JPH0651604U - Motion transmission device - Google Patents

Abstract

(57) [Summary] [Purpose] The object is to suppress the temperature rise by increasing the amount of heat radiation from a member that becomes hot even in a vacuum atmosphere. [Structure] A member that moves in a container in a vacuum atmosphere and has a high temperature is provided with fins facing the inner wall of the container to radiate heat.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a motion transmission device applied to, for example, a reciprocating compressor, a scroll type vacuum pump, or the like.

[0002]

[Prior art]

 FIG. 5 is an explanatory diagram of a conventional motion transmission device used in a reciprocating compressor or the like. In the figure, this motion transmission device converts rotational motion into reciprocating motion in a vacuum container 1 with several Torr or more inside, and transfers it to reciprocating compressors, scroll type vacuum pumps, etc. used in this vacuum atmosphere. The rotary shaft 3 is supported by the bearing 2. A crank arm 4 is attached to an end of the rotary shaft 3, and a link 5 is connected to the crank arm 4 via a rolling bearing (not shown). Reference numeral 10 in the figure is a lid of the empty container 1.

[0003]

[Problems to be solved by the device]

 In the conventional motion transmitting device as described above, the ambient gas exists only at a very low pressure in the vacuum container 1 and there is not enough medium for cooling, and the oil evaporates under vacuum to scatter oil. The temperature of the bearing may exceed 100 ° C due to inability to cool, etc., and the grease for bearing lubrication deteriorates and frequent grease replacement is required. In particular, in devices handling semiconductors, corrosive gas is used at a very low pressure, but when fluorine grease that is resistant to this corrosive gas is used for the bearings, fluorine grease has a large specific gravity. There is a lot of heat generation, and the bearing temperature rises considerably.

[0004]

[Means for Solving the Problems]

 The motion transmission device according to the present invention is intended to solve the above-mentioned problems, and is provided with a fin for radiating heat, which is provided on a member that moves in a vacuum atmosphere container and has a high temperature so as to face the inner wall of the container. Is characterized by.

[0005]

[Action]

 That is, in the motion transmitting device according to the present invention, fins are provided on a member that moves in a container in a vacuum atmosphere and has a high temperature so as to face the inner wall of the container to radiate heat. The amount of heat released from the member that becomes hot through the fins to the inner wall of the container increases, and the temperature rise is suppressed.

[0006]

【Example】

 1 to 3 are explanatory views of a motion transmitting device according to an embodiment of the present invention. In the figure, the motion transmission device according to the present embodiment is used for a reciprocating compressor and the like. In the figure, reference numeral 1 is a vacuum container having an inside of several Torr or more, and 3 is a vacuum container 1 in which a bearing 2 is installed. It is a rotating shaft supported through. A crank arm 4 is attached to the end of the rotary shaft 3, and a link 5 is connected to the crank arm 4 via a rolling bearing (not shown). The rolling bearing provided at the portion connecting the crank arm 4 and the link 5 is filled with grease, and the holding plate 6 of the link 5 fills the grease.

The holding plate 6 is made of stainless steel, and a fin having a groove-like shape is formed on the surface of the holding plate 6. The holding plate 6 is attached to the link 5 by a mounting bolt 7. The fin 8 is made of an aluminum alloy and is attached to the pressing plate 6 by the attaching bolt 7 toward the inner wall of the vacuum container 1. The fins 8 are twisted and attached to increase the amount of heat radiation. The holding plate 6 having these fins is fixed in close contact with the link 5 by a mounting bolt 7. Reference numeral 10 in the drawing is a lid for closing the opening of the vacuum container 1.

As described above, since the fins are provided on the holding plate 6 that attaches the rolling bearing to the link 5 and the fins 8 are attached to the holding plate 6, the heat generated by the rolling bearing is transferred to these fins. The fins radiate a vacuum atmosphere of several Torr or more in the vacuum container 1, and the heat is radiated from the vacuum atmosphere to the outside through the vacuum container 1. Further, since these fins rotate, a slight amount of convection also occurs and the amount of heat radiation increases. In this way, the amount of heat radiated from the rolling bearing is increased several times, and the bearing temperature can be reduced by about 20 to 30% as compared with the conventional bearing. FIG. 3 shows this heat releasing effect, and shows that the heat releasing effect is very high in this motion transmitting device when the reference temperature of the rolling bearing in the conventional motion transmitting device is T. In this motion transmitting device, the holding plate 6 is processed into an uneven shape to form fins, and the fins 8 are attached to the holding plate 6, but the shape and material of these fins are special. It is not limited in this way. Further, although the holding plate 6 is provided with fins in the present device, it is possible to provide the link 5 or the like with fins or to attach the fins 8.

In the conventional motion transmission device, the ambient gas exists only at a very low pressure in the vacuum container, and there is not enough medium for cooling, and the oil evaporates under vacuum to cool the oil spray. The temperature of the bearing may exceed 100 ° C due to failure to maintain the bearing, and the grease for bearing lubrication deteriorates, requiring frequent grease replacement. In particular, in equipment that handles semiconductors, corrosive gas is used at a very low pressure, but when fluorine grease that is resistant to this corrosive gas is used for bearings, fluorine grease has a large specific gravity. However, in this motion transmission device, fins are engraved on the holding plate 6 to which the rolling bearing is attached to improve the heat dissipation effect, and at the same time, the holding plate 6 is closely attached to the vacuum container. 1 The fins 8 are provided toward the inner wall to enhance the heat radiation effect by radiation, and the heat radiation amount due to convection from the rolling bearing to the vacuum container 1 of several Torr or more is increased with the movement of the link 5, and The temperature rise of the bearing is suppressed and the grease replacement period can be extended several times longer than before.

FIG. 4 is an explanatory view of a motion transmitting device according to another embodiment of the present invention. In the figure, the motion transmission device according to the present embodiment is used for a scroll type vacuum pump or the like, and the scroll 11 and the scroll 12 rotate facing each other in a vacuum atmosphere of several Torr or more. The center and the center of the scroll 12 are provided slightly eccentric to each other. In this scroll type vacuum pump, the center of the scroll 12 is eccentrically provided, and in this case, the scroll 12 moves like a crank. The meshing positions of the scrolls 11 and 12 move with rotation, but the cross-sectional area is smaller at the center. Therefore, the gas in the scrolls 11 and 12 moves while being compressed from the outer peripheral portions of the scrolls 11 and 12 to the central portions thereof, and is collected in the central portions of the scrolls 11 and 12, and the high-pressure gas is discharged from the pump outlet. Is discharged. In such a compression process, the gas becomes hot and the scrolls 11 and 12 are also heated, but the fins 13 and 14 are provided on the outer surfaces of the scrolls 11 and 12, and the scrolls 11 and 12 are protected by the fins 13 and 14. Since the heat dissipation area is wide, the amount of heat dissipated by radiation and convection increases, and the same effects as the motion transmitting device according to the above-described embodiment can be obtained, such as cooling.

[0011]

[Effect of device]

 The motion transmitting device according to the present invention is configured as described above, and the temperature rise of the member which becomes high temperature is suppressed, so that the life of the member is extended.

[Brief description of drawings]

FIG. 1 (a) is a sectional view of a motion transmission device according to an embodiment of the present invention, and FIG. 1 (b) is a sectional view taken along line bb in FIG. 1 (a).
FIG.

FIG. 2 (a) is a front view of the fin, and FIG. 2 (b).
FIG. 4B is a sectional view taken along line bb in FIG.

FIG. 3 is an explanatory diagram of its operation.

FIG. 4 is a cross-sectional view of a scroll type vacuum pump according to another embodiment of the present invention.

5 (a) is a sectional view of a conventional motion transmission device, and FIG. 5 (b) is a bb arrow view in FIG. 5 (a).

[Explanation of symbols]

 1 Vacuum Container 2 Bearing 3 Rotating Shaft 4 Crank Arm 5 Link 6 Holding Plate 7 Mounting Bolt 8 Fin 10 Lid 11 Scroll 12 Scroll 13 Fin 14 Fin

Claims (1)

[Scope of utility model registration request] 1. A motion transmission device comprising a member that moves in a container in a vacuum atmosphere and has a high temperature, and a fin provided facing the inner wall of the container to radiate heat.