JPH0653104A - Quality control system in semiconductor manufacture - Google Patents
Quality control system in semiconductor manufactureInfo
- Publication number
- JPH0653104A JPH0653104A JP40039390A JP40039390A JPH0653104A JP H0653104 A JPH0653104 A JP H0653104A JP 40039390 A JP40039390 A JP 40039390A JP 40039390 A JP40039390 A JP 40039390A JP H0653104 A JPH0653104 A JP H0653104A
- Authority
- JP
- Japan
- Prior art keywords
- information
- semiconductor manufacturing
- quality control
- host computer
- control system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 29
- 239000004065 semiconductor Substances 0.000 title claims abstract description 18
- 238000003908 quality control method Methods 0.000 title claims abstract description 10
- 238000000034 method Methods 0.000 claims abstract description 9
- 238000010586 diagram Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/30—Computing systems specially adapted for manufacturing
Landscapes
- General Factory Administration (AREA)
- Management, Administration, Business Operations System, And Electronic Commerce (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、半導体製造における品
質管理システムに関するもので、特に品質トラブル時
や、製品の製造履歴の調査を目的として使用されるもの
である。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a quality control system in semiconductor manufacturing, and is particularly used for quality troubles and for investigating product manufacturing history.
【０００２】[0002]
【従来の技術】従来、半導体製造に際しては、ロット毎
にトラベルシ−トを付加し、そのトラベルシ−トに工程
毎の製造条件、使用した装置、部材名、部材ロット番号
等を記入していた。また、全工程の終了時に、そのトラ
ベルシ−トを保管しておき、トラブル発生時には、人手
によって膨大な量のトラベルシ−トの中から該当する情
報を探しだし、かかるトラブルに対応していた。2. Description of the Related Art Conventionally, when a semiconductor is manufactured, a travel sheet is added to each lot, and manufacturing conditions for each process, equipment used, member name, member lot number, etc. are entered in the travel sheet. It was In addition, at the end of all processes, the travel sheet is stored, and when trouble occurs, the corresponding information is manually searched from a vast amount of travel sheets to deal with such trouble. .
【０００３】しかしながら、人手によって、膨大な量の
トラベルシ−トの中から該当する情報を探しだしていた
ため、必要とする情報を迅速に取り出すことが不可能で
あり、又、取り出せたとしても情報に漏れがあることが
多く、トラブルの根源を正確に把握することができなか
った。However, since the corresponding information is manually searched for from a vast amount of travel sheets, it is impossible to quickly retrieve the required information, and even if it is possible, the information can be retrieved. There were many leaks, and it was not possible to accurately grasp the root of the trouble.
【０００４】[0004]
【発明が解決しようとする課題】このように、従来は、
半導体製造における品質管理にトラベルシ−トを用いて
いたため、トラブル発生時には、人手によって膨大な量
のトラベルシ−トの中から該当する情報を探しだす必要
があり、このため迅速性や正確性に欠けるという欠点が
あった。As described above, the prior art is as follows.
Since a travel sheet was used for quality control in semiconductor manufacturing, when trouble occurs, it is necessary to manually find the relevant information from a vast amount of travel sheets, which leads to quickness and accuracy. It had the drawback of being chipped.
【０００５】本発明は、上記欠点を解決すべくなされた
ものであり、必要な情報を必要なときに迅速かつ正確に
得ることが可能な半導体製造における品質管理システム
を提供することを目的とする。The present invention has been made to solve the above-mentioned drawbacks, and an object of the present invention is to provide a quality control system in semiconductor manufacturing capable of quickly and accurately obtaining necessary information when needed. .
【０００６】[0006]
【課題を解決するための手段】上記目的を達成するため
に、本発明の半導体製造における品質管理システムは、
半導体製造の各工程において使用する各設備と、当該各
設備での処理条件、部材名その他様々な情報を逐次収集
蓄積する手段と、当該手段に蓄積された任意の情報を、
所定の情報を基に検索することが可能な手段とを備えて
いる。In order to achieve the above object, a quality control system in semiconductor manufacturing according to the present invention comprises:
Each equipment used in each step of semiconductor manufacturing, means for sequentially collecting and accumulating various information such as processing conditions, member names and the like in each equipment, and arbitrary information accumulated in the means,
And means for searching based on predetermined information.
【０００７】[0007]
【作用】上記の構成によれば、半導体製造の各工程にお
いて使用する各設備での様々な情報、例えば処理条件
や、部材名等を逐次ホストコンピュ−タに記録してい
る。このため、完成した製品にトラブルが発生したとき
等においても、必要な情報を迅速かつ正確に検索するこ
とが可能となる。According to the above construction, various information on each facility used in each step of semiconductor manufacturing, such as processing conditions and member names, are successively recorded in the host computer. Therefore, even when a trouble occurs in the completed product, it is possible to quickly and accurately search for necessary information.
【０００８】[0008]
【実施例】以下、図面を参照しながら本発明の一実施例
について詳細に説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described in detail below with reference to the drawings.
【０００９】図１は、本発明の一実施例に係わる半導体
製造における品質管理システムの基本構成図を示してい
る。図１において、１１１〜１１９は、半導体装置の製
造におけるペレット製造から組立までの各工程で使用す
る製造装置である。製造装置１１８，１１９は、ブロッ
クコンピュ−タ１２１に連結されている。また、製造装
置１１１〜１１７は、互いにロ−カルエリアネットワ−
ク１３１により連結されると共に、ブロックコンピュ−
タ１２２に連結されている。ブロックコンピュ−タ１２
１，１２２…は、製造装置１１１〜１１９での製造にお
ける処理条件、部材情報等の管理を行うものである。さ
らに、ブロックコンピュ−タ１２１，１２２…は、ネッ
トワ−クシステム１３２を介して本システムの主機能を
受け持つホストコンピュ−タ１４に有機的に連結されて
いる。このホストコンピュ−タ１４は、製造単位（ロッ
ト）毎に、下記に示すような情報を、逐次、製造装置１
１１〜１１９からブロックコンピュ−タ１２１，１２２
…を介して収集できる機能を有している。 (a) 各工程，各製造装置における処理条件（製品名とロ
ット番号を含む） (b) 各工程において用いられた部材名及び部材ロット番
号 (c) 各工程の通過日時 なお、ホストコンピュ−タ１４内の記憶部における情報
蓄積に際しては、例えば図２に示すようなフォ−マット
を使用することができる。FIG. 1 is a basic block diagram of a quality control system in semiconductor manufacturing according to an embodiment of the present invention. In FIG. 1, reference numerals 111 to 119 denote manufacturing apparatuses used in each step from pellet manufacturing to assembly in manufacturing a semiconductor device. The manufacturing apparatuses 118 and 119 are connected to the block computer 121. Further, the manufacturing apparatuses 111 to 117 are mutually connected to the local area network.
Block 131 and block computer
Connected to the switch 122. Block computer 12
1, 122 ... Manage the processing conditions, member information, and the like in the manufacturing by the manufacturing apparatuses 111 to 119. Further, the block computers 121, 122, ... Are organically connected via the network system 132 to the host computer 14 which is in charge of the main function of this system. The host computer 14 sequentially provides the manufacturing apparatus 1 with the following information for each manufacturing unit (lot).
11 to 119 to block computers 121 and 122
It has a function that can be collected via. (a) Processing conditions in each process and manufacturing equipment (including product name and lot number) (b) Material name and material lot number used in each process (c) Passing date and time of each process In addition, the host computer When storing information in the storage unit in the storage unit 14, for example, a format as shown in FIG. 2 can be used.
【００１０】また、ホストコンピュ−タ１４には、ネッ
トワ−クシステム１３２を介して所定の端末１５が連結
されている。端末１５では、所定の情報に基づいて、任
意の情報、例えば製品名、ロット番号、部材名、部材ロ
ット番号等を必要に応じてホストコンピュ−タ１４の記
憶部から検索可能となっている。つまり、端末１５で
は、ある所定の情報に関連する任意の情報の引き出し
や、参照を行うことができるようになっている。A predetermined terminal 15 is connected to the host computer 14 via the network system 132. The terminal 15 can retrieve arbitrary information, such as a product name, a lot number, a member name, a member lot number, etc., from the storage unit of the host computer 14 as needed, based on predetermined information. That is, the terminal 15 can retrieve and refer to arbitrary information related to certain predetermined information.
【００１１】このような構成によれば、従来、ロット毎
にトラベルシ−トを付加し製品を流していた場合と比較
し、ホストコンピュ−タ１４がそのような管理を行うた
め、トラブル発生時にも迅速かつ正確に必要な情報を得
ることが可能となった。With such a configuration, the host computer 14 performs such management as compared with the conventional case where a travel sheet is added to each lot and a product is flown, so that when a trouble occurs, It became possible to obtain the necessary information quickly and accurately.
【００１２】なお、ホストコンピュ−タ１４に管理され
ている様々な情報は、所定の情報（例えば工程Ｎの部材
名）をキ−として検索され、又、当該様々な情報は全て
ホストコンピュ−タ１４から出力される。一方で、ブロ
ックコンピュ−タ１２１，１２２…に、ホストコンピュ
−タ１４の機能をロ−カル的に持たせても構わない。さ
らに、当該機能は、ホストコンピュ−タの端末１５以外
の例えばブロックコンピュ−タ１２からでも検索可能で
あっても良い。Various information managed by the host computer 14 is retrieved by using predetermined information (for example, the member name of the process N) as a key, and all the various information are stored in the host computer. It is output from 14. On the other hand, the block computers 121, 122, ... May be provided with the function of the host computer 14 locally. Furthermore, the function may be retrievable from, for example, the block computer 12 other than the terminal 15 of the host computer.
【００１３】[0013]
【発明の効果】以上、説明したように、本発明の半導体
製造における品質管理システムによれば、次のような効
果を奏する。As described above, according to the quality control system for semiconductor manufacturing of the present invention, the following effects can be obtained.
【００１４】半導体製造時の各工程における処理条件や
部材情報等を逐次ホストコンピュ−タに記録しているた
め、製品にトラブルが発生したとき等に、必要な情報が
迅速に検索可能である。従って、トラブル発生の原因追
及及びその対策を迅速かつ正確に行うことができる。Since the processing conditions, member information, etc. in each step of semiconductor manufacturing are sequentially recorded in the host computer, necessary information can be retrieved quickly when a trouble occurs in the product. Therefore, it is possible to swiftly and accurately take the cause of trouble occurrence and take countermeasures against it.
【図１】本発明の一実施例に係わる半導体製造における
品質管理システムの基本構成を示すブロック図。FIG. 1 is a block diagram showing a basic configuration of a quality control system in semiconductor manufacturing according to an embodiment of the present invention.
【図２】図１のホストコンピュ−タ内での情報蓄積に際
し使用するフォ−マットの一例を示す図。FIG. 2 is a diagram showing an example of a format used when information is stored in the host computer shown in FIG.
１１１〜１１９…製造装置、１２１〜１２３…ブロック
コンピュ−タ、１３１…ロ−カルエリアネットワ−ク、
１３２…ネットワ−クシステム、１４…ホストコンピュ
−タ、１５…端末。111-119 ... Manufacturing equipment, 121-123 ... Block computer, 131 ... Local area network,
132 ... Network system, 14 ... Host computer, 15 ... Terminal.
Claims (1)
設備と、当該各設備における処理条件、部材名その他様
々な情報を逐次収集蓄積する手段と、当該手段に蓄積さ
れた任意の情報を、所定の情報を基に検索することが可
能な手段とを具備することを特徴とする半導体製造にお
ける品質管理システム。1. Equipment for use in each process of semiconductor manufacturing, means for sequentially collecting and accumulating various information such as processing conditions, member names and the like in the equipment, and arbitrary information accumulated in the means are prescribed. And a means capable of retrieving based on the information of 1., a quality control system in semiconductor manufacturing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP40039390A JP2925332B2 (en) | 1990-12-04 | 1990-12-04 | Quality control method in semiconductor manufacturing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP40039390A JP2925332B2 (en) | 1990-12-04 | 1990-12-04 | Quality control method in semiconductor manufacturing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0653104A true JPH0653104A (en) | 1994-02-25 |
| JP2925332B2 JP2925332B2 (en) | 1999-07-28 |
Family
ID=18510307
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP40039390A Expired - Lifetime JP2925332B2 (en) | 1990-12-04 | 1990-12-04 | Quality control method in semiconductor manufacturing |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2925332B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020230398A1 (en) * | 2019-05-13 | 2020-11-19 | 株式会社日立製作所 | Quality control device, quality control method, and quality control program |
-
1990
- 1990-12-04 JP JP40039390A patent/JP2925332B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020230398A1 (en) * | 2019-05-13 | 2020-11-19 | 株式会社日立製作所 | Quality control device, quality control method, and quality control program |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2925332B2 (en) | 1999-07-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US8000827B2 (en) | Processing information management system in a plasma processing tool | |
| US11960443B2 (en) | Block data storage system in an event historian | |
| US9842134B2 (en) | Data query interface system in an event historian | |
| KR880004497A (en) | Machine execution method and device for determining compliance of technical specification of complex process equipment | |
| KR101455880B1 (en) | Primary server architectural networking arrangement and methods therefor | |
| CN115757363B (en) | Multi-level management method and system for three-dimensional cadastral database | |
| CN113255438B (en) | Structured video file marking method, system, host and storage medium | |
| JPH0653104A (en) | Quality control system in semiconductor manufacture | |
| JP3431239B2 (en) | Information retrieval system | |
| JPH08106408A (en) | System and method for operation information access log gathering management | |
| JP2800716B2 (en) | Manufacturing process management system | |
| CN109508318B (en) | Memory space counting method and device, electronic equipment and readable storage medium | |
| JP2003316794A (en) | Data collection/storage method | |
| CN112579471B (en) | Method and device for processing software test information | |
| JP2003249961A (en) | Method, device and program for storing traffic information, recoding medium recorded with the program, and method, device and program for retrieving traffic information, and recording medium recorded with the program | |
| JPH04312188A (en) | System for collecting data | |
| JPH0785093A (en) | Method for automatically setting index | |
| JP3242936B2 (en) | Data compression storage device and storage method thereof | |
| JPH0528386A (en) | Entrance and exit control information matching device | |
| JPH01183706A (en) | Plant analyzing device | |
| JPH06214637A (en) | History data processor | |
| JPH11272306A (en) | Process management device and system, its controlling method and storage medium | |
| CN116860896A (en) | Intelligent data classification management method for data operation system | |
| JP4372387B2 (en) | Product manufacturing history management system and product manufacturing history management method | |
| JPH05181720A (en) | Data base management system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090507 Year of fee payment: 10 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090507 Year of fee payment: 10 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100507 Year of fee payment: 11 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110507 Year of fee payment: 12 |
|
| EXPY | Cancellation because of completion of term | ||
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110507 Year of fee payment: 12 |