JPH066956B2 - Turbo molecular pump - Google Patents
Turbo molecular pumpInfo
- Publication number
- JPH066956B2 JPH066956B2 JP16355085A JP16355085A JPH066956B2 JP H066956 B2 JPH066956 B2 JP H066956B2 JP 16355085 A JP16355085 A JP 16355085A JP 16355085 A JP16355085 A JP 16355085A JP H066956 B2 JPH066956 B2 JP H066956B2
- Authority
- JP
- Japan
- Prior art keywords
- drive shaft
- gas
- molecular pump
- rotating body
- turbo molecular
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明はターボ分子ポンプに関するものである。TECHNICAL FIELD The present invention relates to a turbo molecular pump.
従来のこの種ターボ分子ポンプンを第5図に基づいて説
明する。A conventional turbo molecular pumpon of this type will be described with reference to FIG.
図において,1は回転体であり,その駆動軸1aの下端
にはガスタービンブレード6が結合されている。3,4
はケーシング2に配設されたラジアル方向のガスベアリ
ングであり,ガス導入口3a,4aから入ったガスが多
孔質ノズルから噴出するようになっている。5はケーシ
ング2に配設されたスラスト方向のガスベアリングであ
る。7はガスベアリング部と吐出側真空室8の間をシー
ルするシール部材である。In the figure, 1 is a rotating body, and a gas turbine blade 6 is coupled to the lower end of its drive shaft 1a. 3,4
Is a radial gas bearing arranged in the casing 2, and the gas introduced from the gas inlets 3a and 4a is ejected from the porous nozzle. Reference numeral 5 is a thrust-direction gas bearing disposed in the casing 2. Reference numeral 7 is a seal member that seals between the gas bearing portion and the discharge side vacuum chamber 8.
しかして上記した従来のものでは,ガスタービンが,ラ
ジアル方向のガスベアリング3,及び4に体してオーバ
ハングの形になっているため,ガスベアリング4のラジ
アル反力が過大となり,適正な軸受性能を得ることがで
きなくなるという問題点があった。又,ガスベアリング
は,駆動軸1aとの間に微少な間隙を構成して成るため
通常は,分割型にできない。このため,タービンブレー
ド6と回転体1とは分割して生産し,ネジ結合9などの
手段により,結合して回転体1を構成することとなり,
振動の再現性などの面から好ましくないという問題点が
あった。However, in the above-mentioned conventional one, since the gas turbine is formed into the overhang shape by incorporating the gas bearings 3 and 4 in the radial direction, the radial reaction force of the gas bearing 4 becomes excessive and the proper bearing performance is obtained. There was a problem that I could not get. Further, the gas bearing is usually made into a split type because it has a minute gap with the drive shaft 1a. Therefore, the turbine blade 6 and the rotating body 1 are produced separately, and are joined by means such as screw connection 9 to form the rotating body 1,
There is a problem in that it is not preferable in terms of vibration reproducibility.
本発明は上記した従来の問題点に鑑みてなされたもの
で,駆動軸をほぼ鉛直方向に配し、同駆動軸を含む回転
体に働くスラスト荷重の総和が下向きに設定され、同下
向きスラスト荷重を同駆動軸下端の下向きスラスト荷重
軸受けで支えるターボ分子ポンプにおいて、同駆動軸に
その外径とほぼ同じ外径を有するガシタービンブレード
部を一体に配設し、同ブレード部を挟むように一対のラ
ジアルガスベンリングをケーシングに配設するととも
に、同駆動軸の同ラジアルガスベアリングに対応する位
置から少くともその一方の軸端までおよび同軸端に同駆
動軸の外径より大きな径をもつ部材が付随せずなること
を特徴とするターボ分子ポンプを供するものである。The present invention has been made in view of the above-mentioned conventional problems, in which the drive shaft is arranged in a substantially vertical direction, and the total thrust load acting on the rotating body including the drive shaft is set downward, and the downward thrust load is set. In a turbo molecular pump that supports the lower end of the same drive shaft with a downward thrust load bearing, the drive shaft is integrally provided with a gas turbine blade part having an outer diameter that is substantially the same as the outer diameter of the drive shaft, and the blade parts are sandwiched in a pair. A member having the radial gas venting of the above-mentioned mounted in the casing and having a diameter larger than the outer diameter of the drive shaft from the position corresponding to the radial gas bearing of the drive shaft to at least one of the shaft ends and the coaxial end. The present invention provides a turbo-molecular pump characterized in that
上記したように構成された本発明によれば,駆動軸とガ
スタービンブレード部との間においてボルト結合或いは
別体駆動軸との連結等を有さず,一体の回転軸とて構成
できるので,ガタ防止,アライメント良好等の面から,
回転振動安定性が向上するし,同時にガスタービンブレ
ード部の外径を駆動軸外径とほぼ同じく形成したために
同ガスタービンブレード部を挟むように一対のラジアル
ガスベアリングを配することが出来るので一対のラジア
ルガスベアリングで荷重を均等に支持することができ,
分子ポンプの駆動及び安定回転を確実にできるものであ
る。According to the present invention configured as described above, since there is no bolt connection or connection with a separate drive shaft between the drive shaft and the gas turbine blade portion, it can be configured as an integral rotary shaft, From the aspects of backlash prevention and good alignment,
Rotational vibration stability is improved, and at the same time, since the outer diameter of the gas turbine blade is formed to be almost the same as the outer diameter of the drive shaft, a pair of radial gas bearings can be arranged so as to sandwich the same gas turbine blade. The radial gas bearing can support the load evenly,
The drive and stable rotation of the molecular pump can be ensured.
以下,本発明の実施例を第1図及び第2図に基づいて説
明する。An embodiment of the present invention will be described below with reference to FIGS. 1 and 2.
図において,1は回転体で,1aは同回転体1の駆動軸
である。In the figure, 1 is a rotating body, and 1 a is a drive shaft of the rotating body 1.
2は,該駆動軸1aを囲繞するケーシングで,3,4は
該ケーシング2に配設されたラジアルガスベアリング
で,夫々ガス供給孔3a,4aを有する多孔質金属から
形成されている。2 is a casing surrounding the drive shaft 1a, 3 and 4 are radial gas bearings arranged in the casing 2, which are made of porous metal having gas supply holes 3a and 4a, respectively.
7はラジアルガスベアリング3側と吐出側真空室8との
間をシールするシール部材である。Reference numeral 7 is a seal member that seals between the radial gas bearing 3 side and the discharge side vacuum chamber 8.
そして,6は上記両ラジアルガスベアリング3,4間に
挟まれるように配置されたガスタービンで,同ガスター
ビン6は,上記駆動軸1aの周囲にエンドミル等で直接
機械加工して形成したブレード部6aと,同ブレード部
6aに駆動ガスを噴射させるガス噴射ノズル6bとから
なっている。Further, 6 is a gas turbine arranged so as to be sandwiched between the radial gas bearings 3 and 4, and the gas turbine 6 is a blade portion formed by directly machining an end mill or the like around the drive shaft 1a. 6a, and a gas injection nozzle 6b for injecting drive gas to the blade portion 6a.
尚,ガスタービン6は出力との関係で多段に設けても勿
論可能であり,このときにはラジアルガスベアリング
3,4も複数設けられるものである。Note that the gas turbine 6 may be provided in multiple stages in relation to the output, and at this time, a plurality of radial gas bearings 3 and 4 are also provided.
5は回転体1の自重、すなわち下向きのスラスト方向の
荷重を回転自在に支持する球で,同球5は潤滑油中に漬
けたり,当接部分に固体潤滑油を使用したりして形成し
ている。Reference numeral 5 is a ball that rotatably supports the weight of the rotating body 1, that is, a load in the downward thrust direction. The ball 5 is formed by immersing it in lubricating oil or using solid lubricating oil in the contact portion. ing.
なお、当然のことながら回転体1に作用する圧力差によ
る上向きのスラスト荷重よりも回転体1の自重による下
向きのスラスト荷重が大きく、回転体1に働くスラスト
荷重の総和が常に下向きとなるよう設定設計されること
は言うまでもない。Naturally, the downward thrust load due to the weight of the rotating body 1 is larger than the upward thrust load due to the pressure difference acting on the rotating body 1, and the total thrust load acting on the rotating body 1 is always set downward. It goes without saying that it will be designed.
このように構成された実施例によれば,ガスタービンブ
レード部6aを駆動軸と一体に構成しているので組立型
回転体にみられる振動の発生は確実に抑制でき,回転体
のオーバーハング部もなく全体構造も簡単なものであり
又同ブレード部6aはラジアルガスベアリング3,4に
挟まれるように配置しているので,該ガスベアリング
3,4への荷重は均分化され過負荷現象に伴なう軸受性
能の低下は未然かつ確実に防止できるものである。According to the embodiment configured as described above, since the gas turbine blade portion 6a is formed integrally with the drive shaft, it is possible to reliably suppress the occurrence of vibrations seen in the assembled rotary body, and to prevent the overhang portion of the rotary body. However, since the entire structure is simple and the blade portion 6a is arranged so as to be sandwiched between the radial gas bearings 3 and 4, the load on the gas bearings 3 and 4 is evenly divided to cause an overload phenomenon. The accompanying deterioration in bearing performance can be prevented in advance.
そして第3図は他の実施例を示すもので,同実施例は上
記した実施例の下部のスラスト荷重を受ける球5に代え
て動圧型球面軸受15を採用し,潤滑油9内に位置する
ようにしているもので,他の構成は上記した実施例と同
一であり,同一部分には同一符号を付し詳細な説明は省
略する。FIG. 3 shows another embodiment, which employs a dynamic pressure type spherical bearing 15 in place of the ball 5 which receives the thrust load in the lower portion of the above-mentioned embodiment and is located in the lubricating oil 9. Since the other configurations are the same as those of the above-described embodiment, the same portions are denoted by the same reference numerals and detailed description thereof will be omitted.
尚,上記した各実施例において,回転体1の重量が軽い
場合,ターボ分子ポンプ吸込側8と,ガスベアリング
3,4等を設けた側との圧力差により,回転体1がスラ
スト方向に不安定になることがあるが,このような場合
にはガスタービン6におけるガス噴射ノズル6bからの
ガス噴射方向に下方を向けることにより,回転体1に回
転力を与えると同時に,回転体1の自重と同方向に下向
きのスラスト荷重を与えて,安定化させることができ
る。In each of the above-mentioned embodiments, when the weight of the rotating body 1 is light, the rotating body 1 does not move in the thrust direction due to the pressure difference between the turbo molecular pump suction side 8 and the side where the gas bearings 3, 4 and the like are provided. Although it may become stable, in such a case, by turning downward in the gas injection direction from the gas injection nozzle 6b in the gas turbine 6, a rotational force is applied to the rotating body 1 and at the same time the self-weight of the rotating body 1 is applied. It can be stabilized by applying a downward thrust load in the same direction as.
又,さらに積極的には第4図で示すように,回転体1の
駆動軸1aに段付部10を設けて,この段付部10に対
して矢印11で示す方向(下向き)にガスを噴射させる
ことにより更に回転対1を安定支持することが可能であ
る。Further, more positively, as shown in FIG. 4, a stepped portion 10 is provided on the drive shaft 1a of the rotating body 1, and gas is directed to the stepped portion 10 in a direction indicated by an arrow 11 (downward). By injecting, it is possible to further stably support the rotating pair 1.
以上,本発明によれば振動の発生やガスベアリングの過
負荷現象の発生がなくなり,軸受性能を一段と向上させ
ることができるものであり,ひいては分子ポンプの安定
運転が得られると共に分子ポンプ自体の寿命を一段と向
上させることができる等の種々の秀れた効果を奏しうる
ものである。As described above, according to the present invention, the occurrence of vibration and the overload phenomenon of the gas bearing can be eliminated, and the bearing performance can be further improved. Consequently, the stable operation of the molecular pump can be obtained and the life of the molecular pump itself can be obtained. It is possible to exert various excellent effects such as further improving.
第1図は本発明の実施例を示す要部説明図,第2図は第
1図のII−II断面図,第3図は本発明の他の実施例を示
めす要部説明図,第4図は本発明の更に他の実施例を示
す要部説明図,第5図は従来の分子ポンプを示す要部説
明図である。 1a…駆動軸,3,4…ラジアルガスベアリング,6…
ガスタービン,6a…ガスタービンブレード部,6b…
ガス噴射ノズルFIG. 1 is an explanatory view of essential parts showing an embodiment of the present invention, FIG. 2 is a sectional view taken along line II-II of FIG. 1, and FIG. 3 is an explanatory view of essential parts showing another embodiment of the present invention. FIG. 4 is an explanatory view of a main part showing still another embodiment of the present invention, and FIG. 5 is an explanatory view of a main part of a conventional molecular pump. 1a ... Drive shaft, 3, 4 ... Radial gas bearing, 6 ...
Gas turbine, 6a ... Gas turbine blade section, 6b ...
Gas injection nozzle
Claims (1)
含む回転体に働くスラスト荷重の総和が下向きに設定さ
れ、同下向きスラスト荷重を同駆動軸下端の下向きスラ
スト荷重軸受けで支えるターボ分子ポンプにおいて、同
駆動軸にその外径とほぼ同じ外径を有するガスタービン
ブレード部を一体に配設し、同ブレード部を挟むように
一対のラジアルガスベアリングをケーシングに配設する
とともに、同駆動軸の同ラジアルガスベアリングに対応
する位置から少くともその一方の軸端までおよび同軸端
に同駆動軸の外径より大きな径をもつ部材が付随せずな
ることを特徴とするターボ分子ポンプ。1. A drive shaft is arranged in a substantially vertical direction, a total of thrust loads acting on a rotating body including the drive shaft is set downward, and the downward thrust load is supported by a downward thrust load bearing at the lower end of the drive shaft. In the turbo molecular pump, a gas turbine blade portion having an outer diameter that is substantially the same as the outer diameter thereof is integrally disposed on the same drive shaft, and a pair of radial gas bearings is disposed on the casing so as to sandwich the blade portion, A turbo molecular pump characterized in that a member having a diameter larger than the outer diameter of the drive shaft is not attached to a position from the position corresponding to the radial gas bearing of the drive shaft to at least one shaft end and the coaxial end. .
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16355085A JPH066956B2 (en) | 1985-07-24 | 1985-07-24 | Turbo molecular pump |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16355085A JPH066956B2 (en) | 1985-07-24 | 1985-07-24 | Turbo molecular pump |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6223597A JPS6223597A (en) | 1987-01-31 |
JPH066956B2 true JPH066956B2 (en) | 1994-01-26 |
Family
ID=15776026
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16355085A Expired - Lifetime JPH066956B2 (en) | 1985-07-24 | 1985-07-24 | Turbo molecular pump |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH066956B2 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63200697U (en) * | 1987-06-16 | 1988-12-23 | ||
JPH01187396A (en) * | 1988-01-22 | 1989-07-26 | Hitachi Ltd | Vacuum pump |
CN110159596B (en) * | 2019-04-25 | 2023-11-28 | 浙江理工大学 | Circumferential and axial adjustable cylinder with angle adjustable bionic guide vanes |
-
1985
- 1985-07-24 JP JP16355085A patent/JPH066956B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS6223597A (en) | 1987-01-31 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0335779B1 (en) | Co-axial shaft bearing for a multi-shaft turbo machine, the bearing having clearance control means | |
US4640630A (en) | Turbocharger bearing assembly | |
CA2196243A1 (en) | Bearing arrangement for rotating members | |
CA1067945A (en) | Bearing retaining plate | |
CA1114851A (en) | Mechanical seal assembly | |
JP2924481B2 (en) | Turbocharger thrust bearing device | |
US6736542B2 (en) | Reduced width tilting pad journal bearing and related method | |
JPH066956B2 (en) | Turbo molecular pump | |
JP2562581B2 (en) | Oil-free scroll compressor | |
JP7482000B2 (en) | Tilting pad journal bearing and rotating machine equipped with same | |
JPH05332355A (en) | Tilting pad type journal bearing | |
JP4141178B2 (en) | Turbo molecular pump seal structure | |
JPS628417Y2 (en) | ||
JPS6170105A (en) | Radial turbine with variable capacity | |
JP2563097Y2 (en) | Turbo molecular pump | |
SU1285198A1 (en) | Two-stage turbomolecular vacuum pump | |
SU1673753A1 (en) | Centrifugal compressor bearing unit | |
FR2557208A1 (en) | MEANS OF CONNECTION BETWEEN TWO COAXIAL CYLINDRICAL ELEMENTS, IN PARTICULAR FIXING OF A LABYRINTH JOINT ON THE SHAFT OF A TURBOMACHINE | |
JPS6313915A (en) | Pneumatic bearing type turbo-charger | |
JP2504901Y2 (en) | Supercharger bearing device | |
JPS61104102A (en) | Rotor of gas bearing-supported turbo machine | |
JPS58217701A (en) | Structure for fixing ceramic shaft of impeller | |
KR100315797B1 (en) | Main frame in scroll compressor | |
JP3040647B2 (en) | bearing | |
JPH11294375A (en) | Balance disc device for axial flow pump |