JPH0663254U - Non-contact chuck device - Google Patents

Abstract

(57) [Summary] [Purpose] With a simple structure, work chucking can be performed in a short time. [Configuration] Through the air ejection hole 2b of the chuck body 2,
Air is supplied to the lower surface of the work W. Thereby, the work W can be chucked in a short time in a non-contact state in which the work W is levitated with respect to the chuck body 2. The work W has a stopper portion 3 at its inner peripheral portion.
Restrain by.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a non-contact chuck device that chucks a work by ejecting a fluid onto the lower surface of the work. Mainly used for handling chucks such as IC wafers, magnetic disks, etc. where handling of foreign matter, scratches, and dust are not desired.

[0002]

[Prior art]

 Since IC wafers, magnetic disks, etc. are reluctant to have foreign matter attached during the manufacturing process, they are generally held and transferred in a non-contact state by a chuck device during the transfer.

As such a non-contact chuck device, as disclosed in, for example, Japanese Patent Application Laid-Open No. 4-199732, at least two claws which are arranged to be openable and closable with respect to a work holding center, and It has a cradle projecting from the claws and extending toward the center of the work holding, and a gas discharge part for discharging the gas supplied from the gas supply source, and is discharged from the gas discharge part at the closed position of each claw. The gas forms a gas film between the inner surface of the claw and the outer surface of the work facing the inner surface of the claw, and between the upper surface of the pedestal and the downward surface of the work facing the upper surface of the pedestal, respectively. It is known to have a gas film generating means for floating the gas on a pedestal.

[0004]

[Problems to be solved by the device]

 However, in such a case, the structure was complicated, and it took a considerable time to load and unload the work because the work was pinched. In addition, there is a problem that the lubricant in the movable parts such as the claws that open and close is scattered and the work is contaminated, which makes it difficult to use in a vacuum.

The present invention provides a non-contact type chuck device having a simple structure and capable of chucking a workpiece in a short time.

[0006]

[Means for Solving the Problems]

 The present invention is premised on a non-contact chuck device that chucks a workpiece by ejecting a fluid onto the lower surface of the workpiece.

According to the invention of claim 1, a plate-shaped chuck body having a plurality of fluid ejection holes, a fluid supply means for supplying a fluid to the fluid ejection holes of the chuck body, and a chuck body disposed on the chuck body. It is provided with a stopper part which is provided to restrain the inner peripheral part or the outer peripheral part of the work.

According to the second aspect of the invention, the stopper portion is provided with the fluid ejection hole at a portion facing the inner peripheral portion or the outer peripheral portion of the work.

[0009]

[Action]

 According to the first aspect of the present invention, the work is held in a non-contact state by the fluid supplied through the fluid ejection holes of the chuck body, and the work is constrained at the inner peripheral portion or the outer peripheral portion by the stopper portion.

According to the second aspect of the present invention, the work is brought into a non-contact state with the stopper portion by the ejection of the fluid from the fluid ejection hole of the stopper portion.

[0011]

【Example】

 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

In FIGS. 1 and 2, reference numeral 1 is a non-contact chuck device that chucks a lower surface of a hollow disk-shaped work W by ejecting a fluid, and has a plate-shaped chuck body 2.

The chuck body 2 has side plate portions 2A, 2A corresponding to both side portions of the work W, and a connecting portion 2B for connecting the side plate portions 2A, 2A with a thickness approximately twice that of the side plate portion 2A. . Two air supply holes 2a, 2a are opened in the connecting portion 2B, and each air supply hole 2a, 2a has two air ejection holes 2b, 2b, 2b located near the center of each side plate portion 2A, 2A. 2b is communicated with the passages 2c, 2c. An air pump (not shown) as a fluid supply means for supplying air to the air ejection hole 2b of the chuck body 2 is linked to the air supply holes 2a, 2a.

Further, in each of the side plate portions 2A, 2A, stopper portions 3, 3, 3 having a triangular cross section for restraining the outer peripheral surface W1 of the work W on the surface on the side where the air ejection hole 2b is opened. , 3 are provided.

Therefore, the chuck body 2 of the non-contact chuck apparatus 1 is fixed to, for example, the tip of an arm of an industrial robot and is inserted into the lower surface side of the work W placed on a table (not shown). , The work W is picked up to chuck the work W in a non-contact manner. That is, in the scooped-up state, the work W is levitated and chucked by ejecting air from the air ejection holes 2b, 2b, 2b, 2b.

According to this structure, at least two claws that can be opened and closed with respect to the work holding center unlike the conventional non-contact chuck device are not required, and the structure is simplified. The problem that the work is contaminated by the lubricant of the movable part is eliminated, and the reduction of the tact time is improved.

Further, it becomes easy to use in a vacuum. That is, when used in a vacuum, the non-contact chuck device 1 is placed in a vacuum chamber, and while the chamber is evacuated by a vacuum pump, the amount of air supplied to the non-contact chuck device 1 is reduced from the outside. You just need to supply air.

In the above embodiment, four stopper portions 3, 3, 3, 3 having a triangular cross section for restraining the outer peripheral portion of the work W are adopted, but instead, as shown in FIGS. 3 and 4. In addition, the non-contact chuck device 1A can be configured by using the ring-shaped stopper portion 5 that restrains the outer peripheral portion of the work W.

Further, although the number of air ejection holes is four in the above-described embodiment, as shown in FIG. 5, the connecting portion that connects both side plate portions 11A and 11A of the chuck body 11 on the connecting portion 11B side. 11C is provided, and one air ejection hole 11a, 11a, 11a is provided in each of the side plate portions 11A, 11A and the connecting portion 11C, and the air ejection holes 11a, 11a, 11a are provided with passages 11b, 11b, 11b, respectively. The non-contact chuck device 1B can be configured by providing the communicating air supply holes 11c, 11c, 11c in the connecting portion 11B.

Further, as shown in FIGS. 6 and 7, a stopper portion for restraining the inner peripheral surface W2 of the work W may be used. That is, the chuck main body 21 is composed of a substrate portion 21A and a support plate portion 21B having a plate thickness larger than that of the base plate portion 21A, and the inner peripheral surface (center hole) of the work W is formed substantially at the center of the substrate portion 21A. The cylindrical stopper portion 22 that engages with () is fixed. Then, four air ejection holes 21a, 21a, 21a, 21a are formed around the stopper portion 22, and the respective air ejection holes 21a, 21a, 21a, 21a are formed in the support plate portion 21B through the passages 21b, 21b. The non-contact chuck device 1C is configured to communicate with the air supply holes 21c, 21c.

Further, as shown in FIG. 8, an air ejection hole may be provided in a portion of the stopper portion facing the inner peripheral portion or the outer peripheral portion of the work W. That is, in the non-contact chuck device 1D, stopper portions 32 and 32 having curved surfaces 32a and 32a corresponding to the outer peripheral surface of the work W are provided on the side plate portions 31A and 31A of the chuck body 31, respectively. Air ejection holes 32b, 32b are formed in the air. Then, air is supplied to the air ejection holes 32b, 32b, 32b, 32b from the air supply holes 32d, 32d through the passages 32c, 32c. Similar to the structure shown in FIG. 1, the side plate portion 31A of the chuck body 31 is formed with ejection holes 31a, 31a, 31a, 31a and communicates with the air supply holes 31c, 31c of the connecting portion 31B through the passages 31b, 31b. ing.

Therefore, the air pump blows air to the lower side of the work W through the air supply holes 31c, 31c, 32d, 32d of the connecting portion 31B and the passages 31b, 31b, 32c, 32c. Air is supplied to the holes 31a, 31a, 31a, 31a and the air ejection holes 32b, 32b, 32b, 32b of the stoppers 32, 32 for ejecting air to the outer peripheral surface of the work W, and the chucking is performed in a completely non-contact state. can do.

[0023]

[Effect of device]

 Since the invention of claim 1 is configured as described above, the workpiece is held in a non-contact state by the fluid supplied through the fluid ejection holes of the chuck body, and the inner peripheral portion or the outer peripheral portion of the workpiece is stopped by the stopper portion. Since it is constrained, the work can be chucked in a short time with a simple structure. In addition, since no moving parts are required, no special lubrication is required and it can be used in vacuum.

According to the second aspect of the present invention, the work is brought into a non-contact state not only with the chuck body but also with the stopper part by ejecting the fluid from the fluid ejecting hole of the stopper part.

[Brief description of drawings]

FIG. 1 is a plan view of an embodiment of the present invention.

FIG. 2 is a side view of the same.

FIG. 3 is a view similar to FIG. 1 of a modified example of a stopper portion.

FIG. 4 is a side view of the same.

FIG. 5 is a view similar to FIG. 1 of the embodiment in which the number of air ejection holes is reduced.

6 is a view similar to FIG. 1 of an embodiment in which a stopper portion restrains the inner peripheral portion of a work.

FIG. 7 is a side view of the same.

FIG. 8 is a diagram of an embodiment in which an air ejection hole is provided in a stopper portion.
It is a figure similar to.

[Explanation of symbols]

 1 Non-contact chuck device 1A Non-contact chuck device 1B Non-contact chuck device 1C Non-contact chuck device 1D Non-contact chuck device 2 Chuck body 2b Air ejection hole (fluid ejection hole) 3 Stopper part 5 Stopper part 11 Chuck Body 11a Air ejection hole (fluid ejection hole) 21 Chuck body 21a Air ejection hole (fluid ejection hole) 31 Chuck body 31a Air ejection hole 32 Stopper part 32b Air ejection hole (fluid ejection hole)

Claims (2)

[Scope of utility model registration request] 1. A non-contact chuck device for chucking a workpiece by ejecting a fluid onto the lower surface of the workpiece, comprising: a plate-shaped chuck body having a plurality of fluid ejection holes; and a fluid of the chuck body. A non-contact chuck device comprising: a fluid supply means for supplying a fluid to an ejection hole; and a stopper portion which is arranged in the chuck body and restrains an inner peripheral portion or an outer peripheral portion of a work. 2. The non-contact chuck device according to claim 1, wherein the stopper portion is provided with a fluid ejection hole at a portion facing the inner peripheral portion or the outer peripheral portion of the work.