JPH0674773A - Oscillator for oscillation gyro - Google Patents

Oscillator for oscillation gyro

Info

Publication number
JPH0674773A
JPH0674773A JP4227147A JP22714792A JPH0674773A JP H0674773 A JPH0674773 A JP H0674773A JP 4227147 A JP4227147 A JP 4227147A JP 22714792 A JP22714792 A JP 22714792A JP H0674773 A JPH0674773 A JP H0674773A
Authority
JP
Japan
Prior art keywords
vibrator
oscillator
axis direction
resonance frequency
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4227147A
Other languages
Japanese (ja)
Inventor
Kokichi Terajima
厚吉 寺嶋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Akai Electric Co Ltd
Original Assignee
Akai Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akai Electric Co Ltd filed Critical Akai Electric Co Ltd
Priority to JP4227147A priority Critical patent/JPH0674773A/en
Publication of JPH0674773A publication Critical patent/JPH0674773A/en
Pending legal-status Critical Current

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  • Gyroscopes (AREA)

Abstract

PURPOSE:To enhance detection accuracy of angular speed by stabilizing self- oscillation altitude of an oscillator. CONSTITUTION:Planar parts 16a, 16b having resonance frequencies identical or close to the resonance frequency of an oscillator 3 in the exciting direction are disposed at parts closer to the end part than a position corresponding to a node of the oscillator 3 comprising at least two piezoelectric elements 2a, 2b arranged on the side faces 15a, 15b of a rectangular pillar oscillator 15.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、角速度を検出するた
めの振動ジャイロ用の振動子に関し、特に、自励振動時
の振動姿勢を安定化させることによって角速度の高精度
の検出を可能ならしめるものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibrator for a vibrating gyroscope for detecting an angular velocity, and more particularly, it enables highly accurate detection of an angular velocity by stabilizing a vibration posture during self-excited vibration. It is a thing.

【0002】[0002]

【従来の技術】従来、振動ジャイロ用の振動子として
は、たとえば図3に示すようなものがある。この従来の
振動子3は、横断面形状が四角形をなす振動体1の一の
側面1aに、第一の圧電素子2aを、そしてこの側面1aに隣
接する他の側面1bに、第二の圧電素子2bをそれぞれ貼着
することによって構成されている。
2. Description of the Related Art Conventionally, as a vibrator for a vibrating gyroscope, there is one as shown in FIG. This conventional vibrator 3 includes a first piezoelectric element 2a on one side surface 1a of the vibrating body 1 having a quadrangular cross section, and a second piezoelectric element 2a on the other side surface 1b adjacent to the side surface 1a. It is configured by sticking the elements 2b, respectively.

【0003】この従来の振動子3には、振動体1の相互
に対抗する稜線上で、振動子3のそれぞれの節点と対応
する位置もしくは近傍位置のそれぞれの支持点4,5
に、支持用細条6,7がそれぞれ連結されていて、全体
としてほぼコ字状に折曲するそれらの支持用細状6,7
の両端を一の支持台8に固定することによって振動ジャ
イロを構成することとなる。上記振動子3は、このよう
な支持状態の下で、三次元直交座標系のX軸方向に自励
振動させることができ、また、Z軸の周りの回転運動に
起因するコリオリの力の発生により、Y軸方向に振動す
ることができる。
In this conventional vibrator 3, on the ridge lines of the vibrating body 1 which oppose each other, the supporting points 4, 5 at positions corresponding to or near the respective nodes of the vibrator 3 are provided.
The supporting strips 6 and 7 are connected to each other, and the supporting strips 6 and 7 are bent in a substantially U shape as a whole.
A vibrating gyro is constructed by fixing both ends of the to one support base 8. Under such a supporting state, the oscillator 3 can be self-oscillated in the X-axis direction of the three-dimensional Cartesian coordinate system, and the Coriolis force is generated due to the rotational movement around the Z-axis. With this, it is possible to vibrate in the Y-axis direction.

【0004】ところで、このような振動子3を用いた振
動ジャイロでは、図3(b) に示すように、圧電素子2a,
2bが、それぞれのインピーダンス素子Z1 , Z2 を介し
て駆動装置9の出力側に接続され、さらにこの駆動装置
9の出力側に、他のインピーダンス素子Z3 を介して容
量素子Cが接続されていて、これら圧電素子2a, 2bおよ
び容量素子Cに対して、駆動装置9から同時に交流電圧
が印加されるようになっている。
By the way, in a vibrating gyroscope using such a vibrator 3, as shown in FIG.
2b is connected to the output side of the driving device 9 via the impedance elements Z 1 and Z 2 , respectively, and the capacitive element C is connected to the output side of the driving device 9 via another impedance element Z 3. However, the driving device 9 simultaneously applies an AC voltage to the piezoelectric elements 2a and 2b and the capacitive element C.

【0005】インピーダンス素子Z1 , Z2 と圧電素子
2a, 2bとのそれぞれの接続点10a, 10bは、加算器11の入
力端子に接続され、この加算器11の出力端子および、イ
ンピーダンス素子Z3 と容量素子Cとの接続点10c がそ
れぞれ差動増幅器12の入力端子に接続され、その差動出
力が駆動装置9に帰還されるようになっている。また、
インピーダンス素子Z1 , Z2 と圧電素子2a, 2bとの各
接続点10a, 10bは、差動増幅器13の入力端子にも接続さ
れ、その差動出力が同期検波器14で検波された後、図示
しない平滑回路で平滑されて、角速度検出信号として取
り出されるようになっている。なお、同期検波器14に
は、駆動装置9の出力も供給されている。
Impedance elements Z 1 and Z 2 and piezoelectric element
The connection points 10a and 10b with 2a and 2b are connected to the input terminal of the adder 11, and the output terminal of the adder 11 and the connection point 10c between the impedance element Z 3 and the capacitive element C are differential. It is connected to the input terminal of the amplifier 12, and its differential output is fed back to the driving device 9. Also,
Impedance elements Z 1, Z 2 and the piezoelectric elements 2a, the connection points 10a and 2b, 10b is also connected to the input terminal of the differential amplifier 13, after the differential output is detected by the synchronous detector 14, It is smoothed by a smoothing circuit (not shown) and is taken out as an angular velocity detection signal. The output of the driving device 9 is also supplied to the synchronous detector 14.

【0006】かかる従来振動ジャイロにおいては、駆動
装置9から圧電素子2a, 2bに交流電圧を印加することに
よって、振動子3を三次元直交座標系のX軸方向に自励
振動させることができる。この自励振動状態において、
接続点10a, 10bから得られる出力は、駆動装置9からの
供給電圧と、それぞれの圧電素子2a, 2bの歪みに伴って
各圧電素子2a, 2bから出力される電圧との合成出力とな
る。したがって、それらの両合成出力の和を加算器11で
求め、その出力と接続点10c からの、供給電圧に対応す
る出力との差を差動増幅器12で求めれば、X軸方向の振
動に基づいて圧電素子2a, 2bから発生された電圧だけを
抽出できるので、この差動増幅器12の出力を駆動装置9
に帰還させることにより、振動子3を十分安定して自励
振動させることができる。
In such a conventional vibrating gyro, by applying an alternating voltage from the driving device 9 to the piezoelectric elements 2a, 2b, the vibrator 3 can be vibrated in the X-axis direction of the three-dimensional orthogonal coordinate system. In this self-excited vibration state,
The output obtained from the connection points 10a and 10b is a combined output of the voltage supplied from the drive device 9 and the voltage output from each piezoelectric element 2a, 2b due to the distortion of each piezoelectric element 2a, 2b. Therefore, if the sum of the two combined outputs is obtained by the adder 11 and the difference between the output and the output corresponding to the supply voltage from the connection point 10c is obtained by the differential amplifier 12, it is based on the vibration in the X-axis direction. Since only the voltage generated from the piezoelectric elements 2a and 2b can be extracted, the output of the differential amplifier 12 is set to the driving device 9
By virtue of being fed back to, the vibrator 3 can be sufficiently stably self-excited.

【0007】また、振動子3が自励振動している状態
で、その振動子3がZ軸の周りの回転を受けると、振動
子3はその角速度に比例するコリオリの力によりY軸方
向に振動して、接続点10a, 10bからのそれぞれの出力に
差が生じる。したがって、その差を差動増幅器13で求め
れば、コリオリの力の発生に伴う電圧を分離して検出す
ることができるので、この差動増幅器13の出力を同期検
波器14で検波した後、平滑回路で平滑化することにより
角速度検出信号を得ることができる。
Further, when the vibrator 3 is rotated around the Z axis while the vibrator 3 is self-excited, the vibrator 3 is moved in the Y axis direction by the Coriolis force proportional to its angular velocity. Vibrating causes a difference between the outputs from the connection points 10a and 10b. Therefore, if the difference is obtained by the differential amplifier 13, the voltage associated with the generation of the Coriolis force can be separated and detected, and the output of the differential amplifier 13 is detected by the synchronous detector 14 and then smoothed. An angular velocity detection signal can be obtained by smoothing with a circuit.

【0008】[0008]

【発明が解決しようとする課題】以上のような従来の振
動子3にあっては、振動体1の横断面形状を、コリオリ
の力に対して所定の感度を得るべく、X軸方向およびY
軸方向のそれぞれの共振周波数が一致または近接した値
となるように、その全長にわたって実質的に同一の形状
としている。しかしながら、振動子3の、X軸方向およ
びY軸方向のそれぞれの共振周波数を一致または近接さ
せた場合には、X軸方向およびY軸方向のそれぞれの振
動が相互に影響を及ぼし易くなり、特に周辺温度の変化
等によって、圧電素子2a, 2bの振動体1への貼着状態が
変化すると、振動子3の自励振動姿勢が変化して、励振
方向にY軸方向の振動成分を含むようになり、角速度の
検出精度が低下するという問題があった。この発明は、
従来技術のこのような問題点に着目してなされたもので
あり、振動子の自励振動姿勢を十分安定なものとして、
角速度を高い精度で検出可能ならしめる振動ジャイロ用
振動子を提供するものである。
In the conventional vibrator 3 as described above, the cross-sectional shape of the vibrating body 1 is set in the X-axis direction and the Y-direction in order to obtain a predetermined sensitivity to Coriolis force.
The shapes are substantially the same over the entire length so that the respective resonance frequencies in the axial direction have the same or close values. However, when the resonance frequencies of the X-axis direction and the Y-axis direction of the vibrator 3 are made equal to or close to each other, the respective vibrations of the X-axis direction and the Y-axis direction are likely to affect each other, and in particular, When the attachment state of the piezoelectric elements 2a, 2b to the vibrating body 1 changes due to a change in the ambient temperature, the self-excited vibration posture of the vibrator 3 changes and the vibration direction includes a vibration component in the Y-axis direction. Therefore, there is a problem that the detection accuracy of the angular velocity is lowered. This invention
It was made paying attention to such problems of the conventional technology, and the self-excited vibration posture of the vibrator is made sufficiently stable,
A vibrator for a vibrating gyroscope capable of detecting an angular velocity with high accuracy.

【0009】[0009]

【課題を解決するための手段】この発明の振動ジャイロ
用振動子は、横断面形状が多角形をなす振動体の、相互
に異なる二側面に、少なくとも2つの圧電素子を配設し
てなる振動子の、節点と対応する位置より端部寄りの部
分に、振動子の励振方向の共振周波数に一致もしくは近
接した共振周波数を有する板状部分を設けた点の構成に
特徴を有するものである。
A vibrator for a vibrating gyroscope according to the present invention is a vibrator in which at least two piezoelectric elements are arranged on two mutually different side surfaces of a vibrator having a polygonal cross section. This is characterized in that a plate-shaped portion having a resonance frequency that matches or is close to the resonance frequency in the excitation direction of the vibrator is provided in the portion of the child, which is closer to the end than the position corresponding to the node.

【0010】[0010]

【作用】この本発明振動ジャイロ用振動子は、基本的に
は、従来技術で述べたと同様に機能して自励振動を行う
とともに、角速度に応じて発生するコリオリの力に基づ
いて圧電素子に出力電圧の差を生じる。従って、その差
を求めることによって角速度を検出することができる。
加えて、この振動子では、それの節点と対応する位置よ
り端部側に設けられて、その振動子の励振方向における
共振周波数に一致もしくは近接した共振周波数を有する
板状部分が、振動子の自励振動に際してその励振方向に
大きく運動するようにしなる。そのために、該振動子
は、板状部分の運動に規制されるようにして自励振動す
るようになり、その励振方向が十分安定したものとな
る。従って、角速度を高い精度にて検出することが可能
になる。
This vibrator for a vibrating gyroscope of the present invention basically performs the same function as described in the prior art to perform self-excited vibration, and the piezoelectric element is generated based on the Coriolis force generated according to the angular velocity. A difference in output voltage occurs. Therefore, the angular velocity can be detected by obtaining the difference.
In addition, in this vibrator, the plate-shaped portion provided at the end side from the position corresponding to the node and having a resonance frequency matching or close to the resonance frequency in the excitation direction of the vibrator is When the self-excited vibration is made, it makes a large movement in the exciting direction. For this reason, the oscillator is self-excited as being restricted by the movement of the plate-like portion, and the excitation direction is sufficiently stable. Therefore, the angular velocity can be detected with high accuracy.

【0011】[0011]

【実施例】以下にこの発明の実施例を図面に基づいて説
明する。図1は、この発明の一実施例を示す斜視図であ
る。ここでは、全体としてほぼ四角柱状をなす振動体15
のそれぞれの端部分に、板状部分16a および16b をそれ
ぞれ形成したところにおいて、その振動体15の一の側面
15a に第一の圧電素子2aを、その側面15a に隣接する他
の側面15b には第二の圧電素子2bをそれぞれ貼着して振
動子3を構成する。なおこの場合、前記各板状部分16a,
16bは、振動子3の二つの節点と対応するそれぞれの位
置よりも端部側に位置している。また、これらの板状部
分16a および16b のそれぞれの広幅面は、振動子3の自
励振動方向であるX軸方向と直交する広がりを有する。
ここで、それぞれの板状部分16a および16b の板厚tお
よび長さlは、それらの各板状部分16a, 16bのX軸方向
の共振周波数が、振動子3の励振方向の共振周波数に一
致もしくは近接した値となるように決定する。すなわ
ち、それらの板厚tおよび長さlを、Eをヤング率、ρ
を密度とした場合に、式1に示す、片持はりの固有振動
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a perspective view showing an embodiment of the present invention. Here, the vibrating body 15 is formed into a substantially rectangular column shape as a whole.
When the plate-like portions 16a and 16b are formed at the respective end portions of the
The first piezoelectric element 2a is attached to 15a, and the second piezoelectric element 2b is attached to the other side surface 15b adjacent to the side surface 15a to form the vibrator 3. In this case, each of the plate-shaped portions 16a,
16b is located closer to the end than the respective positions corresponding to the two nodes of the vibrator 3. The wide surfaces of the plate-shaped portions 16a and 16b have a width orthogonal to the X-axis direction which is the self-excited vibration direction of the vibrator 3.
Here, the plate thickness t and the length l of the plate-shaped portions 16a and 16b are such that the resonance frequency of the plate-shaped portions 16a and 16b in the X-axis direction matches the resonance frequency of the vibrator 3 in the excitation direction. Alternatively, determine so that the values are close to each other. That is, the plate thickness t and the length l thereof are E, Young's modulus, ρ
Where is the density, the natural frequency of the cantilever shown in Equation 1

【数1】 に基づいて決定する。[Equation 1] Based on.

【0012】以上のように構成してなる振動子3を、そ
こに連結した各支持用細条6,7によって、従来技術で
述べたと同様にして支持台上に支持することにより、そ
の振動子3の圧電素子2a, 2bに交流電圧を印加すると、
振動子3は、その共振周波数もしくはそれに近接した振
動周波数で、X軸方向に大きく屈曲して自励振動し、こ
のとき、振動子3の共振周波数に一致もしくは近接した
共振周波数を有する板状部分16a, 16bもまた、振動子3
の振動周波数の故に、X軸方向に大きく振動することに
なる。なおここで、板状部分16a, 16bのX軸方向の共振
周波数は、それらの部分の、Y軸方向の共振周波数とは
大きく相違するから、板状部分16a, 16bの、上述したよ
うなX軸方向の振動に際し、たとえそれらがY軸方向の
振動成分を含むことがあっても、それは極めて小さいも
のとなる。かくして、振動子3は、板状部分16a および
16b の、X軸方向への正確な振動の影響下で、X軸方向
に正確に屈曲振動するようその自励振動方向を規制され
ることになり、振動子3の振動姿勢は、温度変化等のい
かんにかかわらず、常に安定したものとなる。従って、
角速度の検出精度を十分に向上させることができる。
The vibrator 3 having the above-described structure is supported on the supporting base by the supporting strips 6 and 7 connected to the vibrator 3 in the same manner as described in the prior art. When AC voltage is applied to the piezoelectric elements 2a and 2b of 3,
The vibrator 3 is largely bent in the X-axis direction and vibrates at its resonance frequency or a vibration frequency close to the resonance frequency to cause self-excited vibration. At this time, a plate-shaped portion having a resonance frequency matching or close to the resonance frequency of the vibrator 3 is generated. 16a and 16b are also transducer 3
Because of the vibration frequency of, the vibration is large in the X-axis direction. Here, since the resonant frequencies of the plate-shaped portions 16a and 16b in the X-axis direction are significantly different from the resonant frequencies of those portions in the Y-axis direction, the above-described X-axis resonance of the plate-shaped portions 16a and 16b is performed. When axially vibrating, they are extremely small, even if they may contain a vibrating component in the Y-axis direction. Thus, the oscillator 3 includes the plate-like portion 16a and
Under the influence of the accurate vibration of 16b in the X-axis direction, the self-excited vibration direction is regulated so that the bending vibration accurately occurs in the X-axis direction. It will always be stable regardless of how it is done. Therefore,
It is possible to sufficiently improve the detection accuracy of the angular velocity.

【0013】図2は、この発明の他の実施例を示す斜視
図であり、これは、前述したと同様の板状部分16a, 16b
の先端に、質量部分17A, 17bを付設し、これらの質量部
分17a, 17bの質量効果によって、振動子3の励振方向の
安定性をさらに高めるものである。以上、この発明を図
示例をもとに説明したが、振動体の横断面形状を、四角
形以外多角形形状とすることもでき、また、板状部分
を、振動体の一方の端部分だけに設けることも可能であ
る。
FIG. 2 is a perspective view showing another embodiment of the present invention, which is a plate-like portion 16a, 16b similar to that described above.
The mass portions 17A and 17b are attached to the tip of the, and the stability of the vibration direction of the vibrator 3 is further enhanced by the mass effect of these mass portions 17a and 17b. Although the present invention has been described above based on the illustrated example, the cross-sectional shape of the vibrating body may be a polygonal shape other than a quadrangle, and the plate-shaped portion may be formed only on one end portion of the vibrating body. It is also possible to provide.

【0014】[0014]

【発明の効果】かくして、この発明によれば、とくに、
振動子の共振周波と一致もしくは近接した共振周波数を
有する板状部分の振動によって、振動子の自励振動方向
を規制することにより、振動子の振動姿勢を常に安定化
させて、角速度の検出精度を有効に向上させることがで
きる。
Thus, according to the present invention, in particular,
The vibration posture of the vibrator is always stabilized by regulating the self-excited vibration direction of the vibrator by vibrating the plate-shaped part that has a resonance frequency that matches or is close to the resonance frequency of the vibrator. Can be effectively improved.

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明の一実施例を示す図である。FIG. 1 is a diagram showing an embodiment of the present invention.

【図2】この発明の他の実施例を示す斜視図である。FIG. 2 is a perspective view showing another embodiment of the present invention.

【図3】従来例を示す図である。FIG. 3 is a diagram showing a conventional example.

【符号の説明】[Explanation of symbols]

2a, 2b 圧電素子 3 振動子 4,5 支持点 6,7 支持用細条 8 支持台 15 振動体 15a, 15b 側面 16a, 16b 板状部分 17a, 17b 質量部分 2a, 2b Piezoelectric element 3 Vibrator 4,5 Support point 6,7 Support strip 8 Support stand 15 Vibrator 15a, 15b Side surface 16a, 16b Plate-like part 17a, 17b Mass part

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 横断面形状が多角形をなす振動体の、相
互に異なる側面に、少なくとも2つの圧電素子を配設し
てなる振動子であって、 振動子の、節点と対応する位置より端部寄りの部分に、
振動子の励振方向の共振周波数に一致もしくは近接した
共振周波数を有する板状部分を設けたことを特徴とする
振動ジャイロ用振動子。
1. A vibrator in which at least two piezoelectric elements are arranged on mutually different side surfaces of a vibrating body having a polygonal cross-sectional shape, the vibrator being located at a position corresponding to a node. In the part near the edge,
A vibrator for a vibrating gyroscope, wherein a plate-shaped portion having a resonance frequency that matches or is close to the resonance frequency in the excitation direction of the vibrator is provided.
JP4227147A 1992-08-26 1992-08-26 Oscillator for oscillation gyro Pending JPH0674773A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4227147A JPH0674773A (en) 1992-08-26 1992-08-26 Oscillator for oscillation gyro

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4227147A JPH0674773A (en) 1992-08-26 1992-08-26 Oscillator for oscillation gyro

Publications (1)

Publication Number Publication Date
JPH0674773A true JPH0674773A (en) 1994-03-18

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP4227147A Pending JPH0674773A (en) 1992-08-26 1992-08-26 Oscillator for oscillation gyro

Country Status (1)

Country Link
JP (1) JPH0674773A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5574219A (en) * 1994-04-26 1996-11-12 Murata Manufacturing Co., Ltd. Piezoelectric vibrator
US5895999A (en) * 1995-06-07 1999-04-20 Murata Manufacturing Co., Ltd. Vibrating gyroscope

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02293622A (en) * 1989-05-08 1990-12-04 Canon Inc Scan type tunnel current detecting device
JPH0354414A (en) * 1989-07-24 1991-03-08 Yazaki Corp Angular velocity sensor
JP4113014B2 (en) * 2002-03-12 2008-07-02 富士フイルム株式会社 Silver halide photographic material

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02293622A (en) * 1989-05-08 1990-12-04 Canon Inc Scan type tunnel current detecting device
JPH0354414A (en) * 1989-07-24 1991-03-08 Yazaki Corp Angular velocity sensor
JP4113014B2 (en) * 2002-03-12 2008-07-02 富士フイルム株式会社 Silver halide photographic material

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5574219A (en) * 1994-04-26 1996-11-12 Murata Manufacturing Co., Ltd. Piezoelectric vibrator
US5895999A (en) * 1995-06-07 1999-04-20 Murata Manufacturing Co., Ltd. Vibrating gyroscope

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