JPH0688234A - Vacuum sealing device - Google Patents

Abstract

PURPOSE:To dispense with a large-capacity vacuum suction pump by adjusting a sealing state according to strip widths. CONSTITUTION:The one surface of the steel strip 22 is brought into contact with a sealing roll 23 provided within a sealing space 16 and the part of the sealing roll 23 not in contact with the steel strip 22 is provided with a sealing plat 26 holding a slight spacing 27 to the sealing roll 23. The part of the sealing roll 23 in contact with the steel strip 22 is provided with a sealing block 33 adjustable in a spacing 34 from the front surface of the steel strip 22 and a side seal 39 adjustable in a spacing from both ends of the steel strip 22, by which the sealing space 16 is internally partitioned to a steel strip inlet 19 side and a steel strip outlet 20 side so that the steel strip inlet 19 side and the steel strip outlet 20 side can be sealed from each other.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum sealing device used on the inlet side and the outlet side of a continuous vapor phase plating line.

[0002]

2. Description of the Related Art The vapor phase plating method in which a metal or metal compound is evaporated in a vacuum to plate the surface of a substrate has the advantage that most substrates can be coated on the substrate. It is attracting attention as a next-generation plating method.

Hereinafter, a conventional vacuum seal device will be described with reference to FIGS.
Will be explained.

In FIG. 4, 1 is a rewinding machine, 2 is an inlet side vacuum seal chamber, 3 is a vacuum plating chamber, 4 is an outlet side vacuum seal chamber, 5 is a winder, and 6 is a steel strip.

An inlet side vacuum seal chamber 2 and an outlet side vacuum seal chamber 4 are provided on the inlet side and outlet side of the vacuum plating chamber 3, respectively, and the steel strip 6 rewound from the rewinding machine 1 is It is introduced into the vacuum plating chamber 3 through the inlet side vacuum seal chamber 2, subjected to the vapor phase plating method in the vacuum plating chamber 3, and then taken out through the outlet side vacuum seal chamber 4 and wound by the winder 5. It is like this.

The inlet vacuum seal chamber 2 and the outlet vacuum seal chamber 4 are provided with a vacuum seal device 7 as shown in FIGS. 5 and 6 in a plurality of stages.

The vacuum seal device 7 has a pair of upper and lower seal rolls 9 and 10 disposed inside a casing 8 of the inlet side vacuum seal chamber 2 and the outlet side vacuum seal chamber 4 so as to sandwich both sides of the steel strip 6 therein. 8 is provided with a seal plate 12 whose position can be adjusted so that a gap 11 with an upper seal roll 9 is kept small, and a gap 13 with a lower seal roll 10 is kept small in a lower part of the casing 8. The position of the seal plate 14 is adjustable so that a sealed state is created in the casing 8 with the seal rolls 9 and 10 and the seal plates 12 and 14 as boundaries.

[0008]

However, the conventional vacuum sealing device described above has the following problems.

That is, in the conventional vacuum seal device, the steel strip 6 for plating the length of the seal rolls 9 and 10 is desired.
Since it was designed according to the maximum width, the steel strip 6 between the seal rolls 9 and 10 when the steel strip 6 having a width smaller than this is passed through the vacuum plating chamber 3 as shown in FIG. A gap 15 is formed at a portion outside the both ends of the strip 6, and a leak occurs from the gap 15 to deteriorate the sealing property.

Since the gap 15 becomes the largest when the steel strip 6 having the minimum width and the maximum thickness is passed, the vacuum plating chamber 3
In order to maintain the required vacuum degree at all times, the gap 1
A large capacity vacuum suction pump must be used in consideration of the degree of deterioration of the sealing property when 5 is the maximum, which causes an increase in equipment cost and running cost of the vacuum suction pump. .

In view of the above situation, it is an object of the present invention to provide a vacuum sealing device capable of eliminating the need for a large-capacity vacuum suction pump by adjusting the sealing state according to the plate width. Is.

[0012]

According to the present invention, there is provided a casing in which a seal space is formed inside and a steel strip inlet and a steel strip outlet for communicating the seal space with the outside are provided, and the inside of the seal space is provided. A seal roll that contacts one side of the steel strip, and a seal part with a seal plate that holds a small gap to the seal roll between the casing and the part of the seal roll where the steel strip is not in contact. A seal block is provided between the casing and the portion of the seal roll where the steel strip is in contact, and the gap between the steel strip and the surface of the steel strip can be adjusted. The present invention relates to a vacuum seal device, which is provided with a free side seal.

[0013]

The operation of the present invention is as follows.

The steel strip enters the sealing space of the casing from the steel strip inlet and is sent out from the steel strip outlet.

On the way, the steel strip is in contact on one side with a seal roll provided inside the seal space, and a small gap is maintained with respect to the seal roll at a portion of the seal roll which is not in contact with the steel strip. A seal portion having a seal plate is provided, and a seal block capable of adjusting a gap with respect to the surface of the steel strip at a portion of the seal roll in contact with the steel strip and a gap with respect to both ends of the steel strip can be adjusted. By providing the side seal, the inside of the seal space is partitioned into the steel strip inlet side and the steel strip outlet side, and the inlet side and the outlet side are sealed from each other.

At this time, the width dimension and the thickness dimension of the steel strip are changed by providing the seal block capable of adjusting the gap with respect to the surface of the steel strip and the side seals capable of adjusting the gap with respect to both ends of the steel strip. Even in such a case, since each gap can be adjusted to the minimum, the sealing property is improved and a large-capacity vacuum suction pump can be eliminated.

[0017]

Embodiments of the present invention will be described below with reference to the drawings.

1 to 3 show an embodiment of the present invention.

A casing 17 having a seal space 16 formed therein is provided, and a steel strip inlet 19 and a steel strip outlet 20 extending in the width direction 18 of the casing 17 are provided at a lower portion of the seal space 16 portion of the casing 17 to provide a seal. At the center of the space 16, a steel strip 22 extends in the width direction 18, and a portion 21 (upper half) of a predetermined range in the circumferential direction on the outer peripheral surface of the steel strip 22 is hooked in an inverted U-shape to form a steel strip entrance. A steel roll 22 introduced from 19 is rotatably provided with a seal roll 23 for sending the steel strip 22 to a steel strip outlet 20, and both ends of a body portion of the seal roll 23 are connected to a seal space 1 of a casing 17.
The seal roll 23 is fitted into a space 24 having a substantially columnar shape formed outwardly of 6 with a required gap so that the seal roll 23 can be driven by a driving device (not shown).

In the seal space 16 and the cylindrical space 24 on both sides of the seal space 16, a portion 25 (lower half) of the seal roll 23 in a region where the steel strip 22 cannot be hooked has substantially the same curvature as that of the seal roll 23. And has a width direction of 18
A seal plate 26 having a partially cylindrical surface extending toward the seal roll 23 is arranged with a small gap 27 between the seal roll 23 and the steel plate inlet 19 at the lower part of the casing 17 in the seal space 16. A lower seal portion 29 that partitions the lower part of the seal space 16 into the steel strip inlet 19 side and the steel strip outlet 20 side is supported by a partition member 28 that extends upward in the width direction 18 from a portion between the steel strip outlets 20. Constitute.

A guide box 31 having upper and lower guide grooves 30 extending in the width direction 18 in the seal space 16 is formed in the upper portion of the casing 17, and the guide box 31 is formed.
A seal block 33 whose position in the vertical direction can be adjusted by a position adjusting device 32 is provided inside the guide groove 30 of the steel strip 22, and the lower surface of the seal block 33 has substantially the same curvature as that of the seal roll 23 and the upper surface of the steel strip 22. For a small gap 34
Is formed, a guide groove 37 extending in the width direction 18 is formed in an intermediate portion between the partial cylindrical surface portions 35, 36, and the casing 17 is provided on both sides of the guide groove 37 of the seal block 33. And a pair of side seals 39 that can adjust the position in the width direction 18 by the position adjusting device 38 to hold a small gap 44 with respect to the side surface of the steel strip 22. An upper seal portion 40 that divides the inlet 19 side and the steel strip outlet 20 side is formed.

Reference numeral 41 is a bearing for supporting the seal roll 23 on the casing 17, 42 is a seal provided between the seal roll 23 and the casing 17, and 43 is a spring for assisting the movement of the side seal 39.

Next, the operation will be described.

The steel strip 6 rewound from the rewinding machine 1 is introduced into the vacuum plating chamber 3 through the inlet vacuum seal chamber 2 and subjected to the vapor phase plating in the vacuum plating chamber 3 and then the outlet vacuum. The process of being taken out through the sealing chamber 4 to the outside and being taken up by the winder 5 is the same as in FIG. 4 (the above description is given using the reference numerals in FIG. 4).

The vacuum sealing device of the present invention is provided in a single stage or multiple stages in the inlet side vacuum seal chamber and the outlet side vacuum seal chamber, and seals as follows.

That is, in each vacuum sealing device, first, the steel strip 22 introduced into the seal space 16 of the casing 17 from the steel strip inlet 19 is a portion 21 (in a predetermined range in the circumferential direction on the outer peripheral surface of the seal roll 23). It is turned around by being hooked in an inverted U shape on the upper half portion) and taken out from the steel strip outlet 20 to the outside.

At this time, in the lower part of the seal space 16, a steel plate inlet 19 side is provided by a lower seal part 29 composed of a seal plate 26 and a partition member 28 which are arranged with a slight gap 27 with respect to the seal roll 23. And the steel strip outlet 20 side.

In the upper part of the seal space 16, the position adjusting device 32 adjusts the vertical position of the seal block 33 provided inside the guide groove 30 of the guide box 31 in accordance with the thickness of the steel strip 22. By doing
Sides provided on both sides of the guide groove 37 of the seal block 33 by the position adjusting device 38 while maintaining a small gap 34 between the partial cylindrical surface portions 35 and 36 of the lower surface of the seal block 33 and the upper surface of the steel strip 22. By adjusting the position of the seal 39 in the width direction 18 in advance according to the width dimension of the steel strip 22, the side seal 39 and the side surface of the steel strip 22 are held in a small gap 44, and the upper part of the seal space 16 is kept. The steel strip inlet 19 side and the steel strip outlet 20 side are partitioned.

Then, as described above, when the steel strip 22 passes through the inside of the seal space 16, the seal block 33, the side seal 39, the seal roll 23, and the seal plate 26.
With the partition member 28 as a boundary, the inside of the seal space 16 is partitioned into the steel strip inlet 19 side and the steel strip outlet 20 side, and both are sealed.

At this time, the inside of the seal space 16 is moved in the width direction 18
The seal block 33 extending to adjust the gap 34 with the surface of the steel strip 22 according to the thickness dimension of the steel strip 22 and the width of the steel strip 22 by the side seal 39 provided in the guide groove 37 of the seal block 33. Since the gap 44 between the both ends of the steel strip 22 is adjusted according to the dimensions, the gap is always maintained regardless of the size of the steel strip 22 from narrow width to wide width or from thin plate to thick plate. Three
It is possible to adjust 4, 44 to the minimum, so that the sealing performance is remarkably improved, so that even a small-capacity vacuum suction pump can hold the vacuum plating chamber etc. at a required vacuum degree. Therefore, the equipment cost and running cost of the vacuum suction pump can be reduced.

Moreover, since the seal block 33 and the side seal 39 extending in the width direction 18 have a simple structure, the overall equipment cost can be greatly reduced.

When the vacuum sealing device of the present invention is provided in multiple stages, the vacuum sealing devices are arranged in a zigzag pattern by turning the vacuum sealing devices upside down, or by arranging a plurality of vacuum sealing devices and adjoining them. The steel strip inlet 19 and the steel strip outlet 20 of the casing are connected by a closed chamber so that a steel strip inverting roll is provided in the closed chamber.

Further, the present invention is not limited to the above-mentioned embodiments, and it goes without saying that various modifications can be made without departing from the gist of the present invention.

[0034]

As described above, according to the vacuum sealing device of the present invention, by adjusting the sealing state according to the plate width, it is possible to eliminate the need for a large-capacity vacuum suction pump. .

[Brief description of drawings]

FIG. 1 is a cutaway front view of an embodiment of the present invention.

FIG. 2 is a view taken along the line II-II of FIG.

FIG. 3 is a view on arrow III-III in FIG. 1.

FIG. 4 is a schematic side view of the conventional example.

FIG. 5 is a partially enlarged view of FIG.

6 is a VI-VI arrow view of FIG.

[Explanation of symbols]

 16 Seal Space 17 Casing 19 Steel Strip Inlet 20 Steel Strip Outlet 21 Part 22 Steel Strip 23 Seal Roll 25 Part 26 Seal Plate 27 Gap 29 Seal Part (Lower Seal Part) 33 Seal Block 34 Gap 39 Side Seal 44 Gap

Claims (1)

[Claims] 1. A casing having a seal space formed therein and a steel strip inlet and a steel strip outlet communicating with the seal space and the outside is provided, and the casing is in contact with one side of the steel strip. A seal roll is provided, and a seal plate is provided between the casing and the part of the seal roll where the steel strips are not in contact with each other. A seal block capable of adjusting a gap with respect to the surface of the steel strip is provided between the contact portion of the strip and a side seal capable of adjusting a gap with respect to both ends of the steel strip. A vacuum sealing device.