JPH0647709U - Fluid pressure equipment - Google Patents

Abstract

(57) [Abstract] [Purpose] To provide a fluid pressure operated device capable of preventing dust generation due to fluid leakage. [Structure] The cylinder body 1 is formed so that one end is closed and the opening end at the other end is covered by a rod cover 8. The cylinder body 1 is formed by the rod cover 8 and the opening end. A piston rod 5 is provided penetrating the portion. A seal member 9 that seals between the rod cover 8 and the rod cover 8 is attached. A dustproof adapter 12 is detachably attached to the cylinder end by a screw member 13, and a seal member 9 is provided in a passage 16 formed between the seal member 9 and the outer end face of the dustproof adapter 12. The fluid leaked from the device comes in. Passage 1 for dustproof adapter 12
An exhaust port 15 communicating with 6 is formed, and a pipe 15a for discharging the leaked fluid to the outside of the clean space is connected to the exhaust port 15.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a fluid pressure actuated device, and more particularly to a fluid pressure actuated device which is optimal when used in a clean room.

[0002]

[Prior art]

 In recent years, fields such as the medical field and semiconductor manufacturing field that require extremely high cleanliness in the work space are spreading, and the requirements for cleanliness are becoming increasingly stringent.

Therefore, in such a field, it is necessary to construct a clean room in order to maintain an extremely high degree of cleanliness and execute a required work in the clean room.

Therefore, it has been required that fluid pressure actuated devices such as an air cylinder used in a clean room should not bring dust into the clean room. In particular, a fluid containing dust such as wear powder of the sealing material or oil mist having lubricating oil applied to the sliding portion easily leaks from the sliding portion between the rod and the rod cover, and contamination in the leak air occurs. Substances contaminate the clean room and are required to be prevented.

In order to meet such requirements, it is considered that an exhaust port is provided in the rod cover of the air cylinder itself, and air leak from the air cylinder is exhausted to the outside of the clean room through this exhaust port to prevent dust generation. .

However, in this technique, a rod cover having a special structure must be manufactured exclusively for the dust prevention cylinder and stored as an inventory, and a special mold is required for the manufacturing. The authors found that there were problems such as having to prepare.

Further, there has been proposed a cylinder device in which a vacuum chamber is specially provided in the front part of the rod cover of the air cylinder, and the vacuum chamber is connected to an exhaust device outside the clean room (see Japanese Patent Laid-Open No. 59-164407). .

However, this cylinder device still requires special processing of the rod cover, and since it is mainly intended to prevent the vacuum degree from decreasing in a clean room, it can be used in combination with a special exhaust device. It was found by the present inventor that there is a problem that it is an indispensable requirement, and the system is complicated and the cost is increased.

Another air cylinder has a structure that covers the entire piston rod by a bellows and stores the fluid leaked from the sliding portion of the piston rod in the bellows to prevent leakage to the outside (Japanese Patent Publication No. 56- No. 27726). However, in this air cylinder structure, the entire rod is covered by the bellows, so the leakage from the sliding part of the piston rod expands the bellows, which makes it difficult to contract the bellows and smoothes the piston rod. However, there was a problem in that it could not be reciprocated and the slidability was reduced.

[0010] Furthermore, there is a problem that the bellows is liable to be damaged due to repeated expansion and contraction and its durability is poor. For long strokes, the slidability of the piston rod and the durability of the bellows are further reduced. There was a problem. In the cylinders described in these publications, the direction of the exhaust port cannot be changed, and there is no freedom to attach the pipe connected to this port.

[0011]

[Problems to be solved by the device]

 An object of the present invention is to provide a fluid pressure operated device capable of preventing dust generation due to leakage.

Another object of the present invention is to provide a fluid pressure actuating device capable of improving the slidability of a rod.

The above and other objects and novel features of the present invention will be apparent from the description of this specification and the accompanying drawings.

[0014]

[Means for Solving the Problems]

 The following is a brief description of the outline of the typical invention disclosed in the present application.

The cylinder body is formed so that one end is closed and the opening end at the other end is covered with a rod cover. The cylinder body penetrates the cylinder end formed by the rod cover and the opening end. Equipped with a piston rod. A seal member that seals the rod cover is attached to the rod cover. A dustproof adapter is removably attached to the end of the cylinder with a screw member, and leaked from the sealant into the passage formed between the sealant and the outer end face of the dustproof adapter. It is designed to allow fluid to enter. An exhaust port communicating with the passage is formed in the dustproof adapter, and a pipe for discharging the leaked fluid to the outside of the clean space is connected to the exhaust port.

[0016]

[Action]

 If the fluid inside the cylinder body leaks from the sealing material provided on the rod cover, the leaked fluid will enter the passage. The fluid is guided from the inside of the passage through the exhaust port to the outside of the clean space by piping, so dust that has leaked from the seal material together with the fluid in the cylinder does not leak into the clean space and can be reliably discharged. Will be discharged outside the clean space. Thereby, the clean space can be normally maintained.

Since the dustproof adapter is detachably attached to the cylinder end by a screw member, the position of the dustproof adapter with respect to the cylinder end can be easily adjusted by attaching and detaching the screw member, and the exhaust port The posture of can be easily changed.

[0018]

【Example】

 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

Embodiment 1 FIG. 1 is a half sectional view showing a fluid pressure cylinder according to an embodiment of the present invention.

In the present embodiment, an air cylinder as an example of a fluid pressure cylinder slides in the axial direction by a cylinder body (cylinder tube) 1 and air in the cylinder tube 1 from an air inflow / outflow port 2 or 3. And a piston rod 5 extending in the axial direction from the end of the piston 4.

One end of the cylinder tube 1 is closed by a head cover 6, and a gap between the head cover 6 and the cylinder body 1 is sealed by a gasket 7. On the other hand, as shown in the figure, the opening end side of the other end of the cylinder tube 1 is closed by a normal standard type rod cover 8 projecting to the outside, and the opening end and the rod cover 8 form a cylinder end. Has been formed.

A seal member 9 seals between the piston rod 5 and the rod cover 8, and a gasket 10 seals between the rod cover 8 and the cylinder tube 1.

As shown in FIG. 1, a dustproof adapter 12 is attached to and detached from a cylinder end portion formed by the opening side end portion of the cylinder tube 1 and the rod cover 8 by a screw member 13 via a gasket 11. It is possible to install. In the case shown, this screw member 13 is screwed to the cylinder tube 1.

The piston rod 5 penetrates through the central portion of the dustproof adapter 12 and projects to the outside. The space between the dustproof adapter 12 and the piston rod 5 is sealed by a seal member 14. It is also possible not to use it. A gap is formed between the dustproof adapter 12 and the piston rod 5 so as to prevent generation of chips due to sliding.

A passage 16 is formed between the seal member 9 and the outer end surface of the dustproof adapter 12 as shown in the drawing. The dustproof adapter 12 prevents the air leaking from the space between the rod cover 8 and the piston rod 5 from being discharged into a clean room (not shown) and contaminating the clean room with contaminants such as dust contained in the air. It is for.

Therefore, an exhaust port 15 is formed in the outer peripheral direction of the dustproof adapter 12, and the exhaust port 15 is mounted on the outside of the projecting end of the exhaust port 15 via an exhaust pipe block pipe 15a to clean room. Communicates with the outside.

Next, the operation of this embodiment will be described.

When the air cylinder of this embodiment is operated, air is supplied from the air inflow / outflow port 2 or 3 into the cylinder chambers on the left and right of the piston 4 in the cylinder tube 1 so that the piston 4 and the piston rod 5 move to the right. Or slide to the left.

At this time, the sliding of the piston rod 5 may cause air in the cylinder tube 1 to leak outward from between the piston rod 5 and the rod cover 8.

In this case, in this embodiment, since the dustproof adapter 12 is attached to the outer end side of the rod cover 8, the air leaking to the outside of the rod cover 8 passes through the passage 16 and the dustproof adapter 12 is attached. From the exhaust port 15 through the illustrated exhaust pipe, that is, the pipe 15a, to the outside of the clean room.

Therefore, according to the present embodiment, it is possible to reliably prevent the inside of the clean room from being contaminated by contaminants such as dust contained in the air leaked from the rod cover 8 of the air cylinder.

As shown in the figure, since the dustproof adapter 12 can be attached to and detached from the cylinder end portion by the screw member 13, the screw member 13 can be attached and detached so that the central axis of the piston rod 5 with respect to the cylinder end portion of the dustproof adapter 12. Since the position around the exhaust port 15 can be changed, the position of the exhaust port 15 can be changed. As a result, it is possible to improve the degree of freedom in attaching the pipe 15a connected to the exhaust port 15.

Embodiment 2 FIG. 2 is a half sectional view showing an air cylinder according to another embodiment of the present invention.

Also in the second embodiment, the dustproof adapter 12 is detachably attached to the cylinder end by the screw member 13. Therefore, also in the second embodiment, the air leaking to the outside of the rod cover 8 of the air cylinder is guided to the outside of the clean room through the exhaust pipe or pipe (not shown) screwed to the exhaust port 15 of the dustproof adapter 12. It can be prevented from being discharged and contaminating the inside of the clean room. The other structure is the same as that shown in FIG. 1, and the attachment position of the dustproof adapter 12 to the cylinder tube 1 can be changed by attaching / detaching the screw member 13, and the pipe connected to the exhaust port 15 can be attached. The degree of freedom of can be improved.

Embodiment 3 FIG. 3 is a half sectional view of an air cylinder according to still another embodiment of the present invention.

Also in the third embodiment, the dust-proof adapter 12 is detachably attached to the cylinder end (the left end in FIG. 3) by the screw member 13, and the air leaking to the outside of the rod cover 8 is removed. The exhaust port 15 of the dustproof adapter 12 can be discharged to the outside of the clean room. In the illustrated case, a screw member 13 is screwed to the rod cover 8 of the cylinder end. In FIG. 3, the same parts as those in FIG. 1 are designated by the same reference numerals.

(Embodiment 4) FIG. 4 is a cross-sectional view of a hydrochecker which is still another embodiment of the present invention.

In the fourth embodiment, a hydro checker as another example of the fluid pressure actuating device includes an outer cylinder 20, an inner cylinder 22 containing a braking oil 21, and a piston 23 that slides in the inner cylinder 22. A rod 24 extending from the end of the piston 23, a check valve 25, an adjusting valve 26, an adjusting knob 27, an extendable diaphragm 28 connected to the outer cylinder 20 and the rod 24, and a diaphragm guide. 29, an air chamber 30, an air port 31, a spring 32, a rod cover (bearing) 33, and a dust seal 34. In FIG. 4, half of the rods 24 and the like are shown in a protruding state and half are in a retracted position.

Also in the fourth embodiment, in order to prevent the air supplied from the air port 31 to the air chamber 30 through the pipe (not shown) from leaking to the outside of the rod cover 33 and contaminating the inside of the clean room, A dustproof adapter 12 is detachably attached to the cylinder end by a screw member 13. The screw member 13 is screwed to the rod cover 33.

Therefore, the air leaking from the air chamber 30 to the outside of the rod cover 33 can be guided to the outside of the clean room from the exhaust port 15 of the dustproof adapter 12 through the pipe (not shown) and discharged.

(Embodiment 5) FIG. 5 is a sectional view of a shock absorber according to still another embodiment of the present invention.

In the fifth embodiment, a shock absorber as still another example of the fluid pressure actuated device is a cylinder tube 40, a floating piston 41, a fixed piston 42, and an end portion of the fixed piston 42. The existing piston rod 43, the braking oil chambers 44 and 45 on both sides of the fixed piston 42, the check valve 46, the sealing screw 47, the stop ball 48, and the air chamber 49 for supplying the return air of the floating piston 41. , An air port 50, and a rod cover 51 having the air port 50 formed therein.

Also in the fifth embodiment, the dust cover adapter 12 is detachably attached to the cylinder end at the rod cover 51 by the screw member 13, and the center opening of the dust cover adapter 12 is connected to the piston rod 43. Penetrates slidably.

Therefore, also in the present embodiment, the air leaking from the air chamber 49 to the outside of the rod cover 51 is guided to the outside of the clean room (not shown) from the exhaust port 15 of the dustproof adapter 12, and is therefore included in the leak air. It is possible to prevent the clean room from being contaminated by contaminants such as dust, and to maintain good cleanliness.

The present invention is not limited to the above-mentioned embodiment, and various other modifications can be made. Further, the fluid pressure actuated device to which the dustproof adapter is attached includes ones other than the above-mentioned air cylinder, hydro checker and shock absorber.

[0046]

[Effect of device]

 (1) The dust-proof adapter detachably attached to the end of the cylinder has an exhaust port that communicates with the passage, so that fluid leaking from between the seal member and the piston rod into the passage can be removed from the clean space. It is possible to prevent the fluid leaking from the fluid pressure equipment from flowing into the clean space together with the dust because it is discharged through the pipe.

(2) Since the dustproof adapter is detachably attached to the cylinder end using a screw member, the position of the dustproof adapter with respect to the cylinder can be easily changed by attaching and detaching the screw member.

(3) As a result, the direction of the exhaust port provided in the dustproof adapter can be changed to an arbitrary position, and the degree of freedom in attaching the pipe to the exhaust port is significantly increased. became.

[Brief description of drawings]

FIG. 1 is a half sectional view showing an example of an air cylinder to which a dustproof adapter according to an embodiment of the present invention is attached.

FIG. 2 is a half sectional view showing an air cylinder according to another embodiment of the present invention.

FIG. 3 is a half sectional view of an air cylinder according to another embodiment of the present invention.

FIG. 4 is a cross-sectional view of a hydro checker according to another embodiment of the present invention.

FIG. 5 is a sectional view of a shock absorber according to another embodiment of the present invention.

[Explanation of symbols]

 1 Cylinder body (cylinder tube) 2, 3 Air inflow / outflow port 4 Piston 5 Piston rod 6 Head cover 7 Gasket 8 Rod cover 9 Seal member 10, 11 Gasket 12 Dust adapter 13 Screw member 14 Seal member 15 Exhaust port 15a Piping 16 Passage 20 Outer cylinder 21 Braking oil 22 Inner cylinder 23 Piston 24 Rod 25 Check valve 26 Adjusting valve 27 Adjusting knob 28 Diaphragm 29 Diaphragm guide 30 Air chamber 31 Airport 32 Spring 33 Rod cover (bearing) 34 Dust seal 40 Cylinder tube 41 Floating piston 42 Fixed piston 43 Piston Rod 44, 45 Braking Oil Chamber 46 Check Valve 47 Sealing Screw 48 Stop Ball 49 Air Chamber 50 Airport 51 Rod Cover

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Creator Hidetoshi Kanzaki 3 2-3 Marunouchi, Chiyoda-ku, Tokyo Koganei Co., Ltd.

Claims (1)

[Scope of utility model registration request] 1. A cylinder main body having one end closed and an opening-side end of the other end covered with a rod cover, and a cylinder body formed by penetrating a cylinder end formed by the rod cover and the opening-side end. A fluid pressure actuating device comprising a piston rod reciprocating due to fluid pressure in the main body, the seal member being attached to the rod cover to seal between the piston rod and a screw member at the cylinder end portion. A dust-proof adapter detachably attached to the dust-proof adapter, and an exhaust port communicating with a passage formed between the outer end surface of the dust-proof adapter and the seal member is formed in the dust-proof adapter. A fluid pressure operation characterized in that a pipe for discharging the fluid leaked from between the piston rods to the outside of the clean space is connected to the exhaust port. Equipment.