JPH067044U - Gas mass spectrometer sampling device - Google Patents
Gas mass spectrometer sampling deviceInfo
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- JPH067044U JPH067044U JP11369491U JP11369491U JPH067044U JP H067044 U JPH067044 U JP H067044U JP 11369491 U JP11369491 U JP 11369491U JP 11369491 U JP11369491 U JP 11369491U JP H067044 U JPH067044 U JP H067044U
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- sample gas
- inflow pipe
- gas inflow
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Abstract
(57)【要約】 （修正有）
【目的】 気体流入パイプに細管を使用するも、常に試
料ガスの流量が定量性を有し、目詰まり、留分物質の付
着を少なくする。
【構成】 キャピラリ・インレット・システムの気体質
量分析計のサンプリング装置において、試料ガス流入パ
イプ４の上流端に該試料ガス流入パイプ４よりは内径の
大きい前処理流路１０と分岐流路２０とを連結し、該前
処理流路１０の上流端を試料ガス流入口１１となし、こ
の前処理流路１０にはミスト除去装置１２、加熱装置１
３、フィルタ１４を設け、上記分岐流路２０は流量調整
バルブ２１を介してその先端を吸気装置２３の吸気口に
連結してなる。
(57) [Summary] (Modified) [Purpose] Even if a thin tube is used as the gas inflow pipe, the flow rate of the sample gas is always quantitative, and clogging and adhesion of distillate substances are reduced. In a sampling device for a gas mass spectrometer of a capillary inlet system, a pretreatment channel 10 and a branch channel 20 having an inner diameter larger than that of the sample gas inflow pipe 4 are provided at the upstream end of the sample gas inflow pipe 4. The sample gas inflow port 11 is formed at the upstream end of the pretreatment channel 10 connected to the mist removing device 12 and the heating device 1.
3, a filter 14 is provided, and the branch passage 20 is connected at its tip to the intake port of the intake device 23 via a flow rate adjusting valve 21.
Description
【０００１】[0001]
本考案は、試料ガスを質量スペクトルに分析する気体質量分析計のサンプリン グ装置の改良に関するものである。 The present invention relates to an improvement of a sampling device of a gas mass spectrometer for analyzing a sample gas into a mass spectrum.
【０００２】[0002]
従来、気体質量分析計のサンプリング装置としては、「図２」に示すごときも のが一般的に使用されており、この例従来例は、チャンバ５の一端に試料ガス流 入口１１を、他端に質量分析計の質量分析管１に連通する試料ガス流入パイプ４ を設け、この試料ガス流入パイプ４には流量調整バルブ２１を介挿し、上記チャ ンバ５と試料ガス流入パイプ４と流量調整バルブ２１とを加熱装置６内に収納し てなる。 Conventionally, as shown in FIG. 2, a sampling device for a gas mass spectrometer has been generally used. In this example, the conventional example has a sample gas inlet 11 at one end of a chamber 5 and another end at the other end. Is provided with a sample gas inflow pipe 4 communicating with the mass spectrometer tube 1 of the mass spectrometer, and a flow rate adjusting valve 21 is inserted in the sample gas inflow pipe 4, and the chamber 5, the sample gas inflow pipe 4, and the flow rate adjusting valve are provided. 21 and 21 are housed in the heating device 6.
【０００３】 そして、上記従来装置は、質量分析管１内を吸気装置２３により負圧に保ち、 流量調整バルブ２１を調整して試料ガスを定量的に質量分析管１内に吸引流入す るようになしてあり、試料ガス流入口１１と該流量調整バルブ２１との間に所定 の容量を有するチャンバ５を介装することで試料ガスの圧力変動を抑え定量性を 保つとともに、加熱装置６による充分な加熱時間を得るようになしている。In the above conventional apparatus, the inside of the mass analysis tube 1 is maintained at a negative pressure by the intake device 23, and the flow rate adjusting valve 21 is adjusted so that the sample gas is quantitatively sucked into the mass analysis tube 1. Since the chamber 5 having a predetermined capacity is interposed between the sample gas inlet 11 and the flow rate adjusting valve 21, the pressure fluctuation of the sample gas is suppressed and the quantitative property is maintained, and the heating device 6 is used. It is designed to get enough heating time.
【０００４】 しかし、上記従来法はチャンバ５内の試料ガスが全部入れ替わらないと、試料 ガスの変化が測定できないことになるため、近時はキャピラリ・インレット・シ ステムと称する方式が提案されている。この方式は、図示はしていないが、質量 分析計の質量分析管に吸気装置の吸気口を連管で連通し、該質量分析管内を所定 の負圧に保ち、この質量分析管には細管よりなる試料ガス流入パイプの一端を連 通してなり、この試料ガス流入パイプ先端を試料ガス流入口となしてある。そし て、該試料ガス流入パイプは内径５０〜１００ミクロン程度の長尺（１〜２ｍ） 細管を使用し、この試料ガス流入パイプ内を負圧によって吸引される試料ガスの 流量の定量性を確保している。However, in the above conventional method, the change in the sample gas cannot be measured unless all the sample gas in the chamber 5 is replaced. Therefore, recently, a method called a capillary inlet system has been proposed. There is. In this method, although not shown in the figure, the mass analysis tube of the mass spectrometer is connected to the intake port of the air intake device by a communication tube, and the inside of the mass analysis tube is maintained at a predetermined negative pressure. One end of the sample gas inflow pipe is made to communicate, and the tip of this sample gas inflow pipe serves as the sample gas inflow port. The sample gas inflow pipe uses a long (1-2 m) thin tube with an inner diameter of about 50 to 100 μm, and the sample gas inflow pipe has a quantitative flow rate of the sample gas sucked by negative pressure. is doing.
【０００５】[0005]
そして、上記キャピラリ・インレット・システムは、気体流入パイプでの圧力 損失を大きく設定することで、すなわち、気体流入パイプをできるだけ細くて長 くすることで、試料ガスの流量をより定量化することができることはよく知られ ており、この気体流入パイプの内径はますます細くて長いものが使用される傾向 にある。 The capillary inlet system can further quantify the flow rate of the sample gas by setting a large pressure loss in the gas inflow pipe, that is, by making the gas inflow pipe as thin and long as possible. It is well known that this is possible, and the inner diameter of this gas inlet pipe tends to be smaller and longer.
【０００６】 しかし、このキャピラリ・インレット・システムも、気体流入パイプが細いた め目詰まりし易く、また、長い気体流入パイプを使用すると途中に、留分物質が 付着して局所的な狭窄流路を形成して定量性を損なったり、留分物質がランダム に多量に流出して測定誤差を惹起するという課題を有している。However, this capillary inlet system is also easily clogged because the gas inflow pipe is thin, and when a long gas inflow pipe is used, a distillate substance is attached on the way and a local constricted flow path is formed. However, there is a problem that the quantitative property is impaired due to the formation of a distillate, or a large amount of distillate substances are randomly discharged to cause a measurement error.
【０００７】 そこで、本考案は上記課題を解決すべくなされたもので、気体流入パイプに細 管を使用するも、常に試料ガスの流量が定量性を有し、目詰まり、留分物質の付 着が少ない気体質量分析計のサンプリング装置を提供することを目的としたもの である。Therefore, the present invention has been made to solve the above problems. Even when a thin tube is used as the gas inflow pipe, the flow rate of the sample gas is always quantitative, clogging, and distillate substances are attached. The purpose of the present invention is to provide a sampling device for a gas mass spectrometer with less wear.
【０００８】[0008]
上記の目的に沿い、先述特許請求の範囲を要旨とする本発明の構成は前述課題 を解決するために、気体質量分析計の質量分析管１に吸気装置２の吸気口を連管 ３で連通し、該質量分析管１内を所定の負圧に保ち、この質量分析管１には細管 よりなる試料ガス流入パイプ４の一端を連通してなる気体質量分析計のサンプリ ング装置において、 上記試料ガス流入パイプ４の上流端に、この試料ガス流入パイプ４よりは内径 の大きい前処理流路１０と分岐流路２０とを連結し、該前処理流路１０の上流端 を試料ガス流入口１１となし、この前処理流路１０にはミスト除去装置１２、加 熱装置１３、フィルタ１４を設け、上記分岐流路２０には流量調整バルブ２１を 介してその先端を吸気装置２３の吸気口に連結したことを特徴とする技術的手段 を講じたものである。 In order to solve the above-mentioned problems, the configuration of the present invention, which is based on the above-mentioned claims, is connected to the mass analysis tube 1 of the gas mass spectrometer through the intake pipe 2 of the intake device 2 in accordance with the above object. In the sampling device of the gas mass spectrometer, in which the inside of the mass analysis tube 1 is maintained at a predetermined negative pressure, and one end of the sample gas inflow pipe 4 made of a thin tube is connected to the mass analysis tube 1, A pretreatment channel 10 having a larger inner diameter than the sample gas inflow pipe 4 and a branch channel 20 are connected to the upstream end of the gas inflow pipe 4, and the upstream end of the pretreatment channel 10 is connected to the sample gas inlet port 11. That is, the pretreatment channel 10 is provided with a mist removing device 12, a heating device 13 and a filter 14, and the branch channel 20 is connected to the intake port of the intake device 23 through the flow control valve 21. Technical hand characterized by being connected Those that took.
【０００９】[0009]
それ故、本考案気体質量分析計のサンプリング装置は、前処理流路１０の上流 端の試料ガス流入口１１を、試料ガス発生源部位に開口させ、加熱装置１３と吸 気装置２３を運転すると、試料ガスは吸気装置２３に吸引され、前処理流路１０ と分岐流路２０とを通って吸気装置２３の吐出口より吐出される。そして、この 前処理流路１０と分岐流路２０とを通る試料ガスは、途中ミスト除去装置１２、 加熱装置１３、固形分子除去用のフィルタ１４で前処理され、分岐流路２０に流 入する時点では清浄で高温な気体となる作用を呈する。 Therefore, in the sampling device of the gas mass spectrometer of the present invention, when the sample gas inlet 11 at the upstream end of the pretreatment channel 10 is opened at the sample gas generation source site and the heating device 13 and the gas suction device 23 are operated. The sample gas is sucked into the suction device 23, passes through the pretreatment channel 10 and the branch channel 20, and is discharged from the discharge port of the suction device 23. The sample gas passing through the pretreatment channel 10 and the branch channel 20 is pretreated by the mist removing device 12, the heating device 13, and the solid molecule removing filter 14 on the way and flows into the branch channel 20. At this point, it acts as a clean and hot gas.
【００１０】 また、上記分岐流路２０に介挿した流量調整バルブ２１を調整（実施例では、 この流量調整バルブ２１は流量計を付設してあり０〜１０リットル／分の範囲で 流量が調整可能となっており、１０リットル／分以下の所定流量に調整する。） することで、前処理流路１０と分岐流路２０とを通る試料ガスの流量を所定に設 定できる作用を呈し、この流量調整バルブ２１を調整して流量を所定に設定する と、試料ガスが加熱装置１３を通過する時間を選定でき、この流量を小さく設定 することで、小型の加熱装置１３で充分なる加熱が可能となる作用を有する。Further, the flow rate adjusting valve 21 inserted in the branch flow path 20 is adjusted (in the embodiment, the flow rate adjusting valve 21 is provided with a flow meter, and the flow rate is adjusted in the range of 0 to 10 liters / minute. It is possible, and the flow rate of the sample gas passing through the pretreatment flow path 10 and the branch flow path 20 can be set to a predetermined value by adjusting to a predetermined flow rate of 10 liters / minute or less. When the flow rate adjusting valve 21 is adjusted to set the flow rate to a predetermined value, the time for the sample gas to pass through the heating device 13 can be selected. By setting this flow rate small, sufficient heating can be achieved with the small heating device 13. It has a possible action.
【００１１】 そして、上記のごとく前処理流路１０と分岐流路２０とを通る試料ガスの流量 を所定に設定した状態で、質量分析計の質量分析管１内を吸気装置２内に試料気 体を吸引する。通常、質量分析管１内は１０-6Ｔｏｒｒ程度に調整されるが、試 料ガス流入パイプ４の内径が１００ミクロン程度に充分に細いと、質量分析管１ 内に吸引される試料ガスの流量はごく微量で定量化される作用は従来と同じであ り、前処理流路１０と分岐流路２０とを通る試料ガスの大部分は吸気装置２３の 吐出口より吐出されるよう作用する。Then, with the flow rate of the sample gas passing through the pretreatment flow channel 10 and the branch flow channel 20 set to a predetermined value as described above, the inside of the mass spectrometer tube 1 of the mass spectrometer is fed into the intake device 2 through the sample gas. Aspirate the body. Normally, the inside of the mass analysis tube 1 is adjusted to about 10 -6 Torr, but if the inner diameter of the sample gas inflow pipe 4 is sufficiently thin to about 100 microns, the flow rate of the sample gas sucked into the mass analysis tube 1 The effect of being quantified with a very small amount is the same as the conventional one, and most of the sample gas passing through the pretreatment channel 10 and the branch channel 20 acts so as to be discharged from the discharge port of the suction device 23.
【００１２】 そして上記のごとく、本考案では試料ガスは、試料ガス流入パイプ４の入口で は既に清浄・高温化されているので、該試料ガス流入パイプ４内での目詰まりが 防止され、かつ、試料ガス流を高温化することで分留物の付着も防止される作用 を呈する。また、本考案は、試料ガスの温度が高いため、細いキャピラリー管内 においても低温ガスに比べより平滑なガス流を維持できることによって、安定し て新たな試料ガスが供送されることになり、試料ガスの変化を短時間で連続的に 測定できる作用を呈するものである。As described above, in the present invention, the sample gas has already been cleaned and heated to a high temperature at the inlet of the sample gas inflow pipe 4, so that clogging in the sample gas inflow pipe 4 is prevented, and By advancing the temperature of the sample gas stream, it also has the effect of preventing the adherence of fractions. Further, according to the present invention, since the temperature of the sample gas is high, a smoother gas flow can be maintained even in the thin capillary tube as compared with the low temperature gas, so that a new sample gas can be stably fed, and the sample gas can be stably supplied. It has the effect of being able to continuously measure changes in gas in a short time.
【００１３】[0013]
次に、本考案の実施例を添附図面に従って説明すれば以下の通りである。図中 、１は気体質量分析計の質量分析管１で、この質量分析管１に吸気装置２の吸気 口を連管３で連通し、該質量分析管１内を所定の負圧に保ち、この質量分析管１ には細管よりなる試料ガス流入パイプ４の一端を連通してなるのは従来と同じで ある。 An embodiment of the present invention will be described below with reference to the accompanying drawings. In the figure, reference numeral 1 is a mass analysis tube 1 of a gas mass spectrometer, and the intake port of an intake device 2 is connected to this mass analysis tube 1 by a connecting tube 3 to keep the inside of the mass analysis tube 1 at a predetermined negative pressure. As in the conventional case, one end of a sample gas inflow pipe 4 made of a thin tube is connected to the mass analysis tube 1 as in the conventional case.
【００１４】 上記気体質量分析計は従来公知なものが使用でき、本実施例では質量分析管１ 内に流入する試料気体をイオン化装置でイオン化し、四重極でそのイオン電流を 捕らえる四重極質量分析計を使用したが、マグネット方式等の他の方式の気体質 量分析計であってもよいことは無論である。また、上記吸気装置２は、ターボ分 子ポンプ、ベーンポンプ、歯車ポンプ、噴流ポンプ等の高真空性に優れたものが 使用され、高真空性を確保するために、連管３の途中に流量調整弁７を介挿し、 さらには図では示していないが、連管３の上記流量調整弁７より下流側部位に所 定容量のチャンバを介挿してもよく、これらは従来技術を利用すればよい。なお 、図示実施例では、上記吸気装置２として５０〜６０リットル／分の排気量を有 するターボ分子ポンプを使用し、質量分析管１内が試料ガス導入時に１０-6Ｔｏ ｒｒ程度となるように設定した。A conventionally known gas mass spectrometer can be used. In the present embodiment, the sample gas flowing into the mass analysis tube 1 is ionized by an ionization device, and the quadrupole detects the ion current. Although the mass spectrometer was used, it goes without saying that a gas mass spectrometer of another type such as a magnet type may be used. Further, as the intake device 2, a turbo molecular pump, a vane pump, a gear pump, a jet pump or the like having an excellent high vacuum property is used, and in order to ensure a high vacuum property, a flow rate adjustment is performed in the middle of the connecting pipe 3. Although not shown in the figure, a valve 7 may be inserted, and a chamber having a predetermined volume may be inserted in a portion of the connecting pipe 3 on the downstream side of the flow rate adjusting valve 7. For these, conventional techniques may be used. . In the illustrated embodiment, a turbo molecular pump having a displacement of 50 to 60 liters / minute is used as the intake device 2 so that the inside of the mass analysis tube 1 is about 10 −6 Torr when the sample gas is introduced. Set to.
【００１５】 また、上記試料ガス流入パイプ４も従来公知なものが使用でき、本実施例では 内径５０〜１００ミクロンの溶融シリカチューブを使用した。As the sample gas inflow pipe 4, a conventionally known pipe can be used, and a fused silica tube having an inner diameter of 50 to 100 μm is used in this embodiment.
【００１６】 そして、上記試料ガス流入パイプ４は、従来はその上流端を直接、試料気体発 生源部位に開口して、試料ガス発生源より試料気体が該試料ガス流入パイプ４内 を通って質量分析管１内に流入するようになしていたが、本考案は、上記試料ガ ス流入パイプ４の上流端に、前処理流路１０と分岐流路２０とを連結してある。In the conventional case, the sample gas inflow pipe 4 has its upstream end directly opened to the sample gas generation source portion, and the sample gas from the sample gas generation source passes through the sample gas inflow pipe 4 to generate a mass. Although it was designed to flow into the analysis tube 1, in the present invention, the pretreatment channel 10 and the branch channel 20 are connected to the upstream end of the sample gas inflow pipe 4.
【００１７】 上記前処理流路１０と分岐流路２０とは、その材質を特に限定するものではな いが、内径は試料ガス流入パイプ４よりは大きいものを使用した。また、この前 処理流路１０と分岐流路２０とは、加熱装置１３の加熱、および加熱装置１３よ って加熱された試料ガスによって変質しないものが使用されるのは無論で、さら には高温雰囲気でもイオン化しずらい材質が使用され、本実施例では内径５〜１ ０ｍｍの硬質ガラス管を使用した。Although the material of the pretreatment channel 10 and the branch channel 20 is not particularly limited, those having an inner diameter larger than that of the sample gas inflow pipe 4 were used. In addition, it is needless to say that the pretreatment channel 10 and the branch channel 20 are not changed by the heating of the heating device 13 and the sample gas heated by the heating device 13 and, of course, further used. A material that is difficult to ionize even in a high temperature atmosphere is used. In this embodiment, a hard glass tube having an inner diameter of 5 to 10 mm is used.
【００１８】 そして、上記前処理流路１０の上流端を試料ガス流入口１１となし、この前処 理流路１０にはミスト除去装置１２、加熱装置１３、フィルタ１４を設け、上記 分岐流路２０は流量調整バルブ２１を介してその先端を吸気装置２３の吸気口に 連結してなる。The upstream end of the pretreatment channel 10 is formed as a sample gas inflow port 11. The pretreatment channel 10 is provided with a mist removing device 12, a heating device 13, and a filter 14, and the branch channel is provided. 20 is connected at its tip to an intake port of an intake device 23 via a flow control valve 21.
【００１９】 上記ミスト除去装置１２、加熱装置１３、フィルタ１４は、夫々従来公知なも のが使用でき、ミスト除去装置１２は流路途中に衝突を有したジグザグ路を設け ミスト捕集するような方式のもの、加熱装置１３は適宜電熱装置、フィルタ１４ は固形分子除去用でグラスウールフィルタ等が使用できる。さらに、上記流量調 整バルブ２１も従来公知な各種バルブが使用できるが、本実施例では小容量の流 量調整に適したニードルバルブを使用し、さらに流量調整が行い易いよう負圧流 量計を付設したものを使用した。The mist removing device 12, the heating device 13, and the filter 14 may be conventionally known ones, and the mist removing device 12 is provided with a zigzag path having a collision in the middle of the flow path to collect mist. System, the heating device 13 is an electric heating device as appropriate, and the filter 14 is for removing solid molecules, and a glass wool filter or the like can be used. Further, various conventionally known valves can be used as the flow rate adjusting valve 21, but in the present embodiment, a needle valve suitable for flow rate adjustment of a small volume is used, and a negative pressure flow meter is used to facilitate flow rate adjustment. The attached one was used.
【００２０】 なお、図中、２２は冷却装置、２４は圧力変動を抑止するチャンバ、２５は液 送ポンプ、３０は温度計、３１はこの温度計３０の出力によって加熱装置１３を 制御する制御装置を示すものである。In the figure, 22 is a cooling device, 24 is a chamber that suppresses pressure fluctuations, 25 is a liquid feed pump, 30 is a thermometer, and 31 is a control device that controls the heating device 13 by the output of this thermometer 30. Is shown.
【００２１】[0021]
【考案の効果】 本考案は上記のごときであるので、前処理流路１０と分岐流路２０とを通る試 料ガスは、途中ミスト除去装置１２、加熱装置１３、フィルタ１４で前処理され 、分岐流路２０に流入する時点では清浄で高温な気体となり、試料ガス流入パイ プ４内での目詰まり、留分物質の付着が防止され、安定した信頼性の高い質量分 析が行える気体質量分析計のサンプリング装置を提供することができるものであ る。EFFECT OF THE INVENTION Since the present invention is as described above, the sample gas passing through the pretreatment channel 10 and the branch channel 20 is pretreated by the mist removing device 12, the heating device 13, and the filter 14 on the way. At the time of flowing into the branch flow path 20, it becomes a clean and high temperature gas, which prevents clogging in the sample gas inflow pipe 4 and adhesion of distillate substances, and enables stable and highly reliable mass analysis. It is possible to provide a sampling device for an analyzer.
【００２２】 また、本考案は前処理流路１０と分岐流路２０とを通る試料ガスの流量を所定 に設定できるため、結果として、分岐流路２０の分岐点まで、一段目の流量調整 が行われ、次いで、試料ガス流入パイプ４で二段目の流量調整が行われることに なり、この流量調整を二段としたことで、安定して試料ガスを定量的に質量分析 管１に流入させ、試料ガスの質量分析管への流入量をより正確に定量化でき分析 精度を向上できる気体質量分析計のサンプリング装置を提供することができるも のである。Further, according to the present invention, since the flow rate of the sample gas passing through the pretreatment channel 10 and the branch channel 20 can be set to a predetermined value, as a result, the flow rate of the first stage can be adjusted up to the branch point of the branch channel 20. After that, the flow rate of the second stage is adjusted by the sample gas inflow pipe 4, and the flow rate is adjusted to the second stage, so that the sample gas stably flows into the mass spectrometry tube 1 quantitatively. Thus, it is possible to provide a sampling device for a gas mass spectrometer that can more accurately quantify the inflow amount of the sample gas into the mass spectrometry tube and improve the analysis accuracy.
【００２３】 さらに、本考案は前処理流路１０と分岐流路２０とを通る試料ガスの流量、管 内圧を所定に設定できるため、試料ガス流入パイプ４の入口には常に新たな試料 ガスが供送されており、試料ガスの変化を短時間で連続的に測定できる気体質量 分析計のサンプリング装置を提供することができるものである。Further, according to the present invention, since the flow rate of the sample gas passing through the pretreatment channel 10 and the branch channel 20 and the internal pressure of the sample gas can be set to a predetermined value, a new sample gas is always introduced at the inlet of the sample gas inflow pipe 4. The present invention is capable of providing a sampling device for a gas mass spectrometer that has been delivered and is capable of continuously measuring changes in sample gas in a short time.
【図１】本考案気体質量分析計のサンプリング装置の一
実施例を示すフロー図である。FIG. 1 is a flow chart showing an embodiment of a sampling device of the gas mass spectrometer of the present invention.
【図２】従来例断面図である。FIG. 2 is a sectional view of a conventional example.
１ 質量分析管 ３ 連管 ４ 試料ガス流入パイプ １０ 前処理流路 １１ 試料ガス流入口 １２ ミスト除去装置 １３ 加熱装置 １４ フィルタ ２０ 分岐流路 ２１ 流量調整バルブ ２３ 吸気装置 DESCRIPTION OF SYMBOLS 1 Mass spectrometry tube 3 Connection tube 4 Sample gas inflow pipe 10 Pretreatment flow path 11 Sample gas inflow port 12 Mist removal device 13 Heating device 14 Filter 20 Branch flow path 21 Flow control valve 23 Intake device
Claims (1)
気装置（２）の吸気口を連管（３）で連通し、該質量分
析管（１）内を所定の負圧に保ち、この質量分析管
（１）には細管よりなる試料ガス流入パイプ（４）の一
端を連通してなる気体質量分析計のサンプリング装置に
おいて、 上記試料ガス流入パイプ（４）の上流端に、この試料ガ
ス流入パイプ（４）よりは内径の大きい前処理流路（１
０）と分岐流路（２０）とを連結し、該前処理流路（１
０）の上流端を試料ガス流入口（１１）となし、この前
処理流路（１０）にはミスト除去装置（１２）、加熱装
置１３、フィルタ（１４）を設け、上記分岐流路（２
０）は流量調整バルブ（２１）を介してその先端を吸気
装置（２３）の吸気口に連結したことを特徴とする気体
質量分析計のサンプリング装置。1. A mass analysis tube (1) of a gas mass spectrometer is connected to an intake port of an intake device (2) by a communication tube (3) to maintain a predetermined negative pressure in the mass analysis tube (1). In the sampling device of the gas mass spectrometer, wherein one end of a sample gas inflow pipe (4) made of a thin tube is connected to the mass analysis pipe (1), the sample gas inflow pipe (4) is provided at the upstream end thereof with Pretreatment channel (1) having an inner diameter larger than that of the sample gas inflow pipe (4)
0) and the branch flow path (20) are connected to each other, and the pretreatment flow path (1
The upstream end of 0) serves as a sample gas inlet (11), and the pretreatment channel (10) is provided with a mist removing device (12), a heating device 13 and a filter (14), and the branch channel (2).
Reference numeral 0) is a sampling device for a gas mass spectrometer characterized in that its tip is connected to an intake port of an intake device (23) through a flow rate adjusting valve (21).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11369491U JPH067044U (en) | 1991-12-30 | 1991-12-30 | Gas mass spectrometer sampling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11369491U JPH067044U (en) | 1991-12-30 | 1991-12-30 | Gas mass spectrometer sampling device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH067044U true JPH067044U (en) | 1994-01-28 |
Family
ID=14618815
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11369491U Pending JPH067044U (en) | 1991-12-30 | 1991-12-30 | Gas mass spectrometer sampling device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH067044U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55120887A (en) * | 1979-03-12 | 1980-09-17 | Mie Higashijima | Preparation of doll |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02141655A (en) * | 1988-11-24 | 1990-05-31 | Matsushita Electric Works Ltd | Apparatus for analyzing atmospheric gas component |
-
1991
- 1991-12-30 JP JP11369491U patent/JPH067044U/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02141655A (en) * | 1988-11-24 | 1990-05-31 | Matsushita Electric Works Ltd | Apparatus for analyzing atmospheric gas component |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55120887A (en) * | 1979-03-12 | 1980-09-17 | Mie Higashijima | Preparation of doll |
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