JPH0647717B2 - Preheating device in continuous dry plating equipment - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a preheating device as a pretreatment facility for continuous dry plating equipment for long thin plates, and in particular, by devising an arrangement of preheating means. It aims to form a coating film that does not change in plate shape and has excellent adhesion.

(Prior Art) In recent years, the coating technology using plasma has made remarkable progress, and its use is spreading in various fields. Examples of applications of such coating technology include magnetic recording thin films, various abrasion resistant and corrosion resistant coatings, and decorative coatings.

Usually, when plasma is used, vaporized substances such as metals and semimetals can be ionized or activated, and high kinetic energy can be imparted. Therefore, a film having high adhesion between the vapor-deposited film and the substrate and having good film quality can be used. can get.

The plasma coating method includes magnetron sputtering method, ion plating method and plasma CVD method, and recently, Maruti arc method using a vacuum arc and Hollow Cathode Discharg method.
e, HCD) method has been developed.

(Problems to be Solved by the Invention) In the present invention, when a long thin plate having a large surface area is processed by a continuous Air-to-Air system by the dry plating method as described above, sufficient examination is conventionally conducted. It discloses the results of research on preheating before coating, which had not been done.

That is, in the past, in continuous air-to-air dry plating equipment, heat treatment by electron beam (EB) was performed on the surface of the substrate as a preheat treatment before coating, but a long thin plate with a large surface area. When the EB heat treatment was applied to the surface of the thin plate, the thin plate was deformed due to a rapid temperature increase locally on the surface of the thin plate, such as film stretch and ear loss.

The occurrence of the above-mentioned shape defect is extremely harmful to the coating treatment of the unidirectional silicon steel sheet whose magnetic characteristics are to be evaluated, and its adverse effects such as deterioration of the magnetic flux density are significant. Therefore, before reaching the coating process,
It is important to solve this problem especially for thin steel sheets having a large surface area.

(Means for Solving the Problems) Based on the basic recognition that the continuous air-to-air dry plating is essential, at least the EB heating device is essential from the viewpoint of improving the adhesion of the coating film. Therefore, various studies were made on the preheating device.

As a result, hot rollers are placed before and after the EB heating device,
It was found that by gradually heating the steel sheet, deformation of the thin sheet during heating can be effectively prevented.

The present invention is based on the above findings.

That is, the present invention is a thin strip preheating device arranged between the inlet side differential pressure chamber and the first coating chamber of a continuous dry plating device for continuously performing dry plating on a long thin plate, It is a preliminary heating device in a continuous dry plating facility comprising one electron beam heating device and hot rollers arranged in front of and behind the electron beam device.

The present invention will be specifically described below.

FIG. 1 is a schematic diagram showing a main part of a continuous dry plating facility incorporating a preferred example of the preheating device according to the present invention. Symbols A, B, and C in the figure respectively denote an inlet-side differential pressure chamber, a preheating device, and a coating device, S is a steel plate,
G is a guide roll, and a-1 to a-7 are vacuum differential pressure seal rolls. This seal roll also serves as a guide roll for the steel plate S, and as shown in the figure, by gradually increasing the degree of vacuum while guiding the steel plate S inside (Air-to-Air method).
A high vacuum of about 10 ⁻⁴ to 10 ⁻⁶ Torr can be realized.

Further, b-1 and b-4 are hot rollers, and these hot rollers b-1 and b-4 are EB heating devices b-2 for heating the upper surface and the lower surface of the two steel plates arranged in this example. , B-3 are placed in front of and behind them, and b-1 to b-4 constitute a heating device.

Note that c-1 is a focusing coil, c-2 is a crucible, c-3 is a rod-shaped evaporation material, and c-4 is an L-shaped HCD gun.

In the preheating device of the present invention, first, the steel plate is heated to about 100 to 200 ° C. by the hot roller b-1 in the preceding stage. Then EB
By using a device to irradiate and scan the surface of the steel sheet with a beam to raise the temperature of the steel sheet to about 200 to 800 ° C and clean the surface of the steel sheet, the adhesion between the steel sheet and the vapor deposition film in the subsequent coating process To improve.

And in the hot roller b-4 in the latter stage, it is necessary to heat up to the coating processing temperature without plate deformation, for that purpose use a hot roller that has small temperature unevenness and can control temperature distribution with high accuracy. Is preferred.

FIG. 2 shows a cross section of a preferred example of such a hot roller. In the figure, 1, 10 and 11 are roller shafts, 2, 3, 6 and 7 are end faces of the roll body, 4, 5 are roll body parts, 8 and 16 are atmospheres inside the roll, and 9 is a heater for heating inside the roll. Has a mechanism that allows control of separation between both ends and the central part. 12, 13,
Reference numeral 14 is a sliding ring, and 15 is a pipe. In the above-mentioned hot roller, it is extremely advantageous to divide the heater 9 into the two end portions and the central portion and individually control each in order to uniformly heat the steel sheet in the width direction.

(Operation) The preheating device of the present invention is characterized in that the plate deformation is avoided by gradually heating the steel plate with the hot rollers arranged before and after the EB heating device. This also has the advantage that the surface of the steel sheet can be cleaned and the adhesion between the steel sheet and the coating film can be improved.

(Example) Example 1 C: 0.043%, Mn: 0.33%, S: 0.012% and P: 0.00
After degreasing the surface of a low carbon cold-rolled steel sheet (sheet thickness: 0.3 mm) containing 8%, use the air-to-air continuous dry plating equipment shown in Fig. 1 above and prepare for the following conditions. After heating, HCD method (vacuum degree in coating chamber: 3 x 10
^-5 Torr) was used to coat CrN to a thickness of 0.8 μm.

Heating temperature by the first-stage hot roller: 150 ° C Heating temperature by the EB for the upper surface heating: 300 ° C Heating temperature by the EB for the lower-surface heating: 450 ° C Heating temperature by the second-stage hot roller: 460 ° C There is no plate deformation in the above coating treatment,
Also, the adhesion was extremely good, because no peeling occurred even after 180 ° bending three times.

Example 2 C: 0.048%, Si: 3.39%, Mn: 0.072%, Al: 0.026
%, S: 0.022%, N: 0.0065%, Sn: 0.05% and C
u: Hot rolled sheet for silicon steel containing 0.1% (sheet thickness: 20 mm)
Then, it was cold-rolled twice with intermediate annealing at 1100 ° C. for 3 minutes to obtain a final plate thickness of 0.20 mm. Then, after performing a primary recrystallization annealing that also serves as decarburization in wet hydrogen at 840 ° C, 85
The temperature was raised from 0 ° C. to 1150 ° C. at a heating rate of 8 ° C./h to develop secondary recrystallization in the Goss orientation, followed by purification annealing at 1230 ° C. for 8 hours.

After that, the oxide on the surface of the steel sheet was removed by pickling, and then it was finished by electropolishing to a mirror surface state with a center line average roughness Ra of 0.06 μm.

Then, using the air-to-air type continuous dry plating equipment shown in FIG. 1 above, a TiN tension film having a thickness of about 1.2 μm was formed.

Preheating at this time was performed by raising the temperature to 100 ° C with the front stage hot roller, then to 250 ° C with the upper surface heating EB, and to 400 ° C with the lower surface heating EB, and then using the latter stage hot roller.
It was performed under the condition that the temperature was raised to 20 ° C. The temperature difference between the both ends of the steel plate and the central part was within 5 ° C., and there was no deformation of the plate at this time.

The magnetic properties and adhesion of the grain-oriented silicon steel sheet obtained as described above were as follows.

Magnetic property …… B ₁₀ ： 1.94T, W _17/50 ： 0.64W / kg Adhesion ・ ・ ・ No peeling of coating even after bending 180 ° at 20mmφ.

(Effects of the Invention) Thus, according to the present invention, it is possible to preheat the thin plate effectively during continuous dry plating of the long thin plate without damaging the plate shape. Moreover, the plate surface can be cleaned to improve the adhesion between the steel plate and the coating film.

[Brief description of drawings]

FIG. 1 is a schematic view of a continuous dry plating facility incorporating a preheating device according to the present invention, and FIG. 2 is a sectional view of a hot roller. S ... Steel plate, G ... Guide roll a-1 to a-7 ... Vacuum differential pressure seal roll b-1, b-4 ... Hot roller b-2, b-3 ... EB heating device for heating upper and lower surfaces c- 1 ... Focusing coil, c-2 ... Crucible c-3 ... Evaporated substance, c-4 ... HCD gun 1, 10, 11 ... Roll shaft 2, 3, 6, 7 ... Roll body end face 4,5, ... Roll body 8, 16 ... Atmosphere in roll 9 ... Heating heater, 12, 13, 14 ... Sliding ring 15 ... Pipe

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Fumihito Suzuki Inventor 1 Kawasaki-cho, Chiba-shi, Chiba Inside Kawasaki Steel Co., Ltd. (72) Inventor Tsuneo Nagamine 1 Kawasaki-cho, Chiba-shi Kawasaki Steel Co., Ltd. Chiba Steel In-house

Claims (1)

[Claims] 1. A preheating device for a ribbon, which is arranged between an inlet-side differential pressure chamber and a first coating chamber of a continuous dry plating device for continuously performing dry plating on a long thin plate, A preliminary heating device in continuous dry plating equipment, comprising one electron beam heating device and hot rollers arranged in front of and behind the electron beam device.