JPH0644535A - Floating type magnetic head - Google Patents

Floating type magnetic head

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Publication number
JPH0644535A
JPH0644535A JP59892A JP59892A JPH0644535A JP H0644535 A JPH0644535 A JP H0644535A JP 59892 A JP59892 A JP 59892A JP 59892 A JP59892 A JP 59892A JP H0644535 A JPH0644535 A JP H0644535A
Authority
JP
Japan
Prior art keywords
magnetic head
slider
recording medium
floating
magnetic recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP59892A
Other languages
Japanese (ja)
Inventor
Shiyouji Fuchigami
祥児 渕上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP59892A priority Critical patent/JPH0644535A/en
Publication of JPH0644535A publication Critical patent/JPH0644535A/en
Pending legal-status Critical Current

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  • Magnetic Heads (AREA)

Abstract

PURPOSE:To provide the floating type magnetic head which can prevent the incidental generation of noises and the damage, etc., of magneto-resistance elements and has excellent reliability and durability. CONSTITUTION:This floating type magnetic head is the floating type magnetic head having the magneto-resistance elements 4 and is constituted by forming nonmagnetic insulating layers 3 on at least the exposed parts of the magneto- resistance element parts 4 on the floating surface of a slider 1. SiO2, ZrO2, Ta2O5, SiN, TiN, etc., are adequately used as the material of the nonmagnetic insulating layers.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は固定ディスク装置等に用
いられる浮動型磁気ヘッドに関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a floating magnetic head used in a fixed disk device or the like.

【0002】[0002]

【従来の技術】近年、コンピュータの処理速度の向上、
記憶容量の増加に伴い、高速かつ大容量を有する固定デ
ィスク装置が普及し始めている。特にさらなる高容量化
のため、磁気を高感度で検出し、その変化を自身の抵抗
値変化によって示す磁気抵抗素子(以下、MR素子と略
す)を読み取り素子とする浮動型磁気ヘッドの開発が望
まれており、特公昭59−35088号公報等に、この
MR素子を磁気記録媒体と対面するスライダの浮上面に
露出させた浮動型磁気ヘッドが提案されている。
2. Description of the Related Art In recent years, the processing speed of computers has been improved,
With the increase in storage capacity, fixed disk devices having high speed and large capacity are becoming popular. In particular, in order to further increase the capacity, it is desired to develop a floating magnetic head that uses a magnetoresistive element (hereinafter abbreviated as MR element) that detects magnetism with high sensitivity and indicates the change by its own resistance value change as a read element. Japanese Patent Publication No. 59-35088 discloses a floating magnetic head in which this MR element is exposed on the air bearing surface of a slider facing a magnetic recording medium.

【0003】以下に従来の浮動型磁気ヘッドについて説
明する。図6(a)は従来の浮動型磁気ヘッドのスライ
ダの側面図であり、図6(b)はスライダの底面図であ
り、図6(c)はスライダの背面図であり、図7はスラ
イダのMR素子部の要部断面図である。
A conventional floating magnetic head will be described below. 6A is a side view of a slider of a conventional floating magnetic head, FIG. 6B is a bottom view of the slider, FIG. 6C is a rear view of the slider, and FIG. 7 is a slider. FIG. 3 is a cross-sectional view of a main part of the MR element part of FIG.

【0004】1はフェライト又はアルミナチタンカーバ
イト等のセラミックスよりなり所要の形状に研削加工さ
れたスライダ、2はスライダ1の磁気記録媒体(図示せ
ず)との対向面に空気の流入方向と平行に設けられた溝
部、3はスライダ1の磁気記録媒体(図示せず)との対
向面に設けられラップ法等の遊離砥粒を用いて極めて高
い平滑度に加工されここに流入する空気より得られる揚
力によってスライダ1を浮上させる浮上面、4はFe−
Ni系合金等よりなり浮動型磁気ヘッドの読み取り素子
となるMR素子、5は酸化物等よりなりMR素子4の下
端部以外を被覆しMR素子4の信頼性を高めるための保
護層である。
Reference numeral 1 is a slider made of ceramics such as ferrite or alumina titanium carbide and ground into a desired shape, and 2 is a surface of the slider 1 facing the magnetic recording medium (not shown) and parallel to the inflow direction of air. The groove portions 3 provided on the surface of the slider 1 are provided on the surface of the slider 1 facing the magnetic recording medium (not shown), and are processed to have extremely high smoothness by using loose abrasive grains such as the lapping method. The air bearing surface for floating the slider 1 by the lift force applied, and 4 are Fe-
An MR element 5 made of a Ni-based alloy or the like, which serves as a reading element of the floating magnetic head, is made of an oxide or the like and covers a portion other than the lower end portion of the MR element 4 and is a protective layer for improving the reliability of the MR element 4.

【0005】外部磁束の変化を自身の抵抗値変化として
示すMR素子4より出力として電圧変化を得るために
は、MR素子4に電流を流す必要がある。そこで図7に
示すように、MR素子4は紙面に垂直な方向に電流を流
した状態で使用される。
In order to obtain a voltage change as an output from the MR element 4 which shows a change in external magnetic flux as a change in its own resistance value, it is necessary to pass a current through the MR element 4. Therefore, as shown in FIG. 7, the MR element 4 is used in a state in which an electric current is passed in a direction perpendicular to the paper surface.

【0006】以上のように構成された従来の浮動型磁気
ヘッドについて、以下その動作を説明する。
The operation of the conventional floating type magnetic head constructed as described above will be described below.

【0007】図8はスライダの浮上状態を示す側面図で
あり、図9はMR素子と磁気記録媒体上の突部とが接触
した状態を示す要部断面図であり、図10はMR素子と
磁気記録媒体とが接触した状態を示す要部断面図であ
る。
FIG. 8 is a side view showing the flying state of the slider, FIG. 9 is a sectional view of an essential part showing a state where the MR element and a protrusion on the magnetic recording medium are in contact, and FIG. FIG. 4 is a cross-sectional view of a main part showing a state in which the magnetic recording medium is in contact with the magnetic recording medium.

【0008】6はデータ等が記録された磁気記録媒体、
7は磁気記録媒体6自体に生じた突起又は塵埃等の磁気
記録媒体6上への付着物よりなる突部である。
Reference numeral 6 is a magnetic recording medium on which data and the like are recorded,
Reference numeral 7 denotes a protrusion formed on the magnetic recording medium 6 itself or a protrusion formed of an adhered matter such as dust on the magnetic recording medium 6.

【0009】図8に示すように、スライダ1は磁気記録
媒体6の回転によって生じる空気流により磁気記録媒体
6に対してθの角をなして浮上する。このときMR素子
4と磁気記録媒体6との距離(以下、浮上量と呼ぶ)
は、0.2(μm)程度に保たれている。
As shown in FIG. 8, the slider 1 flies at an angle of θ with respect to the magnetic recording medium 6 by the air flow generated by the rotation of the magnetic recording medium 6. At this time, the distance between the MR element 4 and the magnetic recording medium 6 (hereinafter referred to as the flying height)
Is maintained at about 0.2 (μm).

【0010】しかし、図9に示すように、磁気記録媒体
6上に浮上量より高い突部7が存在した場合、これとM
R素子4が接触したり衝突していた。
However, as shown in FIG. 9, when there is a protrusion 7 higher than the flying height on the magnetic recording medium 6, this and M
The R element 4 was in contact or collided.

【0011】又、図10に示すように、外部から衝撃等
が加わった場合、MR素子4と磁気記録媒体6とが接触
していた。
Further, as shown in FIG. 10, when an impact or the like is applied from the outside, the MR element 4 and the magnetic recording medium 6 are in contact with each other.

【0012】[0012]

【発明が解決しようとする課題】しかしながら上記従来
の構成では、MR素子が浮上面に露出しているために、
磁気記録媒体に浮上量より高い突部が存在したり、外部
から衝撃等が加わった場合に、MR素子と磁気記録媒体
とが接触したり衝突したりし、磁気記録媒体6とMR素
子4が電気的に導通したり、熱伝導や摩擦熱によってM
R素子4の表面の温度が急速に変化するために、MR素
子の出力電圧が変動してパルス状のノイズが生じ、デー
ターの読み取り時にエラーを発生するという問題点があ
った。
However, in the above conventional structure, since the MR element is exposed on the air bearing surface,
When the magnetic recording medium has a protrusion higher than the flying height, or when an impact or the like is applied from the outside, the MR element and the magnetic recording medium come into contact with or collide with each other, and the magnetic recording medium 6 and the MR element 4 are separated from each other. M by electrical conduction, heat conduction and frictional heat
Since the temperature of the surface of the R element 4 changes rapidly, the output voltage of the MR element fluctuates to generate pulse noise, which causes an error in reading data.

【0013】又、MR素子に通電した状態で磁気記録媒
体との接触を繰り返した場合、数十回以内の接触でMR
素子の出力等の電気特性が低下したり、MR素子が損傷
したり、接触時の摩擦熱や導通によるジュール熱のため
にMR素子が溶断するといった事態が発生するという問
題点もあった。
Further, when the contact with the magnetic recording medium is repeated while the MR element is energized, the MR is contacted within several tens of times.
There are also problems that the electrical characteristics such as the output of the element are deteriorated, the MR element is damaged, and the MR element melts due to frictional heat at the time of contact and Joule heat due to conduction.

【0014】本発明は上記従来の問題点を解決するもの
で、突発的なノイズの発生やMR素子の損傷等を防止す
ることのできる信頼性、耐久性に優れた浮動型磁気ヘッ
ドを提供することを目的とする。
The present invention solves the above-mentioned conventional problems, and provides a floating type magnetic head having excellent reliability and durability capable of preventing the occurrence of sudden noise and damage to MR elements. The purpose is to

【0015】[0015]

【課題を解決するための手段】この目的を達成するため
に本発明の浮動型磁気ヘッドは、MR素子を有する浮動
型磁気ヘッドであって、スライダの浮上面の少なくとも
MR素子の露出部に非磁性絶縁層が形成された構成を有
している。
In order to achieve this object, a floating magnetic head of the present invention is a floating magnetic head having an MR element, which is not exposed at least on the exposed surface of the MR element on the air bearing surface of the slider. It has a structure in which a magnetic insulating layer is formed.

【0016】ここで、非磁性絶縁層の材料としては、S
iO2,ZrO2,Ta25,SiN,TiN等が好適に
用いられる。
Here, the material of the non-magnetic insulating layer is S
iO 2 , ZrO 2 , Ta 2 O 5 , SiN, TiN and the like are preferably used.

【0017】[0017]

【作用】この構成によって、浮動型磁気ヘッドが磁気記
録媒体等と接触しても、ノイズの発生を防止することが
でき、同時に接触を繰り返すことによって生じるMR素
子の損傷等を防止することができる。
With this configuration, even if the floating magnetic head comes into contact with the magnetic recording medium or the like, noise can be prevented from occurring, and at the same time, damage to the MR element caused by repeated contact can be prevented. .

【0018】[0018]

【実施例】以下本発明の一実施例について、図面を参照
しながら説明する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.

【0019】図1(a)は本発明の一実施例における浮
動型磁気ヘッドのスライダの側面図であり、図1(b)
はスライダの底面図であり、図1(c)はスライダの背
面図であり、図2はスライダのMR素子部の要部断面図
である。
FIG. 1A is a side view of a slider of a floating magnetic head according to an embodiment of the present invention, and FIG.
1 is a bottom view of the slider, FIG. 1C is a rear view of the slider, and FIG. 2 is a cross-sectional view of an essential part of the MR element portion of the slider.

【0020】1はスライダ、2は溝部、3は浮上面、4
はMR素子、5は保護層であり、これらは従来例と同様
なものなので同一の番号を付し説明を省略する。
1 is a slider, 2 is a groove portion, 3 is an air bearing surface, 4
The MR element and the protective layer 5 are the same as those in the conventional example, and therefore, the same reference numerals are given and the description thereof is omitted.

【0021】8は非磁性絶縁物よりなりMR素子4の浮
上面3への露出部を被覆する非磁性絶縁層である。
Reference numeral 8 is a nonmagnetic insulating layer made of a nonmagnetic insulating material and covering the exposed portion of the MR element 4 to the air bearing surface 3.

【0022】非磁性絶縁層8はSiO2等の非磁性の絶
縁物質を浮上面3全面にスパッタ法,真空蒸着法,CV
D法等によって1〜100(nm)好ましくは5〜50
(nm)成膜することによって形成される。
The non-magnetic insulating layer 8 is made of a non-magnetic insulating material such as SiO 2 on the entire surface of the air bearing surface 3 by sputtering, vacuum deposition, CV.
1 to 100 (nm), preferably 5 to 50 depending on the D method or the like
(Nm) formed by forming a film.

【0023】以上のように構成された本実施例における
浮動型磁気ヘッドについて、以下その浮上状態を説明す
る。
The floating state of the floating magnetic head of this embodiment having the above-described structure will be described below.

【0024】図3は浮動型磁気ヘッドと磁気記録媒体上
の突部が接触した状態を示す要部断面図である。6は磁
気記録媒体、7は突部であり、これらは従来例と同様な
もので同一の番号を付し説明を省略する。
FIG. 3 is a cross-sectional view of essential parts showing a state in which the floating magnetic head and the projection on the magnetic recording medium are in contact with each other. Reference numeral 6 is a magnetic recording medium, and 7 is a protrusion. These are the same as those in the conventional example and are assigned the same reference numerals and their explanations are omitted.

【0025】本実施例における浮動型磁気ヘッドは、磁
気記録媒体6上に突部7が存在し、これと接触した場合
であっても、非磁性絶縁層8が設けられているため、M
R素子4が突部7と直接接触することを防止することが
できる。又、この時発生していたMR素子4と磁気記録
媒体6との電気的な導通や、MR素子4の表面の熱伝導
による局部放熱現象や摩擦熱をなくすことができるた
め、パルス状のノイズの発生を防ぐことができる。更
に、MR素子4に通電した状態でこの接触を繰り返すこ
とによって生じるMR素子4の損傷等も防止することが
できる。
In the floating magnetic head of this embodiment, the non-magnetic insulating layer 8 is provided even when the protrusion 7 is present on the magnetic recording medium 6 and is in contact with the protrusion 7, so that M
It is possible to prevent the R element 4 from directly contacting the protrusion 7. In addition, the electrical conduction between the MR element 4 and the magnetic recording medium 6 and the local heat radiation phenomenon and frictional heat due to the heat conduction on the surface of the MR element 4 which have been generated at this time can be eliminated, so that the pulse noise is eliminated. Can be prevented. Further, it is possible to prevent damage to the MR element 4 caused by repeating this contact while the MR element 4 is energized.

【0026】また、外部から衝撃等が加わり、浮動型磁
気ヘッドと磁気記録媒体6とが直接接触した場合でも同
様の優れた効果が得られる。
The same excellent effect can be obtained even when the floating magnetic head and the magnetic recording medium 6 come into direct contact with each other due to an external impact.

【0027】上記の本実施例における浮動型磁気ヘッド
と従来の浮動型磁気ヘッドについて性能比較試験を行っ
た。以下その結果について説明する。
Performance comparison tests were carried out on the floating magnetic head of the present embodiment and the conventional floating magnetic head. The results will be described below.

【0028】(実験例)本実施例における浮動型磁気ヘ
ッドをアセンブリし、実験前に全体が消磁されたハード
ディスク用3.5インチ金属薄膜媒体を磁気記録媒体6
として用い、磁気記録媒体6を3600(rpm)の回
転数で回転させ、本実施例における浮動型磁気ヘッドを
磁気記録媒体6の中心から25.4(mm)の位置で0.
1(μm)の浮上量をもって浮上させた。
(Experimental Example) A magnetic recording medium 6 was prepared by assembling the floating type magnetic head in this example and demagnetizing the whole 3.5 inch metal thin film medium for hard disk before the experiment.
The magnetic recording medium 6 is rotated at a rotational speed of 3600 (rpm), and the floating magnetic head in the present embodiment is moved to a position of 25.4 (mm) from the center of the magnetic recording medium 6.
It was levitated with a flying height of 1 (μm).

【0029】この状態でMR素子4を再生状態にしたま
ま、MR素子4の出力電圧をオシロスコープにより測定
した。その測定結果を図4に示す。
In this state, the output voltage of the MR element 4 was measured with an oscilloscope while the MR element 4 was kept in the reproducing state. The measurement result is shown in FIG.

【0030】図4は実験例の出力電圧曲線を示すグラフ
である。 (比較例)浮上面3に非磁性絶縁層8を有さない従来の
浮動型磁気ヘッドをアセンブリした他は、実験例と同一
の条件でMR素子4の出力電圧を測定した。その結果を
図5に示す。
FIG. 4 is a graph showing the output voltage curve of the experimental example. (Comparative Example) The output voltage of the MR element 4 was measured under the same conditions as in the experimental example, except that a conventional floating magnetic head having no nonmagnetic insulating layer 8 on the air bearing surface 3 was assembled. The result is shown in FIG.

【0031】図5は比較例の出力電圧曲線を示すグラフ
である。図4より明らかなように、実験例の出力電圧は
常に略0であり、ノイズの発生は認められなかった。一
方比較例では、図5に示すようなパルス状のノイズが不
定期的ではあるが2秒〜3秒程度毎に発生するのが認め
られた。
FIG. 5 is a graph showing the output voltage curve of the comparative example. As is clear from FIG. 4, the output voltage of the experimental example was almost 0, and no noise was observed. On the other hand, in the comparative example, it was confirmed that pulse-like noise as shown in FIG. 5 was generated every 2 to 3 seconds although it was irregular.

【0032】次に、実験終了後、実験例及び比較例で用
いた浮動型磁気ヘッドを磁気ディスク装置より取り外
し、各々MR素子4の表面を観察し電気特性を測定した
ところ、比較例ではMR素子4の表面に損傷が認めら
れ、MR素子4の出力等の電気特性が劣化していた。一
方、実験例ではこのような損傷及び電気特性の劣化は認
められなかった。
Next, after the experiment was completed, the floating magnetic heads used in the experimental example and the comparative example were removed from the magnetic disk device, and the surface of each MR element 4 was observed to measure the electrical characteristics. 4 was damaged, and the electrical characteristics such as the output of the MR element 4 were deteriorated. On the other hand, in the experimental example, such damage and deterioration of electric characteristics were not observed.

【0033】尚、本実施例においては、非磁性絶縁層8
は浮上面3の全面に形成したが、浮上面3のMR素子4
の露出部のみに形成してもよい。
In this embodiment, the nonmagnetic insulating layer 8 is used.
Is formed on the entire surface of the air bearing surface 3, but the MR element 4 on the air bearing surface 3
It may be formed only on the exposed portion.

【0034】以上のように本実施例によれば、MR素子
4の出力電圧における突発的なノイズの発生やMR素子
4の損傷等を防止することができる。
As described above, according to this embodiment, it is possible to prevent the occurrence of sudden noise in the output voltage of the MR element 4 and the damage to the MR element 4.

【0035】[0035]

【発明の効果】以上のように本発明によれば、浮上面の
少なくともMR素子の露出部に、SiO2等の非磁性絶
縁層を形成することにより、磁気記録媒体等との接触の
際に発生するノイズを防止でき、この接触を繰り返すこ
とによって生じるMR素子の損傷等を防止することので
きる信頼性、耐久性に優れた浮動型磁気ヘッドを実現で
きるものである。
As described above, according to the present invention, a non-magnetic insulating layer such as SiO 2 is formed on at least the exposed portion of the MR element on the air bearing surface, so that the magnetic recording medium or the like can be easily contacted. It is possible to realize a floating magnetic head having excellent reliability and durability, which can prevent noise generated and prevent damage to the MR element and the like caused by repeating this contact.

【図面の簡単な説明】[Brief description of drawings]

【図1】(a)本発明の一実施例における浮動型磁気ヘ
ッドのスライダの側面図 (b)本発明の一実施例における浮動型磁気ヘッドのス
ライダの底面図 (c)本発明の一実施例における浮動型磁気ヘッドのス
ライダの背面図
FIG. 1A is a side view of a slider of a floating magnetic head according to an embodiment of the present invention. FIG. 1B is a bottom view of a slider of a floating magnetic head according to an embodiment of the present invention. Rear view of slider of floating magnetic head in example

【図2】本発明の一実施例における浮動型磁気ヘッドの
スライダのMR素子部の要部断面図
FIG. 2 is a sectional view of an essential part of an MR element portion of a slider of a floating magnetic head according to an embodiment of the present invention.

【図3】浮動型磁気ヘッドが磁気記録媒体上の突部と接
触した状態を示す要部断面図
FIG. 3 is a cross-sectional view of essential parts showing a state in which a floating magnetic head is in contact with a protrusion on a magnetic recording medium.

【図4】実験例の出力電圧曲線を示すグラフFIG. 4 is a graph showing an output voltage curve of an experimental example.

【図5】比較例の出力電圧曲線を示すグラフFIG. 5 is a graph showing an output voltage curve of a comparative example.

【図6】(a)従来の浮動型磁気ヘッドのスライダの側
面図 (b)従来の浮動型磁気ヘッドのスライダの底面図 (c)従来の浮動型磁気ヘッドのスライダの背面図
6A is a side view of a slider of a conventional floating magnetic head, FIG. 6B is a bottom view of a slider of a conventional floating magnetic head, and FIG. 6C is a rear view of a slider of a conventional floating magnetic head.

【図7】従来の浮動型磁気ヘッドのスライダのMR素子
部の要部断面図
FIG. 7 is a sectional view of an essential part of an MR element part of a slider of a conventional floating magnetic head.

【図8】従来の浮動型磁気ヘッドのスライダの浮上状態
を示す側面図
FIG. 8 is a side view showing a flying state of a slider of a conventional floating magnetic head.

【図9】MR素子と磁気記録媒体上の突部が接触した状
態を示す要部断面図
FIG. 9 is a cross-sectional view of essential parts showing a state where an MR element and a protrusion on a magnetic recording medium are in contact with each other.

【図10】MR素子と磁気記録媒体が接触した状態を示
す要部断面図
FIG. 10 is a sectional view of an essential part showing a state where an MR element and a magnetic recording medium are in contact with each other.

【符号の説明】[Explanation of symbols]

1 スライダ 2 溝部 3 浮上面 4 MR素子 5 保護層 6 磁気記録媒体 7 突部 8 非磁性絶縁層 DESCRIPTION OF SYMBOLS 1 slider 2 groove part 3 air bearing surface 4 MR element 5 protective layer 6 magnetic recording medium 7 protrusion 8 non-magnetic insulating layer

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】磁気抵抗素子を有する浮動型磁気ヘッドで
あって、スライダの浮上面の少なくとも磁気抵抗素子の
露出部に非磁性絶縁層が形成されていることを特徴とす
る浮動型磁気ヘッド。
1. A floating magnetic head having a magnetoresistive element, wherein a nonmagnetic insulating layer is formed on at least an exposed part of the magnetoresistive element on an air bearing surface of a slider.
JP59892A 1992-01-07 1992-01-07 Floating type magnetic head Pending JPH0644535A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59892A JPH0644535A (en) 1992-01-07 1992-01-07 Floating type magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59892A JPH0644535A (en) 1992-01-07 1992-01-07 Floating type magnetic head

Publications (1)

Publication Number Publication Date
JPH0644535A true JPH0644535A (en) 1994-02-18

Family

ID=11478174

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59892A Pending JPH0644535A (en) 1992-01-07 1992-01-07 Floating type magnetic head

Country Status (1)

Country Link
JP (1) JPH0644535A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08297813A (en) * 1995-04-27 1996-11-12 Nec Corp Magnetic head slider and its production
US5999379A (en) * 1997-12-11 1999-12-07 International Business Machines Corporation Spin valve read head with plasma produced metal oxide insulation layer between lead and shield layers and method of making

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08297813A (en) * 1995-04-27 1996-11-12 Nec Corp Magnetic head slider and its production
US5999379A (en) * 1997-12-11 1999-12-07 International Business Machines Corporation Spin valve read head with plasma produced metal oxide insulation layer between lead and shield layers and method of making
US6162305A (en) * 1997-12-11 2000-12-19 International Business Machines Corporation Method of making spin valve read head with plasma produced metal oxide insulation layer between lead and shield layers

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