JPH065934A - Superconductor device - Google Patents

Superconductor device

Info

Publication number
JPH065934A
JPH065934A JP4156464A JP15646492A JPH065934A JP H065934 A JPH065934 A JP H065934A JP 4156464 A JP4156464 A JP 4156464A JP 15646492 A JP15646492 A JP 15646492A JP H065934 A JPH065934 A JP H065934A
Authority
JP
Japan
Prior art keywords
superconductor
ferroelectric
ferroelectric substance
transistor
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4156464A
Other languages
Japanese (ja)
Inventor
Seiichi Iwamatsu
誠一 岩松
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP4156464A priority Critical patent/JPH065934A/en
Publication of JPH065934A publication Critical patent/JPH065934A/en
Pending legal-status Critical Current

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  • Superconductor Devices And Manufacturing Methods Thereof (AREA)

Abstract

PURPOSE:To provide transistors, memories, and pressure sensors by the use of superconductors. CONSTITUTION:A ferroelectric substance is formed on the surface of a superconductor, and positive or negative pressure is applied to the surface of the superconductor. A ferroelectric substance 102 composed of zirconium.lead titanate, barium titanate, etc., is formed on the surface of a superconductor 101, and electrodes 103, 104, and 105 are made out of metal such as silver, etc., on the surface of the ferroelectric substance 102 and on the both-side surfaces of the superconductor 101 which interposes the ferroelectric substance 102. Consequently, it becomes possible to obtain superconductor transistors and memories capable of operating at high speed, and superconductor pressure sensors, etc., capable of operating with high sensitivity.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は新しい超電導体装置に関
する。
FIELD OF THE INVENTION The present invention relates to a new superconductor device.

【0002】[0002]

【従来の技術】従来、超電導体装置として、ジョセフソ
ン効果装置、スクイッド磁場センサーおよび標準電圧装
置などがあった。
2. Description of the Related Art Conventionally, there have been Josephson effect devices, squid magnetic field sensors, standard voltage devices, etc. as superconductor devices.

【0003】[0003]

【発明が解決しようとする課題】しかし、上記従来技術
の中には超電導体を用いたトランジスター、メモリーお
よび圧力センサーはまだ無かった。
However, there is still no transistor, memory or pressure sensor using a superconductor in the above prior art.

【0004】本発明はかかる従来技術の課題を解決し、
超電導体を用いたトランジスター、メモリーおよび圧力
センサーを提供することを目的とする。
The present invention solves the above problems of the prior art,
It is an object to provide a transistor, a memory and a pressure sensor using a superconductor.

【0005】[0005]

【課題を解決するための手段】上記課題を解決し、上記
目的を達成するために、本発明は超電導体装置に関し、
(1) 超電導体表面に強誘電体を形成する手段を取る
こと、および、(2) 超電導体表面に正または負の圧
力を印加する手段を取ること、などの手段を取ることを
基本とする。
In order to solve the above problems and to achieve the above objects, the present invention relates to a superconductor device,
Basically, (1) a means for forming a ferroelectric substance on the surface of the superconductor, and (2) a means for applying a positive or negative pressure to the surface of the superconductor are taken. .

【0006】[0006]

【作用】超電導現象はフォノン(音子)と電子の相互作
用によりスピン(回転)の異なる二つ(ツイン)の電子
の発生によるものである。本発明では強誘電体に電界を
印加するか、あるいは機械的に圧力を印加するかして、
超電導体のフォノンを制御し、よって電子との相互作用
を制御し、結果的にツイン電子の発生を制御することに
より、トランジスター作用やメモリー作用あるいは圧力
センサーの作用をする超電導装置を提供するものであ
る。
[Function] The superconducting phenomenon is caused by the generation of two (twin) electrons having different spins (rotations) due to the interaction between phonons (phonons) and electrons. In the present invention, by applying an electric field to the ferroelectric material or mechanically applying pressure,
It provides a superconducting device that acts as a transistor, a memory, or a pressure sensor by controlling the phonons of the superconductor and thus controlling the interaction with electrons and consequently the generation of twin electrons. is there.

【0007】[0007]

【実施例】以下、実施例により本発明を詳述する。EXAMPLES The present invention will be described in detail below with reference to examples.

【0008】図1は、本発明の一実施例をしめす超電導
体トランジスタの断面図である。すなわち、(a)はニ
オビュウム、鉛(4K程度で超電導体となる金属)およ
びイットリュウム・バリュウム・銅酸化物(77Kの液
体窒素温度以上で超電導体となるセラミック)などから
成る超電導体101の表面には、ジルコニュウム・チタ
ン酸鉛やチタン酸バリュウウムなどから成る強誘電体1
02が形成され、該強誘電体102の表面および該強誘
電体102を挟んだ前記超電導体101の両側表面には
銀などの金属などから成る電極103、104および1
05が、それぞれゲートG、ソースSおよびドレインD
として電界効果トランジスターと類似したトランジスタ
が形成されて成る本発明に懸かる原理的な超電導体トラ
ンジスタをも示す断面図である。(b)はチタン酸スト
ロンチュウム、サファイアあるいはシリコンなどから成
る基体110の表面に超電導体111を形成し、該超電
導体111の表面に強誘電体112を形成し、該強誘電
体112の表面および該強誘電体112を挟んだ前記超
電導体111の両側表面には金属などから成る電極11
3、114および115が、それぞれゲートG、ソース
SおよびドレインDとしたトランジスタが形成されて成
る。(C)は基体120の表面に超電導体121を形成
し、該超電導体121の表面にシリコン酸化膜などから
成る絶縁膜126を形成し、該絶縁膜126の表面に強
誘電体122を形成し、該強誘電体122の表面および
該強誘電体122を挟んだ前記超電導体121の両側表
面には金属などから成る電極123、124および12
5が、それぞれゲートG、ソースSおよびドレインDと
したトランジスタが形成されて成る。ここで絶縁膜12
6はゲートGから強誘電体122を通して超電導体12
1へ流れる空間電荷制限電流すなわち電流漏れを防ぐた
めに設けたものである。
FIG. 1 is a sectional view of a superconductor transistor showing an embodiment of the present invention. That is, (a) is the surface of the superconductor 101 made of niobium, lead (metal which becomes a superconductor at about 4K) and yttrium-valium-copper oxide (ceramic which becomes a superconductor at a liquid nitrogen temperature of 77K or higher). Ferroelectric material 1 made of zirconium, lead titanate, barium titanate, etc.
No. 02 is formed, and electrodes 103, 104 and 1 made of a metal such as silver are formed on the surface of the ferroelectric substance 102 and both side surfaces of the superconductor 101 sandwiching the ferroelectric substance 102.
05 denotes a gate G, a source S and a drain D, respectively.
FIG. 3 is a sectional view showing a principle superconducting transistor according to the present invention in which a transistor similar to a field effect transistor is formed as the above. (B) shows that a superconductor 111 is formed on the surface of a substrate 110 made of strontium titanate, sapphire, silicon or the like, a ferroelectric body 112 is formed on the surface of the superconductor 111, and a surface of the ferroelectric body 112 is formed. And electrodes 11 made of metal or the like on both side surfaces of the superconductor 111 sandwiching the ferroelectric body 112.
Transistors 3, 114 and 115 having a gate G, a source S and a drain D are formed. In (C), a superconductor 121 is formed on the surface of a substrate 120, an insulating film 126 made of a silicon oxide film or the like is formed on the surface of the superconductor 121, and a ferroelectric 122 is formed on the surface of the insulating film 126. , Electrodes 123, 124 and 12 made of metal or the like on the surface of the ferroelectric body 122 and on both side surfaces of the superconductor 121 sandwiching the ferroelectric body 122.
5 is formed by forming a transistor having a gate G, a source S and a drain D, respectively. Here, the insulating film 12
6 is a superconductor 12 from the gate G through the ferroelectric 122.
It is provided in order to prevent a space charge limiting current flowing to the device 1, that is, a current leakage.

【0009】本実施例による超電導体トランジスターの
動作は、ゲートGの電極103、113および123か
らの印加電圧により強誘電体102、112および12
2を歪ませて、その歪を超電導体101、および111
には直接に、121には絶縁膜126を介して間接的に
伝幡させて、ソースSとドレインD間に流れる電流を制
御するものであり、強誘電体の分極作用を応用すれば、
メモリー作用のあるトランジスターとして動作させるこ
ともできる。いずれにしろ、この超電導体トランジスタ
ーの動作速度は強誘電体の歪速度に律速されるが、ナノ
秒オーダーの高速動作が可能である。
The operation of the superconducting transistor according to this embodiment is performed by applying voltage from the electrodes 103, 113 and 123 of the gate G to the ferroelectrics 102, 112 and 12 respectively.
2 is distorted and the strain is applied to the superconductors 101 and 111.
To directly control the current flowing between the source S and the drain D by directly transmitting the current through the insulating film 126 to 121, and by applying the polarization action of the ferroelectric substance,
It can also be operated as a memory transistor. In any case, the operation speed of this superconductor transistor is limited by the strain rate of the ferroelectric substance, but high-speed operation of the order of nanoseconds is possible.

【0010】図2は、本発明の他の実施例を示す超電導
体による圧力センサーの断面図である。すなわち、
(a)超電導体201には電極202および203が、
それぞれソースSおよびドレインDとして形成されて成
る本発明に懸かる原理的な超電導体トランジスタの断面
図である。いま、圧力Pが超電導体201に加えられる
と、ソースSとドレインD間に流れる飽和電流値が変わ
る事と成り、圧力センサーとして動作させる事ができる
ことを示す原理図でもある。(b)は基体210の表面
に超電導体211を形成し、該超電導体211の表面に
強誘電体214を形成し、該強誘電体214の表面には
圧力Pが印加されると共に、該強誘電体214を挟んだ
前記超電導体211の両側表面には金属などから成る電
極212、および213が、それぞれゲートGおよびソ
ースSとして形成されて成る。(3)は基体220の表
面に超電導体221を形成し、該超電導体221の表面
にシリコン酸化膜などから成る絶縁膜224を形成し、
該絶縁膜224の表面から圧力Pを印加し、該強誘電体
221を挟んだ前記超電導体221の両側表面には金属
などから成る電極222および223が、それぞれソー
スSおよびドレインDとした圧力センサーが形成されて
成る。ここで絶縁膜224は圧力印加が金属棒の場合に
該金属棒から強誘電体221を通して超電導体221へ
流れる空間電荷制限電流すなわち電流漏れを防ぐために
設けたものである。
FIG. 2 is a sectional view of a pressure sensor using a superconductor showing another embodiment of the present invention. That is,
(A) The superconductor 201 has electrodes 202 and 203,
1 is a cross-sectional view of a principle superconducting transistor according to the present invention formed as a source S and a drain D, respectively. Now, when the pressure P is applied to the superconductor 201, the saturation current value flowing between the source S and the drain D changes, which is also a principle diagram showing that it can be operated as a pressure sensor. In (b), the superconductor 211 is formed on the surface of the base 210, the ferroelectric 214 is formed on the surface of the superconductor 211, and the pressure P is applied to the surface of the ferroelectric 214 and Electrodes 212 and 213 made of metal or the like are formed as a gate G and a source S on both side surfaces of the superconductor 211 sandwiching the dielectric 214, respectively. In (3), the superconductor 221 is formed on the surface of the base 220, and the insulating film 224 made of a silicon oxide film or the like is formed on the surface of the superconductor 221.
Pressure P is applied from the surface of the insulating film 224, and electrodes 222 and 223 made of metal or the like are provided as sources S and drains D on both surfaces of the superconductor 221 with the ferroelectric substance 221 sandwiched therebetween. Are formed. Here, the insulating film 224 is provided in order to prevent a space charge limiting current that flows from the metal rod to the superconductor 221 through the ferroelectric substance 221 when the pressure is applied to the metal rod, that is, current leakage.

【0011】本実施例による超電導体圧力センサーの動
作は、圧力Pの印加により直接または強誘電体214ま
たは絶縁膜224を歪ませて超電導体201、211お
よび221を歪ませて、ソースSとドレインD間に流れ
る電流を変化させるものである。この超電導体センサー
の動作速度は強誘電体や超電導体の歪速度に律速される
が、ナノ秒オーダーの高速動作が可能である。
The operation of the superconductor pressure sensor according to this embodiment is performed by applying a pressure P directly or by distorting the ferroelectric 214 or the insulating film 224 to distort the superconductors 201, 211 and 221 to cause the source S and the drain. The current flowing between D is changed. Although the operating speed of this superconductor sensor is limited by the strain rate of the ferroelectric or superconductor, it can operate at high speed on the order of nanoseconds.

【0012】[0012]

【発明の効果】本発明により、高速で動作する超電導体
トランジスターやメモリーおよび高感度で動作する超電
導体圧力センサーなどを提供することができる効果があ
る。
According to the present invention, it is possible to provide a superconductor transistor and a memory that operate at high speed, a superconductor pressure sensor that operates with high sensitivity, and the like.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明の一実施例をしめす超電導体トランジ
スタの断面図である。
FIG. 1 is a sectional view of a superconductor transistor showing an embodiment of the present invention.

【図2】 本発明の他の実施例を示す超電導体による圧
力センサーの断面図である。
FIG. 2 is a sectional view of a pressure sensor using a superconductor showing another embodiment of the present invention.

【符号の説明】[Explanation of symbols]

101、111、121、201、202、203・・
・超電導体 102、112、122、214・・・強誘電体 103、104、105、113、114、115、1
23、124、125、202、203、212、21
3、222、223・・・電極 110、120、210、220・・・基体 126、224・・・絶縁膜 S・・・ソース G・・・ゲート D・・・ドレイン P・・・圧力
101, 111, 121, 201, 202, 203 ...
Superconductor 102, 112, 122, 214 ... Ferroelectric substance 103, 104, 105, 113, 114, 115, 1
23, 124, 125, 202, 203, 212, 21
3, 222, 223 ... Electrodes 110, 120, 210, 220 ... Base 126, 224 ... Insulating film S ... Source G ... Gate D ... Drain P ... Pressure

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 超電導体表面には強誘電体が形成されて
成ることを特徴とする超誘電体装置。
1. A super-dielectric device characterized in that a ferroelectric is formed on the surface of the super-conductor.
【請求項2】 超電導体表面には正または負の圧力が印
加されて成ることを特徴とする超電導体装置。
2. A superconductor device, wherein a positive or negative pressure is applied to the surface of the superconductor.
JP4156464A 1992-06-16 1992-06-16 Superconductor device Pending JPH065934A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4156464A JPH065934A (en) 1992-06-16 1992-06-16 Superconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4156464A JPH065934A (en) 1992-06-16 1992-06-16 Superconductor device

Publications (1)

Publication Number Publication Date
JPH065934A true JPH065934A (en) 1994-01-14

Family

ID=15628326

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4156464A Pending JPH065934A (en) 1992-06-16 1992-06-16 Superconductor device

Country Status (1)

Country Link
JP (1) JPH065934A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010013294A1 (en) * 2008-07-31 2010-02-04 国立大学法人広島大学 Pressure detecting device, josephson element, and superconducting quantum interferometer using superconductor thin film which changes from superconductor to insulator with pressure

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010013294A1 (en) * 2008-07-31 2010-02-04 国立大学法人広島大学 Pressure detecting device, josephson element, and superconducting quantum interferometer using superconductor thin film which changes from superconductor to insulator with pressure
US8338821B2 (en) 2008-07-31 2012-12-25 Hiroshima University Pressure detection apparatus, Josephson device, and superconducting quantum interference device that include superconductor thin film that undergoes transition from superconductor to insulator by pressure

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