JPH0655347A - Electrochemical composite machine - Google Patents
Electrochemical composite machineInfo
- Publication number
- JPH0655347A JPH0655347A JP21256592A JP21256592A JPH0655347A JP H0655347 A JPH0655347 A JP H0655347A JP 21256592 A JP21256592 A JP 21256592A JP 21256592 A JP21256592 A JP 21256592A JP H0655347 A JPH0655347 A JP H0655347A
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- grindstone
- bearing
- rigidity
- grinding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】この発明は、工作物を加工歪の少
ない状態で表面粗度良くかつ平面度良く加工できる電解
複合加工機に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrolytic multi-tasking machine capable of processing a workpiece with a low surface distortion and a high surface roughness.
【０００２】[0002]
【従来の技術】従来より、工作物を加工する場合には電
解研削や電解複合研磨又は電解加工等が実施されてお
り、電解研削は、加工能率の向上を目的とするため、不
動態化被膜が生成されない電流密度の範囲、即ち、図３
に示すような臨界電流密度ρ以上の範囲で砥石と工作物
間に電解作用を生じさせ、短時間に工作物の表面を多量
に溶解させながら砥石で加工するものであるが、このよ
うな加工だけでは工作物の表面粗度が悪いので、表面粗
度良く工作物を加工したい場合には最終工程で工作物の
表面に機械加工を施すようにしている。2. Description of the Related Art Conventionally, when a workpiece is machined, electrolytic grinding, electrolytic composite polishing, electrolytic machining or the like has been carried out. The purpose of electrolytic grinding is to improve machining efficiency. The range of the current density at which is not generated, that is, FIG.
As shown in (4), the electrolytic action is generated between the grindstone and the workpiece in the range of critical current density ρ or more, and the surface of the workpiece is melted in a large amount in a short time and is processed by the grindstone. Since the surface roughness of the workpiece is poor only by itself, the surface of the workpiece is machined in the final step when it is desired to machine the workpiece with good surface roughness.
【０００３】また、電解複合研磨は、電解作用で工作物
の表面に不動態化被膜を生成しつつ、その不動態化被膜
を粘弾性砥石で除去するという一連のサイクルを繰り返
し実行し、工作物の表面を加工するもので、特に、この
電解複合研磨においては、砥石の各砥粒が比較的小さな
押圧力で工作物の表面に均一に接触することが好ましい
ため、そのように好適な接触状態を得ることが可能な砥
石、即ち、粘弾性体で砥粒を保持した砥石が用いられて
いる。Electrolytic composite polishing also repeats a series of cycles in which a passivation film is formed on the surface of a workpiece by an electrolytic action, and the passivation film is removed by a viscoelastic grindstone. In particular, in this electrolytic composite polishing, it is preferable that each abrasive grain of the grindstone uniformly contacts the surface of the workpiece with a relatively small pressing force. Is used, that is, a grindstone holding abrasive grains with a viscoelastic body is used.
【０００４】なお、電解加工は単なる電気分解のみで工
作物の表面を溶解させて除去加工するものである。The electrolytic processing is to remove the surface of the work piece by melting it only by electrolysis.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、従来の
電解研削にあっては、上記の如く工作物を表面粗度良く
加工する場合には最終工程で工作物の表面に機械加工を
施すため、その機械加工により、工作物に加工歪が多く
残るのみならず、工作物の表面粗度も劣化するので、工
作物を加工歪の少ない状態にかつ表面粗度良く加工する
ことができない。However, in the conventional electrolytic grinding, when the workpiece is machined with a high surface roughness as described above, the surface of the workpiece is machined in the final step. Due to the machining, not only a large amount of machining strain remains on the workpiece, but also the surface roughness of the workpiece deteriorates, so that the workpiece cannot be machined in a state with less machining strain and with good surface roughness.
【０００６】また、従来の電解複合研磨については、粘
弾性体で砥粒を保持した砥石を使用するため、このよう
な砥石では、工作物の表面に前加工で生じたうねりが存
在するとき、うねりの頂部を削り取ることなく、うねり
に沿って弾性変形することは避けられず、うねりがその
まま残るか、あるいは増幅されて大きくなるので、工作
物の表面形状を修正する能力がなく、工作物を平面度良
く加工することができない。Further, in the conventional electrolytic composite polishing, since a grindstone holding abrasive grains with a viscoelastic body is used, when such a grindstone has undulations generated on the surface of a workpiece, Elastic deformation along the undulation is unavoidable without scraping the top of the undulation, and the undulation remains or is amplified and becomes large, so there is no ability to modify the surface shape of the workpiece and It cannot be processed with good flatness.
【０００７】一方、従来の電解加工にあっては、単なる
電気分解のみで工作物の表面を溶解させて除去するだけ
であるため、砥石による加工に比べ、工作物の表面形状
を修正する能力がなく、工作物を平面度良く加工するこ
とができない。On the other hand, in the conventional electrolytic machining, the surface of the work is melted and removed only by electrolysis, so that the ability to modify the surface shape of the work is improved as compared with machining by a grindstone. In addition, the workpiece cannot be machined with good flatness.
【０００８】即ち、このような加工を行う場合には、従
来は、工作物をラッピング加工した後、ラッピング加工
済みの工作物をエッチングし、その後、第１次ポリッシ
ュ仕上げによりエッチングで劣化した工作物の形状を修
正し、次に、第２次ポリッシュ仕上げにより工作物の表
面粗度を向上させつつ工作物の加工歪を除去しているた
め、ラッピング加工済の工作物をエッチング専用の機械
に移送やセットする手間等がかるので、能率良く工作物
を加工することができない。That is, in the case of performing such processing, conventionally, after lapping a workpiece, the lapping-processed workpiece is etched and then the workpiece is deteriorated by etching due to the primary polishing finish. The shape of the workpiece is corrected and then the secondary polishing finish is used to improve the surface roughness of the workpiece and remove the machining distortion of the workpiece, so the workpiece that has been lapped is transferred to a dedicated etching machine. Since it takes time to set and set, it is not possible to machine the workpiece efficiently.
【０００９】この発明は上述の事情に鑑みてなされたも
ので、その目的とするところは、工作物を加工歪の少な
い状態で表面粗度良くかつ平面度良く加工でき、しかも
能率良く加工できる電解複合加工機を提供することにあ
る。The present invention has been made in view of the above circumstances. An object of the present invention is to electrolytically process a work piece with a high surface roughness and a high flatness in a state where the work strain is small, and with high efficiency. It is to provide a compound processing machine.
【００１０】[0010]
【課題を解決するための手段】上記目的を達成するため
に、この発明は、工作物と対向するように配置されると
共に導電性を有する固定砥粒の砥石と、上記工作物が一
体に取り付けられかつその工作物を回転させる主軸と、
上記砥石が一体に取り付けられかつその砥石を回転させ
る砥石軸と、上記主軸又は砥石軸を支持すると共に軸受
剛性を変更できる軸受部と、上記砥石と工作物とを相対
的に接近させる切込テーブルと、上記砥石と工作物との
隙間に供給される加工液と、上記砥石が陰極に接続され
かつ上記工作物が陽極に接続された電源と、上記砥石と
工作物との間に生じる電解作用で工作物側に不動態化被
膜を生成しつつその不動態化被膜を除去する精密研削時
には上記軸受部の軸受剛性を低く設定し、かつ工作物側
に不動態化被膜を生成することなく砥石でその工作物を
直接加工する粗研削時には上記軸受部の軸受剛性を高く
設定する剛性変更手段と、この剛性変更手段で軸受部の
軸受剛性を低く設定したとき、工作物に作用する砥石の
圧力が一定となるように制御する定圧制御手段とを備え
ることを特徴とする。In order to achieve the above-mentioned object, the present invention is to integrally mount the work piece and a fixed-abrasive grindstone which is arranged so as to face the work piece and has conductivity. A spindle that is driven and rotates the workpiece,
A grindstone shaft to which the grindstone is integrally attached and rotates the grindstone, a bearing portion that supports the main spindle or the grindstone shaft and can change bearing rigidity, and a notch table that relatively moves the grindstone and the workpiece. A machining liquid supplied to the gap between the grindstone and the workpiece, a power source in which the grindstone is connected to the cathode and the workpiece is connected to the anode, and an electrolytic action generated between the grindstone and the workpiece. At the time of precision grinding in which the passivation film is removed on the work side while removing the passivation film, the bearing rigidity of the above bearing is set low, and the grindstone does not form the passivation film on the work side. The rigidity changing means for setting the bearing rigidity of the above-mentioned bearing part to high during rough grinding for directly machining the work piece with the above, and the pressure of the grindstone acting on the work piece when the bearing rigidity of the bearing part is set low by this rigidity changing means. Is constant Characterized in that it comprises a pressure control means for controlled so.
【００１１】[0011]
【作用】この発明によれば、粗研削時においては、剛性
変更手段が軸受部の軸受剛性を高く設定する。これによ
り、砥石は切込テーブルと一体の状態で移動しながら工
作物を直接加工する。According to the present invention, the rigidity changing means sets the bearing rigidity of the bearing portion to a high value during rough grinding. As a result, the grindstone moves directly in a state of being integrated with the cutting table to directly machine the workpiece.
【００１２】一方、精密研削時においては、剛性変更手
段が軸受部の軸受剛性を低く設定した上で、定圧制御手
段が工作物に作用する砥石の圧力を一定となるように制
御する。これにより、砥石は一定の圧力で工作物に当接
しつつ工作物側に生成される不動態化被膜を除去しなが
ら工作物を加工する。On the other hand, during precision grinding, the rigidity changing means sets the bearing rigidity of the bearing portion low, and then the constant pressure control means controls the pressure of the grindstone acting on the workpiece to be constant. As a result, the grindstone abuts the work piece with a constant pressure and removes the passivation film formed on the work piece side while processing the work piece.
【００１３】[0013]
【実施例】以下、この発明に係る電解複合加工機の実施
例について図１ないし図３を用いて詳細に説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the electrolytic composite processing machine according to the present invention will be described below in detail with reference to FIGS.
【００１４】図１に示す電解複合加工機には砥石軸ユニ
ット１が切込テーブル２上に設置されていると共に、そ
の砥石軸ユニット１には砥石軸３が配設されており、こ
の砥石軸３の先端にはカップ型砥石４が一体に取り付け
られている。In the electrolytic compound processing machine shown in FIG. 1, a grindstone shaft unit 1 is installed on a cutting table 2, and a grindstone shaft 3 is arranged in the grindstone shaft unit 1. A cup-shaped grindstone 4 is integrally attached to the tip of 3.
【００１５】また、上記砥石４は金属系の材料で砥粒を
保持した、いわゆる導電性を有する固定砥粒の砥石であ
り、その砥石４の先端面と対向する位置には工作物Ｗが
配設されており、この工作物Ｗは主軸ユニット５を構成
する主軸６の先端にチャック（図示省略）を介して一体
に取り付けられている。The grindstone 4 is a grindstone of so-called fixed abrasive grains having an abrasive grain held by a metallic material, and a workpiece W is arranged at a position facing the tip end surface of the grindstone 4. The workpiece W is integrally attached to the tip of a spindle 6 that constitutes the spindle unit 5 via a chuck (not shown).
【００１６】一方、上記切込テーブル２は切込用モータ
７の起動により砥石軸ユニット１と共に砥石４を工作物
Ｗの表面側に向かって移動させる、即ち砥石４と工作物
Ｗとを相対的に接近させるように構成されている。On the other hand, the cutting table 2 moves the grindstone 4 together with the grindstone shaft unit 1 toward the surface side of the workpiece W by activating the cutting motor 7, that is, the grindstone 4 and the workpiece W are relatively moved. Is configured to approach.
【００１７】また、上記砥石４と工作物Ｗとの隙間には
加工液が供給されるように構成されていると共に、砥石
４は電解用電源８の陰極８ａに接続されており、工作物
Ｗは電解用電源８の陽極８ｂに接続されている。Further, the working fluid is supplied to the gap between the grindstone 4 and the workpiece W, and the grindstone 4 is connected to the cathode 8a of the electrolysis power source 8 and the workpiece W Is connected to the anode 8b of the electrolysis power source 8.
【００１８】さらに、上記砥石軸３は軸受剛性を変更で
きる軸受部としてラジアル磁気軸受９，９及びスラスト
磁気軸受１０で支持されており、ラジアル磁気軸受９，
９は砥石軸３の外周面に対向して設置された図示しない
ラジアル方向用電磁石及び位置センサ、並びに図示しな
い付属のラジアル磁気軸受用コントローラ等を備えると
共に、そのラジアル磁気軸受用コントローラはラジアル
方向用位置センサからの検出値に基づきラジアル方向用
電磁石を励磁し、このようにして励磁されたラジアル方
向用電磁石はその磁力で砥石軸３を径方向に支持するよ
うに構成されている。Further, the grindstone shaft 3 is supported by the radial magnetic bearings 9 and 9 and the thrust magnetic bearing 10 as a bearing portion whose bearing rigidity can be changed.
Reference numeral 9 includes a radial direction electromagnet (not shown) and a position sensor (not shown) that are installed to face the outer peripheral surface of the grindstone shaft 3, and an attached radial magnetic bearing controller (not shown). The radial magnetic bearing controller 9 is for the radial direction. The radial direction electromagnet is excited based on the detection value from the position sensor, and the radial direction electromagnet thus excited is configured to support the grindstone shaft 3 in the radial direction by its magnetic force.
【００１９】また、上記スラスト磁気軸受１０は砥石軸
３のアキシャルディスク１１に対向して設置された図示
しないアキシャル方向用電磁石及び位置センサ、並びに
付属のスラスト磁気軸受用コントローラ１２等を備える
と共に、コントローラ１２はアキシャル方向用位置セン
サからの検出値に基づきアキシャル方向用電磁石を励磁
し、このようにして励磁されたアキシャル方向用電磁石
はその磁力で砥石軸３を軸方向に支持するように構成さ
れている。The thrust magnetic bearing 10 includes an axial direction electromagnet and a position sensor (not shown) which are installed to face the axial disk 11 of the grindstone shaft 3 and an attached thrust magnetic bearing controller 12 and the like. Numeral 12 excites the axial direction electromagnet based on the detection value from the axial direction position sensor, and the axial direction electromagnet thus excited is configured to support the grindstone shaft 3 in the axial direction by its magnetic force. There is.
【００２０】さらに、上記スラスト磁気軸受１０には剛
性変更手段としてゲイン切換回路１３が設けられている
と共に、このゲイン切換回路１３には寸法測定器１４が
接続されており、寸法測定器１４は工作物Ｗの加工取代
を測定し、かつその測定結果をゲイン切換回路１３や電
解電流値切換回路１５等へ常時出力するように構成され
ている。Further, the thrust magnetic bearing 10 is provided with a gain switching circuit 13 as a rigidity changing means, and a dimension measuring device 14 is connected to the gain switching circuit 13 so that the dimension measuring device 14 can be machined. The machining allowance of the object W is measured, and the measurement result is constantly output to the gain switching circuit 13, the electrolytic current value switching circuit 15, and the like.
【００２１】一方、上記ゲイン切換回路１３は、寸法測
定器１４からの測定結果に基づき精密研削を行うか否か
を判断すると共に、その判断の結果、精密研削を行うと
き、即ち砥石４と工作物Ｗとの間に生じる電解作用で工
作物Ｗ側に不動態化被膜を生成しつつその不動態化被膜
を除去するときは、コントローラ１２内のゲインを調節
してスラスト磁気軸受１０の軸受剛性を例えば１ｋｇ／
μｍ以下に低く設定し、かつ、粗研削時、即ち工作物Ｗ
側に不動態化被膜を生成することなく砥石４で工作物Ｗ
を直接加工するときは、コントローラ１２内のゲインを
調節してスラスト磁気軸受１０の軸受剛性を例えば１０
０ｋｇ／μｍ以上に高く設定する。On the other hand, the gain switching circuit 13 determines whether or not to perform precision grinding based on the measurement result from the dimension measuring device 14, and as a result of the determination, when performing precision grinding, that is, the grindstone 4 and the work piece. When removing the passivation film while forming the passivation film on the side of the work W by the electrolytic action generated between the object W and the work W, the gain in the controller 12 is adjusted to adjust the bearing rigidity of the thrust magnetic bearing 10. For example 1 kg /
Set to a low value of μm or less and during rough grinding, that is, the workpiece W
Workpiece W with grindstone 4 without forming a passivation film on the side
When directly machining the bearing, the gain in the controller 12 is adjusted to increase the bearing rigidity of the thrust magnetic bearing 10 to, for example, 10
Set as high as 0 kg / μm or more.
【００２２】また、上記電解電流値切換回路１５は、ゲ
イン切換回路１３と同様に寸法測定器１４からの測定結
果に基づき精密研削を行うか否かを判断すると共に、そ
の判断の結果、精密研削を行うときは、電流値切換信号
を上記電源８へ出力することにより、不動態化被膜を生
成できる電流密度の範囲、即ち図３に示すような臨界電
流密度ρ以下の範囲（約数十ｍＡ／cm2 〜１Ａ／cm2 ）
で電解作用が生じるように電源８の電流値を切り換え
る。Further, the electrolytic current value switching circuit 15 determines whether or not to perform precision grinding based on the measurement result from the dimension measuring device 14 similarly to the gain switching circuit 13, and as a result of the determination, the precision grinding is performed. When performing the above, by outputting a current value switching signal to the power source 8, the range of the current density at which the passivation film can be generated, that is, the range below the critical current density ρ as shown in FIG. 3 (about several tens mA). / Cm 2 ~ 1A / cm 2 )
The current value of the power source 8 is switched so that the electrolytic action occurs.
【００２３】ところで、精密研削時、即ちスラスト磁気
軸受１０の軸受剛性を低く設定したとき、工作物Ｗに作
用する砥石４の圧力が一定となる制御を行うために、こ
の電解複合加工機には定圧制御部Ａが設けられており、
定圧制御部Ａは位置測定用センサ１６，位置測定回路１
７，第１の偏差演算回路１８，第２の偏差演算回路１
９，切込切換回路２０等から構成され、位置測定用セン
サ１６はアキシャルディスク１１の表面と対向するよう
に設置されていると共に、位置測定回路１７は位置測定
用センサ１６での測定結果から位置測定用センサ１６と
アキシャルディスク１１との実測の隙間量Ｌ1 を求める
ように構成されている。By the way, in precision grinding, that is, when the bearing rigidity of the thrust magnetic bearing 10 is set to be low, in order to perform control such that the pressure of the grindstone 4 acting on the workpiece W becomes constant, this electrolytic compound machine is used. A constant pressure control unit A is provided,
The constant pressure control unit A includes a position measuring sensor 16 and a position measuring circuit 1.
7, first deviation calculation circuit 18, second deviation calculation circuit 1
9, the cut-off switching circuit 20 and the like, the position measuring sensor 16 is installed so as to face the surface of the axial disk 11, and the position measuring circuit 17 determines the position based on the measurement result of the position measuring sensor 16. It is configured to obtain the actually measured gap amount L 1 between the measurement sensor 16 and the axial disk 11.
【００２４】また、上記第１の偏差演算回路１８は基準
隙間量設定回路２１に予め設定された基準の隙間量Ｌ0
と上記実測の隙間量Ｌ1 とを比較してそれらの現在の偏
差σ1 を求めると共に、上記第２の偏差演算回路１９は
基準偏差設定回路２２に設定された基準の偏差σ0 と上
記現在の偏差σ1 とを比較してそれらの差分ａを求める
ように構成されている。The first deviation calculation circuit 18 has a reference gap amount L 0 preset in the reference gap amount setting circuit 21.
Is compared with the actually measured gap amount L 1 to obtain the current deviation σ 1 thereof, and the second deviation calculation circuit 19 causes the reference deviation σ 0 set in the reference deviation setting circuit 22 to correspond to the current deviation σ 1. It is configured to determine the difference between them a by comparing the deviation sigma 1.
【００２５】さらに、上記切込切換回路２０は、上記ゲ
イン切換回路１３や電解電流値切換回路１５と同様に、
寸法測定器１４からの測定結果に基づき精密研削を行う
か否かを判断すると共に、その判断の結果、精密研削を
行うときは、第２の偏差演算回路１９で求めた差分ａを
モータドライバ２３へ出力するように切り換え、かつ粗
研削時は切込速度設定回路２４に予め設定された粗研削
切込速度Ｖ1 をモータドライバ２３へ出力するように切
り換える。Further, the cut-off switching circuit 20 is similar to the gain switching circuit 13 and the electrolytic current value switching circuit 15 in the cut-out switching circuit 20.
Based on the measurement result from the dimension measuring device 14, it is determined whether or not the precision grinding is performed, and as a result of the determination, when performing the precision grinding, the difference a obtained by the second deviation calculation circuit 19 is used as the motor driver 23. Output to the motor driver 23 at the time of rough grinding, and the rough cutting cutting speed V 1 preset in the cutting speed setting circuit 24 is output to the motor driver 23.
【００２６】一方、上記モータドライバ２３は、切込切
換回路２０で差分ａが出力されるように切り換えられた
ときは、その差分ａを補うように、つまり現在の偏差σ
1 が基準の偏差σ0 と等しくなるように、切込テーブル
２を移動させる。即ち、このような移動により、式
（１）に示す如く、スラスト磁気軸受１０の軸受剛性
（バネ定数ｋ）と現在の偏差σ1 （変位量ｘ）との乗算
値（力Ｆ）が常に略一定に設定され、その結果、精密研
削時において工作物Ｗに作用する砥石４の圧力が常時一
定となるように制御される。 Ｆ＝ｋｘ…（１） なお、上記モータドライバ２３は、切込切換回路２０で
粗研削切込速度Ｖ1 が出力されるように切り換えられた
ときは、切込用モータ７を介して切込テーブル２を粗研
削切込速度Ｖ1 で移動させるように構成されている。On the other hand, when the cut-off switching circuit 20 is switched to output the difference a, the motor driver 23 supplements the difference a, that is, the current deviation σ.
The cutting table 2 is moved so that 1 becomes equal to the standard deviation σ 0 . That is, due to such movement, as shown in the equation (1), the product value (force F) of the bearing rigidity (spring constant k) of the thrust magnetic bearing 10 and the current deviation σ 1 (displacement x) is always substantially constant. It is set to a constant value, and as a result, the pressure of the grindstone 4 acting on the workpiece W during precision grinding is controlled to be constant at all times. F = kx (1) The motor driver 23 cuts through the cutting motor 7 when the cutting switching circuit 20 is switched to output the rough grinding cutting speed V 1. The table 2 is configured to be moved at a rough grinding cutting speed V 1 .
【００２７】次に、上記の如く構成された電解複合加工
機の動作について図１を基に説明する。なお、工作物Ｗ
は主軸ユニット５を構成する主軸６の先端にチャック
（図示省略）を介して一体に取り付けられているものと
する。Next, the operation of the electrolytic composite processing machine configured as described above will be described with reference to FIG. In addition, the workpiece W
Is integrally attached to the tip of a spindle 6 that constitutes the spindle unit 5 via a chuck (not shown).
【００２８】この電解複合加工機によれば、砥石軸３及
び主軸６が砥石４又は工作物Ｗを図中矢印の方向にそれ
ぞれ回転させると共に、この状態で砥石４と工作物Ｗと
が互いに接する直前から、切込テーブル２が粗研削切込
速度Ｖ1 で工作物Ｗの表面側に向かって移動し、砥石４
による工作物Ｗの粗研削が開始される、即ち工作物Ｗ側
に不動態化被膜を生成することなく砥石４がその工作物
Ｗを直接加工する。According to this electrolytic compound processing machine, the grindstone shaft 3 and the spindle 6 rotate the grindstone 4 or the workpiece W in the directions of the arrows in the drawing, and the grindstone 4 and the workpiece W contact each other in this state. From immediately before, the cutting table 2 moves toward the surface side of the workpiece W at the rough grinding cutting speed V 1 , and the grindstone 4 moves.
The rough grinding of the workpiece W is started by, that is, the grindstone 4 directly processes the workpiece W without forming a passivation film on the workpiece W side.
【００２９】また、このような粗研削時においては、ゲ
イン切換回路１３がコントローラ１２内のゲインを調節
してスラスト磁気軸受１０の軸受剛性を高く設定する。
これにより、砥石４は、工作物Ｗからの反力で砥石軸３
の軸心方向に押し戻されることなく、切込テーブル２と
一体の状態で移動しながら工作物Ｗを加工する、いわゆ
る機械の運動精度どうりの運動転写加工を行う。この
際、工作物Ｗの表面に前加工で生じたうねりが存在して
も、砥石４はうねりに沿って大きく変形することはな
く、そのうねりの頂部を削り取り、工作物Ｗの表面を可
能な限り平面に修正する。During such rough grinding, the gain switching circuit 13 adjusts the gain in the controller 12 to set the bearing rigidity of the thrust magnetic bearing 10 to be high.
As a result, the grindstone 4 is moved by the reaction force from the workpiece W to the grindstone shaft 3
The workpiece W is machined while being moved integrally with the cutting table 2 without being pushed back in the axial center direction, that is, so-called motion transfer machining with a machine motion accuracy. At this time, even if the surface of the workpiece W has undulations generated by pre-processing, the grindstone 4 does not significantly deform along the undulations, and the top of the undulations is scraped off to allow the surface of the workpiece W to be formed. As far as it is corrected to a plane
【００３０】さらに、上記のような粗研削と同時に、ゲ
イン切換回路１３，電解電流値切換回路１５，及び切込
切換回路２０においては、寸法測定器１４からの測定結
果に基づき精密研削を行うか否かを判断する。即ち、そ
の測定結果より、精密研削を行うのに好適な寸法まで粗
研削が進行していることを確認したとき、工作物Ｗの精
密研削を行うと判断する。Further, at the same time as the above rough grinding, in the gain switching circuit 13, the electrolytic current value switching circuit 15, and the cut-in switching circuit 20, is precision grinding performed based on the measurement result from the dimension measuring device 14? Determine whether or not. That is, when it is confirmed from the measurement result that the rough grinding has progressed to a dimension suitable for performing precision grinding, it is determined that the workpiece W is to be precision ground.
【００３１】このようにして、工作物Ｗの精密研削を行
うと判断されると、電解電流値切換回路１５が電流値切
換信号を電解用電源８へ出力する。これと同時に、ゲイ
ン切換回路１３がコントローラ１２内のゲインを調節し
てスラスト磁気軸受１０の軸受剛性を低く設定すると共
に、切込切換回路２０が、現在のモータドライバ２３へ
の出力、即ち切込速度設定回路２４に予め設定された粗
研削切込速度Ｖ1 を、第２の偏差演算回路１９で求めた
差分ａに切り換える。When it is determined that the workpiece W is to be precisely ground in this manner, the electrolytic current value switching circuit 15 outputs a current value switching signal to the electrolysis power source 8. At the same time, the gain switching circuit 13 adjusts the gain in the controller 12 to set the bearing rigidity of the thrust magnetic bearing 10 low, and the cut switching circuit 20 outputs the current output to the motor driver 23, that is, the cut. The rough grinding cutting speed V 1 preset in the speed setting circuit 24 is switched to the difference a obtained by the second deviation calculation circuit 19.
【００３２】これにより、不動態化被膜を生成できる電
流密度の範囲で電解作用が生じるように、電源８の電流
値が切り換えられ、その結果、加工液を介して砥石４と
工作物Ｗ間に電解作用が生じ、工作物Ｗの表面に不動態
化被膜が生成される。As a result, the current value of the power source 8 is switched so that the electrolytic action occurs in the range of the current density capable of forming the passivation film, and as a result, the grinding stone 4 and the workpiece W are connected via the working fluid. An electrolytic action occurs and a passivation film is formed on the surface of the workpiece W.
【００３３】これと同時に、モータドライバ２３が上記
差分ａを補うように、つまり現在の偏差σ1 が基準の偏
差σ0 と等しくなるように、切込テーブル２を移動さ
せ、このような移動により、スラスト磁気軸受８の軸受
剛性（バネ定数ｋ）と現在の偏差σ1 （変位量ｘ）との
乗算値（力Ｆ）が常に略一定に設定され、その結果、工
作物Ｗに作用する砥石４の圧力が常時一定となるように
制御される。At the same time, the motor driver 23 moves the cutting table 2 so as to make up the difference a, that is, the current deviation σ 1 becomes equal to the reference deviation σ 0, and by such movement. , The product (force F) of the bearing rigidity (spring constant k) of the thrust magnetic bearing 8 and the current deviation σ 1 (displacement x) is always set to be substantially constant, and as a result, the grindstone that acts on the workpiece W is obtained. The pressure of 4 is controlled so as to be always constant.
【００３４】即ち、精密研削時においては、砥石４は常
時一定の圧力で工作物Ｗに当接しつつ、工作物Ｗの表面
に生成される不動態化被膜を除去しながら工作物Ｗの表
面を加工する、いわゆる定圧加工を行う。このような加
工によると、工作物Ｗに残る加工歪が極めて少なく、か
つ表面粗度良く工作物Ｗを加工でき、また、上記のよう
な粗研削で修正しきれなかったうねりが工作物Ｗの表面
に存在しても、砥石４は、うねりに沿って大きく変形す
ることはなく、そのうねりの頂部を削り取り、工作物Ｗ
の表面を可能な限り平面に修正する。That is, during precision grinding, the grindstone 4 constantly contacts the work W with a constant pressure and removes the passivation film formed on the surface of the work W while removing the surface of the work W. Processing, so-called constant pressure processing is performed. According to such machining, the machining strain remaining on the workpiece W is extremely small, the workpiece W can be machined with a high surface roughness, and the undulations which cannot be corrected by the above-described rough grinding are generated on the workpiece W. Even if it exists on the surface, the grindstone 4 does not largely deform along the undulations, and the top of the undulations is scraped off to form the workpiece W.
Modify the surface of the as flat as possible.
【００３５】なお、上記粗研削時においては、不動態化
被膜が生成されない電流密度の範囲、即ち、図３に示す
ような臨界電流密度ρ以上の範囲で砥石４と工作物間に
電解作用を生じさせ、短時間に工作物Ｗの表面を多量に
溶解させながら砥石４で加工して、加工能率の向上を図
るようにしても良い。During the rough grinding, an electrolytic action is generated between the grindstone 4 and the workpiece in the range of the current density at which the passivation film is not formed, that is, in the range of the critical current density ρ or more as shown in FIG. It is also possible to improve the processing efficiency by causing the surface of the workpiece W to be dissolved in a large amount in a short time and processing it with the grindstone 4.
【００３６】したがって、上記実施例の電解複合加工機
によれば、固定砥粒の砥石を用いるため、工作物の表面
に前加工で生じたうねりが存在しても、粗研削時及び精
密研削時に、砥石がうねりに沿って大きく変形すること
はなく、そのうねりの頂部を削り取り、工作物の表面を
可能な限り平面に修正するので、工作物を平面度良く加
工できるだけでなく、精密研削時には、スラスト磁気軸
受の剛性を低く設定した上で工作物に作用する砥石の圧
力を常時一定となるように制御するため、砥石が一定の
圧力で工作物に当接しつつ工作物側に生成される不動態
化被膜を除去しながら工作物を加工するので、工作物に
残る加工歪が極めて少なく、かつ工作物を表面粗度良く
加工できる。Therefore, according to the electrolytic compound processing machine of the above-mentioned embodiment, since the grindstone of the fixed abrasive is used, even if the undulation generated in the pre-processing is present on the surface of the workpiece, the rough grinding and the precision grinding are performed. , The grindstone does not greatly deform along the undulations, the top of the undulations is scraped off and the surface of the workpiece is corrected to be as flat as possible, so not only can the workpiece be machined with good flatness, but also during precision grinding. The rigidity of the thrust magnetic bearing is set low and the pressure of the grindstone acting on the workpiece is controlled to be constant at all times.Therefore, the grindstone contacts the workpiece at a constant pressure and is generated on the workpiece side. Since the work piece is processed while removing the passivation film, the work strain remaining on the work piece is extremely small and the work piece can be processed with good surface roughness.
【００３７】また、この電解複合加工機によれば、上記
の如く工作物を加工歪が極めて少ない状態で表面粗度良
くかつ平面度良く加工するには、加工開始時又は加工終
了時において工作物を主軸に取り付けたり又は取り外す
だけで良く、加工開始から加工終了までの間においては
工作物を主軸から取り外す等の手間が一切省略されるの
で、能率良く工作物を加工できる。Further, according to this electrolytic composite processing machine, in order to machine the workpiece with good surface roughness and flatness in the state where the machining strain is extremely small as described above, the workpiece can be processed at the start of machining or at the end of machining. It suffices to simply attach or detach the work piece to or from the main spindle, and the work such as removing the work piece from the main spindle is completely omitted from the start to the end of the work, so that the work piece can be efficiently processed.
【００３８】なお、上記実施例では、砥石としてはカッ
プ型砥石４を用いたが、この型に限定されることはな
く、図２に示すような円筒型砥石３０を用いても良く、
この円筒型砥石３０を用いる場合には、円筒型砥石３０
の外周面と工作物Ｗの表面とを対向させて配置すると共
に、円筒型砥石３０はその軸心回りに回転しつつレシプ
ロテーブル３１により工作物Ｗの表面に沿って左右に往
復移動できるように構成し、工作物Ｗはその軸心回りに
回転しつつ切込テーブル２により円筒型砥石３０の外周
面に向かって移動できるように構成すると共に、ゲイン
切換回路１３はコントローラ１２を介して主軸６を支持
するスラスト磁気軸受１０に接続して、そのコントロー
ラ１２内のゲインを調節するように構成し、位置測定セ
ンサ１６は主軸６のアキシャルディスク１１に対向させ
て設置する。Although the cup-shaped grindstone 4 is used as the grindstone in the above embodiment, the grindstone is not limited to this type, and a cylindrical grindstone 30 as shown in FIG. 2 may be used.
When using this cylindrical grindstone 30, the cylindrical grindstone 30
The outer peripheral surface of the workpiece W and the surface of the workpiece W are disposed so as to face each other, and the cylindrical grindstone 30 is reciprocally moved along the surface of the workpiece W by the reciprocating table 31 while rotating around its axis. The workpiece W is configured to be movable toward the outer peripheral surface of the cylindrical grindstone 30 by the cutting table 2 while rotating around the axis of the workpiece W, and the gain switching circuit 13 is connected to the spindle 6 via the controller 12. Is connected to the thrust magnetic bearing 10 for supporting the motor, and the gain in the controller 12 is adjusted, and the position measuring sensor 16 is installed so as to face the axial disk 11 of the spindle 6.
【００３９】[0039]
【発明の効果】この発明に係る電解複合加工機にあって
は、上記の如く固定砥粒の砥石を用いるため、工作物の
表面に前加工で生じたうねりが存在しても、粗研削時及
び精密研削時に、砥石がうねりに沿って大きく変形する
ことはなく、そのうねりの頂部を削り取り、工作物の表
面を可能な限り平面に修正するので、工作物を平面度良
く加工できるだけでなく、精密研削時には、剛性変更手
段がスラスト磁気軸受の剛性を低く設定した上で、定圧
制御手段が工作物に作用する砥石の圧力を常時一定とな
るように制御するため、砥石が一定の圧力で工作物に当
接しつつ工作物側に生成される不動態化被膜を除去しな
がら工作物を加工するので、工作物に残る加工歪が極め
て少なく、かつ工作物を表面粗度良く加工できる。As described above, in the electrolytic compound processing machine according to the present invention, since the whetstone having the fixed abrasive grains is used as described above, even if the undulation generated in the preprocessing exists on the surface of the workpiece, the rough grinding is performed. Also, during precision grinding, the grindstone does not greatly deform along the undulations, the top of the undulations is shaved off and the surface of the workpiece is corrected to be as flat as possible, so not only can the workpiece be machined with a high degree of flatness, During precision grinding, the rigidity changing means sets the rigidity of the thrust magnetic bearing to a low value, and the constant pressure control means controls the pressure of the grindstone acting on the workpiece to be constant at all times. Since the work piece is processed while contacting the work piece and removing the passivation film generated on the work piece side, the work strain remaining on the work piece is extremely small, and the work piece can be processed with good surface roughness.
【００４０】また、この電解複合加工機によれば、上記
の如く工作物を加工歪が極めて少ない状態で表面粗度良
くかつ平面度良く加工するには、加工開始時又は加工終
了時において工作物を主軸に取り付けたり又は取り外す
だけで良く、加工開始から加工終了までの間においては
工作物を主軸から取り外したり取り付ける等の手間が一
切省略されるので、能率良く工作物を加工できる。Further, according to this electrolytic composite processing machine, in order to machine the workpiece with good surface roughness and flatness in a state where machining strain is extremely small as described above, the workpiece can be processed at the start of machining or at the end of machining. It suffices to attach or remove the workpiece from the spindle, and the work such as removing or attaching the workpiece from the spindle is completely omitted from the start of machining to the end of machining, so that the workpiece can be efficiently machined.
【図１】この発明に係る電解複合加工機の一実施例を説
明する説明図。FIG. 1 is an explanatory view for explaining an embodiment of an electrolytic combined processing machine according to the present invention.
【図２】この発明の他の実施例を説明する説明図。FIG. 2 is an explanatory view explaining another embodiment of the present invention.
【図３】不動態化被膜が生成される電流密度の範囲を説
明する説明図。FIG. 3 is an explanatory diagram illustrating a range of current density in which a passivation film is generated.
２ 切込テーブル ３ 砥石軸 ４ 砥石 ５ 主軸 ８ 電源 １０ スラスト磁気軸受（軸受部） １３ ゲイン切換回路（剛性変更手段） Ａ 定圧制御部 Ｗ 工作物 2 Cutting table 3 Grindstone axis 4 Grindstone 5 Spindle 5 Power supply 8 Power supply 10 Thrust magnetic bearing (bearing section) 13 Gain switching circuit (stiffness changing means) A Constant pressure control section W Workpiece
Claims (1)
に導電性を有する固定砥粒の砥石と、上記工作物が一体
に取り付けられかつその工作物を回転させる主軸と、上
記砥石が一体に取り付けられかつその砥石を回転させる
砥石軸と、上記主軸又は砥石軸を支持すると共に軸受剛
性を変更できる軸受部と、上記砥石と工作物とを相対的
に接近させる切込テーブルと、上記砥石と工作物との隙
間に供給される加工液と、上記砥石が陰極に接続されか
つ上記工作物が陽極に接続された電源と、上記砥石と工
作物との間に生じる電解作用で工作物側に不動態化被膜
を生成しつつその不動態化被膜を除去する精密研削時に
は上記軸受部の軸受剛性を低く設定し、かつ工作物側に
不動態化被膜を生成することなく砥石でその工作物を直
接加工する粗研削時には上記軸受部の軸受剛性を高く設
定する剛性変更手段と、この剛性変更手段で軸受部の軸
受剛性を低く設定したとき、工作物に作用する砥石の圧
力が一定となるように制御する定圧制御手段とを備える
ことを特徴とする電解複合加工機。1. A grindstone of fixed abrasive grains which is arranged so as to face a work piece and has conductivity, a main shaft to which the work piece is integrally attached and which rotates the work piece, and the grindstone piece are integrally formed. A grindstone shaft that is attached and that rotates the grindstone, a bearing portion that supports the main spindle or the grindstone shaft, and can change the bearing rigidity, a cutting table that relatively brings the grindstone and the workpiece into close proximity, and the grindstone A machining fluid supplied to the gap between the workpiece, a power source in which the grindstone is connected to the cathode and the workpiece is connected to the anode, and an electrolytic action generated between the grindstone and the workpiece causes the workpiece side. At the time of precision grinding to remove the passivation film while forming the passivation film, the bearing rigidity of the above-mentioned bearing is set low, and the workpiece is polished with a grindstone without forming the passivation film on the workpiece side. Rough grinding for direct processing Is a rigidity changing means for setting the bearing rigidity of the bearing portion high, and a constant pressure for controlling the pressure of the grindstone acting on the workpiece to be constant when the bearing rigidity of the bearing portion is set low by the rigidity changing means. An electrolytic composite processing machine comprising: a control means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21256592A JPH0655347A (en) | 1992-08-10 | 1992-08-10 | Electrochemical composite machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21256592A JPH0655347A (en) | 1992-08-10 | 1992-08-10 | Electrochemical composite machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0655347A true JPH0655347A (en) | 1994-03-01 |
Family
ID=16624812
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21256592A Withdrawn JPH0655347A (en) | 1992-08-10 | 1992-08-10 | Electrochemical composite machine |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0655347A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002024389A1 (en) * | 2000-09-20 | 2002-03-28 | Mitsubishi Denki Kabushiki Kaisha | Electric discharge machining device and electric discharge machining method |
| WO2005000512A1 (en) * | 2003-06-26 | 2005-01-06 | Tokyo Stainless Grinding Co., Ltd. | Rotation surface-reducing head, electrolytic surface-reducing device, and electrolytic surface-reducing method |
| CN1309521C (en) * | 2003-07-24 | 2007-04-11 | 三菱电机株式会社 | Electric discharge machining apparatus |
| US20100320172A1 (en) * | 2007-11-08 | 2010-12-23 | Institut fur Mikrotechnik Mainz | Drive device for erosion tools |
-
1992
- 1992-08-10 JP JP21256592A patent/JPH0655347A/en not_active Withdrawn
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002024389A1 (en) * | 2000-09-20 | 2002-03-28 | Mitsubishi Denki Kabushiki Kaisha | Electric discharge machining device and electric discharge machining method |
| US6788019B2 (en) | 2000-09-20 | 2004-09-07 | Mitsubishi Denki Kabushiki Kaisha | Electric discharge machining device and electric discharge machining method |
| EP1473103A1 (en) * | 2000-09-20 | 2004-11-03 | Mitsubishi Denki Kabushiki Kaisha | Electric discharge machining device and electric discharge machining method |
| EP1473103A4 (en) * | 2000-09-20 | 2008-02-13 | Mitsubishi Electric Corp | Electric discharge machining device and electric discharge machining method |
| WO2005000512A1 (en) * | 2003-06-26 | 2005-01-06 | Tokyo Stainless Grinding Co., Ltd. | Rotation surface-reducing head, electrolytic surface-reducing device, and electrolytic surface-reducing method |
| JPWO2005000512A1 (en) * | 2003-06-26 | 2006-08-03 | 東京ステンレス研磨興業株式会社 | Rotational surface reduction head, electrolytic surface reduction device, and electrolytic surface reduction method |
| JP4878159B2 (en) * | 2003-06-26 | 2012-02-15 | 東京ステンレス研磨興業株式会社 | Rotational surface reduction head, electrolytic surface reduction device, and electrolytic surface reduction method |
| CN1309521C (en) * | 2003-07-24 | 2007-04-11 | 三菱电机株式会社 | Electric discharge machining apparatus |
| US20100320172A1 (en) * | 2007-11-08 | 2010-12-23 | Institut fur Mikrotechnik Mainz | Drive device for erosion tools |
| US8445806B2 (en) * | 2007-11-08 | 2013-05-21 | Institut Fur Mikrotechnik Mainz Gmbh | Drive device for erosion tools |
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