JPH0666248A - Moving mechanism - Google Patents

Abstract

PURPOSE:To provide a moving mechanism excellent in high rigidity and high response speed and capable of readily performing remote work. CONSTITUTION:A cylindrical sealing member 10 whose cylinder end face perpendicular to its axis is formed by an inextensible member 11 and whose cylinder side face parallel to the axis is formed by an extension member 12 is provided, and a thermal expansion member 14 is provided inside the sealing member 10 and a heating member 13 for heating the thermal expansion member 14 is provided and actuator drive control means are provided for varying the volume of the thermal expansion member 14 by means of the heating member 13.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a moving mechanism used for an inchworm mechanism or the like in the field of micromechatronics.

[0002]

2. Description of the Related Art Conventional moving mechanisms include, for example, those described below. First, as the first conventional example, under the title of "FRR actuator",
Nikkei Mechanical, 1989, 3/20, p. 46-47
Are disclosed in. This FRR actuator has three pressure chambers 1a, 1a, as shown in FIG.
Cylindrical FRR tube 1 having 1b and 1c inside
And metal fittings 2a and 2b attached to both ends of the FRR tube 1. The pressure chambers 1a, 1b,
1c is connected to a pump (not shown) via three thin tubes 3a, 3b, 3c attached to the metal fitting 2b. As shown in FIG. 23 (b), the FRR tube 1 is made of filaments 4 of aramid wound in a spiral shape and fixed with silicone rubber 5. The structure is easy to extend in the direction T perpendicular to the.

In such a structure, the FRR actuator can be bent in any direction by changing the pressures of the three pressure chambers 1a, 1b, 1c in the FRR tube 1 and elastically deforming the pressure chambers.

Further, as a second conventional example, there is an inchworm mechanism as shown in FIG. This is a shaft 6 of a round shaft type, and cylindrical piezoelectric elements for clamping 7a and 7b mounted around the shaft 6 at a constant interval.
It comprises a cylindrical piezoelectric element 7a for clamping and a cylindrical piezoelectric element 8 for axial expansion and contraction connected between the cylindrical piezoelectric element 7a for clamping and the cylindrical piezoelectric element 7b for clamping. In this case, the two clamping cylindrical piezoelectric elements 7a and 7b at both ends perform clamping and unclamping operations, and the central axial expanding / contracting cylindrical piezoelectric element 8 expands / contracts in the axial direction. With such a combination of operations, it is possible to drive with a resolution on the order of nanometers and obtain a stroke of several tens of millimeters.

[0005]

In the first conventional example, since a lateral bending motion due to elastic deformation is utilized, a large displacement amount can be obtained, but the rigidity as an actuator element is low. In addition, the relationship between air pressure and displacement is complicated. Furthermore, since it has to be connected to the pump through the three thin tubes 3a, 3b, 3c, it becomes an obstacle during remote work.

In the second conventional example, both actuators for expanding and contracting and clamping use a piezoelectric element having a displacement amount of several μm, so that the displacement amount in one step is small, and the displacement between the shaft and the clamp piezoelectric element is small. Processing accuracy on the order of microns or less is required, which requires expensive equipment. Moreover, since a high voltage of 100 V or more is used, its control is difficult.

[0007]

According to a first aspect of the present invention, there is provided a columnar sealing member in which a cylindrical end face in the direction orthogonal to the axis is formed by a non-expandable member and a side face in the axis parallel direction is formed by an expandable member. A thermal expansion member is provided in the sealing member, a heating member for heating the thermal expansion member is provided, and actuator drive control means for changing the volume of the thermal expansion member by the heating member is provided.

According to the second aspect of the present invention, there is provided a columnar type sealing member in which the end face of the column in the direction orthogonal to the axis is formed of a non-expandable member and the side face of the column in the direction parallel to the axis is formed of the expandable member. A heating member for filling the liquid and heating the liquid is provided, and an actuator drive control means for changing the volume by generating bubbles in the liquid by the heating member is provided.

According to the third aspect of the present invention, a columnar sealing member in which an end surface of the column in the direction orthogonal to the axis is formed by a non-expandable member and a side surface of the column in the direction parallel to the axis is formed by the elastic member, and the sealing member is filled. At least three actuators each including a thermal expansion member and a heating member that heats the thermal expansion member are connected in series in the cylindrical tube, and actuator drive control means for independently driving the actuators in the cylindrical tube is provided.

According to a fourth aspect of the present invention, a columnar sealing member having an end face in the direction orthogonal to the axis formed by a non-expandable member and a side face in the direction parallel to the axis formed by an expandable member, and the sealing member is filled. At least three actuators each including a liquid and a heating member for heating the liquid are connected in a cylindrical tube, and actuator drive control means for independently driving the actuators in the cylindrical tube is provided.

According to the invention of claim 5, claims 1, 2,
In the invention described in 3 or 4, the electromechanical conversion element is attached along the circumferential direction of the cylindrical side surface of the cylindrical sealing member.

According to the invention of claim 6, claims 1, 2 and
In the invention described in 3 or 4, the thermoelectric conversion element is attached along the circumferential direction of the cylindrical side surface of the cylindrical sealing member.

According to the seventh aspect of the present invention, there is provided a hollow cylindrical sealing member in which the cylindrical end surface and the outer peripheral surface of the cylinder are formed of a non-expandable member, and the inner peripheral surface of the cylinder is formed of an elastic member. An actuator for filling an expansion member and providing a heating member for heating the thermal expansion member, providing a shaft passing through a central hollow portion of the hollow cylindrical sealing member, and changing the volume of the thermal expansion member by the heating member. Drive control means is provided.

According to the present invention, there is provided a hollow cylindrical sealing member having a cylindrical end surface and a cylindrical outer peripheral surface formed of a non-expandable member and an inner cylindrical surface formed of an elastic member. An actuator that fills with a heating member that heats the liquid, provides a shaft that passes through the central hollow portion of the hollow cylindrical sealing member, and causes the heating member to generate bubbles in the liquid to change the volume. Drive control means is provided.

According to a ninth aspect of the present invention, a hollow cylindrical sealing member having a cylindrical end surface formed of a non-expandable member and an outer peripheral surface of the cylinder and an inner peripheral surface of the cylindrical member formed of an expandable member is provided. A heating member for filling the expansion member and heating the thermal expansion member is provided, and actuator drive control means for changing the volume of the thermal expansion member by the heating member is provided.

According to the tenth aspect of the present invention, there is provided a hollow cylindrical sealing member having a cylindrical end surface formed of a non-expandable member, and an outer peripheral surface of the cylinder and an inner peripheral surface of the cylinder formed of an elastic member.
A liquid is filled in the sealing member, a heating member for heating the liquid is provided, and actuator drive control means for changing the volume by generating bubbles in the liquid by the heating member is provided.

According to the eleventh aspect of the present invention, a hollow cylindrical sealing member in which the cylindrical end surface and the cylindrical outer peripheral surface are formed of a non-expandable member and the cylindrical inner peripheral surface is formed of an elastic member, and the sealing member is filled. A first actuator including a thermal expansion member or a liquid and a heating member that heats the thermal expansion member or the liquid is provided, and a cylindrical end surface is formed by a non-expandable member and a cylindrical outer peripheral surface and a cylindrical inner peripheral surface are formed by an elastic member. A second actuator composed of a hollow cylindrical sealing member, a thermal expansion member or a liquid filled in the sealing member, and a heating member for heating the thermal expansion member or the liquid is provided, and a single shaft is centered. At least two of the first actuators are connected, the second actuator is connected between the two first actuators, and the first and second actuations are connected. It provided an actuator drive control means for driving the eta each independently.

[0018]

According to the first aspect of the present invention, the axial length of the sealing member can be reduced by increasing the volume of the thermal expansion member by the heating member using the actuator drive control means, whereby the axial length of the sealing member can be reduced. It is possible to obtain the displacement of.

According to the second aspect of the present invention, the axial length of the sealing member can be reduced by generating bubbles in the liquid by the heating member and increasing the volume by using the actuator drive control means. It is possible to obtain displacement in a fixed direction.

According to the third and fourth aspects of the present invention, the actuator drive control means is used to independently drive each of the three consecutive actuators so that the connected actuators are integrated along the inside of the cylindrical pipe. It becomes possible to move it.

According to the fifth aspect of the invention, since the electromechanical conversion element is used, it is possible to feedback control the deformation of the sealing member which is the structure.

According to the invention of claim 6, since the thermoelectric conversion element is used, it is possible to detect the temperature by detecting the temperature of the sealing member which is the structure, and to know the displacement amount. By controlling the amount of heat, it becomes possible to feedback control the amount of displacement of the sealing member.

According to the seventh aspect of the present invention, the volume of the thermal expansion member is increased by the heating member using the actuator drive control means, and the cylindrical inner peripheral surface of the sealing member is bulged toward the center, so that the sealing member is attached to the shaft. It becomes possible to clamp.

According to the eighth aspect of the present invention, by using the actuator drive control means, a bubble is generated in the liquid by the heating member to increase the volume and bulge the inner peripheral surface of the cylinder of the sealing member toward the center. Can be clamped on the shaft.

According to the ninth aspect of the invention, the actuator drive control means is used to increase the volume of the thermal expansion member by the heating member, whereby the axial length of the sealing member can be reduced.

According to the tenth aspect of the present invention, the axial length of the sealing member can be reduced by using the actuator drive control means to generate bubbles in the liquid by the heating member to increase the volume. .

In the eleventh aspect of the present invention, the actuator drive control means is used to independently drive each of the three consecutive actuators, whereby the actuators can be integrally moved along the shaft. It will be possible.

[0028]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the invention described in claim 1 will be described with reference to FIGS. FIG. 1 shows the shape of the actuator 9 (moving mechanism). The cylindrical sealing member 10 has a metal fitting 11 as a non-expandable member formed on the end surface of the cylinder in the direction orthogonal to the axis of the cylinder, and a reinforced fiber rubber as an elastic member on the side surface of the cylinder in the direction parallel to the axis of the cylinder. (FRR) 12 is formed. This FRR12 is
It has longitudinal fibers 12a formed in the axial direction of the cylinder and transverse fibers 12b formed along the lateral direction of the cylinder. The longitudinal fibers 12a have a high elastic coefficient and are difficult to expand, but the second moment of area corresponding to the bending in the radial direction is low and the fibers are easily bent, and the transverse fibers 12b have a low elastic coefficient and are easily expanded. Further, in the vicinity of the center of the cylindrical side surface of the sealing member 10, several nichrome wires 13 as heating members are arranged at equal intervals along the circumferential direction. A thermal expansion member 14 is filled inside the column of the sealing member 10. The nichrome wire 13 may be mounted on the outer surface of the cylindrical side surface, but it is better to mount it on the inner side of the cylindrical side surface (on the side of the thermal expansion member 14) in consideration of thermal efficiency.

Further, here, actuator drive control means (not shown) is provided. The actuator drive control means has a function of increasing the volume of the thermal expansion member 14 by the nichrome wire 13 and reducing the axial length of the sealing member 10.

The principle of controlling the drive of the actuator 9 using the actuator drive control means in such a configuration will be described with reference to FIG. FIG. 2A shows a state before driving. Now, when heat is generated by the nichrome wire 13 from such a state, the thermal expansion member 14 tries to increase the volume. Such an action appears as a force for expanding both end faces of the cylinder, that is, a force for extending the longitudinal fibers 12a, and a force for expanding the side faces of the cylinder in the radial direction, that is, a transverse fiber 12b. In the present actuator 9, the horizontal fiber 12b is much easier to stretch than the vertical fiber 12a. Therefore, when the nichrome wire 13 is heated to change the volume of the thermal expansion member 14, FIG. As shown in, the central part of the cylinder bulges and the longitudinal fibers 12a become curved, and the distance between the end faces of both cylinders is ΔX.
Just narrows. That is, this means that it functions as an actuator that contracts due to thermal energy, and is particularly effective for the sustainability of displacement and force.

As described above, since the actuator 9 can be driven and controlled only by the nichrome wire 13, remote work can be performed. Further, since it is only necessary to control the temperature of the thermal expansion member 14, it is not necessary to put in or take out a fluid, which makes it easy to hold a constant displacement amount and a constant force,
The device can be downsized, the rigidity can be increased, and the response speed can be increased. Furthermore, since the actuator itself exerts a force in a contracted form, it does not buckle when a high load is applied in the direction opposite to the direction of the force. Therefore, from the above, the present actuator 9 can be used for a driving unit or a moving unit of a hand of a microrobot,
It can also be applied to the inchworm mechanism.

Next, an embodiment of the invention described in claim 2 will be described with reference to FIGS. 3 and 4. The description of the same parts as those of the invention according to claim 1 (see FIGS. 1 and 2) is omitted, and the same reference numerals are used for the same parts.

In this embodiment, the sealing member 10 is filled with a liquid 15 instead of the thermal expansion member 14 described in the first aspect of the invention. Also here
An actuator drive control means (not shown) uses a nichrome wire 13 used as a heating member to add bubbles 16 to the liquid 15
And has a function of reducing the axial length of the sealing member 10.

The driving principle of the actuator 9 having such a structure will be described with reference to FIG. Now, FIG. 4 (a)
When heat is generated by the nichrome wire 13 from the state before driving, the bubble 16 is generated inside the liquid 15 to increase the volume, as shown in FIG. 4B. Such an action is a force to push both end faces of the cylinder (a force to extend the longitudinal fibers 12a) and a force to push the side faces of the cylinder in a radial direction (a force to extend the transverse fibers 12b). Appears as. This actuator 9 is composed of longitudinal fibers 1
Since the horizontal fiber 12b is much easier to stretch than the horizontal fiber 2a, the central portion of the cylinder bulges, and the distance between the end faces of both cylinders is reduced by ΔX. That is, it acts as an actuator that contracts due to thermal energy.

As described above, since the present actuator 9 utilizes the energy generated when the liquid 15 is heated and the phase of the liquid 15 is changed, the displacement speed and the displacement amount are different from those of the invention according to claim 1. Can be large.
Further, since it is only necessary to control the phase change between the liquid 15 and the gas (bubble 16) by the temperature change, and the liquid 15 does not need to be taken in and out, high rigidity and high response speed are excellent, and the size of the device can be reduced. You can Furthermore, since the force of the bubble 16 (the force generated when the phase is changed from the liquid 15 to the gas) is used, the energy conversion efficiency is high, and the displacement amount and the displacement speed can be increased. In addition to the above, the effect described in the invention of claim 1 is also included, but the description thereof is omitted here.

Next, an embodiment of the invention described in claim 5 will be described with reference to FIG. In the present embodiment, the piezoelectric thin film 17 (other piezoresistive element) as a mechanical-electrical conversion element is arranged along the circumferential direction of the cylindrical side surface of the cylindrical sealing member 10 described in the above-mentioned claim 1 or 2. Etc. are used). Lead zirconate titanate, barium titanate or the like can be used as the piezoelectric thin film, and silicon single crystal or amorphous silicon or the like can be used as the piezoresistive element. The sealing member 10 is filled with the thermal expansion member 14 or the liquid 15.

In such a structure, the nichrome wire 13
When the central portion of the cylinder swells due to the generation of heat from the (heating member), a stretching stress acts on the piezoelectric thin film 17 to generate a voltage (in the case of a piezoresistive element, the resistance changes). The amount of contraction of the actuator 9, which is a structure, is detected by this change, and the amount of heat generated by the nichrome wire 13 is feedback-controlled from this, whereby the amount of displacement of the actuator 9 can be precisely controlled. In addition to this, it is possible to prevent destruction of the actuator itself and the operation symmetrical object due to runaway.

Next, an embodiment of the invention described in claim 6 will be described with reference to FIG. In the present embodiment, the temperature sensor 18 as a thermoelectric conversion element is attached along the circumferential direction of the cylindrical side surface of the cylindrical sealing member 10 described in the above-described invention of claim 1 or 2. . This temperature sensor 1
The heat generation state can be monitored by 8, and the displacement amount of the actuator 9 can be known from this. The amount of heat input to the nichrome wire 13 can be controlled by the detected displacement amount, and the displacement amount of the actuator 9 can be finally feedback-controlled. As a result, the displacement and movement of the actuator 9 can be controlled accurately. In addition to this, it is possible to prevent destruction of the actuator itself and the operation symmetrical object due to runaway.

Next, an embodiment of the invention described in claims 3 and 4 will be described with reference to FIGS. 7 and 8. In this embodiment, the three actuators 19a, 19b and 19c are cylindrical tubes 20.
The actuators 19 are arranged in series inside. The actuators 19a and 19c have the same diameter in normal times,
Moreover, its diameter is slightly smaller than the inner diameter of the cylindrical tube 20. Further, the diameter of the actuator 19b in the normal state is smaller than that of the actuators 19a and 19c, and the actuator 19b does not come into contact with the inner wall of the cylindrical tube 20 even when expanded by heating. In this case, the internal configuration of the actuators 19a, 19b, 19c is the same as that of the invention described in claims 1 and 2 (see FIG. 1), and the sealing member 10 is filled with the thermal expansion member 14 or the liquid 15. ing.

Further, here, the actuators 19a,
There is provided an actuator drive control means (not shown) that drives 19b and 19c independently in the cylindrical tube 20, thereby moving the actuator 19 along the tube.

The principle of controlling the drive of the actuator 19 using the actuator drive control means in such a configuration will be described with reference to FIGS. In the figure, actuators 19a and 19c (here,
CL is a clamp and UCL is an unclamp. The clamp bulges due to heating and closes the inside of the cylindrical tube 20, and the unclamp shows a normal state. In addition, the actuator 19
In b (herein referred to as B), LG indicates a normal state, and ST indicates a state shortened by heating.

First, in (a), only A is driven, and A
Is clamped on the tube wall. Next, in (b), B is contracted while A is clamped. Next, in (c), C is also clamped while B is still compressed.
Next, in (d), after unclamping A, B is extended in (e). Next, in (f), after A is clamped again, C is unclamped in (g), and the original state is restored. However, when B is shortened, the entire actuator 19 has moved to the left by the stroke.
By repeating such a series of operations, the entire body moves to the left. It should be noted that even when moving to the right, drive control can be performed according to the same principle.

As described above, by constructing a structure in which three cylindrical actuators 19a, 19b, 19c are connected in series, high rigidity, high response speed, and miniaturization of the device can be achieved, and remote work can be performed. Easy to do. In addition, the energy efficiency is higher than that of an inchworm using an existing piezoelectric element, and each actuator 19a, 19b, 19c
Since the columnar member is more flexible than the conventional one, it is easy to move along a curved path, and strict machining accuracy is not required.

Next, an embodiment of the invention described in claim 7 will be described with reference to FIGS. The same parts as those in the invention described in claim 1 (see FIGS. 1 and 2) are designated by the same reference numerals.

FIG. 9 shows the structure of the actuator 9. The hollow cylindrical sealing member 10 has its cylindrical end surface and cylindrical outer peripheral surface formed by a metal fitting 11 as a non-expandable member, and its cylindrical inner peripheral surface formed by an elastic thin film 12 (rubber or the like) as an elastic member. . A thermal expansion member 14 is filled in the sealing member 10. Sealing member 10
Nichrome wires 13 as heating members are evenly arranged along the circumferential direction on the inner wall near the center on the outer peripheral surface side of the cylinder. In the central hollow portion of the sealing member 10, the shaft 2
It has a shape in which 1 penetrates. FIG. 10 shows an external configuration of the actuator 9. Also here
There is provided actuator drive control means (not shown) for increasing the volume of the thermal expansion member 14 by the nichrome wire 13 and bulging the cylindrical inner peripheral surface of the sealing member 10 toward the center to clamp it on the shaft 21.

The driving principle of the actuator 9 having such a structure will be described with reference to FIG. Now, when heat is generated by the nichrome wire 13, the thermal expansion member 14
Increases the volume, whereby the inner peripheral surface of the cylinder bulges inward and clamps the shaft 21.

Therefore, from the above, the drive control only needs to control the temperature of the thermal expansion member 14, and it is not necessary to let the fluid in and out. Therefore, high rigidity, high response speed, and miniaturization can be achieved. Moreover, since it can be driven only by energizing, remote work can be easily performed. Further, since the outer peripheral surface of the cylinder is made of the metal fitting 11 having high rigidity, it is not deformed, and the member of the inner peripheral cylindrical surface of the actuator 9 is flexible, so that the degree of freedom of the shape of the shaft 21 is high and the machining accuracy is severe. The cost can be reduced without the need. Furthermore, since thermal expansion is used, the durability of displacement and force can be enhanced. As an application example, it can be used for a clamp mechanism of a micro robot or an inchworm mechanism.

Next, an embodiment of the present invention will be described with reference to FIGS. Incidentally, claims 2 and 7
The same symbols are used for the same portions as the described invention (see FIGS. 3 to 4 and 9 to 11).

In this embodiment, the filling material filled in the sealing member 10 according to the invention described in claim 7 (see FIG. 9) is changed. FIG. 12 shows the configuration of the actuator 9. Hollow cylindrical sealing member 10
The cylindrical end surface and the outer peripheral surface of the cylinder are formed by a metal fitting 11 as a non-expandable member, and the inner peripheral surface of the cylinder is formed by an elastic thin film 12 (rubber or the like) as an elastic member.
The liquid 15 is filled in the sealing member 10. Nichrome wires 13 as heating members are evenly arranged along the circumferential direction on the inner wall near the center of the outer peripheral surface of the cylinder in the sealing member 10. A shaft 21 penetrates the hollow portion at the center of the sealing member 10. FIG. 13 shows an external configuration of the actuator 9. Further, here, there is provided an actuator drive control means (not shown) which increases the volume of the liquid 15 by the nichrome wire 13, swells the cylindrical inner peripheral surface of the sealing member 10 toward the center, and clamps it on the shaft 21.

The driving principle of the actuator 9 having such a structure will be described with reference to FIG. Now, when heat is generated by the nichrome wire 13, bubbles 16 are generated in the liquid 15 to increase the volume, and the inner peripheral surface of the cylinder bulges inward to clamp the shaft 21 at the center.

Therefore, since the force of the bubble 16 is used in this way, the energy conversion efficiency is increased, which makes it possible to generate a strong instantaneous force or take out an instantaneous displacement, which results in a large displacement. The quantity and displacement speed can be obtained. In addition to this, the same effect as the invention according to claim 7 can be obtained.

Next, an embodiment of the invention described in claim 9 will be described with reference to FIGS. The same reference numerals are used for the same parts as the invention according to claim 7 (see FIGS. 9 to 11).

In this embodiment, the invention according to claim 7 (see FIG.
The surface forming member of the sealing member 10 in the reference) is changed. That is, in the sealing member 10 of FIG.
The end surface of the cylinder is formed by a metal fitting 11 as a non-expandable member, and the outer peripheral surface and the inner peripheral surface of the cylinder are FR as an elastic member.
It is formed of R12 (reinforced fiber rubber). A thermal expansion member 14 is filled inside the sealing member 10. F
The RR 12 has longitudinal fibers 12a and transverse fibers 12b. The longitudinal fibers 12a have a high elastic modulus and are difficult to stretch, but have a low second moment of area corresponding to the bending in the radial direction and are hard to bend. The transverse fiber 12b has a low elastic modulus and is easily stretched. FIG. 16 shows an external configuration of the actuator 9. Further, here, there is provided an actuator drive control means (not shown) which increases the volume of the thermal expansion member 14 by the nichrome wire 13 and swells the inner peripheral surface of the cylinder of the sealing member 10 toward the center.

In such a structure, FIG. 17A shows a state before driving. Now, when the nichrome wire 13 is heated to generate heat, the thermal expansion member 14 increases in volume, and as shown in FIG. 17 (b), the outer peripheral surface of the cylinder bulges outward and the inner peripheral surface of the cylinder bulges inward and The distance between the peripheral surfaces becomes smaller.

Therefore, the present actuator 9 has a function of shortening the length in the axial direction by the heat energy, and can enhance the sustainability of displacement and force. In addition to this, the same effect as the invention according to claim 7 can be obtained.

Next, an embodiment of the invention described in claim 10 will be described with reference to FIGS. The same parts as those in the invention according to claim 9 (see FIGS. 15 to 17) are designated by the same reference numerals.

In this embodiment, the invention according to claim 9 (see FIG.
5) in which the filling material in the sealing member 10 is changed. That is, the metal fitting 11 of the sealing member 10 of FIG.
The liquid 15 is filled in the interior surrounded by the FRR 12. Further, here, there is provided an actuator drive control means (not shown) for generating bubbles 16 in the liquid 15 by the nichrome wire 13 to change the volume. FIG. 19 shows an external structure of the actuator 9.

In such a structure, FIG. 20A shows a state before driving. Now, when the nichrome wire 13 is heated to generate the bubbles 16, the volume of the liquid 15 increases and the outer peripheral surface of the cylinder bulges outward and the inner peripheral surface of the cylinder bulges inward as shown in FIG. 20 (b). The distance between the inner peripheral surfaces of the cylinder becomes narrow.

Therefore, the actuator 9 has a function of shortening the length in the axial direction by the thermal energy from the above fact, and the displacement and the instantaneousness of force can be enhanced. In addition to this, the same effect as the invention according to claim 7 can be obtained.

Next, an embodiment of the invention described in claim 11 will be described with reference to FIGS. 21 and 22. In addition, claim 6
9 are used for the same parts as those in the invention described in FIGS.

In this embodiment, two first actuators 22a and 22c are connected with one shaft 21 as a central portion, and a second actuator 22b is connected between these first actuators 22a and 22c. . Further, here, the first and second actuators 22a, 2
There is provided actuator drive control means (not shown) for independently driving 2b and 22c. In this case, the first actuators 22a and 22c are the same as in Claims 6 and 7.
The structure of the actuator 9 is the same as that of the actuator 9 in the invention described, and the second actuator 22b is the same as the structure of the actuator 9 in the invention described in claims 8 and 9.

The principle of operation of the actuator 9 having such a structure will be described with reference to FIGS. In the figure, the indications of CL (clamp), UCL (unclamp), LG (normal state), and ST (state shortened by heating) are the inventions described in claims 3 and 4 (see FIG. 8). Shall have the same meaning as in. First, in (a), only the first actuator 22a (hereinafter referred to as "A") is driven, whereby the shaft 2
1 is being clamped. Next, in (b), the second actuator 22b (hereinafter referred to as B) is contracted while A is still clamped. Next, in (c), the shaft 21 is clamped by driving the first actuator 22c (hereinafter, referred to as C) while keeping B compressed. Next, in (d), after unclamping A,
In (e), B is extended. Next, in (f), A again
After (c) is clamped, (c) is unclamped in (g) to return to the state of (a). However, the entire actuator has moved leftward by the stroke that shortens B. By repeating such a series of operations, it is possible to continue moving to the left as a whole. Further, the rightward movement can be performed by the same principle.

Therefore, by using the three actuators 9 connected in series in this manner, the inchworm mechanism which has a higher energy efficiency and can move along a curved path as compared with a conventional piezoelectric element is used. Can be realized. In addition, this makes it possible to achieve high rigidity and high response speed, reduce the size of the device, and reduce the cost because it is not necessary to make the processing accuracy severe.

[0064]

According to the first aspect of the present invention, there is provided a columnar sealing member in which a cylindrical end face in the direction orthogonal to the axis is formed of a non-expandable member, and a side surface of the column in the axis parallel direction is formed of an elastic member. Since the thermal expansion member is provided therein, the heating member for heating the thermal expansion member is provided, and the actuator drive control means for changing the volume of the thermal expansion member by the heating member is provided, the volume of the thermal expansion member is changed by the heating member. It is possible to obtain a displacement in a certain direction by increasing the axial length of the sealing member and decreasing the axial length of the sealing member.
It is possible to realize a small actuator that is excellent in high rigidity and high response speed.

According to a second aspect of the present invention, there is provided a columnar sealing member in which an end face of the column in the direction orthogonal to the axis is formed of a non-expandable member and a side face of the column in the direction parallel to the axis is formed of the extendable member.
Since the sealing member is filled with a liquid, a heating member for heating the liquid is provided, and an actuator drive control means for changing the volume by generating bubbles in the liquid by the heating member is provided. It is possible to obtain displacement in a certain direction by generating bubbles inside and increasing the volume and reducing the axial length of the sealing member,
As a result, it is possible to realize a small actuator that is excellent in high rigidity and high response speed.

According to a third aspect of the present invention, a columnar sealing member in which an end face of the column in the direction orthogonal to the axis is formed of a non-expandable member and a side face of the column in the direction parallel to the axis is formed of an expandable member, and the sealing member is filled. Since at least three actuators each including a thermal expansion member and a heating member for heating the thermal expansion member are connected in a cylindrical tube, and actuator drive control means for independently driving the actuators in the cylindrical tube is provided. Since it is possible to independently drive each of the three actuators connected in series and move the connected actuators integrally along the inside of the cylindrical pipe, the energy efficiency is higher and the bending is higher than in the conventional case. It is possible to realize an inchworm mechanism that can easily move the route.

According to a fourth aspect of the present invention, a columnar sealing member having an end face in the direction orthogonal to the axis formed by a non-expandable member and a side face in the direction parallel to the axis formed by an expandable member, and the sealing member is filled. At least three actuators each including a liquid and a heating member that heats the liquid are connected in a cylindrical pipe, and actuator drive control means for independently driving the actuators in the cylindrical pipe is provided. Since it is possible to independently drive the actuators connected in series and move the connected actuators integrally along the inside of the cylindrical pipe,
It is possible to realize an inchworm mechanism that has higher energy efficiency than conventional ones and can easily move a curved path.

The invention according to claim 5 is the invention as defined in claims 1, 2, and 3.
Alternatively, in the invention described in item 4, since the electromechanical conversion element is attached along the circumferential direction of the side surface of the cylindrical sealing member, it is possible to perform feedback control of the deformation of the sealing member that is the structure. Since the displacement and movement of the actuator can be controlled with high precision, it is possible to prevent the actuator itself and the operation target from being destroyed due to runaway.

The invention according to claim 6 is the same as claims 1, 2, and 3.
Alternatively, in the invention described in 4, since the thermoelectric conversion element is attached along the circumferential direction of the cylindrical side surface of the cylindrical sealing member,
The deformation of the sealing member, which is a structure, can be feedback-controlled, and thereby the displacement and movement of the actuator can be controlled with high accuracy, so that the actuator itself and the operation target can be prevented from being destroyed due to runaway. It is possible.

According to a seventh aspect of the present invention, a hollow cylindrical sealing member is provided, in which the cylindrical end surface and the cylindrical outer peripheral surface are formed of a non-expandable member, and the cylindrical inner peripheral surface is formed of an elastic member. An actuator for filling an expansion member and providing a heating member for heating the thermal expansion member, providing a shaft passing through a central hollow portion of the hollow cylindrical sealing member, and changing the volume of the thermal expansion member by the heating member. Since the drive control means is provided, it is possible to increase the volume of the thermal expansion member by the heating member and bulge the inner peripheral surface of the cylindrical member of the sealing member toward the center to clamp the sealing member on the shaft. It is possible to provide an actuator excellent in durability of force.

According to an eighth aspect of the present invention, there is provided a hollow cylindrical sealing member having a cylindrical end surface and a cylindrical outer peripheral surface formed of a non-expandable member, and an inner peripheral surface of the cylinder formed of an elastic member. An actuator that fills with a heating member that heats the liquid, provides a shaft that passes through the central hollow portion of the hollow cylindrical sealing member, and causes the heating member to generate bubbles in the liquid to change the volume. Since the drive control means is provided, it becomes possible to generate bubbles in the liquid by the heating member to increase the volume and inflate the inner peripheral surface of the sealing member toward the center, and to clamp the sealing member on the shaft. It is possible to provide an actuator excellent in displacement and force instantaneousness.

According to a ninth aspect of the present invention, there is provided a hollow cylindrical sealing member having a cylindrical end surface formed of a non-expandable member and an outer peripheral surface of the cylinder and an inner peripheral surface of the cylinder formed of an elastic member. Since the expansion member is filled and the heating member that heats the thermal expansion member is provided, and the actuator drive control means that changes the volume of the thermal expansion member by the heating member is provided, the volume of the thermal expansion member is increased by the heating member. Therefore, it is possible to reduce the axial length of the sealing member, and thereby it is possible to provide an actuator excellent in displacement and force durability.

According to a tenth aspect of the present invention, there is provided a hollow cylindrical sealing member having an end surface of the cylinder formed of a non-expandable member, and an outer peripheral surface of the cylinder and an inner peripheral surface of the cylinder formed of an expandable member. A heating member for heating the liquid, and an actuator drive control means for changing the volume by generating a bubble in the liquid by the heating member, so that a bubble is generated in the liquid by the heating member. It is possible to increase the volume and reduce the axial length of the sealing member, which makes it possible to provide an actuator excellent in displacement and force instantaneousness.

According to the eleventh aspect of the present invention, a hollow cylindrical sealing member in which the cylindrical end surface and the cylindrical outer peripheral surface are formed of a non-expandable member and the cylindrical inner peripheral surface is formed of an elastic member, and the sealing member is filled. A first actuator including a thermal expansion member or a liquid and a heating member that heats the thermal expansion member or the liquid is provided, and a cylindrical end surface is formed by a non-expandable member and a cylindrical outer peripheral surface and a cylindrical inner peripheral surface are formed by an elastic member. And a second actuator comprising a hollow cylindrical sealing member, a thermal expansion member or a liquid filled in the sealing member, and a heating member for heating the thermal expansion member or the liquid,
At least two first actuators are connected about one shaft, and the second actuator is connected between the two first actuators.
Since the actuator drive control means for independently driving the second actuator and the second actuator are provided, it is possible to independently drive each of the three consecutive actuators and integrally move the actuators along the shaft. As a result, the displacement and movement of the actuator can be controlled with high accuracy, so that the actuator itself and the operation target can be prevented from being destroyed due to runaway.

[Brief description of drawings]

FIG. 1 is a perspective view showing an embodiment of the invention described in claim 1.

FIG. 2 is a side view showing a state before and after an operation of the actuator.

FIG. 3 is a perspective view showing an embodiment of the invention described in claim 2.

FIG. 4 is a side view showing a state before and after an operation of the actuator.

FIG. 5 is a perspective view showing an embodiment of the invention described in claim 5.

FIG. 6 is a perspective view showing an embodiment of the invention described in claim 6;

FIG. 7 is a perspective view showing an embodiment of the invention described in claims 3 and 4.

FIG. 8 is an operation explanatory view showing a state of a series of operations of the actuator.

FIG. 9 is a sectional view showing an embodiment of the invention as set forth in claim 7;

FIG. 10 is a perspective view of an actuator.

FIG. 11 is a cross-sectional view when the actuator is operating.

FIG. 12 is a sectional view showing an embodiment of the invention as set forth in claim 8.

FIG. 13 is a perspective view of an actuator.

FIG. 14 is a cross-sectional view when the actuator is operating.

FIG. 15 is a sectional view showing an embodiment of the invention as set forth in claim 9;

FIG. 16 is a perspective view of an actuator.

FIG. 17 is an operation explanatory view showing the states before and after the operation of the actuator.

FIG. 18 is a sectional view showing an embodiment of the invention as set forth in claim 10;

FIG. 19 is a perspective view of an actuator.

FIG. 20 is an operation explanatory view showing states before and after the operation of the actuator.

FIG. 21 is a perspective view showing an embodiment of the invention set forth in claim 11;

FIG. 22 is an operation explanatory view showing a state of a series of operations of the actuator.

FIG. 23 is a configuration diagram showing a first conventional example.

FIG. 24 is a configuration diagram showing a second conventional example.

[Explanation of symbols]

 10 Sealing member 11 Non-expandable member 12 Expandable member 13 Heating member 14 Thermal expansion member 15 Liquid 16 Bubble 17 Mechanical-electrical conversion element 18 Thermoelectric conversion element 19a-19c Actuator 20 Cylindrical tube 21 Shaft 22a, 22c First actuator 22b Second actuator

Claims (11)

[Claims] 1. A columnar sealing member having an end face in the direction orthogonal to the axis formed by a non-expandable member and a side face in the axis parallel direction formed by an extendable member, and a thermal expansion member filled in the seal member. A moving mechanism comprising: a heating member for heating the thermal expansion member; and actuator drive control means for changing the volume of the thermal expansion member by the heating member. 2. A columnar sealing member whose end face in the direction orthogonal to the axis is formed by a non-expanding member and whose side face in the axis parallel direction is formed by an expanding member, a liquid filled in the sealing member, and A moving mechanism comprising: a heating member that heats a liquid; and an actuator drive control unit that changes the volume by generating bubbles in the liquid by the heating member. 3. A columnar sealing member whose end face in the direction orthogonal to the axis is formed by a non-expandable member and whose side face in the axis parallel direction is formed by an expandable member, and a thermal expansion member filled in this sealing member. A moving mechanism, characterized in that at least three actuators each comprising a heating member for heating the thermal expansion member are connected in series in the cylindrical tube, and actuator drive control means for independently driving the actuators in the cylindrical tube is provided. . 4. A columnar sealing member having an end face in the direction orthogonal to the axis formed of a non-expandable member and a side face in the direction parallel to the axis formed of an expandable member, a liquid filled in the seal member, and the liquid. A moving mechanism, characterized in that at least three actuators each comprising a heating member for heating are connected in a cylindrical tube, and an actuator drive control means for independently driving the actuators in the cylindrical tube is provided. 5. The moving mechanism according to claim 1, wherein the electromechanical conversion element is attached along the circumferential direction of the side surface of the cylindrical sealing member. 6. The moving mechanism according to claim 1, wherein a thermoelectric conversion element is attached along the circumferential direction of the side surface of the cylindrical sealing member. 7. A hollow cylindrical sealing member having an end surface and an outer peripheral surface of the cylinder formed of a non-expandable member and an inner peripheral surface of the cylinder formed of an expandable member, and a thermal expansion member filled in the sealing member. A heating member for heating the thermal expansion member, a shaft passing through the central hollow portion of the hollow cylindrical sealing member, and an actuator drive control means for changing the volume of the thermal expansion member by the heating member. A characteristic moving mechanism. 8. A hollow cylindrical sealing member having an end surface and an outer peripheral surface of the cylinder made of a non-expandable member and an inner peripheral surface of the cylinder made of an elastic member, a liquid filled in the sealing member, and the liquid. A heating member that heats the member, a shaft that passes through the central hollow portion of the hollow cylindrical sealing member, and an actuator drive control unit that changes the volume by generating bubbles in the liquid by the heating member. A characteristic moving mechanism. 9. A hollow cylindrical sealing member having an end surface of the cylinder formed of a non-expandable member, and an outer peripheral surface of the cylinder and an inner peripheral surface of the cylinder formed of an expandable member, and a thermal expansion member filled in the sealing member. A moving mechanism comprising: a heating member that heats the thermal expansion member; and actuator drive control means that changes the volume of the thermal expansion member by the heating member. 10. A hollow cylindrical sealing member having an end surface of a cylinder formed of a non-expandable member, and an outer peripheral surface of the cylinder and an inner peripheral surface of the cylinder formed of an elastic member, a liquid filled in the sealing member, and the liquid. A moving mechanism comprising: a heating member that heats the liquid; and an actuator drive control unit that causes the heating member to generate bubbles in the liquid to change the volume. 11. A hollow cylindrical sealing member having an end surface and an outer peripheral surface of the cylinder formed of a non-expandable member and an inner peripheral surface of the cylinder formed of an expandable member, and a thermal expansion member or a liquid filled in the closing member. A hollow-cylindrical hermetic seal in which a first actuator including a thermal expansion member or a heating member that heats the liquid is provided, and a cylindrical end surface is formed of a non-expandable member and an outer peripheral surface of the cylinder and an inner peripheral surface of the cylinder are formed of expandable members A second actuator including a member, a thermal expansion member or a liquid filled in the sealing member, and a heating member that heats the thermal expansion member or the liquid is provided, and at least the first actuator is centered around one shaft. Two of them are connected and the second actuator is connected between the two first actuators.
A moving mechanism characterized by comprising actuator drive control means for connecting an actuator and independently driving the first and second actuators.