JPH0652813A - Flat display and manufacture thereof - Google Patents

Abstract

PURPOSE:To obtain a flat display capable of keeping ultimate vacuum high and also the degree of vacuum high. CONSTITUTION:A basic board 1 with a fluorescent surface 3 provided on a main surface and a basic board 2 with a secondary electron emission source 4 provided on a main surface are faced against each other so that the fluorescent surface 3 is in opposite to the secondary electron emission source 4, and a plurality of through-holes 2a are made in the part of the basic board 2 in which the secondary electron emission source is not provided, and a getter container 5 is provided in the position corresponding to the through-holes 2a in the other surface of the basic board. Then, an exhaust tube communicating with the through-holes may be provided. Furthermore, when a thermal exhaust treatment is applied to the opposed basic boards, a thermal exhaust treatment is applied to the exhaust tube or the exhaust treatment may be applied thereto by applying electron beams to the fluorescent surface from the secondary electron emission source.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flat display in which a substrate having an electron emission source on one main surface and a substrate having a fluorescent surface on one main surface are opposed to each other so that the electron emission source and the fluorescent surface face each other. The present invention relates to a manufacturing method thereof.

[0002]

2. Description of the Related Art A display device is often used as a display device for displaying information such as characters and images, but in recent years, a small and thin display device has been demanded. There has been proposed a thin flat display device using. A typical example of the above flat panel display is a field emission display.
Display (Field Emission Dis)
Play, hereinafter abbreviated as FED. ) Is mentioned.

The FED is composed of a substrate on which a two-dimensional electron emission source is formed by arranging electron emission sources such as micro cold cathodes in a matrix according to pixels, and a phosphor which is color-separated with a black matrix as a boundary. The formed substrate is opposed to the two-dimensional electron emission source so that the phosphor is opposed to the two-dimensional electron emission source, and the phosphor is irradiated with an electron beam from the two-dimensional electron emission source to emit light from the phosphor onto the substrate. Is to be displayed.

The FED is manufactured through the following steps. First, a fluorescent material is applied to one main surface of a substrate made of glass or the like by a method such as a slurry method, a printing method, or an electrodeposition method to form a fluorescent surface, a frit seal is arranged around the fluorescent surface, and an oxidation treatment is applied to the substrate. Sinter the organic material above. At the same time,
On one main surface of the substrate having an exhaust hole penetrating to the outside,
A two-dimensional electron emission source is formed by arranging micro cold cathodes in a matrix according to pixels. Then, these two substrates are bonded to each other with a space as a spacer using a frit seal so that the phosphor and the two-dimensional electron emission source face each other. Next, an exhaust pipe subjected to oxidation treatment with a frit seal disposed at the joint is joined to the exhaust hole of the substrate, and the space between the substrates is exhausted from the exhaust pipe. At this time, the exhaust treatment is performed while the substrate is subjected to heat treatment in order to accelerate the exhaust. After the vacuum degree in the space between the substrates reaches a predetermined vacuum degree, a getter is arranged in the exhaust pipe to seal the exhaust pipe,
Get D.

[0005]

By the way, in an electron tube such as a CRT which has been conventionally used in a display device, the degree of vacuum required in the space between the electron emission source and the phosphor screen is 10.
It is about ^-3 to 10 ^-4 Pa, a high degree of vacuum is not required, and since the space is large, the getter scattering area is also wide, and the degree of vacuum does not change much due to the generation of some gas. . On the other hand, the FED is a very thin display device, and the degree of vacuum required for the space between the electron emission source and the phosphor screen, that is, the space between the substrates is as high as 10 ⁻⁶ Pa, and the space between the substrates is Since it is extremely narrow, the degree of vacuum changes greatly due to the generation of a small amount of gas. If the degree of vacuum in the space between the substrates decreases, the minute cold cathodes, which are the electron emission sources, are contaminated, which hinders the irradiation of the electron beam, and the durability of the FED is deteriorated.

However, in the above manufacturing method, F
When the ED is manufactured, since the exhaust holes are provided only at the end portions of the substrates and the space between the substrates is narrow, the exhaust efficiency is poor, the exhaust speed is slow, and the ultimate vacuum is low.
Further, a getter is arranged in the exhaust pipe to seal the exhaust pipe, but since the exhaust hole is provided only in one place on the substrate,
It takes time for the gas generated between the substrates after the sealing to be absorbed by the getter. Further, since the phosphor forming the phosphor screen formed on the one main surface of the substrate is powder, gas is generated by irradiation of the electron beam after the exhaust pipe is sealed. For this reason, it is difficult to maintain a high degree of vacuum in the space between the substrates of the FED, and a decrease in the degree of vacuum inside the FED leads to a decrease in the durability of the FED.

Therefore, the present invention has been proposed in view of the conventional circumstances, and provides a flat display capable of increasing the ultimate vacuum in the flat display and maintaining the high vacuum, and a manufacturing method thereof. With the goal.

[0008]

In order to achieve the above-mentioned object, according to the present invention, a substrate having an electron emission source on one main surface and a substrate having a fluorescent surface on one main surface are opposed to each other. In a flat display facing each other as described above, a plurality of through holes are formed in a portion of the substrate having an electron emission source on one main surface where the electron emission source is not provided, and the through holes on the back side of the substrate are provided. The getter container is provided at the above position.

The present invention also provides a flat display in which a substrate having an electron emission source on one main surface and a substrate having a fluorescent surface on one main surface are opposed to each other so that the electron emission source and the fluorescent surface face each other. A plurality of through holes are formed in a portion of the substrate having an electron emission source on the surface where the electron emission source is not provided,
An exhaust pipe communicating with these through holes is provided. At this time, the getter may be arranged in the exhaust pipe.

Further, according to the present invention, a substrate having an electron emission source on one main surface and a substrate having a fluorescent surface on one main surface are opposed to each other through a space so that the electron emission source and the fluorescent surface are opposed to each other, and the space between the substrates is increased. In the method of manufacturing a flat display in which the exhaust pipe is sealed after the exhaust pipe is heated and exhausted, the exhaust pipe is heated and exhausted before the exhaust pipe is sealed.

Further, according to the present invention, a substrate having an electron emission source on one main surface and a substrate having a fluorescent surface on one main surface are opposed to each other through a space so that the electron emission source and the fluorescent surface face each other, and the substrate In a method of manufacturing a flat display in which an exhaust pipe is sealed after heating and exhausting a space between the spaces, a phosphor screen is irradiated with an electron beam from an electron emission source before sealing the exhaust pipe. It is a thing.

Further, in the present invention, the electron emission source may be a micro cold cathode.

[0013]

In a thin flat display such as an FED, the degree of vacuum required in the flat display is high, and since the space in the flat display is small, the degree of vacuum changes greatly due to the generation of a small amount of gas. However, it contaminates the micro cold cathode, which is the electron emission source of the flat display, and reduces the durability of the flat display.

In the present invention, in a flat display in which a substrate having an electron emission source on one main surface and a substrate having a fluorescent surface on one main surface are opposed to each other such that the electron emission source and the fluorescent surface are opposed to each other, Since a plurality of through holes are formed in a portion of the substrate having the electron emission source on the surface where the electron emission source is not provided, and the getter container is provided at a position corresponding to the through hole on the back side of the substrate, a large amount of The getter can be stored, the getter can be scattered in a relatively wide range, and the gas generated in the flat display can be efficiently absorbed, so that the degree of vacuum in the flat display can be maintained high. .

The present invention also provides a flat display in which a substrate having an electron emission source on one main surface and a substrate having a fluorescent surface on one main surface are opposed to each other so that the electron emission source and the fluorescent surface face each other. A plurality of through holes are formed in a portion of the substrate having an electron emission source on the surface where the electron emission source is not provided,
Since an exhaust pipe communicating with these through holes is provided,
Exhaust efficiency when exhausting the inside of the flat display is good, and the ultimate vacuum in the flat display can be increased in a short time. At this time, if a getter is placed in the exhaust pipe, the exhaust efficiency in the flat display can be further increased, and the gas generated in the flat display can be efficiently absorbed, and the degree of vacuum in the flat display can be reduced. Can be kept high.

Further, according to the present invention, a substrate having an electron emission source on one main surface and a substrate having a fluorescent surface on one main surface are opposed to each other through a space such that the electron emission source and the fluorescent surface are opposed to each other, and In the manufacturing method of the flat display in which the exhaust pipe is sealed after the exhaust pipe is heated and exhausted, the exhaust pipe is heated and exhausted before the exhaust pipe is sealed. Since the gas is not discharged from the vicinity of the surface of the exhaust pipe after the exhaust pipe is sealed, the degree of vacuum in the flat display can be maintained high.

Further, according to the present invention, a substrate having an electron emission source on one main surface and a substrate having a fluorescent surface on one main surface are opposed to each other through a space so that the electron emission source and the fluorescent surface face each other, and the substrate In the method of manufacturing a flat display in which the exhaust pipe is sealed after heating and exhausting the space between them, the fluorescent screen is irradiated with an electron beam from an electron emission source before sealing the exhaust pipe. Since the contained gas is exhausted in advance, no gas is generated from the phosphor screen after the exhaust pipe is sealed, and the degree of vacuum in the flat display can be maintained high.

[0018]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Specific embodiments to which the present invention is applied will be described below with reference to the drawings. Example 1 In this example, an example of a flat display to which the present invention is applied will be described. In the flat display of the present embodiment, as shown in FIG. 1, a substrate 1 having a phosphor screen 3 formed on one main surface and a substrate 2 having a two-dimensional electron emission source 4 formed on one main surface are called a phosphor screen 3. This is a so-called FED in which the two-dimensional electron emission sources 4 are opposed to each other. The substrates 1 and 2 are joined to each other while forming a space between the substrates 1 and 2 by a frit seal 6 arranged around the phosphor screen 3 of the substrate 1. An enlarged view of the flat display of this embodiment is shown in FIG. Substrate 1 on which the phosphor screen 3 is formed
Is formed of a material, such as glass, which allows the light emission of the phosphor screen 3 to be seen from the outside. The phosphor screen 3 is composed of phosphors 8, 9 and 10 (usually red, green and blue) that are color-separated with the black matrix 7 as a boundary. On the other hand, the two-dimensional electron emission sources 4 are arranged in a matrix at positions corresponding to the phosphors 8, 9, 10 on the phosphor screen 3. In the two-dimensional electron emission source, as shown in FIG. 3, an electrode 11 is formed on a substrate 2 and an insulating layer 12 is formed.
The metal layer 13 having the gate 13a is arranged at a position corresponding to the electrode 11 via the. In the flat display of the present embodiment, a voltage is applied to the two-dimensional electron emission source 4 according to information, whereby the electron beam is emitted from the two-dimensional electron emission source 4 to the fluorescent screen 3 and the fluorescent surface 3 emits light. An image is formed on the substrate 1.

Further, in the flat display of this embodiment, as shown in FIG. 1, a plurality of through holes 2a are formed in the portion of the substrate 2 where the two-dimensional electron emission source 4 is not formed, and the substrate 2 The getter container 5 having, for example, a semicircular cross section is provided at a position corresponding to the through hole 2a on the surface where the two-dimensional electron emission source 4 is not provided, and the getter is arranged inside. The number and size of the through holes 2a may be set so long as the strength of the substrate 2 is not impaired.
The opening a is formed so as to fit inside the opening of the getter container 5. The diameter of the through holes is preferably 5 to 10 mm, and may be less than 5 mm when a large number are provided. Further, regarding the shape of the getter container 5, in addition to the semi-circular cross-section described above, a square cross-section, a boat-shaped shape, etc. may be mentioned. The shape may be any of those that do not interfere with the two-dimensional electron emission source 4. Further, the getter sealed in the getter container 5 may be any of an evaporation type, a non-evaporation type, and a mixed type of an evaporation type and a non-evaporation type. Examples of the evaporation type include a barium getter and the like. Ti + as a mold
(Zr-Al), Ti + (Zr-V-Fe), Ti + M
and the like. The getter may have any shape such as a ring shape, a rod shape, or a wire shape. As for the method of attaching the getter to the getter container 5, the getter may be activated from outside the getter container 5 and may be attached so that the getter does not come into contact with the getter container 5. For example, a method may be used in which fixing plates are provided at both ends inside the getter container 5, a wire is passed over this, and the getter is fixed to the wire so that the getter does not come into contact with the getter container 5. The getter may be attached to the getter container 5 before the getter container 5 is bonded to the substrate 2. When an evaporation type getter is used, it is necessary to provide a shield plate or the like in the through hole 2a so that the getter does not diffuse into the space between the substrates 1 and 2 through the through hole 2a.

In the flat display of this embodiment, a plurality of through holes are formed in the portion of the substrate where the two-dimensional electron emission source is not provided, and the surface of the substrate where the two-dimensional electron emission source is not provided. A getter container is provided at a position corresponding to the through hole of the substrate. Since the getter is arranged in the getter container, a large amount of getter can be stored, and even if a gas is generated in the vacuum space between the substrates, a plurality of through holes are formed. Since it is housed in the getter container through the hole and quickly absorbed by the getter, the degree of vacuum in the flat display can be maintained high, the two-dimensional electron emission source is less likely to be contaminated, and the durability of the flat display can be improved. It is possible. Further, since the getter container for the flat display of this embodiment has a flat shape, the thickness of the flat display can be reduced.

Further, in the flat display of this embodiment, as shown in FIG. 4, a plurality of through holes 2 are formed in the portion of the substrate 2 where the two-dimensional electron emission source 4 is not formed.
The exhaust pipe 14 may be provided so as to communicate with a. The number and size of the through holes 2a may be set within a range that does not impair the strength of the substrate 2 as described above, but the through holes 2a are set within the opening of the exhaust pipe 14 so that the inner diameter of the through holes 2a is small. 7-10 mm is desirable. As shown in FIG. 5, the exhaust pipe 14 is composed of a boat portion 15 having a semicircular cross section and a pipe portion 16, and an end portion 16 a of the pipe portion 16 is sealed when the exhaust pipe 14 is sealed. The shape of the exhaust pipe 14 is not particularly limited, and for example, the cutout portion 1 as shown in FIG.
7a and a pipe part 17b, and an exhaust pipe 1 having a polishing part 18a and a pipe part 18b as shown in FIG.
8 is mentioned. Further, as shown in FIG. 8, an exhaust pipe 19 composed of a getter storage portion 19a and a pipe portion 19b.
May be used as a getter container. The getter used at this time is, as described above, an evaporation type, a non-evaporation type,
Both the evaporation type and the non-evaporation type may be used, and the shape is not particularly limited. As for the method of attaching the getter, it is sufficient that the getter can be activated from outside the getter container as described above, and the getter is attached so as not to contact the getter container.

The flat display having the exhaust pipe 14 as described above is manufactured by the following manufacturing method. That is, as shown in FIG. 9, the phosphor screen 3 is formed on one main surface of the substrate 1, and the frit seal 6 is arranged on the periphery thereof. An electron emission source 4 is formed on one main surface of the substrate 2, and a plurality of through holes 2a are formed at positions where the two-dimensional electron emission source 4 is not formed. In addition, the opening 15a of the boat 15 of the exhaust pipe 14
Then, the frit seal 20 is formed. Then, after the substrate 1 and the exhaust pipe 14 were oxidized, the substrates 1 and 2 were color-separated so that the phosphor screen 3 and the two-dimensional electron emission source 4 face each other as shown in FIG. The fluorescent tube and the matrix-shaped two-dimensional electron emission source 4 are opposed to each other so that their positions match each other, and the exhaust pipe is arranged so that the boat portion 15 of the exhaust pipe 14 is located at a position corresponding to the through hole 2a provided in the substrate 2. 14 is opposed to the substrate 2, and the substrates 1 and 2 and the exhaust pipe 14 are joined.
After that, the substrates 1 and 2 joined together are heated while being exhausted from the end portion 16a of the pipe portion 16 of the exhaust pipe 14. Exhaust pipe 14 after sufficient exhaustion (attaining vacuum degree of 10 ^-6 Pa)
Is sealed.

In the flat display of this embodiment, since a plurality of through holes are formed in the substrate, the air in the space between the substrates easily flows during exhaust, the exhaust efficiency is good, and the exhaust efficiency is high in a short time. A vacuum degree can be achieved. Further, since the exhaust pipe has a flat shape, it is possible to reduce the thickness of the flat display, the exhaust pipe is less likely to be damaged, and the durability of the flat display is improved. Further, when the exhaust pipe is constituted by the getter housing portion and the pipe portion as described above, the getter may be sealed in the exhaust pipe after the exhaust treatment, and gas is generated in the vacuum space between the substrates. Even though it is housed in the getter container through multiple through holes and quickly absorbed by the getter, the vacuum level in the flat display can be maintained at a high level, the two-dimensional electron emission source is less likely to be contaminated, and the flat display is durable. It is possible to improve the property.

Example 2 In this example, an example of a method for manufacturing a flat display to which the present invention is applied will be described. In the flat display manufacturing method of the present embodiment, as shown in FIG. 11, a phosphor screen 23 is formed on one main surface of a substrate 21, and a frit seal 25 is arranged on the periphery thereof. An electron emission source 24 is formed on one main surface of the substrate 22, and a through hole 22a is formed at a position where the two-dimensional electron emission source 24 is not formed. Further, the frit seal 28 is formed in the opening 26a of the suction portion 26 of the exhaust pipe 25 which is constituted by the suction portion 26 and the pipe portion 27. After oxidizing the substrate 21 and the exhaust pipe 25, the substrates 21 and 22 are opposed to each other so that the phosphor screen 23 and the two-dimensional electron emission source 24 face each other as shown in FIG. The exhaust pipe 25 is arranged so that the suction portion 26 of the exhaust pipe 25 is located at a position corresponding to the hole 22a.
In accordance with 2, the substrates 21 and 22 and the exhaust pipe 25 are joined. Thereafter, the heating and exhausting device as shown in FIG. 13 is used to exhaust the air from the end portion 27a of the pipe portion 27 of the exhaust pipe 25 while heating the bonded substrates 21 and 22 and the exhaust pipe 25. After exhaustion is sufficient (ultimate vacuum degree of 10 ^-6 P
a), the getter 28 is connected to the exhaust pipe 2 as shown in FIG.
5, and the exhaust pipe 25 is sealed.

As shown in FIG. 13, the heating / exhausting device includes a heating furnace 31, a chamber 32, and a turbo pump 3.
3, an exhaust system 37 including a solenoid valve, a thermocouple gauge 34, a rotary pump 35, and an ionization vacuum gauge 36. A pre-baking / chip-off jig 39 is arranged in the heating furnace 31. Bonded substrates 2
1, 22 and the exhaust pipe 25 are held by a jig 38 connected to the exhaust system 37 and arranged in the heating furnace 31.
The tube portion 27 of No. 5 is held by a pre-baking / chip-off jig 39 in the heating furnace 31. As shown in FIG. 14, the pre-baking / chip-off jig 39 has guide lids 41, 4 having through holes 41a, 42a in the upper and lower ends of a main body 40 in the center.
2, a ribbon heater 44 wound in a coil shape is arranged as a heating device inside the main body 40, and a furnace material 43 is arranged around the ribbon heater 44.
The pipe portion 27 of the exhaust pipe 25 is guided by the guide lids 41 and 42 and the ribbon heater 44 to penetrate the center of the tip-off jig 39. Although the ribbon heater is used as the heating device in the heating and exhausting device of this embodiment, a gas burner may be used.

Therefore, the substrate 2 is heated by the heating and exhausting device.
When the heating exhaust process of 1 and 22 is performed, exhaust is performed by the exhaust system 37 through the exhaust gap 25 while heating by the heating furnace 31. The heating and exhausting process at this time is performed by a heating cycle as shown in FIG. The heating cycle is a heating step a in which the temperature is raised from room temperature to 350 to 400 ° C. at 5 to 6 ° C./min, and 30 to 6 at 350 to 400 ° C.
Insulation process b for holding for 0 minutes, 350 ~ at 5-6 ° C / min
It comprises a cooling step c for cooling from 400 ° C. to room temperature. In the flat display manufacturing method of this embodiment, the exhaust pipe 25 is provided during the cooling step c of the heating cycle.
The heating and evacuation process is performed. In the flat display manufactured according to this embodiment, the substrate 21,
Since the space between 22 is very small, the generation of some gas greatly reduces the degree of vacuum. Therefore, the exhaust pipe 25 is heated and exhausted so that the gas contained in the vicinity of the surface of the exhaust pipe 25 is also exhausted to prevent a decrease in the degree of vacuum after the exhaust pipe 25 is sealed. At this time, since the volume of the exhaust pipe 25 is larger than the space between the substrates 21 and 22, the gas exhausted from the exhaust pipe 25 is exhausted so as not to affect the degree of vacuum in the space between the substrates 21 and 22. It is necessary to heat and exhaust the pipe 25. That is, in the present embodiment, the exhaust pipe 25 is provided during the cooling step c in the heating cycle in which the exhaust of the space between the substrates 21 and 22 is substantially completed as described above.
Is being heated and exhausted. When the softening temperature of the material of the exhaust pipe 25 is Ts, the heating exhaust process of the exhaust pipe 25 is T
It is desirable to carry out for several minutes under a temperature condition of about s to Ts + 100 ° C. When the heating / exhaust treatment temperature is lower than the softening temperature Ts, the gas contained in the vicinity of the exhaust pipe surface is not sufficiently exhausted, and when it is higher than Ts + 100 ° C., the exhaust pipe is deformed to reduce the pipe diameter and reduce the exhaust efficiency. Will lower it. For example, when the exhaust pipe is made of lead glass having a softening point of 530 ° C., heating and exhausting treatment is performed at 530 to 630 ° C., and in the case of borosilicate glass having a softening point of 785 ° C. which is hard glass, 785 to 885. In the case of borosilicate glass having a softening point of 821 ° C. and a softening point of 821 ° C., heating and exhausting treatment may be performed at 821 to 921 ° C.

Therefore, the relationship between the heating and exhausting process of the exhaust pipe and the ultimate vacuum degree was investigated using the above heating and exhausting device. Using a borosilicate glass tube having a softening point of 785 ° C. as an exhaust pipe, heating and exhausting the exhaust pipe at a heating temperature of 785 to 885 ° C. for about 3 minutes is repeated three times in a cooling step c during a heating cycle as shown in FIG. I went. The ultimate vacuum was measured by the ionization vacuum gauge 36 in the heating and exhausting device shown in FIG. When repeating the heating and exhausting process,
Each time one process is completed, the pre-baking shown in FIG.
The ribbon heater 44 in the chip-off jig 39 was turned off, cooled to the initial state, and then heated and exhausted again. The results are shown in Fig. 16. At this time, the first time and 2
The third treatment was performed for 3 minutes, and the third treatment was performed for 3 minutes and 40 seconds to seal the exhaust pipe. As shown in FIG. 16, it was found that the degree of vacuum is increased by performing the heating and exhausting treatment on the exhaust pipe, and the ultimate degree of vacuum is increased and becomes stable as the number of heating and exhausting treatments is increased. .

Next, FIG. 15 shows the heating and exhausting process of the exhaust pipe for about 3 minutes at the heating temperature of 785 to 885 ° C. using the borosilicate glass tube having the softening point of 785 ° C. as the exhaust pipe by using the above heating and exhausting device. Cooling step c during heating cycle
The degree of vacuum reached was compared between those obtained by repeating the above three times and those obtained by performing the exhaust treatment for the same time without performing the exhaust pipe heat treatment during the cooling step of the heating cycle. FIG. 17
The results are shown in Figure 4. The change in the ultimate vacuum during the third heating and exhaust treatment of the exhaust pipe is shown by the solid line in the figure, and the change in the ultimate vacuum when only the exhaust treatment is performed for the same time is indicated by the dashed line and one point in the figure. Shown by a chain line. As shown in FIG. 17, a great difference was found in the ultimate vacuum degree depending on whether or not the exhaust pipe was heated and exhausted.

According to the method of manufacturing a flat display of this embodiment, a fluorescent screen and a two-dimensional electron emission source are formed on the two surfaces.
When the substrates and the exhaust pipe are joined and then heated and exhausted by a predetermined heating cycle, the exhaust pipe is heated and exhausted during the cooling process of the heating cycle. The gas contained in the vicinity of the surface of the exhaust pipe can be exhausted without affecting the temperature, and the space between the substrates after the exhaust pipe is sealed, that is, the degree of vacuum in the flat display can be maintained high. After increasing the degree of vacuum, the getter is placed in the exhaust pipe to seal the exhaust pipe.
The getter can be effectively operated after sealing, and the degree of vacuum in the flat display can be maintained high. Therefore,
It is possible to improve the durability of the flat display.

Further, in the flat display manufacturing method of this embodiment, as shown in FIG. 12, a substrate 21 having a phosphor screen 23 formed on one main surface and a two-dimensional electron emission source 24 formed on one main surface are formed. The substrate 22 facing each other so that the phosphor screen 23 and the two-dimensional electron emission source 24 face each other.
2 and the exhaust pipe 25 are joined to each other, and the substrates 21 and 22 are heated and exhausted.
Voltage is applied to an electron emission source (not shown) formed in 2.
An exhaust process may be performed by irradiating a phosphor screen (not shown) formed on the substrate 21 with an electron beam from a two-dimensional electron emission source. Then, after exhaustion is sufficiently performed (attaining vacuum degree 10
^-6 Pa), the getter 28 is arranged in the exhaust pipe 25 to seal the exhaust pipe 25.

When the substrates 21 and 22 are heated and exhausted, a heating cycle as shown in FIG. 15 is performed. In the flat display manufacturing method of the present embodiment, after performing heating and exhaust treatment by the heating cycle,
A predetermined voltage is applied to the substrate 22 from a power source, a two-dimensional electron emission source 24 on the substrate 22 irradiates the fluorescent screen 23 on the substrate 21 with an electron beam, and the gas discharged from the fluorescent screen 23 is exhausted. In the flat display manufactured according to this embodiment, since the space between the substrates 21 and 22 is very small, the generation of some gas greatly lowers the degree of vacuum. However, since the phosphor forming the phosphor screen 23 formed on one of the substrates 21 is powder, the gas contained in the phosphor is released by the irradiation of the electron beam, which causes the vacuum degree to be lowered. . Therefore, the substrate 2
After the heating and exhausting treatment of 1 and 22, the phosphor screen 23 of the substrate 21 is irradiated with an electron beam from the two-dimensional electron emission source 24 of the substrate 22, the gas in the phosphor screen 23 is exhausted, and the space between the substrates 21 and 22 is That is, it is intended to maintain a high degree of vacuum in the flat display. At this time, the substrates 21 and 22
In order not to affect the degree of vacuum in the space between them, and since unnecessary irradiation of the electron beam may damage the fluorescent screen 23, the irradiation of the electron beam must be gradually performed. Irradiation of the electron beam may be performed by using the degree of vacuum change of two digits as a guide. Further, a getter may be placed in the exhaust pipe 25 before irradiation with the electron beam and partially activated in advance to prevent damage to the two-dimensional electron emission source 24 due to generation of gas from the fluorescent screen 23. In this case, the getter may be activated and sealed again before the exhaust pipe 25 is sealed.

Therefore, the state of gas generation from the fluorescent screen was investigated by irradiating the fluorescent screen with an electron beam. That is, the change in the degree of vacuum when the phosphor screen was irradiated with an electron beam in vacuum was measured. As shown in FIG. 18, the measuring device has a chamber 51, a turbo molecular pump 52, and a solenoid valve 5.
3, an exhaust system 55 composed of a rotary pump 54 is connected, and a glass 56 having an unillustrated phosphor screen on one main surface, an electron beam source 57, and a phosphor screen and an electron beam source 57 are connected in the chamber 51. They are arranged so as to face each other, and a vacuum gauge 58 capable of measuring the degree of vacuum in the chamber 51, an electron beam source 57, and an electrode terminal 59 connected to the glass 56 are arranged outside the chamber 51.
When performing the measurement with the above-mentioned measuring device, the exhaust system 55 evacuates the chamber 51 to reach a predetermined vacuum degree, and then a predetermined voltage is applied to the electron beam source 57 from the electrode terminal 59, and an electron beam is emitted. In order to control the direction of the beam, a voltage is also applied to the glass 56 to irradiate the fluorescent screen with the electron beam, and the change in the degree of vacuum at that time is measured by the vacuum gauge 58.

In this example, a phosphor is applied to a glass with ITO in a size of 50 × 50 mm to form a phosphor screen, and the phosphor is subjected to an oxidation treatment at 430 ° C. for 1 hour to remove organic substances in the phosphor screen. Burned, and vacuum degree 10 ^{-5 for} degassing
Oxidation treatment is performed for 6 hours in an atmosphere of Pa, 450 ° C.,
A glass 56 having a phosphor screen was obtained. This glass 56
Is placed in the chamber 51 as shown in FIG. 18, and exhaust is performed by the exhaust system 55 until the degree of vacuum becomes 10 ⁻⁶ .
The electron beam source 57 irradiates the glass 56 having the fluorescent surface with an electron beam. The irradiation conditions are as follows: phosphor screen voltage 100 V, beam amount 15 mA, irradiation area 25.0 c
It was m ² . The change in the degree of vacuum measured by the vacuum gauge 58 at that time is shown in FIG. From the result of FIG.
At the initial stage, it was confirmed that the degree of vacuum was greatly changed by the gas generated from the phosphor screen by the electron beam irradiation. In the above measuring device, the chamber 51
A chamber having a volume of 3 liters is used as the chamber, and the turbo molecular pump 52 is evacuating at an evacuation rate of 300 liters / minute. Considering the results in FIG. You can see that

According to the manufacturing method of the flat display of the present embodiment, the fluorescent screen and the two-dimensional electron emission source are formed on the two surfaces.
After the substrate and the exhaust pipe are joined and heated and exhausted by a predetermined heating cycle, the fluorescent surface is irradiated with an electron beam, so that the vacuum degree in the space between the substrates is not affected. The gas contained in the surface can be exhausted, and the space between the substrates, that is, the degree of vacuum in the flat display can be maintained high. Further, since the getter is arranged after the degree of vacuum is increased, the getter can be effectively operated after the exhaust pipe is sealed, and the degree of vacuum in the flat display can be maintained high. Therefore, it is possible to improve the durability of the flat display.

[0035]

As is apparent from the above description, in the present invention, a substrate having an electron emission source on one principal surface and a substrate having a phosphor screen on one principal surface are opposed to the electron emission source and the phosphor surface. In the flat display thus facing each other, a plurality of through holes are formed in a portion of the substrate having an electron emission source on one main surface where the electron emission source is not provided, and the through holes on the back surface side of the substrate correspond to the through holes. Since the getter container is provided at the position, the getter scatters in a relatively wide range, and the gas generated in the flat display can be efficiently absorbed through the plurality of through holes to maintain a high degree of vacuum in the flat display. Therefore, the electron emission source is less likely to be contaminated, and the durability of the flat display can be improved.

Further, the present invention provides a flat display in which a substrate having an electron emission source on one main surface and a substrate having a fluorescent surface on one main surface are opposed to each other so that the electron emission source and the fluorescent surface face each other. A plurality of through holes are formed in a portion of the substrate having an electron emission source on the surface where the electron emission source is not provided,
Since an exhaust pipe communicating with these through holes is provided,
The exhaust efficiency when exhausting the inside of the flat display is good, the ultimate vacuum inside the flat display can be increased in a short time, the vacuum inside the flat display can be maintained high, and the electron emission source is contaminated. Since it is difficult to do so, the durability of the flat display can be improved. At this time, when a getter is arranged in the exhaust pipe, the exhaust efficiency can be further increased, the gas generated in the flat display can be efficiently absorbed, and the vacuum degree in the flat display can be maintained high. Since the degree of vacuum in the flat display can be maintained high and the electron emission source is unlikely to be contaminated, the durability of the flat display can be improved.

Further, according to the present invention, a substrate having an electron emission source on one main surface and a substrate having a fluorescent surface on one main surface are opposed to each other through a space so that the electron emission source and the fluorescent surface are opposed to each other, and In the manufacturing method of the flat display in which the exhaust pipe is sealed after the exhaust pipe is heated and exhausted, the exhaust pipe is heated and exhausted before the exhaust pipe is sealed. Since the gas is not discharged from the exhaust pipe after the exhaust pipe is sealed, the degree of vacuum in the flat display can be maintained high, and the durability of the flat display can be improved. Is.

Further, according to the present invention, a substrate having an electron emission source on one main surface and a substrate having a fluorescent surface on one main surface are opposed to each other through a space so that the electron emission source and the fluorescent surface are opposed to each other, and the substrate is In the method of manufacturing a flat display in which the exhaust pipe is sealed after heating and exhausting the space between them, the fluorescent screen is irradiated with an electron beam from an electron emission source before sealing the exhaust pipe. Since the contained gas will be exhausted in advance, gas will not be generated from the phosphor screen after the exhaust pipe is sealed, and the degree of vacuum inside the flat display can be maintained high, improving the durability of the flat display. It is possible.

In the flat display of the present invention and the flat display manufactured by the method of manufacturing a flat display of the present invention, since the inside of the flat display is kept in a high vacuum state, it is easy to take out an electron beam from the electron emission source, and fluorescence is emitted. The brightness of the surface can be improved and a good image can be obtained. Further, since the degree of vacuum is high, it is easy to make the electric field distribution uniform and a good image can be obtained.

[Brief description of drawings]

FIG. 1 is a perspective view showing an embodiment of a flat display to which the present invention is applied.

FIG. 2 is an enlarged view showing an embodiment of a flat display to which the present invention is applied.

FIG. 3 is an enlarged view showing a two-dimensional electron emission source of one embodiment of a flat display to which the present invention is applied.

FIG. 4 is a perspective view showing another embodiment of the flat display to which the present invention is applied.

FIG. 5 is a perspective view showing an example of an exhaust pipe arranged in a flat display to which the present invention is applied.

FIG. 6 is a perspective view showing another example of an exhaust pipe arranged in a flat display to which the present invention is applied.

FIG. 7 is a perspective view showing still another example of an exhaust pipe arranged in a flat display to which the present invention is applied.

FIG. 8 is a perspective view showing still another example of the exhaust pipe arranged in the flat display to which the present invention is applied.

FIG. 9 is a view sequentially showing steps of manufacturing a flat display to which the present invention is applied, in which a phosphor screen, a frit seal, and a two-dimensional electron emission source are respectively formed on one main surface of a pair of substrates, and a frit is formed on an exhaust pipe. It is a perspective view showing a process of arranging a seal.

FIG. 10 is a side view showing a step of joining a pair of substrates having a phosphor screen and a two-dimensional electron emission source formed on one main surface to an exhaust pipe.

FIG. 11 is a view showing a method of manufacturing a flat display to which the present invention is applied in the order of steps, in which a phosphor screen, a frit seal, and a two-dimensional electron emission source are respectively formed on one main surface of a pair of substrates, and a frit is formed on an exhaust pipe. It is a perspective view showing a process of arranging a seal.

FIG. 12 is a side view showing a step of joining a pair of substrates having a phosphor screen and a two-dimensional electron emission source formed on one main surface to an exhaust pipe.

FIG. 13 is a schematic diagram showing a configuration example of a heating and exhausting device that performs a heating and exhausting process on a pair of substrates and an exhaust pipe that are joined together.

FIG. 14 is a schematic diagram showing a configuration example of a pre-baking / chip-off jig of a heating / exhausting device.

FIG. 15 is a diagram showing a heating cycle in a heating and exhausting process.

FIG. 16 is a diagram showing changes in ultimate vacuum when an exhaust pipe is heated and exhausted.

FIG. 17 is a diagram showing changes in ultimate vacuum when the exhaust pipe is heated and exhausted and when the exhaust pipe is only exhausted.

FIG. 18 is a schematic diagram showing a configuration example of a vacuum degree measuring device.

FIG. 19 is a diagram showing changes in the degree of vacuum when the phosphor screen is irradiated with an electron beam.

[Explanation of symbols]

1, 2, 21, 22 ··· Substrate 3, 23 ···· Phosphor screen 4, 24 ··· · Two-dimensional electron emission source 5 ···・ ・ ・ ・ Getter container 6,25 ・ ・ ・ ・ Frit seal 14, 25 ・ ・ ・ ・ Exhaust pipe 31 ・ ・ ・ ・ Heating furnace 37・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ Exhaust system 39 ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ Pre-baking / Chip-off jig

Claims (7)

[Claims] 1. A flat display in which a substrate having an electron emission source on one main surface and a substrate having a fluorescent surface on one main surface are opposed to each other so that the electron emission source and the fluorescent surface face each other. A flat plate characterized in that a plurality of through holes are formed in a portion of the substrate having the emission source where the electron emission source is not provided, and a getter container is provided at a position corresponding to the through holes on the back side of the substrate. display. 2. A flat display in which a substrate having an electron emission source on one principal surface and a substrate having a phosphor screen on one principal surface are opposed to each other so that the electron emission source and the phosphor surface are opposed to each other. A flat display characterized in that a plurality of through holes are formed in a portion of the substrate having the emission source where the electron emission source is not provided, and an exhaust pipe communicating with these through holes is provided. 3. The flat display according to claim 2, wherein a getter is arranged in the exhaust pipe. 4. The flat display according to claim 1, wherein the electron emission source is a micro cold cathode. 5. A substrate having an electron emission source on one main surface and a substrate having a fluorescent surface on one main surface are opposed to each other through a space so that the electron emission source and the fluorescent surface are opposed to each other, and a space is provided between the substrates. On the other hand, a method of manufacturing a flat display in which an exhaust pipe is sealed after being heated and exhausted, wherein the exhaust pipe is heated and exhausted before sealing the exhaust pipe. 6. A substrate having an electron emission source on one main surface and a substrate having a fluorescent surface on one main surface are opposed to each other with a space so that the electron emission source and the fluorescent surface are opposed to each other, and a space is provided between the substrates. On the other hand, in a method for manufacturing a flat display in which an exhaust pipe is sealed after being heated and exhausted, a flat display characterized in that a fluorescent screen is irradiated with an electron beam from an electron emission source before sealing the exhaust pipe. Method. 7. The method for manufacturing a flat display according to claim 5, wherein the electron emission source is a micro cold cathode.