JPH0689800A - Particle accelerator - Google Patents

Abstract

PURPOSE:To provide possibility of generating SOR beams having a plurality of wavelengths or SOR beams having a large wavelength width simultaneously using the device and conduct a bombard experiment of charged particles with one another bearing different magnitudes of energy by the use of a single particle accelerator. CONSTITUTION:A particle accelerator is equipped with a vacuum chamber 22 in which a charged particles orbit and a deflecting electric magnet 23 (24) which is installed outside of the vacuum chamber 22 and in which magnetic poles 41, 42 having different polarities are arranged opposingly while sandwiching runway where the charged particles orbit. The magnetic pole surface confronting the runway is furnished with a step in the direction perpendicular to the orbiting of charged particles, and with this step, a plurality of particle orbiting tracks 25, 26 are formed between the magnetic poles 41, 42. This permits forming a plurality of particle orbiting tracks in a single particle accelerator and allows charged particles bearing different magnitudes of energy to orbit simultaneously.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a particle accelerator such as a synchrotron, and it is possible to orbit charged particles having different energies by forming orbits of a plurality of charged particles using one deflecting electromagnet. It is related to the particle accelerator.

[0002]

2. Description of the Related Art In recent years, in various fields such as manufacturing of VLSI, diagnosis in the medical field, molecular analysis, structural analysis, etc., synchrotron radiation (Synchrotron Radial Ratio)
n) The SOR lithography technique using light (abbreviated as SOR light) is considered promising. This SOR light is generated when an electron beam close to the speed of light is bent by a magnetic field while traveling in a particle accelerator such as a synchrotron, and includes light with a wavelength from far infrared to X-ray. It has excellent features such as continuous light, high beam output, strong directivity and high brightness. In the semiconductor industry such as VLSI, the generated SOR light is sent to a semiconductor fine processing apparatus such as an exposure apparatus through the beam channel and used as a light source for fine processing of VLSI.

FIG. 3 shows an outline of a synchrotron (particle accelerator) S for generating SOR light. An electron beam generated by an electron generator 1 such as an electron gun is accelerated by a linear accelerator (linac) 2 at the speed of light. The electron beam is accelerated to a near position, the electron beam is deflected by the deflection electromagnet 3, and then the electron beam is incident through the inflector 4 into the vacuum duct 5 which is a storage ring. The electron beam that has entered the vacuum duct 5 is converged to a predetermined diameter by the converging electromagnet 7 while being given energy by the high-frequency acceleration cavity 6, is deflected by the deflection electromagnet 8, and continues to circulate in the vacuum duct 5. . Then, SOR light is generated when being deflected by the deflection electromagnet 8, and this SOR light is emitted to, for example, the exposure device 10 via the light extraction line 9 and used for a predetermined purpose.

On the other hand, in the area of high energy physics, like the electron-positron collision, the same particles having different charges are orbited in opposite directions in the collision ring to form high energy particles. Studies have been conducted to elucidate various physical phenomena such as a search for an internal structure of elementary particles and a search for new elementary particles by causing front particles to collide with each other in an interaction region in the ring. In the collision ring described above, charged particles having different signs are subjected to forces in opposite directions, so that electrons and positrons can be confined in one common magnetic field, and the amount of energy obtained by these electrons and positrons depends on the magnetic field. It is uniquely determined by strength.

[0005]

By the way, for example, the above-mentioned SOR light is generated when an electron beam close to the speed of light is bent in its traveling direction by a magnetic field, and therefore its wavelength region has a large magnetic field applied. Therefore, it is extremely difficult to simultaneously generate SOR light having a plurality of wavelengths and SOR light having a wide wavelength width by using the same device.

In the case of studying various physical phenomena such as electron-positron collision, it is not possible to investigate the interaction between these particles by varying the energy magnitudes of the particles. Extremely important. However, in the above-mentioned collision ring, the same particles having different charges are circulated in opposite directions in one common magnetic field. Therefore, the magnitude of energy obtained by these particles is determined by the strength of the magnetic field. It is impossible to change the energy of these particles separately.
Therefore, when particles having different energies collide with each other, these particles must be orbited in different collision rings to form high-energy particles, and a plurality of particle accelerators are required. Further, these particle accelerators naturally require a large space, and there is a problem that the installation place is limited.

The present invention has been made in view of the above circumstances. It is possible to orbit charged particles of different energies at the same time by forming orbits of a plurality of charged particles in one particle accelerator. To provide a simple particle accelerator.

[0008]

To solve the above problems, the present invention employs the following particle accelerator. That is, a vacuum chamber in which charged particles circulate, and a deflection electromagnet provided outside the vacuum chamber and having polarities different from each other and opposed to each other with a circulating orbital surface of the charged particles interposed therebetween are provided. In a particle accelerator that deflects the charged particles by a generated magnetic field, a step is formed on a magnetic pole surface facing the orbital surface along a direction orthogonal to the circulating direction of the charged particles, and the step causes a plurality of steps between the magnetic poles. It is characterized in that a circular orbit of charged particles is formed.

[0009]

In the particle accelerator of the present invention, a step is formed on the magnetic pole surface facing the orbital surface along the direction orthogonal to the circulating direction of the charged particles. Due to this step, the magnetic pole spacing between the magnetic poles changes stepwise along the direction orthogonal to the circulating direction of the charged particles, and a plurality of magnetic field regions are formed corresponding to these magnetic pole spacings, and these regions are formed. The orbits of charged particles are regulated respectively. From this, 1
It is possible to form orbits of a plurality of charged particles in one particle accelerator, and thus it is possible to orbit charged particles of different energies at the same time.

[0010]

DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is an overall configuration diagram showing a storage ring 21 of a synchrotron (particle accelerator) according to an embodiment of the present invention, and FIG. 2 is a partial sectional view of a deflecting electromagnet portion thereof. The storage ring 21 is roughly composed of a vacuum chamber 22 around which electrons (charged particles) circulate, and deflection electromagnets 23 and 24 respectively provided outside both ends of the vacuum chamber 22.

Inside the vacuum chamber 22, there are provided an inner orbit 25 and an outer orbit 26, which are two orbits around which electrons circulate, and a kicker (orbit changing device) 27 for changing the orbit of the electrons is arranged in the inner orbit 25. ing. Further, the outer orbit 26 has orbit changing magnets 28, 2 for changing the orbit of electrons.
9. An injection device 32 for injecting electrons from the incident beam line 31 to the outer orbit 26 and an emission device 34 for emitting electrons to the emission beam line 33 are respectively provided.

As shown in FIG. 2, the deflecting electromagnet 23 (24) has magnetic poles 41 and 42 having different polarities, which are arranged to face each other with the inner orbit 25 and the outer orbit 26 in the vacuum chamber 22 interposed therebetween. 42 includes the inner track 2
5 and the outer raceway 26 in a direction orthogonal to the outer raceway 26 (the horizontal direction in FIG. 2), the surface spacing on the inner raceway 25 side is the outer raceway 26.
A step is formed so as to be narrower than the surface spacing on the one side of the two sides, and this step divides the magnetic poles 41 and 42 into a narrow region R ₁ and a wide region R ₂ , and these regions R ₁ and R ₂ respectively have strong magnetic fields. The region H ₁ corresponds to the weak magnetic field region H ₂ . Here, the amount of energy that each electron of the inner orbit 25 and the outer orbit 26 should obtain, that is, the inner orbit 2
The surface spacing between the magnetic poles 41 and 42 is determined based on the strength of the magnetic field required by each of the magnetic poles 5 and the outer track 26, and can be changed as appropriate.

Next, the operation of the storage ring 21 will be described. In the magnetic poles 41 and 42, in the direction orthogonal to the inner orbit 25 and the outer orbit 26 (the left-right direction in FIG. 2), the surface spacing on the inner track 25 side is narrower than the surface spacing on the outer track 26 side. Because the step is formed like
The gap between the magnetic poles 41 and 42 changes stepwise to a narrow region R ₁ and a wide region R ₂ . Therefore, a strong magnetic field region H ₁ (weak magnetic field region H ₂ ) is formed corresponding to the region R ₁ (wide region R ₂ ) having a small interval, and this strong magnetic field region H ₁ (weak magnetic field region H ₂ ) is Inner orbit 25 which is an orbit
(Outer track 26) will be regulated.

As a result, it becomes possible to form a plurality of circular orbits (inner orbit 25 and outer orbit 26) of electrons in one synchrotron, and the inner orbit 25 and the outer orbit 2 are formed.
It is possible to appropriately change the magnitude of the energy that each of the electrons of 6 should obtain, and therefore it is possible to orbit the electrons of different energies at the same time.

As described above, according to the synchrotron of this embodiment, in the deflection electromagnet 23 (24), the magnetic poles 41 and 42 having different polarities sandwich the inner orbit 25 and the outer orbit 26 in the vacuum chamber 22. Since the magnetic poles 41 and 42 are formed so as to face each other and the gap between the inner track 25 and the outer track 26 is narrower than that of the outer track 26, a step is formed in one synchrotron. Orbits of two electrons (inner orbit 25 and outer orbit 26) can be formed, and thus electrons of different energies can orbit simultaneously.

As described above, SOR light having a plurality of wavelengths and SOR light having a wide wavelength width can be simultaneously generated using the same device, and electrons having different energy levels can be generated in the same vacuum chamber 22. Thus, it is possible to achieve an excellent effect such as a collision test between electrons having different energies using one synchrotron.

[0017]

As described above, according to the particle accelerator of the present invention, a vacuum chamber in which charged particles orbit, and magnetic poles having different polarities provided outside the vacuum chamber orbit the charged particles. In a particle accelerator provided with a deflecting electromagnet arranged opposite to each other with the orbital surface sandwiched therebetween, wherein the charged particle is deflected by a magnetic field generated by the magnetic pole, the magnetic pole surface facing the orbital surface is orthogonal to the orbiting direction of the charged particle. Since a step is formed along the direction and a plurality of orbits of charged particles are formed between the magnetic poles by the step, it is possible to form a plurality of orbits of charged particles in one particle accelerator. Yes, and therefore charged particles of different energies can orbit simultaneously.

As described above, SOR light having a plurality of wavelengths and SOR light having a wide wavelength range can be simultaneously generated by using the same device, and charged particles having different energies can be generated in the same vacuum chamber. Thus, it is possible to achieve an excellent effect such as a collision experiment between charged particles having different energies using a single particle accelerator.

[Brief description of drawings]

FIG. 1 is an overall configuration diagram showing a storage ring of a synchrotron (particle accelerator) according to an embodiment of the present invention.

FIG. 2 is a partial cross-sectional view showing a bending electromagnet portion of a synchrotron (particle accelerator) according to an embodiment of the present invention.

FIG. 3 is an overall configuration diagram showing a conventional synchrotron (particle accelerator).

[Explanation of symbols]

21 Storage Ring 22 Vacuum Chamber 23, 24 Bending Electromagnet 25 Inner Orbit (Orbit of Charged Particle) 26 Outer Orbit (Orbit of Charged Particle) 27 Kicker (Orbit Change Device) 28, 29 Orbit Change Magnet 31 Incident Beamline 32 Incident Device 33 Output beam line 34 Output device 41, 42 Magnetic pole R ₁ Region with narrow magnetic pole spacing R ₂ Region with wide magnetic pole spacing H ₁ Strong magnetic field region H ₂ Weak magnetic field region

Claims (1)

[Claims] 1. A vacuum chamber in which charged particles orbit,
And a deflection electromagnet provided outside the vacuum chamber, the magnetic poles having mutually different polarities face each other with the orbital plane of the charged particles facing each other, and the magnetic particles generated by the magnetic poles deflect the charged particles. In the accelerator, a step is formed on a magnetic pole surface facing the orbital surface along a direction orthogonal to the orbiting direction of the charged particles, and the step forms a circular orbit of the charged particles between the magnetic poles. Particle accelerator characterized by.