JPH0668526A - Transporting device for disk substrate - Google Patents

Abstract

PURPOSE:To surely suck and transport a disk substrate by efficiently forming an information signal recording region part on the disk substrate and preventing the generation of a product defect, such as chipping of a protective film. CONSTITUTION:This transporting means has an annular suction means 20 sucking and holding an annular non-information signal recording region part 6 constituted between a magnetic plate housing recessed part 4 and the information signal recording region part 2 over the entire periphery. This suction means consists of an inner peripheral suction lip part 24 and outer peripheral suction lip part 25 which are respectively thin, are freely elastically deformable and are increased in the height on the inner side. The suction means 40 consists of an annular suction part 41 which sucks the non-information signal recording region part 6 over the entire periphery and a projecting part 43 for centering projected to the inner periphery thereof and is provided with a pressing means 50 for pressing the disk substrate opposite to the suction means. Then, the transportation of the disk substrate with large sucking force is possible. The information signal recording region part is efficiently formed and the generation of the product defect, such as chipping of the protective film, is obviated.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for carrying a disk substrate which constitutes an optical disk, a disk-shaped disk such as a magneto-optical disk capable of recording an information signal such as a tone signal and a video signal, and more particularly to a vacuum suction means. The present invention relates to a disc substrate transporting device for sucking, holding, and transporting a disc substrate.

[0002]

2. Description of the Related Art Information signal recording discs such as optical discs and magneto-optical discs have been proposed which are capable of recording information signals such as tone signals and video signals. These information signal recording disks are capable of high density recording of information signals, and for example, magneto-optical disks have been proposed with extremely small diameters such that the diameter is 64 mm or less.

As described above, the information signal recording disk capable of extremely small diameter and high density recording is mounted on the disk rotation driving device and rotated at high speed. Then, in the state of being rotated at a high speed, a fine recording track provided on the information signal recording layer formed on one main surface of the information signal recording disk is irradiated with the light beam emitted from the optical pickup, and the external magnetic field is applied. A desired information signal is recorded by applying an external magnetic field that is magnetic field modulated according to the signal information to be recorded by the generator.

By the way, in order to accurately irradiate a fine recording track with a light beam while being rotated at a high speed,
The information signal recording disk needs to be surely integrated with the disk table of the disk rotation driving device and mounted with the rotation center accurately positioned on the axis of the disk table.

In order to securely integrate the information signal recording disk into the disk table, and to position and mount it with high accuracy, in general, a metal plate, which is a magnetic material, disposed on the information signal recording disk side is mounted on the disk table side. A disk chucking method is adopted in which an information signal recording disk is attracted by a magnet to be chucked on a disk table.

The information signal recording disk used in the disk chucking system utilizing the attractive force of this magnet is based on a disk substrate formed in a disk shape from a synthetic resin material such as transparent polycarbonate resin having excellent light transmission characteristics. It is made of wood. As shown in FIG. 7, the disc substrate 1 is a recording formed in a concentric or spiral shape on an information signal recording layer formed on the information signal recording area portion 2 formed on one main surface 1a. A center hole 3 is formed so that its center coincides with the center of curvature of the track, and an annular bulging portion 5 that surrounds the center hole 3 and forms a magnetic plate housing recess 4 has another main surface 1b. It is formed to bulge to the side.

The bulging portion 5 is formed at least in the non-information signal recording area portion 6 in which the information signal recording layer on the inner peripheral side of the disc substrate 1 is not formed, and is formed in the extremely thin disc substrate 1. By making the depth of the center hole 3 larger, the centering member arranged on the disk table side is engaged with the center hole 3 with a larger amount of protrusion, whereby the center of rotation of the information signal recording disk is adjusted. It functions to ensure that a centering operation that matches the axis of the disc table is performed.

An annular stamper groove portion 7 is formed on one main surface 1a of the disk substrate 1 so as to surround the magnetic plate accommodating recess portion 4. The stamper groove portion 7 forms a pregroup forming a pit or a recording track, which is an uneven pattern corresponding to an information signal, on the information signal recording area portion 2 of the one main surface 1a of the disc substrate 1, and therefore, the molding die is used. It is a groove formed due to the stamper attached to the.

That is, when the disk substrate 1 is molded, the stamper is incorporated into a molding die through a stamper holder having a stamper supporting claw portion that supports the peripheral edge of the center hole 3, and the disk substrate 1 A stamper groove portion 7 is formed on the one main surface 1a of the disk substrate 1 in order to allow the stamper supporting claw portion protruding into the cavity forming the one main surface 1a to escape.

Of course, the stamper groove portion 7 is also formed in the non-information signal recording area portion 6 inside the information signal recording area portion 2, in other words, the disc substrate 1 is recessed from the stamper groove portion 7 to the magnetic plate accommodating recess portion. The central portion up to 4 is configured as an annular non-information signal recording area portion 6.

By the way, as described above, in the information signal recording area portion 2 of the one main surface 1a of the disc substrate 1, pre-groups forming pits or recording tracks, which are concavo-convex patterns corresponding to information signals, are formed at the time of molding. The protective film 9 is formed by coating the reflective film 8 made of aluminum with a coating material to prevent deterioration of the reflective film 8. In addition, the disk substrate 1 has a magnetic plate housing recess 4
By storing and arranging a metal plate that is a magnetic material,
The information signal recording disc is completed.

Therefore, the information signal recording disk is formed on the disk substrate 1 molded by a molding die in the step of coating the information signal recording area 2 with the reflection film 8 and the protective film 9 or in the magnetic plate accommodating recess 4. It is completed through a series of steps such as a step of assembling a metal plate, and the disk substrate 1 is transferred and delivered by a transfer device in the course of various processing and processing of the disk substrate 1.

As described above, the disk substrate 1 is an extremely small and thin article, and the mechanical chuck means for handling such an article is complicated and expensive,
A conventional disk substrate transporting device is generally provided with a vacuum suction means, and the suction head of the vacuum suction means sucks and holds the disk substrate 1.

The suction head 10 in the conventional disk substrate carrying apparatus is, for example, as shown in FIGS.
Adsorption pads 12 are respectively movably arranged in a plurality of guide holes 11 formed in the head main surface 10a. Each suction pad 12 is generally formed of an elastic material such as silicon rubber, and a funnel-shaped suction lip portion 13 that is elastically deformable is formed at the tip of the suction pad 12 and the base portion communicates with the suction lip portion 13. An air vent hole 14 is formed.

Therefore, the suction head 10 is moved so as to face the main surface 1a of the disk substrate 1, and thereafter, as shown in FIG. The disk substrate 1 is suction-held by extracting the air in the suction lip portion 13 from the air-bleeding hole 14 in the state of being pressed against. Of course, the suction pad 12 is arranged on the head main surface 10a so that the suction lip portion 13 sucks and holds the non-information signal recording area portion 6 of the disk substrate 1.

[0016]

By the way, when the suction head of the vacuum suction means sucks and holds an article, the suction part of the article against which each suction pad is pressed must have a sufficient area and a uniform flat surface. Become. However,
For a magneto-optical disk with a diameter of 64 mm or less,
As shown in FIG. 7, the outer diameter R1 of the stamper groove portion 7 is about 2
2 mm, and the inner peripheral diameter R2 of the stamper groove portion 7 is about 2
0 mm and the diameter R3 of the magnetic plate storage recess 4
Is about 15 mm, and the width of the flat portion of the non-signal recording area portion 6 of the disk substrate 1 on which the suction pad 12 is to be pressed is about 2.5 mm, which is extremely small.

Further, in order to apply a predetermined suction force to the disk substrate 1, the suction pad 12 must have a suction lip portion 13 whose outer diameter is set to a certain size. However, when applied to the magneto-optical disk having the above-mentioned configuration, the suction pad 12 is
As shown in FIG. 10, even if the groove width of the stamper groove portion 7 is considered with reference to the inner peripheral wall of the magnetic plate accommodating concave portion 4, the outer diameter of the suction lip portion 13 is about 3 mm, which is the limit. It is difficult to secure power.

By the way, in the process of transporting the disk substrate 1 coated with the reflective film 8 to the protective film coating process by the transport device, the suction lip portion 12 of the suction pad 12 made of silicon rubber records the information signal. Area 2
When the coated reflective film 8 is brought into contact with the coated film, the coating material forming the protective film is repelled at the contact portion, the protective film is not formed, and a product defect occurs and the yield deteriorates.

On the other hand, when the disk substrate 1 is suction-held by using the suction pad 12 having the above-described structure, the transport device is misaligned, the suction head 10 is assembled in error, or the suction pad 12 is elastically deformed. Due to the variation in the amount and the like, the suction position of the suction lip portion 13 of the suction pad 12 with respect to the non-information signal recording area portion 6 of the disk substrate 1 varies in the diameter direction.

Therefore, the conventional disk carrier is used as a carrier for an information signal recording disk such as a magneto-optical disk having a very small diameter and having a complicated shape in which the magnetic plate housing recess 4 or the stamper groove 7 is formed. In this case, the disc substrate 1 considers the deviation of the suction position of the suction lip portion 13, and as shown in FIG. 11, adjusts the information signal recording area portion 2 with respect to the stamper groove portion 7 in the circumferential direction by the adjustment amount L. It is necessary to consider such things as the address. However, when the information signal recording area 2 is shifted in the circumferential direction, the recording layer area of the information signal of the magneto-optical disk is naturally narrowed, and the recording capacity efficiency of the disk is significantly impaired.

Further, in the suction pad 12 made of silicon rubber, since the suction lip portion 13 has a small diameter, repeated suction and release of the disk substrate 1 increases elastic fatigue, Since there is a possibility that the disc substrate cannot be reliably held and transported, there is a problem that the disc substrate has poor durability and must be replaced regularly.

Therefore, according to the present invention, an information signal recording area is formed on a disc substrate in a carrier for a disc substrate which is a base material of an information signal recording disc such as a magneto-optical disc having an extremely small diameter and capable of high density recording. It is proposed for the purpose of providing a disc substrate transporting device in which a defective portion such as a defective protective film can be prevented from being formed efficiently, and a disc substrate can be securely attracted and transported. is there.

[0023]

A disk substrate carrying apparatus according to the present invention which achieves this object is provided with a center hole, and a magnetic plate accommodating recess is provided on one main surface side surrounding the center hole. In a disc substrate transporting device for transporting a disc substrate, which is formed and has an information signal recording region portion on which an information signal is recorded, by a vacuum suction means, a region between the magnetic plate accommodating recess and the information signal recording layer. The non-information signal recording portion configured as described above is provided with a ring-shaped suction means for suctioning the entire circumference. The ring-shaped suction means forms a thin, elastically deformable inner and outer suction lip portions into a ring shape, and an air vent hole between these inner and outer suction lip portions. And a suction pad in which the height of the inner suction lip portion is larger than that of the outer suction lip portion.

Further, the ring-shaped suction means is joined to the entire surface of the non-information signal recording portion, and a ring-shaped suction portion having an air vent hole is formed, and a protrusion is formed on the inner circumference of the suction portion. And a centering protrusion that fits into the recess for storing the magnetic plate. Further, a pressing means is disposed so as to face the suction head having a ring-shaped suction portion which is joined over the entire surface of the non-information signal recording portion and has an air vent hole, and the suction means is used for suction. The disk substrate is configured to be pressed and held on the suction head side.

[0025]

According to the disk substrate carrying apparatus of the present invention, since the suction portion of the suction head is formed into a ring shape that sucks the non-information signal recording portion of the disk substrate over the entire circumference, a large suction portion is provided. A large suction force can be applied to a disk substrate that is configured and is extremely small and has a magnetic plate housing recessed portion or the like and has a complicated shape, so that the disk substrate is securely sucked and held.

Further, by making the height of the inner circumference suction lip portion larger than that of the outer circumference suction lip portion, the inner circumference suction lip portion can be positioned in the magnetic plate accommodating concave portion to suck and hold the disk substrate. Therefore, it is possible to eliminate the possibility that the outer peripheral suction lip portion may enter the information signal recording area portion beyond the stamper groove portion and cause a trouble in forming the protective film.

Further, the centering protrusion fitted into the magnetic plate accommodating recess accurately positions the suction position of the suction pad with respect to the disk substrate, and the pressing means ensures that the suction pad is more securely attached to the disk substrate. Function to act.

[0028]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Specific embodiments of the present invention will be described below with reference to the drawings. A disc substrate carrying apparatus according to the present invention includes a suction pad 20 shown in FIGS. 1 and 2. The suction pad 20 is made of silicon rubber, has a center hole 21 slightly larger in diameter than the center hole 3 of the disk substrate 1, and has an approximately outer diameter substantially equal to the diameter of the stamper groove portion 7 of the disk substrate 1. The base portion 22 is formed in the shape of a ring, and a ring-shaped suction lip portion 23 is integrally formed at the tip of the base portion 22.

The ring-shaped suction lip portion 23 is elastically deformable by being made thin, and includes an inner suction lip portion 24 and an outer suction lip portion 25 formed in a funnel shape. The inner suction lip portion 24 is formed to project from the lower end of the center hole 21 of the suction pad 20, and the outer suction lip portion 25 is formed to project from the lower end of the outer peripheral surface of the suction pad 20. Therefore, an annular suction portion 26 is formed between the inner circumference suction lip portion 24 and the outer circumference suction lip portion 25, and the distance M between the suction portions 26 is equal to the width of the non-information signal recording area portion 6 of the disc substrate 1. Almost equal.

Further, the height of the inner circumference suction lip portion 24 is larger than that of the outer circumference suction lip portion 25 by a dimension substantially equal to the depth dimension of the magnetic plate housing recess 4 of the disk substrate 1. There is. The suction pad 20 has a base portion 22,
A plurality of air vent holes 27 are formed in the suction portion 26 formed between the inner circumference suction lip portion 24 and the outer circumference suction lip portion 25, respectively.

The suction pad 20 constructed as described above
As shown in FIG. 3, the suction head 30 is configured by being attached to the main surface of the mounting portion 31 of the transport device. The plurality of air vent holes 27 are connected to the duct of the vacuum device at the mounting portion 31. Therefore, the suction head 30
As shown in FIG. 3, after being moved so as to face the main surface 1a of the disk substrate 1, its suction pad 20 is pressed against the main surface 1a of the disk substrate 1, and by driving the vacuum device in this state. The air in the adsorption unit 26 is extracted from the air vent hole 27. As a result, the pressure inside the suction unit 26 is reduced and the disk substrate 1 is suction-held.

As described above, in the suction head 20, the gap M between the suction portions 26 formed between the inner circumference suction lip portion 24 and the outer circumference suction lip portion 25 is set to the non-information signal recording area portion 6 of the disk substrate 1. Since it is formed to have a width substantially equal to the width, the non-information signal recording area portion 6 of the disk substrate 1 is held by a large suction force over the entire circumference. Further, by making the height dimension of the inner circumference suction lip portion 24 larger than that of the outer circumference suction lip portion 25, the outer circumference suction lip portion 25 is positioned on the inner circumference of the stamper groove portion 7 as shown in FIG. Also in this case, the inner peripheral suction lip portion 24 is located at the bottom of the magnetic plate storage recess 4 and securely holds the disk substrate 1 by suction. In other words, the occurrence of a state in which the suction lip portion 23 comes into contact with the information signal recording area portion 2 is reliably prevented.

By the way, in the disk substrate carrying apparatus of the above embodiment, the suction pad 20 is made of silicon rubber, and the ring-shaped suction lip portion 23 is provided.
Although the inner peripheral suction lip portion 24 and the outer peripheral suction lip portion 25 each have an elastically deformable funnel shape, the present invention is not limited to the suction pad having such a configuration.

Another embodiment of the disk substrate carrying apparatus according to the present invention will be described with reference to FIGS.

The disk substrate transporting device shown as the second embodiment of the present invention has a metal suction head 40 and a disk substrate pressing device. The suction head 40, which is in the shape of an entire disc, has a ring-shaped suction portion 41 having a width substantially equal to the width of the non-information signal recording area portion 6 of the disk substrate 1 formed at the lower end thereof. ,
The non-information signal recording area portion 6 is joined over the entire circumference. A plurality of air vent holes 42, which are communicated with each other by a vacuum device and a duct, are opened on the main surface of the suction portion 41, and a centering protrusion 43 is integrally formed on the inner peripheral side thereof. . The centering projection 43 has an outer diameter substantially equal to the inner diameter of the magnetic plate storage recess 4 of the disk substrate 1 and a height substantially equal to the depth of the magnetic plate storage recess 4.

On the other hand, the disc substrate pressing device 50 is arranged so as to face the suction head 40 with the transport path of the disc substrate 1 interposed therebetween. This disc substrate pressing device 50 uses an air cylinder (not shown) as a drive source, and disc substrate 1
The unit block 51 is configured to move in and out of the transport path, the pressing unit 52 incorporated in the unit block 51, the spring 56, and the metal bush 57 that guides the pressing unit 52.

The pressing unit 52 is a unit block 5
It is movably incorporated in the metal bush 57 incorporated in the disk holder 1. The ring-shaped holder 53 corresponding to the non-information signal recording area portion 6 of the disc substrate 1 is formed at the tip of the holder. Guide recess 5 surrounded by 53
The inner diameter of 4 is substantially equal to the outer diameter of the bulging portion 5 of the disk substrate 1. The spring 56 is inserted between the pressing unit 52 and the unit block 51, and biases the pressing unit 52 toward the transport path side of the disc substrate 1. The pressing unit 52
The flange portion 52A formed on the lower end peripheral surface thereof is locked to the lower end surface of the metal bush 57.

Therefore, when the disc head 1 is supplied to the opposing position of the suction head 40, the disc head 1
Then, the centering protrusion 43 is first fitted into the magnetic plate housing recess 4. Then, as the suction head 40 further descends, the ring-shaped suction portion 41 is joined to the non-information signal recording area portion 6 of the disk substrate 1 over the entire circumference by using the centering protrusion 43 as a guide. It

After that, the air cylinder is operated, and the pressing device 50 is moved upward to the disk substrate 1 side. The pressing device 50 stops with the pressing unit 52 in contact with the disk substrate 1, but the pressing unit 52 presses the disk substrate 1 toward the suction head 40 side by the acting force of the spring 56. Thus, the non-information signal recording area portion 6 of the disk substrate 1 has the suction head 40.
It is sandwiched between the suction portion 41 and the holding portion 53 of the pressing unit 52. In other words, the suction portion 41 of the suction head 40
Is the non-information signal recording area portion 6 by the pressing unit 52.
And the vacuum substrate is activated in this state to suction-hold the disc substrate 1 in the suction portion 41.

As described above, in the disk carrying device shown as the second embodiment, the metal suction head 40 is used.
Therefore, the durability is significantly improved as compared with the suction head formed of silicon rubber. Further, even if the adsorption portion 41 contacts the information signal recording area portion 2, there is no problem that the protective film is not formed due to the coating material forming the protective film being repelled. Further, due to the action of the centering protrusion 43, the suction portion 41 is accurately joined to the non-information signal recording area portion 6, and the pressing unit 52 is also provided.
Cooperates with the disc substrate 1 to firmly and closely hold it.

[0041]

As described above, according to the disk substrate transporting apparatus of the present invention, a disk serving as a base material for an information signal recording disk such as a magneto-optical disk having a very small diameter and capable of high density recording. Since the substrate is adapted to be adsorbed by the ring-shaped adsorbing portion over the entire circumference of the narrow non-information signal recording area portion, the disc substrate can be reliably conveyed by a large adsorbing force. it can. Also,
Since the non-information signal recording area portion is formed in the minimum necessary range, the information signal recording area portion can be sufficiently secured on the disc substrate, the information signal recording area portion is efficiently formed, and the protective film is further formed. It is possible to reliably prevent product defects such as the coating material being repelled and the protective film being damaged.

[Brief description of drawings]

FIG. 1 is a perspective view of a main part of a suction pad provided in a disc substrate transport device according to the present invention.

FIG. 2 is a vertical sectional view of the suction pad.

FIG. 3 is a cross-sectional view of essential parts in a state where the disc substrate transport device suction-holds the disc substrate.

FIG. 4 is a cross-sectional view of essential parts of the suction pad and the disk substrate.

FIG. 5 is a cross-sectional view of another embodiment of the disc substrate transport device according to the present invention.

FIG. 6 is a cross-sectional view of essential parts of the suction pad and the disk substrate.

FIG. 7 is a vertical sectional view of a disk substrate.

FIG. 8 is a perspective view of a conventional suction pad.

FIG. 9 is a cross-sectional view of essential parts in a state where a conventional disk substrate transport device suction-holds a disk substrate.

FIG. 10 is a cross-sectional view of essential parts of the suction pad and the disk substrate.

FIG. 11 is a cross-sectional view of essential parts of the suction pad and the disk substrate.

[Explanation of symbols]

 1 Disc Substrate 2 Information Signal Recording Area 4 Magnetic Plate Storage Recess 6 Non Information Signal Recording Area 7 Stamper Groove 8 Reflective Film 9 Protective Film 20 Adsorption Pad 23 Adsorption Lip Part 24 Inner Adsorption Lip Part 25 Outer Adsorption Lip Part 26 Adsorption Part 27 Air vent hole 30 Adsorption head 31 Mounting part 40 Adsorption head 41 Adsorption part 42 Air vent hole 43 Centering protrusion 50 Disk substrate pressing device 51 Unit block 52 Pressing unit 53 Holding part 54 Guide recess 55 Guide hole 56 Spring

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁵ Identification code Internal reference number FI Technical display location G11B 11/10 A 9075-5D 17/02 Z 8110-5D

Claims (4)

[Claims] 1. A disk substrate having a center hole, a magnetic plate accommodating recess formed on one main surface side surrounding the center hole, and an information signal recording area for recording an information signal. In a disc substrate transporting device for transporting a disc by a vacuum suction means, a ring-shaped non-information signal recording region portion formed in a region between the magnetic plate storage recess and the information signal recording region portion is sucked over the entire circumference. Device for transporting a disk substrate, which has a ring-shaped suction means. 2. The ring-shaped suction means comprises a thin-walled elastically deformable inner circumference suction lip portion and an outer circumference suction lip portion formed in a ring shape. 2. A disk substrate transporting apparatus according to claim 1, wherein the disk substrate transporting apparatus is constituted by a suction pad having an air vent hole between the suction pad and the inner suction lip portion whose height is larger than that of the outer suction lip portion. 3. The ring-shaped suction means is joined to the entire surface of the non-information signal recording area portion and has a ring-shaped suction portion having an air vent hole, and an inner circumferential portion of the suction portion. 2. The apparatus for transporting a disk substrate according to claim 1, further comprising a centering protrusion that is formed in a protruding manner and that fits in the recess for storing the magnetic plate. 4. A pressing means is arranged facing the suction head having a ring-shaped suction portion which is joined over the entire circumference of the surface of the non-information signal recording portion and has an air vent hole. 2. The disk substrate transporting device according to claim 1, wherein the disk substrate is pressed and held on the side of the suction head by.