JPH0668102A - Production management system - Google Patents

Abstract

PURPOSE:To obtain the production management system in which two production management information sets or over are displayed simultaneously as graphs on a same screen of a display device. CONSTITUTION:Other CPU 3b than a CPU (3a) managing the operation of a semiconductor manufacture equipment is provided, production information from the semiconductor manufacture equipment from the CPU (3a) is stored in a production information data file 6 in the CPU 3b and data forming plural sets of production management information are extracted from the data file 6 based on external data to specify the plural different production management information sets and a data edit means 8 edits the data into a data group for each production management information and plural edit data groups obtained for each production management information are displayed on a same screen of a display device 2b as graphs by a picture information conversion means 9 and a picture information synthesis means 10.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a production management system, and more particularly to a production management system which is excellent in operator operability.

[0002]

2. Description of the Related Art FIG. 5 is a block diagram showing the structure of a conventional semiconductor device production management system.
Is a semiconductor device manufacturing apparatus, 2 is a display (liquid crystal display, etc.),
3 is a CPU (personal computer). Here, the CPU 3 controls both the manufacturing apparatus 1 and the production management of the semiconductor device obtained from the manufacturing apparatus 1.

On the other hand, FIG. 6 shows a display screen of a display (CRT) 2 which displays the production information possessed by the manufacturing apparatus 1 when the manufacturing apparatus 1 is in operation. If you want to know, as shown in the figure, only the items of production information (production quantity) and numbers are displayed.

[0004]

The conventional production control system for a semiconductor manufacturing apparatus is configured as described above, and controls the semiconductor apparatus manufacturing apparatus 1 and controls the production of the products obtained by the manufacturing apparatus 1. And the same CPU3. For this reason, the processing capacity of the CPU 3 is limited, and the display 2 showing the production management information shows one management item such as the total production quantity as shown in FIG. 6 or the production quantity in lot units. There is a problem that only production information can be displayed, the number of production information itself is insufficient, and detailed production management cannot be performed. In particular, with the multi-product, variable-volume production that has been seen in recent years in the manufacture of semiconductor devices, it is practically possible to sufficiently recognize the operating status and production efficiency of the manufacturing apparatus with only one item of production information. Unnecessary, unnecessary process in the production stage,
There is a problem that energy and time are overlooked and the manufacturing cost of the product (semiconductor device) is increased.

The present invention has been made in order to solve the above-mentioned problems, and provides two or more items of different production control information,
It is an object of the present invention to provide a production management system that can be visually and accurately and instantly recognized.

[0006]

In a production management system according to the present invention, the production information of an article obtained from the manufacturing apparatus by a CPU different from the CPU that controls the article manufacturing apparatus is stored in a plurality of production management items. Based on this, a plurality of editing results obtained by the editing are displayed as a graph on the same CRT screen.

[0007]

According to the present invention, since a plurality of different production control information are graphed and displayed on the same screen of the display, the operator can easily handle the production control information, and the plurality of information can be mutually exchanged. It is possible to analyze accurately in relation to and improve productivity.

[0008]

DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. 1 is a block diagram showing a configuration of a semiconductor device production management system according to an embodiment of the present invention. In the figure, the same reference numerals as those in FIG. 5 denote the same or corresponding parts, and 2a denotes a display (CRT). 3b is a CP for production control
U, 4 are a data editing / management unit in the CPU 3b for production control, 5 is an input unit (keyboard) which is an interface unit with an operator, 6 is a semiconductor device manufacturing apparatus 1 and a CPU for controlling the manufacturing apparatus 1. This is a production information data file in which production information from the (personal computer) 3a is sequentially stored.

Further, FIG. 2 is a C for production control of FIG.
FIG. 7 is a block diagram showing the configuration of the PU 3b in detail, in which 7 is a mode setting signal from the input unit (keyboard) 5, that is, a signal for designating whether or not a plurality of production control information are simultaneously displayed on the display 2a. Then, the mode setting means for giving the image information synthesizing means 10 a command of image synthesizing, 8 is the mode signal judged by the mode setting means 7, and the external data for specifying the production control information inputted from the input section (keyboard) 5. Based on the image data, the data constituting the production control information is extracted from the data file and edited, and the data edited by the data editing unit 8 and the data input from the input unit (keyboard) 5 are used as image information. The image information converting means 10 for converting into the raw information is converted into image information by the image information converting means 8 based on the signal from the mode setting means 7. The data that make up the management information,
An image information synthesizing means for synthesizing a graph for each management item and synthesizing an image, and 11 is a graph for the image information synthesizing means 10,
An image output unit for outputting the combined image information on the screen of the display 2a, 12 receives data for specifying the display screen input to the input unit (keyboard) 5, and sets the display screen of the display 2a. It is a display screen setting means to perform.

Next, the operation will be described. FIG. 3 is a flow chart showing an example of the operation of the production management system configured as described above, which is an operation for displaying the cumulative production amount and the daily production amount at the time of manufacturing the semiconductor device as a graph on the same screen of the display 2a. Also, FIG. 4 shows the display 2a at this time.
The display screen of is shown.

The operation will be described below with reference to these figures. First, when the operator inputs a signal for specifying the display screen of the display device 2a to the input unit (keyboard) 5, the display screen setting means 12 causes the display screen setting means 12 to display a predetermined display screen, that is, a screen. The fixed screen 20 shown in FIG. 4 is displayed on the display 2a (step 13).

Next, when a signal for specifying the year and month is input from the input section (keyboard) 5, the signal is converted into image information by the image information converting means 9, and the image in the fixed screen 20 via the image outputting means 11. The date 21 is displayed as an image at a predetermined location (step 14).

Next, when a signal for specifying the product type name is input from the input section (keyboard) 5, the signal is converted into image information by the image information converting means 9 in the same manner as described above, and the predetermined information is displayed on the fixed screen 20. The product name 22 is displayed as an image at the location (step 15).

Next, a signal for specifying the cumulative scale is input from the input unit (keyboard) 5, and a plurality of cumulative scales 23 preset to be displayed at predetermined locations in the fixed screen 20.
The corresponding scale is designated (step 16).

Next, when a signal for specifying the number of production plans is input from the input section (keyboard) 5, the signals are converted into image information by the image information converting means 9, and the number of production plans is set at a predetermined position in the fixed screen 20. 24 is displayed as an image (Step 1
7).

After the input processing of the above four items, the corresponding data retrieval processing, in this case, the daily production number data and the cumulative production number data are retrieved (step 18), and the retrieved data (daily production number And the total number of productions) are displayed (step 19), and the end judgment is made (step 2).
Receive 0). Incidentally, regarding the cumulative production number scale 29 and the daily production number scale 26 in the fixed screen 20 shown in FIG. 4, when the cumulative scale 23 is designated, a signal for specifying the cumulative scale 23 is input to the input unit (keyboard) 5. At this time, predetermined image data is selected from various scale display image data stored in advance in the display screen setting means 12,
An image is displayed on the fixed screen 20 of the display 2a, and the straight line 27 showing the production plan quantity is the production plan when the external signal for specifying the production plan quantity is input in the above step 17. Along with the display of the number 24, the beginning of the month is set to 0 and the end of the month is set to the value of the input production plan number, which is displayed by connecting with a straight line.

Next, the operations of the data search process of step 18 and the data display process of step 19 will be described in detail. First, when the operator inputs a command signal for displaying the daily production quantity and the cumulative production quantity as a graph on the same screen into the input section (keyboard) 5, the mode setting means 7
When it is detected that each data group forming a plurality of different production management information is graphed and displayed on the same screen of the display 2a, the image information composition means 10 is given an image composition command. On the other hand, the data editing means 7, which has received the signal from the mode setting means 7 and the signal specifying the daily production quantity and the cumulative production quantity from the input section (keyboard) 5, receives the signal from the CPU 3 a controlling the semiconductor manufacturing apparatus 1. From the data file 6 in which the production information is accumulated, the data corresponding to the daily production number and the cumulative production number are taken out, and these data are divided into a data group that constitutes the daily production number and a data group that constitutes the cumulative production number. To edit.

Next, the data group edited by the data editing means 8 is converted into image information by the image information converting means 9, and the image information synthesizing means 10 converts the data group constituting the daily production number into the production data for each day. The numbers are displayed as a bar graph, and the data group that constitutes the cumulative production number is graphed so that the production numbers that are accumulated daily are displayed as a line chart. The data groups are combined so as to be displayed on the same screen of the display device 2a, that is, the display screen 20. Then, the data group thus converted into image information and graphed is displayed by the image output means 11 on the display unit 2.
It is displayed on the display screen 20 of a.

In such a production management system of this embodiment, the CPU 3b which controls the production of the manufacturing apparatus 1 is controlled by the external data specifying a plurality of different production control information.
From the data file 6 in which the production information of the manufacturing apparatus 1 is stored, only the data constituting the plurality of different production management information is extracted, and this is edited and graphed for each data group constituting the individual production management information. Further, since the data / edit management unit 4 which synthesizes these and mainly controls the display 2a is provided, the daily production number and the cumulative production number of the semiconductor device are displayed as different mutually related graphs on the same screen. As a result, the operator can use the display 2a to display the operating status and production efficiency of the manufacturing apparatus 1,
Instantly, easily and accurately grasped, the operating state of the manufacturing apparatus 1 can be finely controlled based on these management information, and an accurate production plan can be planned.

In the above embodiment, the daily production number and the cumulative production number are selected as the production control items.
Since the production information in the above is sequentially stored in the data file 6, for example, production information about different articles such as the number of daily productions of different semiconductor devices can be displayed in the form of a graph on the same screen. It is possible to perform detailed production control even for small-volume production.

[0021]

As described above, according to the present invention, the production information of an article obtained from a manufacturing apparatus is edited by a CPU different from the CPU controlling the article manufacturing apparatus based on a plurality of production control items. Since multiple editing results obtained by this can be displayed as a graph on the same CRT screen, the operator can visually grasp the operating status and production efficiency of the manufacturing equipment and the production capacity. There is an effect that a high-level production management system can be constructed without reducing the cost.

[Brief description of drawings]

FIG. 1 is a block diagram showing a configuration of a semiconductor device production management system according to an embodiment of the present invention.

FIG. 2 is a block diagram showing an internal configuration of a CPU 3 of FIG.

FIG. 3 is a flow chart diagram showing an operation in which the daily production number and the cumulative production number are graphed and displayed on the same screen in the production management system shown in FIG. 1.

FIG. 4 is a diagram showing a sketch of an example of a display screen of a display device 2a shown in FIG.

FIG. 5 is a block diagram showing a configuration of a conventional semiconductor device production management system.

6 is a diagram showing a sketch of an example of a display screen of the display device 2 shown in FIG.

[Explanation of symbols]

 1 semiconductor manufacturing equipment 2, 2a display (CRT) 3, 3a, 3b CPU (personal computer) 4 data editing / management section 5 input section (keyboard) 6 production information data file 7 mode setting means 8 data editing means 9 image information conversion Means 10 Image information combining means 11 Image output means 12 Display screen setting means 13 Fixed screen display processing 14 Year / month input processing 15 Variety name input processing 16 Cumulative scale input processing 17 Production plan quantity input processing 18 Corresponding data search processing 19 Data display processing 20 End judgment 21 Year 22 22 Variety name 23 Cumulative scale 24 Production plan quantity 25 Daily production quantity 26 Day production quantity scale 27 Production plan quantity 28 Cumulative production quantity 29 Cumulative production quantity scale 30 Fixed screen

Claims (1)

[Claims] 1. A production management system in which a CPU for controlling an article manufacturing apparatus and a CPU for managing production of a product obtained from the manufacturing apparatus are independently provided, and the CPU for performing the production management is provided. The production management information is configured from the production information stored in the data file by a data file containing production information from the CPU controlling the manufacturing apparatus and external data specifying a plurality of different production management information. Only the information you want to
Data editing means for editing and storing the retrieved information for each information group constituting individual production control information, and image information conversion for converting the plurality of stored information groups into image information for each information group Means, a plurality of information groups converted into the plurality of image information, each image group is made into a graph, and an image synthesizing means for storing the information in association with each other; And an image output means for simultaneously transferring the same onto the same screen, the production control system.