JPH0660443A - Production of optical disk substrate - Google Patents
Production of optical disk substrateInfo
- Publication number
- JPH0660443A JPH0660443A JP20642592A JP20642592A JPH0660443A JP H0660443 A JPH0660443 A JP H0660443A JP 20642592 A JP20642592 A JP 20642592A JP 20642592 A JP20642592 A JP 20642592A JP H0660443 A JPH0660443 A JP H0660443A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- resin layer
- optical
- recording medium
- resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、光ディスク用基板の製
造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing an optical disk substrate.
【0002】[0002]
【従来の技術】近年の高度情報化社会の進展にともな
い、高密度でしかも大容量のファイルメモリへのニーズ
が高まっている。これに応えるメモリとして光記録が注
目されている。これまで、コンパクトディスクに代表さ
れる再生専用型,文書ファイルなどに用いられている追
記型、そして、文書ファイルや画像ファイルなどに用い
られている書換え型の1種である光磁気記録が、最近、
実用化された。特に、書換え型の光記録は、この他に、
幅広い応用が考えられており、さらにその高性能化の研
究が多くの研究機関で行われている。その一つに、光磁
気ディスクの高性能化がある。例えば、記録密度を高く
するために小さな記録ビットを形成することが考えられ
ている。その場合、波長の短い光を用いて再生すること
が分解能の観点から必要である。形成される磁区形状が
小さく、かつ波長の短い光を用いても、信号対雑音比
(S/N)が従来より大きくなければならない。しか
し、波長の短い光を用いると基板表面の微小な凹凸によ
りノイズが高くなる場合があり、安定した再生ができな
い場合があった。従来から、高S/Nを得るために大き
な磁気光学効果が得られる記録材料の探索がなされてい
た。その1例に、特開昭62−222609号公報がある。2. Description of the Related Art With the progress of the advanced information society in recent years, there is an increasing need for a high-density and large-capacity file memory. Optical recording is attracting attention as a memory that can meet this demand. Recently, magneto-optical recording, which is one of a read-only type represented by a compact disc, a write-once type used for a document file, and a rewritable type used for a document file or an image file, has recently been developed. ,
It was put to practical use. In particular, rewritable optical recording is
A wide range of applications are being considered, and research on how to improve its performance is being carried out at many research institutes. One of them is to improve the performance of magneto-optical disks. For example, it has been considered to form small recording bits in order to increase the recording density. In that case, it is necessary from the viewpoint of resolution to perform reproduction using light having a short wavelength. The signal-to-noise ratio (S / N) must be higher than in the past even if light having a small magnetic domain shape and a short wavelength is used. However, when light with a short wavelength is used, noise may increase due to minute irregularities on the substrate surface, and stable reproduction may not be possible in some cases. Heretofore, a search has been made for a recording material that can obtain a large magneto-optical effect in order to obtain a high S / N. One example is JP-A-62-222609.
【0003】[0003]
【発明が解決しようとする課題】上記従来技術では、記
録材料に関する検討が中心であり、基板の特性中でも特
に、基板からのノイズの発生に関する考慮がなされてい
なかった。In the above-mentioned prior art, the study on the recording material is the main focus, and no consideration has been given to the generation of noise from the substrate, among the characteristics of the substrate.
【0004】本発明の目的は、基板表面の平坦性を改良
するプロセスとすることにより、ディスクの性能、特
に、記録−再生特性の向上を図り、高性能な光ディスク
を提供することにある。An object of the present invention is to provide a high-performance optical disk by improving the disk performance, particularly the recording / reproducing characteristics, by using a process for improving the flatness of the substrate surface.
【0005】[0005]
【課題を解決するための手段】上記目的は、表面の凹凸
の案内溝を有する光ディスク用の基板の作製において、
光記録媒体の形成の前に紫外線硬化型樹脂層を表面の凹
凸の案内溝の深さや形状が変化しないように形成するこ
とにより達成される。ここで、用いる光ディスク用の基
板は、プラスチックでもガラス円板上に紫外線硬化型樹
脂でホトポリマ法により案内溝を形成した基板を用いて
もよく、基板の材質に依存するものではない。The above object is to prepare a substrate for an optical disc having a guide groove having an uneven surface,
This can be achieved by forming an ultraviolet curable resin layer before forming the optical recording medium so that the depth and shape of the guide groove having irregularities on the surface do not change. The substrate for the optical disk used here may be plastic or a substrate in which a guide groove is formed on a glass disk by a photopolymer method with an ultraviolet curable resin, and does not depend on the material of the substrate.
【0006】本発明においては、表面の凹凸の案内溝の
深さや形状が変化しないように形成する樹脂の物性の選
択が重要である。この層の形成は、スピン塗布法を用い
てモノマを塗布する。その場合、重要なのは塗布するモ
ノマの粘度及び分子量である。スピンナでモノマの薄層
を形成するのに、その膜厚は表面に存在する微小な凹凸
が埋まれば良い。In the present invention, it is important to select the physical properties of the resin to be formed so that the depth and shape of the uneven guide groove on the surface do not change. To form this layer, the monomer is applied using a spin coating method. In that case, what is important is the viscosity and molecular weight of the applied monomers. In order to form a thin layer of monomer with a spinner, the film thickness may be such that minute irregularities existing on the surface are filled.
【0007】このように、表面に凹凸の案内溝を有する
光ディスク用の基板の作製において、その表面に存在す
る微小な凹凸を紫外線硬化型樹脂層を表面の凹凸の案内
溝の深さや形状が変化しないように形成することにより
基板表面の平坦化を実現した。As described above, in the production of a substrate for an optical disc having an uneven guide groove on the surface, the minute unevenness present on the surface is changed to the ultraviolet curable resin layer by changing the depth and shape of the uneven guide groove on the surface. The flattening of the substrate surface was realized by forming it so that it was not formed.
【0008】塗布する樹脂のモノマの粘度や分子量は、
形成するべき膜の膜厚と大きく関連している。塗布した
後に、紫外線を照射して硬化させるが、その場合、膜厚
の変化や内部応力の変化をきたすので光磁気記録媒体の
寿命に影響を与えるので注意が必要である。また、基板
表面に形成する樹脂層は基板材もしくは基板表面の凹凸
を形成している樹脂層の屈折率と同じ屈折率を有する紫
外線硬化型樹脂を用いた。これは、磁気光学効果の光学
的な干渉による増大を図るためで、基板と形成した樹脂
層の間での光の反射や吸収を防ぐためである。The viscosity and molecular weight of the monomer of the applied resin are
It is closely related to the film thickness of the film to be formed. After coating, the composition is irradiated with ultraviolet rays to be cured, but in that case, the life of the magneto-optical recording medium is affected because it causes a change in film thickness and a change in internal stress. As the resin layer formed on the substrate surface, an ultraviolet curable resin having the same refractive index as that of the substrate material or the resin layer forming the irregularities on the substrate surface was used. This is to increase the magneto-optical effect due to optical interference, and to prevent reflection and absorption of light between the substrate and the formed resin layer.
【0009】樹脂を硬化させる場合、基板表面に樹脂層
(モノマ層)を形成した後に、真空中或いは酸素が存在し
ない環境中で紫外線を基板表面に照射し、樹脂を重合さ
せた。これは、これら酸素を含まない環境中では樹脂の
重合度が高いためである。この他、硬度の低い基板材で
作製した基板表面に硬度の高い樹脂層を形成すると基板
の機械的強度が増大する。また、耐熱性の低い基板上に
高耐熱性を有する樹脂層を形成すると、スパッタリング
法や真空蒸着法を用いた記録媒体の作製時に生じる基板
表面の熱損傷を抑制できる。また、基板と記録媒体との
密着性が悪い場合には、この紫外線硬化型樹脂層により
基板と記録媒体との密着性を向上させることができる。When the resin is cured, a resin layer is formed on the surface of the substrate.
After forming the (monomer layer), the resin was polymerized by irradiating the substrate surface with ultraviolet rays in a vacuum or in an environment where oxygen does not exist. This is because the degree of polymerization of the resin is high in the environment containing no oxygen. In addition, when a resin layer having a high hardness is formed on the surface of the substrate made of a substrate material having a low hardness, the mechanical strength of the substrate increases. Further, when a resin layer having high heat resistance is formed over a substrate having low heat resistance, heat damage on the surface of the substrate that occurs when a recording medium is manufactured by a sputtering method or a vacuum evaporation method can be suppressed. Further, when the adhesion between the substrate and the recording medium is poor, the adhesion between the substrate and the recording medium can be improved by this UV-curable resin layer.
【0010】[0010]
【作用】本発明により得られるディスク基板では、表面
に紫外線硬化型樹脂層を形成することにより、基板上に
存在する案内溝より十分に微小な凹凸が樹脂によって埋
められ、従来においてはこれら基板上に存在する微小な
凹凸が原因で発生していたディスクノイズを大きく低減
できる。この他、樹脂の材質を選択することにより、さ
らに、基板表面の熱損傷の抑制,基板の機械的強度の増
大,基板と記録媒体との密着性の向上を図れる。In the disk substrate obtained by the present invention, by forming an ultraviolet curable resin layer on the surface, the minute irregularities sufficiently filled with the guide grooves existing on the substrate are filled with the resin. It is possible to greatly reduce the disk noise generated due to the minute unevenness existing in the disk. In addition, by selecting the resin material, it is possible to further suppress the heat damage on the substrate surface, increase the mechanical strength of the substrate, and improve the adhesion between the substrate and the recording medium.
【0011】[0011]
〈実施例1〉本実施例はプラスチック基板を用いた場合
である。基板材にはポリカーボネイトを用いた。この基
板は射出成型法により作製したものである。この基板の
表面に紫外線硬化型樹脂をスピン塗布した。その後、こ
の基板を窒素ガス雰囲気中におき水銀ランプを用いて紫
外線を照射して樹脂を硬化させた。このように処理した
基板を用いてディスクを作製した。その構造は、SiN
x/TbFeCoNb/SiNx/AlTaなる4層構
造である。成膜はスパッタ法により行い、先の4層を連
続積層した。<Example 1> In this example, a plastic substrate is used. Polycarbonate was used as the substrate material. This substrate is manufactured by an injection molding method. An ultraviolet curable resin was spin-coated on the surface of this substrate. Then, this substrate was placed in a nitrogen gas atmosphere and ultraviolet rays were irradiated using a mercury lamp to cure the resin. A disk was manufactured using the substrate thus treated. Its structure is SiN
It has a four-layer structure of x / TbFeCoNb / SiNx / AlTa. The film formation was performed by a sputtering method, and the above four layers were continuously laminated.
【0012】そして、このようにして作製したディスク
の未記録時のノイズを測定した。周波数:f=2.5M
Hzにおける値は、本発明を用いた場合が−62.0d
Bmであったのに対し、処理を施していない場合は−5
9.5dBm であった。このように本発明の平坦化処理
を施すことによりノイズレベルを約2.5dB(f=2.5
MHz)低減できた。Then, the noise of the disk thus manufactured when not recorded was measured. Frequency: f = 2.5M
The value in Hz is -62.0d when the present invention is used.
Bm was -5, but when not treated, -5
It was 9.5 dBm. By thus performing the flattening processing of the present invention, the noise level is reduced to about 2.5 dB (f = 2.5
MHz) could be reduced.
【0013】図1に記録周波数2.5MHz で記録した
ときのスペクトル分布を示す。この図に示すように、本
発明の効果は5MHz以下の低周波数領域で効果があ
り、未処理の場合に生じるノイズは基板表面の凹凸によ
り生じた偏光面の揺らぎによるノイズであると考えられ
る。FIG. 1 shows a spectral distribution when recording is performed at a recording frequency of 2.5 MHz. As shown in this figure, the effect of the present invention is effective in the low frequency region of 5 MHz or less, and it is considered that the noise generated when untreated is the noise due to the fluctuation of the polarization plane caused by the unevenness of the substrate surface.
【0014】この他、本発明の効果としてポリカーボネ
イト基板と記録媒体との接着性の改善が図れた。ポリカ
ーボネイト基板と記録媒体、特に窒化シリコンとの接着
力が弱いので、時間の経過と共に基板から記録媒体が剥
離するという問題があった。一方、紫外線硬化型樹脂は
プラスチック同士或いは記録媒体との接着力が強いため
に、バインダとしての作用があるためである。また、ア
クリル基板のように軟化温度が低い基板材料に対して
は、スパッタ時の基板の表面温度の上昇による基板自身
や溝或いはピットの変形を抑制できる。また、表面の硬
度が低い材料を用いた場合には、ハードコートしたのと
同様の効果により傷などがつきにくかった。In addition to the above, as an effect of the present invention, the adhesion between the polycarbonate substrate and the recording medium was improved. Since the adhesion between the polycarbonate substrate and the recording medium, particularly silicon nitride, is weak, there is a problem that the recording medium peels off from the substrate over time. On the other hand, the ultraviolet curable resin has a strong adhesive force between plastics or with a recording medium, and therefore has a function as a binder. Further, for a substrate material having a low softening temperature such as an acrylic substrate, it is possible to suppress the deformation of the substrate itself, the groove, or the pit due to the increase in the surface temperature of the substrate during sputtering. Further, when a material having a low surface hardness was used, it was difficult to get scratches due to the same effect as hard coating.
【0015】〈実施例2〉本実施例は、ホトポリマ法に
よりガラス円板の表面に凹凸の案内溝を形成したガラス
/2p基板を用いた場合である。この基板の表面に紫外
線硬化型樹脂をスピン塗布した。その後、この基板を窒
素ガス雰囲気中におき水銀ランプを用いて紫外線を照射
して樹脂を硬化させた。ここで、樹脂を硬化させる雰囲
気として窒素中以外に、アルゴン等の不活性ガス雰囲気
中であれば同様の効果がある。このような不活性ガス中
で硬化させるのは、膜表面だけではなく膜内部まで完全
に硬化させるためである。このように処理した基板を用
いてディスクを作製した。その構造は、SiNx/Tb
FeCoNb/SiNx/AlTaなる4層構造であ
る。成膜はスパッタ法により行い、先の4層を連続積層
した。Example 2 This example is a case of using a glass / 2p substrate in which uneven guide grooves are formed on the surface of a glass disk by a photopolymer method. An ultraviolet curable resin was spin-coated on the surface of this substrate. Then, this substrate was placed in a nitrogen gas atmosphere and ultraviolet rays were irradiated using a mercury lamp to cure the resin. Here, the same effect can be obtained if the atmosphere for curing the resin is not only nitrogen but also an atmosphere of an inert gas such as argon. The reason for curing in such an inert gas is to completely cure not only the surface of the film but also the inside of the film. A disk was manufactured using the substrate thus treated. Its structure is SiNx / Tb
It has a four-layer structure of FeCoNb / SiNx / AlTa. The film formation was performed by a sputtering method, and the above four layers were continuously laminated.
【0016】そして、このようにして作製したディスク
の未記録時のノイズを測定した。その結果、周波数:f
=2.5MHzにおける値は、本発明を用いた場合が−6
5.0dBmであったのに対し、処理を施していない場合
は−61.0dBm であった。このように本発明の平坦
化処理を施すことによりノイズレベルを約4dB(f=
2.5MHz)低減できた。Then, the noise of the thus-produced disc when not recorded was measured. As a result, frequency: f
The value at = 2.5 MHz is -6 when the present invention is used.
While it was 5.0 dBm, it was -61.0 dBm when it was not treated. By thus performing the flattening process of the present invention, the noise level is reduced to about 4 dB (f =
2.5MHz) was able to be reduced.
【0017】図2に記録周波数2.5MHz で記録した
ときのスペクトル分布を示す。この図に示すように、本
発明は5MHz以下の低周波数領域で効果があり、未処
理の場合に生じるノイズは基板表面の凹凸により生じた
偏光面の揺らぎによるノイズであると考えられる。FIG. 2 shows a spectral distribution when recording is performed at a recording frequency of 2.5 MHz. As shown in this figure, the present invention is effective in the low frequency region of 5 MHz or less, and it is considered that the noise generated when untreated is the noise due to the fluctuation of the polarization plane caused by the unevenness of the substrate surface.
【0018】[0018]
【発明の効果】本発明により、ディスク基板表面に紫外
線硬化型樹脂層を形成することにより、基板上に存在す
る微小な凹凸を樹脂により埋めることができて除去でき
る。これにより、光ディスクを形成したときに基板上に
存在する微小な凹凸が原因で発生するディスクのノイズ
を大きく低減できる。この他、樹脂の材質を選択するこ
とにより、さらに、基板表面の熱損傷の抑制,基板の機
械的強度の増大,基板と記録媒体との密着性の向上が図
れる。According to the present invention, by forming an ultraviolet-curable resin layer on the surface of a disk substrate, minute irregularities existing on the substrate can be filled with resin and can be removed. As a result, it is possible to greatly reduce the noise of the disc, which is caused by the minute irregularities existing on the substrate when the optical disc is formed. In addition, by selecting the resin material, it is possible to further suppress the heat damage on the substrate surface, increase the mechanical strength of the substrate, and improve the adhesion between the substrate and the recording medium.
【図1】スペクトラムアナライザで測定したキャリアレ
ベル及びノイズレベルの周波数依存性を示す特性図。FIG. 1 is a characteristic diagram showing frequency dependence of carrier level and noise level measured by a spectrum analyzer.
【図2】スペクトラムアナライザで測定したキャリアレ
ベル及びノイズレベルの周波数依存性を示す特性図。FIG. 2 is a characteristic diagram showing frequency dependence of carrier level and noise level measured by a spectrum analyzer.
f…周波数(MHz)。 f ... Frequency (MHz).
Claims (5)
の基板の作製において、光記録媒体の形成の前に紫外線
硬化型樹脂層を前記表面の凹凸の案内溝の深さや形状が
変化しないように形成したことを特徴とする光ディスク
用基板の製造方法。1. In the production of a substrate for an optical disc having an uneven guide groove on its surface, an ultraviolet curable resin layer is formed before the formation of an optical recording medium so that the depth and shape of the uneven guide groove on the surface do not change. A method for manufacturing an optical disk substrate, which is characterized in that
の基板の作製において、前記表面に紫外線硬化型樹脂層
を前記表面の凹凸の案内溝の深さや形状が変化しないよ
うに形成することにより、前記基板表面に存在する前記
案内溝より微小な凹凸を平坦化することを特徴とする光
ディスク用基板の製造方法。2. A method of manufacturing a substrate for an optical disc having an uneven guide groove on the surface, by forming an ultraviolet-curable resin layer on the surface so that the depth and shape of the uneven guide groove on the surface do not change. A method for manufacturing a substrate for an optical disc, characterized in that fine irregularities present on the surface of the substrate are flattened from the guide grooves.
の基板の作製において、光記録媒体の形成の前に紫外線
硬化型樹脂層を前記表面の凹凸の案内溝の深さや形状が
変化しないように形成するのに、用いる前記紫外線硬化
型樹脂の分子量や粘度を制御したことを特徴とする光デ
ィスク用基板の製造方法。3. In the production of a substrate for an optical disk having an uneven guide groove on the surface, an ultraviolet curable resin layer is formed before the formation of an optical recording medium so that the depth and shape of the uneven guide groove on the surface do not change. A method for manufacturing an optical disk substrate, characterized in that the molecular weight and the viscosity of the ultraviolet curable resin used for forming the substrate are controlled.
録媒体の形成の前に前記紫外線硬化型樹脂層を表面の凹
凸の案内溝の深さや形状が変化しないように形成するの
に、前記基板材もしくは前記基板の表面の凹凸を形成し
ている樹脂層の屈折率と同じ屈折率を有する前記紫外線
硬化型樹脂を用いた光ディスク用基板の製造方法。4. The method according to claim 1, 2 or 3, wherein the ultraviolet curable resin layer is formed before the formation of the optical recording medium so that the depth or shape of the guide groove of the unevenness on the surface does not change. A method for manufacturing an optical disk substrate using the ultraviolet curable resin having the same refractive index as that of the substrate material or the resin layer forming irregularities on the surface of the substrate.
基板の表面に樹脂層を形成した後に真空中或いは酸素が
存在しない環境中で紫外線を前記基板の表面に照射し、
樹脂を重合させる光ディスク用基板の製造方法。5. The surface of the substrate according to claim 1, 2, 3 or 4, wherein after the resin layer is formed on the surface of the substrate, the surface of the substrate is irradiated with ultraviolet rays in a vacuum or in an environment where oxygen does not exist,
A method for manufacturing a substrate for an optical disc, which comprises polymerizing a resin.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20642592A JPH0660443A (en) | 1992-08-03 | 1992-08-03 | Production of optical disk substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20642592A JPH0660443A (en) | 1992-08-03 | 1992-08-03 | Production of optical disk substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0660443A true JPH0660443A (en) | 1994-03-04 |
Family
ID=16523168
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20642592A Pending JPH0660443A (en) | 1992-08-03 | 1992-08-03 | Production of optical disk substrate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0660443A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5899094A (en) * | 1996-11-06 | 1999-05-04 | Shima Seiki Manufacturing, Ltd. | Flat knitting machine comprising a set-up device |
-
1992
- 1992-08-03 JP JP20642592A patent/JPH0660443A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5899094A (en) * | 1996-11-06 | 1999-05-04 | Shima Seiki Manufacturing, Ltd. | Flat knitting machine comprising a set-up device |
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