JPH0653317B2 - Plasma jet device - Google Patents

Plasma jet device

Info

Publication number
JPH0653317B2
JPH0653317B2 JP61155430A JP15543086A JPH0653317B2 JP H0653317 B2 JPH0653317 B2 JP H0653317B2 JP 61155430 A JP61155430 A JP 61155430A JP 15543086 A JP15543086 A JP 15543086A JP H0653317 B2 JPH0653317 B2 JP H0653317B2
Authority
JP
Japan
Prior art keywords
plasma jet
processed
detection plate
distance
mantle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61155430A
Other languages
Japanese (ja)
Other versions
JPS6313675A (en
Inventor
秋男 小松
幹夫 芳賀
均 飯島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Origin Electric Co Ltd
Original Assignee
Origin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Origin Electric Co Ltd filed Critical Origin Electric Co Ltd
Priority to JP61155430A priority Critical patent/JPH0653317B2/en
Publication of JPS6313675A publication Critical patent/JPS6313675A/en
Publication of JPH0653317B2 publication Critical patent/JPH0653317B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Arc Welding In General (AREA)
  • Drying Of Semiconductors (AREA)
  • Plasma Technology (AREA)

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、トーチの陰極棒とそれを囲む外套との間にプ
ラズマジェットを発生せしめ、該プラズマジェットによ
り被加工材料を加工するプラズマジェット装置に関す
る。
The present invention relates to a plasma jet device for generating a plasma jet between a cathode rod of a torch and a jacket surrounding the torch, and processing the material to be processed by the plasma jet. Regarding

〔従来の技術〕[Conventional technology]

第5図は従来のプラズマジェット装置を示す図である。
同図において、1は陰極棒(タングステン棒)、2は狭
窄ノズル3を有する外套、4はプラズマガス通路、5は
プラズマジェット、6は直流電源、7は被加工材料であ
る。不活性のアルゴンガスAをプラズマガスとしてプ
ラズマガス通路4に流し、直流電源6により電圧を陰極
棒1と外套2との間に印加してプラズマジェット5を発
生させ、そのプラズマジェットにより被加工材料7を加
工する。特に、狭窄ノズル3の径が1mm以上で、プラズ
マジェット電流Iが数10A以上のプラズマジェット
装置にあっては、プラズマジェットの状態が安定してい
るので、被加工材料7に良い加工を施すことができる。
FIG. 5 is a diagram showing a conventional plasma jet device.
In the figure, 1 is a cathode rod (tungsten rod), 2 is a jacket having a constricting nozzle 3, 4 is a plasma gas passage, 5 is a plasma jet, 6 is a DC power source, and 7 is a material to be processed. Argon gas A r inert flowed into the plasma gas passage 4 as the plasma gas, a voltage to generate plasma jet 5 is applied between the cathode bar 1 and the mantle 2 by the DC power supply 6, the work by the plasma jet Material 7 is processed. In particular, in a plasma jet apparatus in which the diameter of the constriction nozzle 3 is 1 mm or more and the plasma jet current I J is several tens of amperes or more, the state of the plasma jet is stable, so that the material 7 to be processed is subjected to good processing. be able to.

〔発明が解決しようとする問題点〕[Problems to be solved by the invention]

しかし、このような従来のプラズマジェット装置にあっ
ては、狭窄ノズルと被加工材料間の距離を一定にするこ
とができないので、狭窄ノズルと被加工材料との接触に
よる破損事故を防止することができないという欠点があ
った。
However, in such a conventional plasma jet device, since the distance between the constriction nozzle and the material to be processed cannot be made constant, it is possible to prevent damage accidents due to contact between the constriction nozzle and the material to be processed. There was a drawback that I could not.

〔問題点を解決するための手段〕[Means for solving problems]

本発明は以上の問題点を解決するために、トーチの陰極
棒とそれを囲む外套との間にプラズマジェットを発生せ
しめ、該プラズマジェットにより被加工材料を加工する
プラズマジェット装置において、上記被加工材料の位置
に導電性検出板を配設し、上記外套と導電性検出板間の
電圧或いは外套と導電性検出板間を通流する電流を検出
して、外套の先端部と導電性検出板との距離が略一定に
なるように制御することにより、狭窄ノズルと被加工材
料間の距離を略一定にすることを特徴とするプラズマジ
ェット装置を提供するものである。
In order to solve the above problems, the present invention provides a plasma jet device for producing a plasma jet between a cathode rod of a torch and an outer jacket surrounding the torch, and processing the workpiece material by the plasma jet. A conductive detecting plate is arranged at the position of the material, and the voltage between the mantle and the conductive detecting plate or the current flowing between the mantle and the conductive detecting plate is detected to detect the tip of the mantle and the conductive detecting plate. The present invention provides a plasma jet device characterized in that the distance between the constriction nozzle and the material to be processed is made substantially constant by controlling the distance to be substantially constant.

〔作用〕[Action]

外套の先端部と導電性検出板間の距離は、狭窄ノズルと
被加工材料間の距離でもあるので、このように、外套と
導電性検出板間の電圧或いは外套と導電性検出板間を通
流する電流を検出して、外套の先端部と導電性検出板と
の距離が略一定になるように制御することにより、狭窄
ノズルと被加工材料間の距離を略一定にすることができ
る。
Since the distance between the tip of the mantle and the conductive detection plate is also the distance between the constriction nozzle and the material to be processed, the voltage between the mantle and the conductive detection plate or the distance between the mantle and the conductive detection plate is thus set. By detecting the flowing current and controlling the distance between the tip of the mantle and the conductive detection plate to be substantially constant, the distance between the constriction nozzle and the material to be processed can be made substantially constant.

また、外套の先端部はプラズマジェットによって消耗せ
ず、従って、外套の先端部と導電性検出板間の距離は加
工時間の経過により変化しないので、外套の先端部と導
電性検出板間の距離の制御を頻繁に行う必要がなく、制
御が容易である。
In addition, the tip of the mantle is not consumed by the plasma jet, and therefore the distance between the tip of the mantle and the conductive detection plate does not change with the lapse of processing time. The control is easy because it does not require frequent control.

このようなことが相まって、狭窄ノズルと被加工材料と
の接触による破損事故を防止できることができると共
に、より安定した加工を被加工材料に施すことができ
る。
Combined with this, it is possible to prevent damage accidents due to contact between the constriction nozzle and the material to be processed, and it is possible to perform more stable processing on the material to be processed.

〔実施例〕〔Example〕

第1及び第2図は本発明の一実施例を説明するための図
である。第1図において、8は導電性検出板、9は電流
検出器、10はフィルタ回路、11は増幅回路、12は
比較回路、13は設定回路、14はA/D変換回路であ
る。第5図に示すようにして被加工材料7に加工を施し
ているプラズマジェット装置において、狭窄ノズル3と
被加工材料7間の距離が一定であることを確認する、或
いは一定になるように補正する必要が生じた場合には、
被加工材料7を除去すると共に、被加工材料7のあった
位置に導電性検出板8を配設して、第1図に示すような
回路とする。すると、直流電源6→外套2→プラズマジ
ェット5→導電性検出板8→電流検出器9→直流電源6
の経路で検出電流Iが流れる。外套2の先端部と導電性
検出板8間の距離Hと検出電流Iとの関係は第2図に示
すようになる。その検出電流Iをフィルタ回路10、増
幅回路11を介して比較回路12で予め設定回路13で
設定されている設定値と比較する。その比較値が或る値
を越えた時に比較回路12は信号をA/D変換回路14
に送出し、A/D変換回路は出力信号を送出して外套2
の先端部と導電性検出板8との距離が一定になるように
制御する。外套2の先端部と導電性検出板8間の距離
は、狭窄ノズル3と被加工材料7間の距離でもあるの
で、このように、外套2と導電性検出板8間を通流する
電流を検出して、外套2の先端部と導電性検出板8との
距離が一定になるように制御することにより、狭窄ノズ
ル3と被加工材料7間の距離を一定にすることができ
る。また、外套2の先端部はプラズマジェットによって
消耗せず、従って、外套2の先端部と導電性検出板8間
の距離は加工時間の経過により変化しないので、外套2
の先端部と導電性検出板8間の距離の制御を頻繁に行う
必要がなく、制御が容易である。このようなことが相ま
って、狭窄ノズル3と被加工材料7との接触による破損
事故を防止することができると共に、より安定した加工
を被加工材料7に施すことができる。
1 and 2 are diagrams for explaining one embodiment of the present invention. In FIG. 1, 8 is a conductive detection plate, 9 is a current detector, 10 is a filter circuit, 11 is an amplification circuit, 12 is a comparison circuit, 13 is a setting circuit, and 14 is an A / D conversion circuit. In the plasma jet device that processes the material 7 to be processed as shown in FIG. 5, confirm that the distance between the narrowing nozzle 3 and the material 7 to be processed is constant, or correct it so that it becomes constant. If you need to
The material 7 to be processed is removed, and the conductive detection plate 8 is disposed at the position where the material 7 to be processed was present to form a circuit as shown in FIG. Then, the DC power supply 6 → jacket 2 → plasma jet 5 → conductive detection plate 8 → current detector 9 → DC power supply 6
The detection current I flows through the path. The relationship between the detection current I and the distance H between the tip of the jacket 2 and the conductive detection plate 8 is as shown in FIG. The detected current I is compared with a set value preset in the setting circuit 13 in the comparison circuit 12 via the filter circuit 10 and the amplification circuit 11. When the comparison value exceeds a certain value, the comparison circuit 12 converts the signal into the A / D conversion circuit 14
And the A / D conversion circuit sends the output signal to the jacket 2
Control is performed so that the distance between the tip of the and the conductive detection plate 8 becomes constant. Since the distance between the tip of the mantle 2 and the conductive detection plate 8 is also the distance between the constriction nozzle 3 and the material 7 to be processed, the current flowing between the mantle 2 and the conductive detection plate 8 is thus set. The distance between the constriction nozzle 3 and the material 7 to be processed can be made constant by detecting and controlling the distance between the tip of the outer jacket 2 and the conductive detection plate 8 to be constant. Further, the tip of the outer jacket 2 is not consumed by the plasma jet, and therefore, the distance between the tip of the outer jacket 2 and the conductive detection plate 8 does not change with the lapse of processing time.
It is not necessary to frequently control the distance between the tip of the and the conductive detection plate 8, and the control is easy. In combination with this, it is possible to prevent damage accidents due to contact between the constriction nozzle 3 and the material 7 to be processed, and to perform more stable processing on the material 7 to be processed.

第3図は本発明の他の一実施例を説明するための図であ
る。この実施例は、外套2と導電性検出板8間の電圧を
検出して、外套2の先端部と導電性検出板8との距離が
一定になるように制御することにより、狭窄ノズル3と
被加工材料7間の距離を一定にするものであり、第1図
の実施例とほぼ同様の効果が得られる。
FIG. 3 is a diagram for explaining another embodiment of the present invention. In this embodiment, by detecting the voltage between the outer jacket 2 and the conductive detection plate 8 and controlling the distance between the tip of the outer jacket 2 and the conductive detection plate 8 to be constant, the narrowed nozzle 3 and The distance between the workpieces 7 is made constant, and the same effect as that of the embodiment shown in FIG. 1 can be obtained.

第4図は本発明の他の一実施例を説明するための図であ
る。この実施例は、第1図の回路において、電流検出器
9と直流電源15の直列接続回路を外套2と導電性検出
板8間に接続したものであり、第1図の実施例とほぼ同
様の効果が得られる。
FIG. 4 is a diagram for explaining another embodiment of the present invention. In this embodiment, a circuit in which a current detector 9 and a DC power supply 15 are connected in series in the circuit of FIG. 1 is connected between the mantle 2 and the conductive detection plate 8 and is almost the same as the embodiment of FIG. The effect of is obtained.

以上の実施例は、被加工材料7が非導電性である場合に
ついて述べたが、被加工材料7が導電性である場合に
は、被加工材料7が導電性検出板8を兼ねることができ
る。この場合には、狭窄ノズル3と被加工材料7間の距
離が一定になるように常時制御することができる。
In the above embodiments, the case where the work material 7 is non-conductive has been described, but when the work material 7 is conductive, the work material 7 can also serve as the conductive detection plate 8. . In this case, it is possible to constantly control the distance between the constriction nozzle 3 and the material 7 to be processed to be constant.

〔発明の効果〕〔The invention's effect〕

以上述べたように、本発明は、トーチの陰極棒とそれを
囲む外套との間にプラズマジェットを発生せしめ、該プ
ラズマジェットにより被加工材料を加工するプラズマジ
ェット装置において、上記被加工材料の位置に導電性検
出板を配設し、上記外套と導電性検出板間の電圧或いは
外套と導電性検出板間を通流する電流を検出して、外套
の先端部と導電性検出板との距離が略一定になるように
制御することにより、狭窄ノズルと被加工材料間の距離
を略一定にすることを特徴とするプラズマジェット装置
である。本発明はこのような特徴を有するので、狭窄ノ
ズルと被加工材料との接触による破損事故を防止するこ
とができると共に、より安定した加工を被加工材料に施
すことができる。特に、プラズマジェットの状態が安定
している狭窄ノズルの径が1mm以上でプラズマジェット
電流が数10A以上のプラズマジェット装置に適用して
有用である。
As described above, according to the present invention, in the plasma jet apparatus for generating a plasma jet between the cathode rod of the torch and the jacket surrounding the torch, and processing the workpiece with the plasma jet, the position of the workpiece is set. A conductive detection plate is installed in the sensor, and the voltage between the mantle and the conductive detection plate or the current flowing between the mantle and the conductive detection plate is detected to detect the distance between the tip of the mantle and the conductive detection plate. Is a plasma jet device characterized in that the distance between the constriction nozzle and the material to be processed is made substantially constant by controlling so as to be substantially constant. Since the present invention has such characteristics, it is possible to prevent a damage accident due to contact between the constriction nozzle and the material to be processed, and to perform more stable processing on the material to be processed. In particular, it is useful when applied to a plasma jet device in which the diameter of the narrowed nozzle in which the state of the plasma jet is stable is 1 mm or more and the plasma jet current is several tens A or more.

【図面の簡単な説明】[Brief description of drawings]

第1図及び第2図は本発明の一実施例を説明するための
図、第3図及び第4図はそれぞれ本発明の他の一実施例
を説明するための図、第5図は従来のプラズマジェット
装置を説明するための図である。 1……陰極棒、2……外套 3……狭窄ノズル、4……プラズマガス通路 5……プラズマジェット、6、15……直流電源 7……被加工材料、8……導電性検出板 9……電流検出器、10……フィルタ回路 11……増幅回路、12……比較回路 13……設定回路、14A……A/D変換回路
1 and 2 are diagrams for explaining one embodiment of the present invention, FIGS. 3 and 4 are diagrams for explaining another embodiment of the present invention, and FIG. 5 is a conventional example. FIG. 3 is a diagram for explaining the plasma jet device of FIG. DESCRIPTION OF SYMBOLS 1 ... Cathode rod, 2 ... Overcoat 3 ... Constriction nozzle, 4 ... Plasma gas passage 5 ... Plasma jet, 6, 15 ... DC power supply 7 ... Workpiece material, 8 ... Conductivity detection plate 9 ... current detector, 10 ... filter circuit 11 ... amplification circuit, 12 ... comparison circuit 13 ... setting circuit, 14A ... A / D conversion circuit

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】トーチの陰極棒とそれを囲む外套との間に
プラズマジェットを発生せしめ、該プラズマジェットに
より被加工材料を加工プラズマジェット装置において、 上記被加工材料の位置に導電性検出板を配設し、上記外
套と導電性検出板間の電圧或いは外套と導電性検出板間
を通流する電流を検出して、外套の先端部と導電性検出
板との距離が略一定になるように制御することにより、
狭窄ノズルと被加工材料間の距離を略一定にすることを
特徴とするプラズマジェット装置。
Claim: What is claimed is: 1. A plasma jet is generated between a cathode rod of a torch and a jacket surrounding the torch, and a material to be processed is processed by the plasma jet. The voltage between the mantle and the conductive detection plate or the current flowing between the mantle and the conductive detection plate is detected so that the distance between the tip of the mantle and the conductive detection plate becomes substantially constant. By controlling
A plasma jet device characterized in that a distance between a constriction nozzle and a material to be processed is made substantially constant.
【請求項2】上記被加工材料と導電性検出板とが同一の
ものであることを特徴とする特許請求の範囲第1項に記
載のプラズマジェット装置。
2. The plasma jet apparatus according to claim 1, wherein the material to be processed and the conductive detection plate are the same.
JP61155430A 1986-07-02 1986-07-02 Plasma jet device Expired - Lifetime JPH0653317B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61155430A JPH0653317B2 (en) 1986-07-02 1986-07-02 Plasma jet device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61155430A JPH0653317B2 (en) 1986-07-02 1986-07-02 Plasma jet device

Publications (2)

Publication Number Publication Date
JPS6313675A JPS6313675A (en) 1988-01-20
JPH0653317B2 true JPH0653317B2 (en) 1994-07-20

Family

ID=15605844

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61155430A Expired - Lifetime JPH0653317B2 (en) 1986-07-02 1986-07-02 Plasma jet device

Country Status (1)

Country Link
JP (1) JPH0653317B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0795372A1 (en) * 1990-04-17 1997-09-17 Kabushiki Kaisha Komatsu Seisakusho Standoff control method and apparatus for plasma cutting machine

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4170727A (en) * 1978-05-19 1979-10-09 Thermal Dynamics Corporation Thermal torch height acquisition circuit

Also Published As

Publication number Publication date
JPS6313675A (en) 1988-01-20

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