positive side to the extent that turning ON the Q 1, the potential at the point A becomes rapidly smaller, Q 3 is turned OFF. Furthermore, when the gate voltage of Q 1 becomes negative again, Q 1 turns off,
Q 3 because the voltage rises at the point A becomes ON again.

第3図は、本発明の一実施例の薄膜トランジスタ集積回
路のゲート電圧対ドレイン電流の特性図である。
FIG. 3 is a characteristic diagram of gate voltage vs. drain current of a thin film transistor integrated circuit according to an embodiment of the present invention.

Q3のドレイン電圧として、20Volt印加した場合を示して
いるが、約±2Vのゲート電圧でドレイン電流のON・OFF
比約104を得ているが、Q3のみの単一FETの場合は104のO
N・OFF比を得るのに10V程度のゲート電圧幅を必要とす
る。
The figure shows the case where 20 Volt is applied as the drain voltage of Q 3 , but the drain current is turned on and off at a gate voltage of about ± 2V.
A ratio of about 10 4 is obtained, but for a single FET with only Q 3 , 10 4 O
A gate voltage width of about 10V is required to obtain the N / OFF ratio.

なお、上記実施例において、薄膜トランジスタはアモル
ファスシリコン薄膜によるMIS型FETを用いたが、アモル
ファスシリコンの他に多結晶シリコン,CdSe,Teなどを用
いた薄膜トランジスタであってもよい。
Although the MIS type FET made of the amorphous silicon thin film is used as the thin film transistor in the above-described embodiment, the thin film transistor may be made of polycrystalline silicon, CdSe, Te or the like in addition to amorphous silicon.

発明の効果 以上のように本発明は、3個の薄膜トランジスタにより
構成されているため、単一の薄膜トランジスタの場合に
比べて、ゲート・ドレイン間の短絡不良が起こりにく
く、かつ、ドレイン電流のON・OFFを制御するゲート電
圧の変位幅が小さくてよいというすぐれた効果が得られ
る。
EFFECTS OF THE INVENTION As described above, since the present invention is configured by three thin film transistors, a short circuit between the gate and the drain is less likely to occur than in the case of a single thin film transistor, and the drain current is turned on. The excellent effect that the displacement width of the gate voltage for controlling the OFF can be small is obtained.

従って、本発明は、液晶表示器,エレクトロルミネッセ
ンス表示器などの平面表示器や、画像読取り用の撮像装
置などの画素選択用のスイッチング回路として、あるい
は、画素周辺の制御回路の中にも利用することができ
る。
Therefore, the present invention is also used as a flat panel display such as a liquid crystal display or an electroluminescence display, a switching circuit for pixel selection in an image pickup device for image reading, or a control circuit around a pixel. be able to.

【図面の簡単な説明】[Brief description of drawings]

第1図は本発明の薄膜トランジスタ集積回路の回路図、
第2図は従来の薄膜トランジスタの回路図、第3図は本
発明の一実施例の薄膜トランジスタ集積回路のゲート電
圧対ドレイン電流の特性図である。 Q1,Q2,Q3,Q4……FET、A……中間ノード。
FIG. 1 is a circuit diagram of a thin film transistor integrated circuit of the present invention,
FIG. 2 is a circuit diagram of a conventional thin film transistor, and FIG. 3 is a characteristic diagram of gate voltage vs. drain current of a thin film transistor integrated circuit according to an embodiment of the present invention. Q 1, Q 2, Q 3 , Q 4 ...... FET, A ...... intermediate nodes.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】第1の電界効果トランジスタのドレイン
と、第2の電界効果トランジスタのゲートおよびソース
と、第3の電界効果トランジスタのゲートを接続してあ
り、第2の電界効果トランジスタのドレインと、第3の
電界効果トランジスタのドレインを接続してあり、第1
の電界効果トランジスタのソースと、第3の電界効果ト
ランジスタのソースを接続したことを特徴とする薄膜ト
ランジスタ集積回路。
1. A drain of a first field effect transistor, a gate and a source of a second field effect transistor, and a gate of a third field effect transistor are connected to each other, and a drain of a second field effect transistor. , The drains of the third field effect transistors are connected, and the first
2. A thin film transistor integrated circuit, characterized in that the source of the field effect transistor is connected to the source of the third field effect transistor.
【請求項2】第1、および第2の電界効果トランジスタ
のW/L比が第3の電界効果トランジスタのW/L比より1桁
以上小さいことを特徴とする特許請求の範囲第(1)項
記載の薄膜トランジスタ集積回路。
2. The W / L ratio of the first and second field effect transistors is smaller than the W / L ratio of the third field effect transistor by one digit or more. Item 3. A thin film transistor integrated circuit according to item.
JP61107910A 1986-05-12 1986-05-12 Thin film transistor integrated circuit Expired - Lifetime JPH0691254B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61107910A JPH0691254B2 (en) 1986-05-12 1986-05-12 Thin film transistor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61107910A JPH0691254B2 (en) 1986-05-12 1986-05-12 Thin film transistor integrated circuit

Publications (2)

Publication Number Publication Date
JPS62264655A JPS62264655A (en) 1987-11-17
JPH0691254B2 true JPH0691254B2 (en) 1994-11-14

Family

ID=14471158

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61107910A Expired - Lifetime JPH0691254B2 (en) 1986-05-12 1986-05-12 Thin film transistor integrated circuit

Country Status (1)

Country Link
JP (1) JPH0691254B2 (en)

Also Published As

Publication number Publication date
JPS62264655A (en) 1987-11-17

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