JPH06759Y2 - Hardness meter sample stand - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of use] The present invention relates to a sample table on which a sample such as a micro hardness tester is placed.

[Prior Art] A micro-hardness tester in which an indenter is pressed against a measurement surface of an object to be measured by a variable load mechanism for applying a micro load to measure a displacement amount of the indenter, that is, an indentation depth, is shown in FIG. First, the sample 5 to be tested is fixed to the sample stage 3 moving in the XY directions on the rotary table 2 of the sample table 1, and the indenter 9 is loaded by the load device 8 by the optical microscope 7 as an auxiliary device. Determine the test position to push. At this time, in order to focus the microscope, the handle attached to the foam shaft 11 is turned to move the sample table 1 up and down to determine the test position, and then the rotary table 2 is rotated around the center line of the main shaft 12 to perform the test. The position is brought right below the indenter 9.

[Problems to be solved by the invention] When determining the test position for pushing the indenter as described above, the touch point of the indenter may be displaced or deviated from the displacement measurement range (several μm) depending on the height position of the sample table. There was something that happened. This is because the parallelism and roundness of the spindle that supports the sample table or its shaft hole cannot be ensured due to processing accuracy, and the gap between the spindle and the bearing is unbalanced due to distortion caused by bending. . Therefore, the fourth
As shown in the figure, the sample table tilts and changes depending on the position of the sample table, the distance between the sample surface and the tip of the indenter is not constant depending on the position of the sample table, and the tip of the indenter and the sample surface at the focused position There is a problem that the distance is not constant and accurate measurement cannot be performed. In addition, the fact that the main shaft is a screw has also been a cause of disadvantage in accuracy.

Therefore, according to the present invention, if the test position of the sample is determined, the touch point of the indenter becomes constant regardless of the height position of the sample table, and the stroke loss of the indenter can be made as small as possible. The purpose is to provide a sample stand such as a meter.

[Means for Solving Problems] In order to solve the above problems, the present invention employs the following configuration.

That is, the sample table of the hardness meter according to the present invention includes a sample stage on which a sample is placed, a rotary table for rotating and moving the sample stage directly below an optical microscope or an indenter of the hardness meter, and an elevating and lowering table for the rotary table. And a restraining means for restraining a support shaft of the rotary table so that the rotary table becomes horizontal after the rotary table is lifted up and down.

[Operation] Since the support shaft of the rotary table is constrained by the restricting means so that the rotary table becomes horizontal, the support shaft does not rattle in the gap with the shaft hole when the rotary table is rotated, and is mounted on the sample stage. The touch point of the indenter on the sample becomes constant.

[Embodiment] FIG. 1 is a view showing an embodiment of the present invention. A sample stage 1 includes a sample stage 3 on which a sample 5 is placed and which moves in the XY directions, as in the conventional example, and an optical microscope for the sample stage 3. 7 or indenter 9
And a rotary table 2 which is rotated and moved to a position immediately below. Turntable 2
Is supported by the main shaft 12 and rotatably supported around the center line of the main shaft 12. The spindle 12 is fitted into a spindle hole 17 provided in the table 15 of the tester body,
It is supported by bearings 13 and 14 and moves up and down by a worm shaft 11 screwed onto a main shaft 12. When the worm shaft 11 is rotated by a handle (not shown), the main shaft 12 moves up and down, and at the same time, the sample table also moves up and down.

A clamp 16 is further provided for the main shaft 12,
Due to the gap between the spindle 12 and the bearings 13, 14, the spindle 1
Restrain the 2 so that it does not rattle and keep the turntable 2 horizontal. As the clamp 16, as shown in FIG. 2 (a), a restraint band 18 that is provided so as to be wrapped around the main shaft 12 is tightened and restrained on the main shaft 12 by rotating a lever 19, and FIG. As shown in (b), the main shaft 12 is restrained by the chuck type clamp 20 of the lathe, or as shown in the same figure (c), the restraint 21 is pressed against the main spindle 12 from the radial direction by the bolts 22 to restrain it. Various formats may be used, such as.

As described above, since the sample table according to the present invention is provided with the clamp mechanism for supporting the rotary table and having the elevating means for elevating the rotary table, the clamp mechanism for further restraining the main axis is provided. After focusing the light microscope, the main axis can be clamped before targeting the sample surface. Therefore, when the rotary table is rotated after the target is determined and the sample is moved directly below the indenter, the spindle does not rattle, the distance between the sample surface and the indenter tip is kept constant, and the touch point of the indenter shifts. Disappears.
Even if there is a possibility that it will be clamped in the XY direction,
Since the vertical shift is extremely small, the depth of focus of the microscope can be sufficiently covered.

Further, as described above, the parallelism and roundness of the spindle or the shaft hole,
Even if the processing accuracy such as distortion is a little rough, the indenter pressing position on the sample surface can be accurately determined, the dimensional tolerance does not need to be so strict, and the parts can be easily machined. Therefore, it is not limited to the sample table of the micro hardness tester, it is a device used with an optical microscope, and the sample table can also be rotated to 1 /
When there is a limit to the machining accuracy of the component parts such as those that perform positioning with an accuracy of about 100 to 1 μm, provision of such restraint means can effectively ensure the accuracy.

[Effects of the Invention] As is apparent from the above description, in the sample table of the hardness tester according to the present invention, the touch point of the indenter does not shift at any height position of the sample table, and the test position of the sample can be accurately measured. You can decide.

[Brief description of drawings]

FIG. 1 is a diagram showing a configuration of an embodiment of the present invention, and FIGS. 2 (a) and (b).
(C) is a diagram illustrating various examples of the clamp mechanism, FIG. 3 is a diagram illustrating a state in which the conventional example is incorporated into a micro hardness tester main body and used, and FIG. 4 is a diagram illustrating problems in the conventional example. . 1 ... Sample stage 2 ... Rotary stage 3 ... Sample stage 11 ... Worm axis 12 ... Spindle 16 ... Clamp

Claims (1)

[Scope of utility model registration request] 1. A sample of a hardness meter comprising a sample stage on which a sample is placed, a rotary table for rotating the sample stage to rotate directly under an optical microscope or an indenter of the hardness meter, and an elevating means for elevating the rotary table. A hardness meter sample table, characterized in that it is provided with a restraining means for restraining a support shaft of the rotating table so that the rotating table after moving up and down becomes horizontal.