JPH0673792B2 - Feeder - Google Patents

Feeder

Info

Publication number
JPH0673792B2
JPH0673792B2 JP59077279A JP7727984A JPH0673792B2 JP H0673792 B2 JPH0673792 B2 JP H0673792B2 JP 59077279 A JP59077279 A JP 59077279A JP 7727984 A JP7727984 A JP 7727984A JP H0673792 B2 JPH0673792 B2 JP H0673792B2
Authority
JP
Japan
Prior art keywords
nut
feeding
target member
nut body
lead screw
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59077279A
Other languages
Japanese (ja)
Other versions
JPS60221240A (en
Inventor
壮作 木村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Watch Co Ltd
Original Assignee
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Watch Co Ltd filed Critical Citizen Watch Co Ltd
Priority to JP59077279A priority Critical patent/JPH0673792B2/en
Publication of JPS60221240A publication Critical patent/JPS60221240A/en
Publication of JPH0673792B2 publication Critical patent/JPH0673792B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22—Feeding members carrying tools or work
    • B23Q5/34—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission
    • B23Q5/36—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission in which a servomotor forms an essential element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22—Feeding members carrying tools or work
    • B23Q5/34—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission
    • B23Q5/38—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding continuously
    • B23Q5/40—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding continuously by feed shaft, e.g. lead screw

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は工作機械における移動テーブル等を送り対象部
材として該テーブルを高精度に所要送り量直線移動させ
る送り送置に関する。Description: TECHNICAL FIELD The present invention relates to a feeding / feeding device that uses a moving table or the like in a machine tool as a feeding target member and linearly moves the table with a required feeding amount with high accuracy.

〔発明の背景〕[Background of the Invention]

近年、精密機械加工の分野においては、例えば0.1ミク
ロン単位という高精度な製品加工の要請が強くそれに応
じ得る送り装置ひいては超精密工作機械の開発が望まれ
ている。In recent years, in the field of precision machining, there is a strong demand for highly precise product machining, for example, in the unit of 0.1 micron, and it is desired to develop a feed device and an ultra-precision machine tool that can meet the demand.

〔従来技術と問題点〕[Conventional technology and problems]

従来の送り装置は、一般に、ベッドに軸受を介して回転
自在に支承された親ねじに、移動テーブルに固着された
ナット体を螺合して、該親ねじを回動駆動させることに
よりナット体と伴に移動テーブルを直線移動させる構成
であった。In the conventional feeding device, generally, a nut body fixed to a moving table is screwed onto a lead screw rotatably supported on a bed via a bearing, and the nut body is rotated to drive the nut body. Therefore, the moving table was moved linearly.

しかしながら、かかる構成の送り装置では親ねじとナッ
ト体との間に生ずるバックラッシュ、あるいは親ねじの
回転を移動テーブルの直線移動に変換する機構に対して
の正確な送り量制御の困難性等から、高精度な送りを期
待することはできなかった。However, in the feed device having such a configuration, backlash that occurs between the lead screw and the nut body, or difficulty in accurately controlling the feed amount for the mechanism that converts the rotation of the lead screw into the linear movement of the moving table, etc. , I could not expect high precision feed.

〔発明の目的〕[Object of the Invention]

本発明は上述した如き事情に基づいてなされたものであ
り、その目的は高精度に送り対象部材を所要送り量移動
させることができる送り装置を提供することである。The present invention has been made under the circumstances as described above, and an object thereof is to provide a feeding device capable of moving a feeding target member by a required feeding amount with high accuracy.

〔発明の構成〕[Structure of Invention]

本発明は上記目的を達成するために次の如く構成したこ
とを特徴とする。The present invention is characterized by having the following constitution in order to achieve the above object.

すなわち、本体と、この本体に軸受を介して回転自在に
支承された親ねじと、この親ねじを回転駆動する駆動源
と、上記親ねじに螺合されたナット体と、このナット体
の移動に伴い上記本体上を移動する送り対象部材と、こ
の送り対象部材を上記ナット体に対して相対変位させる
ことにより上記本体上で移動させる精密送り手段とを具
備し、前記精密送り手段は前記送り対象部材及び前記ナ
ット体に対し互いに軸方向逆向きの流体圧を作用させて
なる構成である。That is, the main body, a lead screw rotatably supported by the body via a bearing, a drive source for rotationally driving the lead screw, a nut body screwed to the lead screw, and a movement of the nut body. And a precision feed means for moving the feed target member on the body by relatively displacing the feed target member with respect to the nut body. This is a configuration in which fluid pressures axially opposite to each other are applied to the target member and the nut body.

〔発明の実施例〕Example of Invention

以下、本発明の一実施例を図面に基づいて説明する。 An embodiment of the present invention will be described below with reference to the drawings.

第１図は本実施例の送り装置の全体構成を示す図、第２
図は第１図におけるＡ−Ａ線断面図、第３図は送り装置
の要部を拡大して示す図である。FIG. 1 is a diagram showing the overall construction of the feeding device of this embodiment, and FIG.
FIG. 1 is a sectional view taken along the line AA in FIG. 1, and FIG. 3 is an enlarged view showing a main part of the feeding device.

図中３は工作機械における本体（ベッド）であり、図中
１は親ねじである。上記親ねじ１は静圧軸受２を介して
本体３に回転自在に支承されていると共に、駆動源とし
てのモータ４に減速機構５を介して連結されている。ま
た、本体３には送り対象部材としてのテーブル６が摺動
自在に配設されており、一方、親ねじ１にはナット体７
が螺合されている。Reference numeral 3 in the drawing is a main body (bed) in the machine tool, and 1 in the drawing is a lead screw. The lead screw 1 is rotatably supported by the main body 3 via a hydrostatic bearing 2, and is also connected to a motor 4 as a drive source via a reduction mechanism 5. A table 6 as a member to be fed is slidably arranged on the main body 3, while a nut body 7 is attached to the lead screw 1.
Are screwed together.

上記テーブル６とナット体７とは、テーブル６に形成さ
れた孔にナット体７が挿入された状態にて係合してい
る。The table 6 and the nut body 7 are engaged with each other while the nut body 7 is inserted into the hole formed in the table 6.

前記ナット体７は第１ナット８の軸心部に所定深さがわ
たって形成した溝に第２のナット９が嵌入されたいわゆ
るダブルナットに形成されている。ここで、上記第２の
ナット９は第２図に示す如く角形状に形成されており、
従って、各ナット８、９は相対変位が禁止されている。
また、第１のナット８及び第２のナット９の軸方向境界
面にはさまれた空間10には配管11を通して作動油が供給
可能となっており、これにより各ナット８、９は軸方向
の油圧を受けて親ねじ１に圧接固定され得る構成となっ
ている。The nut body 7 is formed as a so-called double nut in which a second nut 9 is fitted in a groove formed by extending a predetermined depth in the axial center portion of the first nut 8. Here, the second nut 9 is formed in a square shape as shown in FIG.
Therefore, relative displacement of the nuts 8 and 9 is prohibited.
Further, hydraulic oil can be supplied through a pipe 11 to a space 10 sandwiched between the axial boundary surfaces of the first nut 8 and the second nut 9, whereby the nuts 8 and 9 are axially moved. It can be pressed and fixed to the lead screw 1 by receiving the hydraulic pressure of.

前記テーブル６とナット体７との間には、該テーブル６
を高精度にて移動させる精密送り手段が構成されてい
る。すなわち、精密送り手段は、ナット体７の一部外周
につば部12を形成してこれをプランジャとすると共にテ
ーブル６をシリンダチューブとして油圧シリンダ13を形
成し、該油圧シリンダ13へサーボ弁14から配管15、16を
通して作動油を供給することによりナット体７に対して
テーブル６を相対変位させて、テーブル６を本体３上で
摺動させる構成である。The table 6 is provided between the table 6 and the nut body 7.
A precision feeding means is configured to move with high precision. That is, the precision feeding means forms a flange portion 12 on a part of the outer circumference of the nut body 7 to form a plunger, and forms a hydraulic cylinder 13 using the table 6 as a cylinder tube. By supplying hydraulic oil through the pipes 15 and 16, the table 6 is relatively displaced with respect to the nut body 7, and the table 6 is slid on the main body 3.

上述した精密送り手段は次の制御系により送り量を制御
される。すなわち、差動増巾器17はコントローラ18から
の送り量指令信号及びテーブル６に設けられた変位計19
からのテーブル６とナット体７との相対変位信号を入力
し、これらの減算値信号をサーボ増巾器20を介してサー
ボ弁14へと出力する。サーボ弁14は信号を入力する間油
圧シリンダ13の所定の室内に作動油を供給する。変位計
19からの相対変位信号コントローラ18からの指令信号と
同値になったとき差動増巾器17は出力零となり、その結
果、サーボ弁14から供給される圧力はバランスし、所望
の位置に保持される。The above-mentioned precision feed means controls the feed amount by the following control system. That is, the differential amplifier 17 has a feed amount command signal from the controller 18 and a displacement meter 19 provided on the table 6.
The relative displacement signal between the table 6 and the nut body 7 is input, and these subtraction value signals are output to the servo valve 14 via the servo amplifier 20. The servo valve 14 supplies hydraulic oil into a predetermined chamber of the hydraulic cylinder 13 while inputting a signal. Displacement gauge
When the relative displacement signal from 19 reaches the same value as the command signal from the controller 18, the output of the differential amplifier 17 becomes zero, and as a result, the pressure supplied from the servo valve 14 is balanced and held at a desired position. It

次に、本送り装置の動作を説明する。Next, the operation of the present feeding device will be described.

テーブル６の粗送りはモータ４により親ねじ１を回転駆
動して、ナット体７を直線移動させることにより行な
う。このとき、油圧シリンダ13の各室内には作動油が充
填されており、従って、テーブル６はナット体７と一体
になって直線移動する。次に、テーブル６の精密送りを
前記油圧シリンダ13に作動油を供給することにより該油
圧シリンダ13の行程範囲内で行なう。すなわち、前述し
た制御系からの信号に基づいてサーボ弁14が油圧シリン
ダ13の所定の室内に作動油を供給すると、テーブル６及
びナット体７のつば部12は互いに軸方向逆向きの油圧を
受け、その結果、ナット体７の位置を基準としてテーブ
ル６は本体３上で直線移動して送りがなされる。このと
き、第１のナット８及び第２のナット９の間の空間10に
は作動油が供給され、ナット体７は親ねじ１に圧接固定
されている。従って、ナット体７は親ねじ１を介して本
体３に確実に固定された状態を維持でき、その結果、精
密送りの基準となるナット体７の位置はずれを生ずるお
それがない。このように、精密送りは油圧シリンダ13の
直線運動によりテーブル６を同方向に直線移動させる機
構であるため、高精度な送り制御が可能で、かつバック
ラッシュがないため高い信頼性が確保できる。The rough feed of the table 6 is performed by rotationally driving the lead screw 1 by the motor 4 and linearly moving the nut body 7. At this time, each chamber of the hydraulic cylinder 13 is filled with hydraulic oil, so that the table 6 linearly moves together with the nut body 7. Next, the precision feed of the table 6 is performed within the stroke range of the hydraulic cylinder 13 by supplying hydraulic oil to the hydraulic cylinder 13. That is, when the servo valve 14 supplies the working oil into the predetermined chamber of the hydraulic cylinder 13 based on the signal from the control system described above, the table 6 and the flange portion 12 of the nut body 7 receive the hydraulic pressure in the axially opposite directions. As a result, the table 6 is linearly moved on the main body 3 and fed with the position of the nut body 7 as a reference. At this time, the working oil is supplied to the space 10 between the first nut 8 and the second nut 9, and the nut body 7 is fixed by pressure to the lead screw 1. Therefore, the nut body 7 can be maintained in a state of being securely fixed to the main body 3 via the lead screw 1, and as a result, there is no possibility that the position of the nut body 7, which is a reference for precision feeding, is displaced. As described above, the precision feed is a mechanism for linearly moving the table 6 in the same direction by the linear movement of the hydraulic cylinder 13, so that highly precise feed control is possible and high reliability can be secured because there is no backlash.

尚、本発明は上述した一実施例に限定されるものではな
い。例えば、精密送り手段としては油圧シリンダ13に代
えてつば部12の両側方に各々静圧ポケットを形成し、空
気、油等の作動流体を圧力を異にして上記静圧ポケット
内に供給してナット体７とテーブル６とをナット体７を
基準として相対変位させる構成であってもよい。The present invention is not limited to the above-mentioned embodiment. For example, as the precision feeding means, instead of the hydraulic cylinder 13, static pressure pockets are formed on both sides of the collar portion 12, and working fluids such as air and oil are supplied into the static pressure pockets at different pressures. The nut body 7 and the table 6 may be configured to be relatively displaced with respect to the nut body 7.

〔発明の効果〕〔The invention's effect〕

以上の説明から明らかなように本発明によれば、送り対
象部材及びナット体に対し互いに軸方向逆向きの流体圧
を作用させてなる精密送り手段を有するので、終局的に
バックラッシュがなくかつ高精度の送り制御を行なうこ
とができ、その結果、高精度に送り対象部材を所要送り
量移動させることができるという効果を奏することがで
きる。As is apparent from the above description, according to the present invention, since there is a precision feeding means that applies fluid pressures in axially opposite directions to the object to be fed and the nut body, finally there is no backlash and It is possible to perform highly accurate feed control, and as a result, it is possible to achieve an effect that the feed target member can be moved by the required feed amount with high precision.

【図面の簡単な説明】[Brief description of drawings]

図面は本発明の一実施例を示すものであり、第１図は送
り装置の全体構成を示す断面図、第２図は第１図におけ
るＡ−Ａ線断面図、第３図は要部を拡大して示す断面図
である。 １……親ねじ、２……静圧軸受、 ３……本体、４……モータ、 ６……テーブル、７……ナット体、 ８……第１のナット、９……第２のナット、 12……つば部、13……油圧シリンダ、 14……サーボ弁、17……差動増巾器、 18……コントローラ、19……変位計、 20……サーボ増巾器。The drawings show an embodiment of the present invention. FIG. 1 is a sectional view showing the entire structure of a feeding device, FIG. 2 is a sectional view taken along the line AA in FIG. 1, and FIG. It is sectional drawing which expands and shows. 1 ... Lead screw, 2 ... Hydrostatic bearing, 3 ... Main body, 4 ... Motor, 6 ... Table, 7 ... Nut body, 8 ... First nut, 9 ... Second nut, 12 …… Brim, 13 …… Hydraulic cylinder, 14 …… Servo valve, 17 …… Differential amplifier, 18 …… Controller, 19 …… Displacement meter, 20 …… Servo amplifier.

Claims (1)

【特許請求の範囲】[Claims] 【請求項１】本体と、本体に軸受を介して回転自在に支
承された台形ねじまたは三角ねじよりなる親ねじと、親
ねじを回転駆動する駆動源と、前記親ねじに螺合された
ナット体と、ナット体の移動に伴い前記本体上を移動す
る送り対象部材と、送り対象部材を前記ナット体に対し
て相対変位させることにより前記本体上で移動させる精
密送り手段と、送り対象部材と前記ナット体との相対変
位量を検出する変位計とを具備し、前記精密送り手段は
前記送り対象部材及び前記ナット体に対して互いに軸方
向逆向きの流体圧を作用させてなる送り装置であって、
前記ナット体の一部外周に形成されたつば部をプランジ
ャとすると共に前記送り対象部材をシリンダチューブと
して形成された油圧シリンダに、流体を供給して前記プ
ランジャに対して前記シリンダチューブを流体圧により
相対変位させる構成であり、前記ナット体は、第１のナ
ットと、第１のナットの軸心部に所定深さにわたって形
成した溝に相対的な回転を禁止した状態で嵌入された第
２のナットとから形成されたダブルナットであり、前記
第１のナット及び前記第２のナットにはさまれた空間に
作動油を供給するための配管を前記ナット体に配した構
成であり、前記第１のナット及び前記第２のナットには
さまれた空間に配管を通して作動油を供給することによ
り前記第１のナット及び前記第２のナットの軸方向境界
面に流体圧を与えて前記第１のナット及び前記第２のナ
ットを前記親ねじに圧接固定し、ずれを生じないよう
に、親ねじに圧接固定された前記ナット体を精密送りの
基準として、前記変位計で、送り対象部材とナット体の
相対変位量を検出しながら、前記精密送り手段により、
前記送り対象部材を送ることにより、送り制御を行い、
高精度に送り対象部材を所要送り量、移動させるべく構
成されていることを特徴とする送り装置。1. A main body, a lead screw composed of a trapezoidal screw or a triangular screw rotatably supported by a main body through a bearing, a drive source for rotationally driving the lead screw, and a nut screwed to the lead screw. A body, a feeding target member that moves on the main body with the movement of the nut body, a precision feeding means that moves the feeding target member on the main body by relatively displacing the feeding target member with respect to the nut body, and a feeding target member A displacement device that detects a relative displacement amount with respect to the nut body, wherein the precision feeding means is a feeding device that applies fluid pressures in axially opposite directions to the feeding target member and the nut body. There
A flange is formed on a part of the outer circumference of the nut body, and a fluid is supplied to a hydraulic cylinder formed by using the feed target member as a cylinder tube. The nut body is configured to be relatively displaced, and the nut body is inserted into a groove formed in the first nut and a shaft center portion of the first nut over a predetermined depth in a state in which relative rotation is prohibited. A double nut formed from a nut, wherein a pipe for supplying hydraulic oil to a space sandwiched between the first nut and the second nut is arranged in the nut body, By supplying hydraulic oil through a pipe into a space sandwiched between the first nut and the second nut, fluid pressure is applied to the axial boundary surface of the first nut and the second nut. The first nut and the second nut are fixed to the lead screw by pressure, and the nut body fixed by pressure on the lead screw is used as a reference for precision feed so as to prevent misalignment. While detecting the relative displacement amount of the target member and the nut body, by the precision feeding means,
By feeding the member to be fed, feed control is performed,
A feeding device, which is configured to move a feeding target member with a required feeding amount with high accuracy.
JP59077279A 1984-04-17 1984-04-17 Feeder Expired - Lifetime JPH0673792B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59077279A JPH0673792B2 (en) 1984-04-17 1984-04-17 Feeder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59077279A JPH0673792B2 (en) 1984-04-17 1984-04-17 Feeder

Publications (2)

Publication Number Publication Date
JPS60221240A JPS60221240A (en) 1985-11-05
JPH0673792B2 true JPH0673792B2 (en) 1994-09-21

Family

ID=13629421

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59077279A Expired - Lifetime JPH0673792B2 (en) 1984-04-17 1984-04-17 Feeder

Country Status (1)

Country Link
JP (1) JPH0673792B2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63120050A (en) * 1986-11-06 1988-05-24 Canon Inc Driving mechanism
JPH05138484A (en) * 1991-11-18 1993-06-01 Yotaro Hatamura Precision positioning fine moving feed device and system
JPH07217607A (en) * 1994-02-03 1995-08-15 Smc Corp Positioning device for load
KR100945034B1 (en) 2009-07-27 2010-03-05 주식회사 태성테크 Brake of linear motion apparatus using screw
JP6540058B2 (en) * 2015-02-03 2019-07-10 株式会社ジェイテクト Feeder and machine tool

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58120444A (en) * 1982-01-14 1983-07-18 Nachi Fujikoshi Corp Fine thread feeder of static pressure slide table
JPS58155142A (en) * 1982-03-04 1983-09-14 Nachi Fujikoshi Corp Hybrid precise positioning and feed mechanism

Also Published As

Publication number Publication date
JPS60221240A (en) 1985-11-05

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