JPH06510582A - Electrostatically driven ultra-compact diaphragm micropump - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed description of the invention] Electrostatically driven ultra-small diaphragm micropump The present invention is defined in claim 1. Regarding the electrostatically driven ultra-compact diaphragm micropump according to the preamble of Section 2. do.

A large number of ultra-small diaphragm micropumps are already known. rSenso rs and Actuators J, A21-A23 (1990).

F, C, M, van de Pol, H, T, G, v on pages 198-202 an Lintel, M.

rA T by Elwsenspoke and J, H, J, Fluitman hermo-Pneumatic Micropump Ba5ed on M icro-Engineering TechniquesJ has hot air drive A diaphragm micropump is disclosed, but it is difficult to realize such a drive. It is very expensive to do so.

For piezoelectrically driven diaphragm micropumps, see the technical publication rSens ors and actuators J 19 (1988), 153-1 Page 67 F, CJl, van Pol, H, T, G, van Lintel , S, Bouwst “rA Piezoelectric Mic by a ropump Ba5ed on Micromachining of 5i M. licon J and 20 (1989), pp. 163-169.

rNorma by Esashi, S., 5hoji, A., Nakano lly closed Microvalve and λli croppump It is described in J.

The realization of these drive means involves steps such as gluing to a piezoelectric film or piezoelectric stack. Since it includes manufacturing processes that do not belong to the standard technology process of semiconductor technology, manufacturing costs are reduced. expensive.

European Patent Publication EP-AI-0392978 discloses that deformation by piezoelectric elements is A microdiaphragm pump with an external diaphragm adjusted to has been done. The internal pump chamber of the micro pump has an internal valve structure or arrangement. subdivided by partitions. The valve structure prevents pumping during each pump cycle. relative to the partition or to the stationary part of the pump body, so as to determine a constant amount of medium being pumped. It is a component part of a restraining means for restricting movement of a diaphragm.

In International Patent Publication W○90/15929, most of its structure is just as described above. Additional micropumps are disclosed that correspond to micropumps.

German Patent Publication No. 4006152 Al is used for the first pump body and the diaphragm area. Discloses a micropump comprising: a second pump body having a second pump body; . Each pump body is adjusted to connect to a voltage source and electrically connected to each other. It has a conductive electrode area that is insulated. Also, the two pump bodies are A pump chamber is formed in contact with the diaphragm region. This micro pump pump capacity is not always sufficient. The liquid being pumped is subjected to the action of an electric field. In some cases, it may not be desirable to

The present invention is of the type described in the preamble of claim 1, Ultra-compact diaphragm in which the liquid is not affected by the electric field or is only slightly affected by the electric field. characterized by providing a micro pump A micro diaphragm micropon of the type described in the preamble of claim 1. With respect to the be done.

Furthermore, the present invention is of the type described in the preamble of claim 2, and can be easily Ultra-compact diaphragm micropolymer that can be manufactured at low cost and has high pump performance. The purpose is to provide a sample. Species described in the preamble of claim 2 Regarding ultra-small diaphragm micropumps of the same type, the object of the present invention is to This is achieved by the features disclosed in the Features section.

In the configuration of the present invention, a novel electrostatic A driving principle is disclosed, which is characterized by a very simple construction. Both can be realized using standard methods of semiconductor technology.

With the diaphragm micropump according to the invention, the pumped medium The present invention prevents the electrostatic field from being affected by the electrostatic field required as a driving means. A diaphragm micropump is used to handle drugs that separate under the influence of electrostatic fields. It can also be used for administration.

Diaphragm micropumps generate hydrostatic pressure when the flow rate is zero and Liquids and/or gases can be transferred to.

The diaphragm micropump according to the invention is used in the semiconductor technology field. It can be manufactured by any known method, which is a great advantage. Diaphragm according to the invention Another advantage of ram micropumps is that they can be used to transport fluids with any electrical conductivity. It is in a position where it can be used.

As a typical field in which the diaphragm micropump according to the present invention is utilized, for example, For example, in the medical field or technical fields such as mechanical engineering, microliter or subliter Examples include the field of precision dosing of liquids in the microliter range.

In a first aspect of the invention, the diaphragm micropump comprises two pump bodies. is formed by and includes a hollow space in contact with the diaphragm area. . Said hollow space is a fluid medium spatially separated from the liquid being pumped. It is filled. The hollow space has at least one opening through which said medium can flow out. Is it preferable? According to a second aspect of the invention, the diaphragm micropump is , a hollow space formed by the two pump bodies and adjoining the diaphragm area. It consists of Said hollow space is spatially isolated from the pumped fluid. Filled with fluid medium to be separated. The fluid medium has a dielectric constant higher than l Ru.

Preferably, the hollow space has at least one opening through which said medium can flow out. . The medium to be considered as a reinforcing liquid or gas must have a dielectric constant as high as possible. so that when voltage is applied to the two pump bodies, it acts on the diaphragm area. It is preferable to generate the strongest force possible.

The fluid may be enclosed in the housing of the diaphragm micropump, so be sure to There is no need for contact with the surroundings. If the fluid is enclosed in a housing, then It is necessary to keep this in mind. i.e., if a liquid is used, a very small pressure of the liquid Due to shrinkage considerations, the liquid must not completely fill the hollow space of the housing. .

Otherwise, between the first and second pump bodies (diaphragm area/counter electrode body) The liquid cannot drain from the space and the diaphragm is damaged by the liquid. The die according to the invention cannot be moved due to the back pressure exerted by the die. The Yafram micropump is similar to the above embodiment where it is not completely filled with the reinforcing liquid. Alternatively, embodiments are conceivable in which the hollow space is completely filled with reinforcing liquid. deer However, in this case, the opening of the hollow space is made of a rubber skin, for example. sealed from the atmosphere by a highly elastic additional diaphragm. pump can also be operated with reinforcing gases that have dielectric constants higher than l.

If a liquid is used as the reinforcing means, one or more openings may be provided in the counter electrode body. , without the need to overcome any significant resistance, the liquid flows through the first and second pump bodies. The space between A (diaphragm area/counter electrode body) can be moved in and out. But long In addition, the increase in the pumping frequency of the electrostatic diaphragm micropump according to the present invention is Channel structure of the pump body located opposite the phragm or diaphragm This is obtained by facilitating the outflow of the reinforcing liquid in the direction of the channel opening through the channel.

A dielectric with a high relative permittivity replaces a dielectric with a lower relative permittivity in the capacitor. Due to the physical effect of body displacement, only one of the channel openings is filled. The liquid is transferred to the first and second pump bodies (dashboard), provided that the liquid is in contact with the filler liquid. The space between the earphragm/counter electrode) can be automatically filled. This filling The treatment comprises at least a first Appropriate surface coating of the second pump body and appropriate surface coating of the third pump body as a counter electrode This becomes even easier with a surface coating.

Furthermore, if additional fluids are used in hollow spaces, the housing required for this purpose Extra costs regarding technology are significantly reduced.

Advantageous further developments of the subject matter of the invention are disclosed in the dependent claims.

The subject matter of the invention will be explained in more detail below on the basis of exemplary embodiments and with reference to the accompanying drawings. Ru.

FIG. 1 is a schematic cross-sectional view showing the operating principle of the electrostatic diaphragm micropump of the present invention. It is.

FIG. 2 is a schematic cross-section of the first embodiment of the electrostatically driven diaphragm micropump of the present invention. Show the diagram.

Figure 3a shows a third pump consisting of two auxiliary pump bodies provided in the pulp It is a sectional view showing a body.

FIG. 3b shows a sectional view of another embodiment of the pump body structure according to FIG. 3a.

FIG. 4 shows another configuration of the first pump body.

FIG. 5 is a schematic cross-sectional view showing another configuration of the electrostatic diaphragm micropump of the present invention. It is.

FIG. 6 is a schematic cross section showing another embodiment of the electrostatic diaphragm micropump of the present invention. It is a diagram.

FIG. 7 shows a modification of the embodiment according to FIG.

Figure 8 is a graph showing the relationship between flow rate and pressure differential for the valve used in the embodiment of Figure 3b. It is f.

(Example) FIG. 1 shows an electrostatically actuated micro-diaphragm matrix according to the present invention, indicated by the reference numeral 1. The subunits of the micropump are shown. The first pump body 2 as a counter electrode, It is arranged on the second pump body 3 and is fixedly connected to the second pump body 3.

Preferably, the pump bodies 2 and 3 are both semiconductor materials of different types of charge carriers. Delicious. For example, the first pump body 2 may be made of p-type silicon, and the second pump body may be made of p-type silicon. 3 can be made of n-type silicon.

The surface of the second pump body 3 facing the first pump body 2 is covered with a dielectric layer. be done.

The surface of the second pump body 3 opposite to the first pump body 2 has a truncated pyramid shape. A recess 7 is provided, which allows a thin elastic diaphragm of slight thickness to be formed. Region 6 is formed. The recess 7 is formed by photolithography of the back surface etching and subsequent anisotropy. Created by sexual etching.

The first pump body 2 has two passage openings 4 and 5 extending through the first pump body 2 in its thickness direction. has.

The first and second pump bodies 2 and 3 are sealed in their peripheral areas via a connecting layer 9. A space 10 is formed by interconnecting them so as to form a space 10. The connection layer 9 is For example, it can be constructed from Pyrex glass. Anodic bonding or adhesive means It can be glued by. The first and second pump bodies 2 and 3 face each other. The distance d1 between the two surfaces is approximately in the range of 1 to 20 micrometers. No. 1 and the space 10 between the second pump bodies 2 and 3, the liquid spreads out and forms a flow path. a suitably high ratio to the extent that it penetrates into openings 4 and 5 or exceeds channel openings 4 and 5; It is filled with a fluid medium having a dielectric constant. In this connection, the second pump body 3 Although only the first pump body 2 or the first and second pump bodies 2 and 3 are shown, Both have an overall thickness d2 and a dielectric constant ε to prevent dielectric breakdown, for example. A non-activated dielectric layer 8 having . Furthermore, the dielectric material is 2 Surface tension effective for a particular liquid on mutually facing surfaces of the two pump bodies 2 and 3 It can also perform the function of giving.

On the surface of the first pump body 2, an ohmic contact point 11 is located on the surface of the second pump body 3. The surface is provided with ohmic contact points 11'. These two contact points 11 and lbi are Connect to the terminal of voltage source U.

A second pump body 3 having a diaphragm region 6 and a first pump body 3 as a counter electrode. By supplying voltage U between the body These occur on the pump body.

Voltage polarity is determined by positive charges occurring on the n-type semiconductor and negative charges occurring on the n-type semiconductor. It is preferable that the property is such that it occurs in First pump body 2 and diaphragm The surface charge density generated in this way is The size is given by the capacitance per unit area of the entire subunit l, acts on the diaphragm region 6 of the second pump body 3 via an attractive force between the charges. The electrostatic generated pressure P becomes 1. This is expressed by the following formula: where C1 is the second pump The medium in the space between the diaphragm region 6 of the body 3 and the first pump body 2 C2 is the dielectric constant of the deactivatable layer 8.

From this equation (11), select a suitable medium with a high dielectric constant ε and high dielectric strength. by selecting (e.g. with methanol with count ε1=32) It can be seen that the electrostatically generated pressure acting on the flam region 6 clearly increases. die The typical flow medium in the area between the yaphram region 6 and the second pump body 3 is is usually different from the medium being pumped and is inherently more specific in terms of its conductivity. Other requirements must be met. Due to insufficient resistivity of the medium, electrostatic This causes a rapid reduction in the field. This electrostatic field connects the diaphragm region and the opposing exists between the first pump body as a pole, and also has a characteristic according to the following equation (2). Used for pressure generation within time τ.

Flow passage openings 4 and 5 provided in the first pump body 2 allow fluid to flow into the second pump body 2. Obstacles from the space between the diaphragm region 6 of the body 3 and the first pump body 2 Therefore, the diaphragm region 6 moves in response to the electrostatically generated pressure. No adverse pressure can be applied to the diaphragm region 6 that would prevent it from do not have.

Furthermore, equation (11) shows that the thickness d2 of the deactivatable layer 8 is a characteristic value (ε.

d2<ε2d+).

The typical magnitude of the generated pressure acting on the diaphragm region 6 is When used as a medium (ε+=32), it is approximately 1000 Pa, and the distance is d, = 5 μm, and the operating voltage is U = 50 V for ε, d, << 82 dl. , which corresponds to a hydrostatic pressure of about 1 m water column and, as a result, conventional piezoelectric or higher than the pressure that would occur on a diaphragm that was being driven pneumatically. Become. It is also possible to increase the operating voltage U and choose a different reinforcing medium. Therefore, the pressure acting on the diaphragm can be further increased. Thickness approximately 25μm and length measurement 3 For such a net pressure acting on a silicon diaphragm having mm Therefore, the diaphragm is deflected by a maximum of about 5 μm, which is equal to the total area of the diaphragm. This corresponds to a volumetric displacement of approximately 0.02 μl.

The electrostatically generated pressure acting on the diaphragm area is actually due to changes in the diaphragm itself. Depending on the shape, it is stored in the diaphragm, and when the voltage U is stopped, the diaphragm It has the effect of returning the ram to its original position.

Varying the diaphragm thickness and length will result in different lines proportional to the specific actuation voltage. It is also possible to generate a large volume.

Furthermore, a periodic voltage (preferably a square wave pulse) is applied to the first pump button as a counter electrode. day 2 and a second pump body 3 having a diaphragm region 6. Therefore, the maximum frequency of the periodic voltage is determined by the flow rate of the valve of the diaphragm pump, which will be described later. Determined by the dynamic characteristics, a constant stroke volume is displaced periodically. This is die This is the main feature of the Yapuram pump.

Relying as little or as little as possible on counterpressure to be counteracted by the fluid The stroke volume of the pump, which is only slightly dependent on Always beneficial. Characteristics of the electrostatic diaphragm pump according to the present invention as described below. Due to its nature, a constant stroke volume is achieved in a very simple manner.

The diaphragm drive of the pump according to FIG. It can be considered as a column connection. In the case of FIG. 1, this means that the insulating layer 8 and the liquid The interface surface between the hollow space lo filled with is the virtual capacitor plate and It's obvious if you think about it. The capacitor C2 is shown with an insulating layer 8, whereas the capacitor C2 is The capacitor C1 is shown with a flowing medium within the hollow space 10. This is expressed by the following formula: I can do something.

As far as the movement of the diaphragm is concerned, only the partial voltage U1 of the external supply voltage U0 is Then, the partial voltage U+ is dropped by the capacitor c1, and is given by equation (3). Therefore, ε, d, << ε2d1 (the maximum part of the voltage U. voltage drop due to the smaller of the two capacitors). However, die When the yaphram approaches the counter electrode, d becomes smaller and becomes ε1d, = ε2d1. There is a critical distance d+. If closer to the diaphragm or counter electrode, the voltage The maximum part of U0 causes a voltage drop across the insulating layer 8, so the diaphragm is moved further. The driving force needed to move is lost.

Next, for this type of electrostatic drive, the diaphragm must be at a certain critical distance d1. This corresponds to a limited stroke volume. In addition, the insulating layer 8 By adjusting the thickness, at a sufficiently high operating voltage U0, the pressure-independent stroke volume can be can be reached up to a certain maximum back pressure p to be canceled, which is Very effective as far as precise supply of fluid is concerned.

FIG. 2 shows a first, particularly simple, electrostatically actuated diaphragm pump according to the invention. It is a diagram schematically showing a cross-sectional view of an example.

This diaphragm pump has first and second pump bodies as shown in FIG. A subunit 1 having a diode 2 and a diode 3 respectively, and additionally a conductive sealed connection. The pump body includes a third pump body 12 connected to a second pump body 3. . This connection may be made, for example, by soldering, eutectic bonding or adhesive means. I can do it. Further, the material of the third pump body 12 is the same as that of the second pump body 3. It is preferable to use a type of semiconductor material, ie, n-type silicon.

The first and third pump bodies 2 and 12 have ohmic contact points 13 and 14 on their outer surfaces. each ohmic contact point is connected to a terminal of a voltage source U.

The third pump body 12 is provided with two flow passage openings 15 and 16. The opening 15 serves as a fluid inlet and the channel opening 16 serves as a fluid outlet. . Both channel openings 15 and 16 are tapered in the direction of fluid flow.

The surface of the third pump body 12 facing the second pump body 3 has a passage opening 15. A check valve formed by a flap 17 is also provided. 3rd pump body 12 An additional check valve formed by a channel opening 16 and a flap 18 is provided on the free surface of the is provided.

In this connection, the term check valve generally refers to different flow characteristics in different directions. It means a means of characterizing.

The third pump body 12 covers the recess 7 in the second pump body to form a hollow space. 19, ie, forming the pump chamber.

The free surface of the third pump body 12 is connected to the flow passage opening 15 to supply fluid. Attach the hose 20 and the hose 21 that connects to the flow path opening 16 and discharges the fluid. It will be done. Instead of a hose, a suitable fluid path may be installed.

By periodic displacement of the diaphragm or diaphragm region 6 as explained in FIG. As a result, the pump chamber volume will change periodically. This periodic change is a check Compensated by the respective flow of fluid through valves 15, 16, 17.18. back check Valve 15. ’16°17.18 or have different flow characteristics in the flow and cut-off directions. This creates a pumping effect in a specific direction. When the pump chamber is depressurized, the reverse Stop valve 17 is opened and fluid enters the pump chamber. Check valve 18 is closed It is. Depending on the subsequent decrease in pump chamber volume and the associated increase in pressure , the check valve 18 opens and the check valve 17 closes, so that a constant fluid volume is maintained in the pump chamber. is ejected from the chamber.

According to this simple embodiment, the check valve of the third pump body 12 has a diaphragm shape. can be formed by a flow passage opening covered by a thin layer of a channel aperture extending through the di-chip and a channel aperture provided in spaced relation; will be prepared in sequence.

Such a configuration can be created, for example, by sacrificial layer technology. These check valves are Can be mounted on one pump body chip or stacked on top of each other to connect It can also be provided on two different pump body chips combined. At the flow path opening? Such a diaphragm also has a surface recess relative to the surface of the third pump body 12. It may also be moved back for more effective protection.

Another embodiment of a check valve in accordance with the invention is shown in Figure 3a. In this example, FIG. The third pump body 12 of the diaphragm pump shown in FIG. It is formed by component elements 22a and 22b, which are arranged face-to-face. are arranged, and only the peripheral area and the central area are interconnected by the thin connection layer 23. connected to each other. In the inner region surrounded by the connection layer 23, two facing each other The surfaces of the auxiliary components 22a and 22b are spaced apart.

The connection layer 23 may be omitted, in which case the auxiliary components 22a and 22b It is glued at each end face position.

Each auxiliary component 22a and 22b has a flow opening 15.1 of the third pump body 12. Channel openings 24a and 24b having the same configuration as 6 are provided, respectively, and furthermore, a unique structure is provided. Additional flow path openings 25a and 25b are provided, respectively. Additional channel opening 25 Since a and 25b have the same configuration, only one channel opening 25a will be explained. Ru.

The channel opening 25a includes a recess 26. The recess 26 is a truncated pyramid-shaped, auxiliary Preferably rectangular cross-sectional shape tapering towards the free surface of component 22a has. Although only two are shown in this figure, the auxiliary components 22a, A total of four thin elastic connecting webs 27 are provided on the side remote from the auxiliary component 22b. I get kicked. These connecting webs are integrally formed with the auxiliary component 22a and are recessed. It extends into section 26 . The thickness of the connecting web 27 is approximately 0.5 to 30 μm. recess At the free end of each connecting web 27 projecting into 26 there is a A thin film portion 28 is provided which extends in the direction of the auxiliary component 22b. like this In this figure, only two or four thin film portions 28 are provided; The membrane portions are generally close together with their end faces 29 facing the auxiliary component 22b. The auxiliary component 22a is located within the plane of the surface thereof.

Due to the thin connecting web 27, the difference between the two auxiliary components 22a and 22b The pressure causes the auxiliary components 22a and 22b to have a substantially perpendicular major surface to their respective major surfaces. The thin film portion 28 is displaced in the direction.

The thin film portion 28 of either one of the channel openings 25a and 25b is connected to the thin film portion 28 pressed against the surfaces of the auxiliary components 22a and 22b arranged opposite the end face 29 of the If this happens, fluid resistance increases or fluid flow through the channel opening is blocked. As a result, fluid flow occurs through the other channel opening 25b or 25a.

When using other cross-sectional shapes, e.g. triangular, a corresponding number of connecting webs and A thin film portion is provided.

Electrical contact throughout the diaphragm pump is made by bonding or Since there is a conductive connection between the pump body and the 3rd pump body, the housing on the upper side of the 1st bomb body This can be done by using a housing under the pump body and the third pump body.

The entire inside of the pump chamber 19 is metallized so that it can be connected via contacts on the third pump body. can be grounded. This allows the pumped medium to pass through the pump chamber 19. It has the effect of not being exposed to any electrostatic field while passing through it. This is a medical It is important for application to

FIG. 3b shows a modification of the embodiment according to FIG. 3a. In both figures, the same parts are The same reference numerals are used to omit the explanation. In the embodiment of FIG. 3b, the embodiment of FIG. The connecting web 27 and the membrane part 28 are not provided. instead of these components , the valve flaps are formed integrally with the auxiliary components 22a and 22b facing each other. It will be done. For this purpose, the auxiliary components 22a and 22b have valve flaps 28a, 28 It is etched together with b. These valve configurations are arranged face-to-face. It can consist of identical semiconductor chips glued together such that each chip is A thin film forming flaps 28a, 28b with a standard flap thickness of 20 μm. The area to be etched and the channel openings 24a and 2 to be etched through. It has an area of 4b. When two chips are glued together, the flap of one chip Place it above the opening of the other chip. flaps 28a, 28b The standard lateral area is approximately 1 x 1 mm, and the standard flow opening dimensions on the smaller side is approximately 400 μm×400 μm.

Since the two flaps 28a and 28b have high elasticity, the pressure acting on the flaps is Depending on the direction of the force, it may be pressed against the channel openings 24a, 24b; In addition, it may be separated from the flow path opening.

Figure 8 is a graph showing the flow rate through the pump body valve configuration of Figure 3b as a function of pressure difference. It is f. The valve configuration according to Figure 3b can be characterized by a very high forward/backward ratio. It is clear that This feature of the valve configuration is particularly important for the different valve configurations incorporated in FIG. This is obvious in the dependence on the flow rate/pressure difference at small flow rates represented by the scale.

FIG. 4 is another embodiment similar to the embodiment shown in FIG.

Identical parts are given the same reference numerals.

The stroke volume of the diaphragm depends on the net pressure acting on the diaphragm area.

On the one hand, the first important things are the electrostatic generated pressure and the operating voltage U, and on the other hand, , there is a hydrostatic differential pressure Δp that is counteracted by the pumped fluid. Then a constant operating voltage If pressure is used, the stroke volume of the diaphragm or diaphragm area is first Depends on Δp. And this is undesirable in many applications. This failure arranged in a net shape to reduce or almost completely eliminate this problem. The insulating element 30 is connected to the first port facing the diaphragm region 6 of the second pump body 3. provided on the surface of the pump body 2. The first pump body 2 acts as a counter electrode. However, the insulating element 30 may be provided instead of or in addition to the electrostatic boundary. Ru. These insulating elements 30 increase the stroke volume of the diaphragm region 6 during pumping operations. As explained in Fig. 1 (Equation (3)), the stroke volume or small Within the range of differential pressure ΔP, there is an effect of being extremely pressure independent.

FIG. 5 shows another embodiment of an electrostatic diaphragm pump according to the invention and is shown in FIG. In contrast to a diaphragm pump, where the fluid inlet and fluid outlet placed on both sides of the pool.

The diaphragm pump of FIG. 2nd゜3rd pump body 32, 33, and 34. First and second pump bodies 32 and 33. No. The second and third pump bodies 33 and 34 are connected to connecting layers 35 and 36 in the peripheral region, respectively. More interconnected. The distance between the individual pump bodies is determined by the thickness of the connecting layers 35 and 36. Determined by The connection layer may be made of, for example, Pyrex glass or soldered. Can be done.

The first pump body 32 has an ohmic contact point 37 and the third pump body 34 has an ohmic contact point 37. A contact point 38 is provided and connected to a voltage source.

The first pump body 32 has three flow passage openings 39, 40 and 41. Of the ports, 39 and 40 are the flow path openings 5 provided in the diaphragm pump of FIG. 4 and has the same configuration as the flow path openings 5 and 4. Also, the third The flow passage opening 41 has a truncated pyramid shape and tapers in the direction of the second pump body 33. ing.

A dielectric material is provided between the first and second pump bodies 32 and 33 for the flow path opening 41. A connecting layer region 42 is provided which delimits a storage chamber 43.

The second pump body 33 has a recess 44 on the side facing the third pump body 34, The recess 44 corresponds to the recess 7 provided in the second pump body 3 in FIG. Concave By providing the portion 44, a thin elastic diaphragm region 45 is formed. Ru. The second pump body 33 is provided with a flow passage opening 46 . This channel opening 46 is located away from the recess 44 and is located away from the flow passage opening 41 of the first pump body 32. and are lined up. The flow passage opening 46 has a truncated pyramid shape, and is connected to the first pump body 32. It tapers in the direction of.

The third pump body 34 has a truncated pyramid shape, and is first in the direction of the second pump body 33. It has a channel opening 47 that becomes narrower. The flow passage opening 47 allows the flow of the second pump body 33. It is in line with the road opening 46.

The rear recess 44 of the second pump body 33 and the third port facing the second pump body 33 The surface of the pump body 34 forms a pump chamber 48 . Adjacent to flow path opening 46 A recess or a recess provided in the third pump body 34 is provided on the side of the pump chamber that is in contact with the pump chamber. Ru. This provides a connecting channel 49 between the pump chamber 48 and the channel opening 46 area. is formed. During pumping operation, this connecting channel 49 directs the pumped fluid to the pump. can be more easily passed from the chamber 48 to the area of the channel opening 46.

A supply hose 50 is secured to the free side of the third pump body 34 and is connected to the fluid inlet opening. It is connected to the flow path opening 47 as shown in FIG. Freedom of the discharge hose 51 or the first pump body 32 It is fixed to the side and connects with a channel opening 41 as a fluid outlet opening.

The passage opening 47 of the third pump body 34 has a side facing the second pump body 33. A check valve 52 is provided. The flow path opening 46 of the second pump body 33 has a first pump A check valve 53 is provided on the side facing the body 32.

During the pumping operation caused by the movement of the diaphragm region 45, the flow path opening 46 Overpressure and underpressure occur alternately between the two check valves 52 and 53 in the area of . past In the pressure stage, the check valve 52 closes and the check valve 53 opens, causing the water to be pumped up. The fluid is discharged from the flow path opening 41. Subsequently, in the pressure reduction stage, the check valve 53 is closed. At the same time, the check valve 52 opens and the pumped fluid comes into contact with the flow path opening 47. It passes through the continuation channel 49 and flows into the pump chamber 48 .

In the electrostatic diaphragm pump explained in Fig. 5, the first pump is used as a counter electrode. The pump body 32 is composed of a p-type semiconductor substrate with one side polished, and is connected to the second pump body 3. 3 is composed of an n-type semiconductor substrate polished on both sides, and furthermore, the third pump body 34 is made of one side. Preferably, it consists of an n-type semiconductor substrate with polished sides.

The diaphragm pump of FIG. The pump body includes first and second pump bodies 61 and 62. 1st pump body 6 1 has two channel openings 64 and 65 for the pumped fluid, high dielectric constant It has two flow path openings 66 and 67 for reinforcing fluid. Channel openings 66 and 67 are inside Connect with empty space 68. A second pump body 62 is located below the hollow space 68. A diaphragm region 69 is provided. The two pump bodies 61 and 62 are are interconnected by a connecting layer 70 in the peripheral area of the hollow space 68 and in the peripheral area of the hollow space 68. Ru. The second pump body 62 has a diaphragm on one side as well as a cover plate 63. a pump chamber 71 extending into the pump area 69 and merging with the interchannel lower 2.73 on the other side; Form. The first pump body 61 has a first valve in the area of its second flow passage opening 65. A valve flap 74 is provided, and the valve flap 74 is connected to the flow path opening 65. form a check valve.

The second pump body 62 is provided with a second valve flap 75. The wrap 75 forms an additional check valve together with the second passage opening lower 3 . 1st pump box The first and second flow path openings 64 and 65 of the day 61 have two fluid connections 76 and 77. Be prepared.

FIG. 7 shows a modification of the embodiment of FIG. Regarding the part corresponding to the part of the embodiment in FIG. The same reference numeral shall be given to the same reference numeral. In the embodiment of FIG. 7, the diaphragm of the second pump body 3 The area 6 and the counter electrode area 11 arranged in opposite directions of the first pump body 2 have a cross section. The figure differs from the embodiment of FIG. 1 in that it has a rib-like or comb-like configuration. hollow space the dielectric constant of the dielectric fluid in the base 10 and the voltage supplied to the two pump bodies 2, 3. Based on this, the electrostatic force acting on the diaphragm region 6 is Can be increased by configuration.

In an embodiment, the diaphragm pump has a fluidizing medium in its hollow space. The pump contains a liquid that is affected by an electric field, and the liquid is pumped up or the liquid is replaced. using a gas instead, such as air, and/or instead of a pumped liquid. Pumped gas can also be used.

For certain applications, high pumping capacity is not required, and the pumped fluid or electric field If the hollow space is not affected by the effect of I can do it. Air can also be used as this fluidizing medium.

Voluntary writing of procedural amendments) April 14, 1994

Claims (25)

[Claims] (1) Conductive electrode areas used to connect with a voltage source and electrically isolated from each other a first pump body (2, 32) each having a diaphragm region (6); the second pump body (3, 33), which depends on the flow direction of the pumped fluid; flow direction control means (17, 18; 28; 28a, 28b) having a fluid resistance of an electrostatically driven diaphragm microphone comprising a pump chamber (19); In the pump (1), the two pump bodies (2, 3; 32, 33) are connected to each other. , forming a hollow space (10; 43; 68) in contact with the diaphragm region; The spaces (10; 43; 68) are spatially separated from the fluid being pumped. The pump body (2, 3; 32, 33) is filled with a fluidizing medium that The electrode area is such that the fluid medium is connected to the electrically conductive electrode of the pump body (2, 3; 32, 33). The pumped fluid is affected by the electric field generated between the polar regions, whereas the pumped fluid is A stationary device characterized in that it is arranged so that it is not or only slightly affected by the action of Electrically driven diaphragm micro pump. (2) conductive electrode areas used to connect with a voltage source and electrically isolated from each other; a first pump body (2, 32) and a diaphragm region (6) each having a the second pump body (3, 33), which depends on the flow direction of the pumped fluid; flow direction control means (17, 18; 28; 28a, 28b) having a fluid resistance of an electrostatically actuated diaphragm miter comprising a pump chamber (19); In the black pump (1), the two pump bodies (2, 3; 32, 33) are , forming a hollow space (10; 43; 68) in contact with the diaphragm region; The spaces (10; 43; 68) are spatially separated from the fluid being pumped. characterized in that the fluidizing medium has a dielectric constant higher than 1. Electrostatically driven diaphragm micro pump. (3) Diaphragm micropump contacts hollow space (10; 43; 68) has at least one channel opening (4, 5; 39, 40; 66, 67) that Claim 1 or 2, characterized in that the fluid medium flows out through the opening of the The electrostatically driven diaphragm micropump described in . (4) The pump chamber (19; 48) filled with the fluid to be pumped is hollow bordering the diaphragm region (6) on the side remote from the space (10; 43; 68) The electrostatic drive according to any one of claims 1 to 3, characterized in that: Diaphragm micro pump. (5) of hollow spaces (10; 43; 68) used for discharging the fluid medium; At least one opening extends through the first pump body (2; 32; 61). formed by at least one of the channel openings (4, 5; 39, 40; 66, 67) The static device according to any one of claims 1 to 4, characterized in that Electrically driven diaphragm micro pump. (6) The second pump body (3; 33) is equipped with a third pump body (12; 34). The second pump body (3; 33) is connected to the third pump body (12; 34). It has a recess (7; 44) on the facing side, and the recess (7; 44) is connected to the third pump bottle. The pump chamber (19; 48) is formed together with the di (3; 34). The electrostatic drive diaphragm according to any one of claims 1 to 5, characterized in that ram micro pump. (7) A third pump body (12) is connected to the pump chamber (19) inside the third pump body (12). at least two channel openings (15, 16) through which the at least two The amount of fluid passing through the flow path openings (15, 16) is controlled by check valves (17, 18). The electrostatically driven diaphragm microport according to claim 6, characterized in that: pump. (8) The check valves (17, 18) are arranged in the third pump body (12). The electrostatically driven diaphragm micropump according to claim 7, characterized in that (9) The pump chamber (48) is a section connecting the two flow path openings (41, 47). The amount of fluid fluidly connected to the area (46) and passing through the two flow path openings (41, 47) is controlled by each check valve (52, 53). The electrostatically driven diaphragm micropump according to any one of Items 4 to 6. (10) A pump chamber (48) is located between the second and third pump bodies (33, 34) The cell is characterized in that it is connected to the area (46) via an extending connecting channel (49). The electrostatically driven diaphragm micropump according to item 9. (11) the area is formed by a channel opening (46), the channel opening (46) comprising: formed in the second pump body (33) and connected to the first pump via the check valve (52, 53). The flow path openings (41, 47) formed in the third pump body (32, 34) and the fluid The electrostatic actuator according to claim 9 or 10, characterized in that the electrostatic driver is connected to Earphragm micro pump. (12) The third pump body (12) is connected to the first channel opening (24a, 24b) and the second channel opening (24a, 24b). two interconnecting auxiliary components (25a, 25b) each having a channel opening (25a, 25b); 22a, 22b), and one complementary component of the auxiliary component (22a, 22b). The first flow path openings (24a, 24b) of the auxiliary component are connected to the other auxiliary component (22b). , 22a) and the second flow path openings (25a, 25b) of the second flow path openings (25a, 25b). (25a, 25b) has a thin film portion (28) extending therein at an acute angle in the fluid flow direction. is arranged, and one end of the thin film part (28) is connected via a thin elastic connecting web (27). , the section of the auxiliary component on the side remote from the other auxiliary component (22b, 22a) Within the channel openings (25a, 25b) where the thin film portion (28) extends, the auxiliary The thin film part (28) is connected to the second auxiliary component (22a, 22b). The elements extend close to each other in the direction of the surface of the element (22b). The electrostatically driven diaphragm micropump according to item 6 or 7. (13) A thin membrane portion (28) and a thin elastic connecting web (27) are connected to each auxiliary component (22). a, 22b), characterized in that it is formed integrally with Electrostatically driven diaphragm micropump. (14) The first and second pump bodies (2, 3; 32, 33) are halves of different charge types. Any one of claims 1 to 13, characterized in that it is made of a conductive material. The electrostatically driven diaphragm micropump according to any one of the above. (15) The third pump body (12; 22a; 22b; 34) is the second pump body A claim characterized in that it is made of a semiconductor material of the same charge type as (3; 33). 15. The electrostatically driven diaphragm micropump according to item 14. (16) At least the first pump body (2; 32) and the second pump body (3; 3) are each characterized by having ohmic contact points (11'11; 13, 14) The electrostatically driven diaphragm micropump according to claim 14 or 15, P. (17) The first and/or second pump body (2, 3; 32, 33) is inactivated. Claim 14, characterized in that the dielectric layers have surfaces facing each other. 17. The electrostatically driven diaphragm micropump according to any one of Item 16. (18) The second and third pump bodies (2, 3; 32, 34) are connected to each other in a conductive manner. According to any one of claims 14 to 17, characterized in that the Electrostatically driven diaphragm micropump. (19) The electrically insulating area (30) is located on the die facing the first pump body (2; 33). Claim 1, characterized in that it is provided on the surface of the yaphram region (6). 19. The electrostatically driven diaphragm micropump according to any one of Item 18. (20) The electrically insulating areas (30) are arranged in a regular manner, in particular in a net-like or checkered pattern. The electrostatic actuator according to claim 19, characterized in that the electrostatic actuator is arranged in a pattern. Earphragm micro pump. (21) The medium in the hollow space (10; 43; 68) is methanol. The electrostatically driven diaphragm micropump according to claim 20, characterized in that . (22) Claim 1, wherein the fluid to be pumped is a liquid. 22. The electrostatically driven diaphragm micropump according to any one of Item 21. (23) Claim 1, characterized in that the fluid to be pumped up is gas. 22. The electrostatically driven diaphragm micropump according to any one of Item 21. (24) Claims 1 to 23, characterized in that the fluid medium is a liquid. The electrostatically driven diaphragm micropump according to any one of the above. (25) Claims 1 to 23, characterized in that the fluidizing medium is a gas. The electrostatically driven diaphragm micropump according to any one of the above.