JPH0644113B2 - Active matrix liquid crystal display panel manufacturing method - Google Patents

Description

The present invention relates to a manufacturing method for preventing damage to a MOS transistor due to static electricity generated at the time of manufacturing an active matrix liquid crystal display panel.

[Description of conventional technology]

Large-capacity matrix liquid crystal display panels have been put to practical use due to improvements in liquid crystal materials and panel assembly technology. However, this matrix liquid crystal display panel is inferior in display characteristics such as contrast, viewing angle characteristics, response speed and the like to those of a calculator or the like. As a market demand, there is a strong demand for practical use of a liquid crystal display panel having a large display capacity and excellent display quality. Against the background of this market need, a thin film transistor (TFT) having a MOS structure is provided on one electrode substrate of the liquid crystal display panel by the number of display elements,
Development of an active matrix liquid crystal display panel that drives the liquid crystal display panel in a time division manner by the switching operation is in progress. This active matrix liquid crystal display panel has characteristics that display characteristics are excellent because a voltage is statically applied to each display element. MO
The S-TFT includes II-IV compound semiconductor represented by CdSe, Te, polysilicon, and
Amorphous silicon is being studied. These M
The OS-TFT is easily damaged by static electricity, while the liquid crystal display panel tends to be charged with static electricity in the manufacturing process thereof, thus lowering the yield of the liquid crystal display panel.

[Object of the Invention]

An object of the present invention is to provide a method for manufacturing an active matrix liquid crystal display panel that suppresses static electricity generated in the manufacturing process of the liquid crystal display panel and does not damage the MOS-TFT.

[Explanation of Structure and Action of Invention]

The method according to the present invention is a method of manufacturing an active matrix liquid crystal display panel, comprising: a first electrode substrate having a plurality of thin film transistors having a MOS structure arranged in a matrix and a second electrode substrate having a common electrode; Forming a connection part for short-circuiting the gate electrode terminals forming a row and the electrode terminals forming a column of the thin film transistor and a common electrode terminal continuous to the connection part on the first electrode substrate; Rubbing the first electrode substrate having the common electrode terminal, and connecting the common electrode terminal of the first electrode substrate and the common electrode of the second electrode substrate to each other. And a step of assembling the second electrode substrate so as to be opposed to each other with a predetermined space therebetween, and enclosing liquid crystal; and
And the step of cutting from the substrate.

Hereinafter, the present invention will be described using examples.

FIG. 1 shows a schematic cross-sectional view of a liquid crystal display panel used in the method for manufacturing an active matrix liquid crystal display panel of one embodiment. The liquid crystal 3 is filled between the electrode substrate 12 provided with the TFT and the electrode substrate 1 provided with the common electrode 2.
The gate electrode 11 is formed in a predetermined pattern on the electrode substrate 12, and the gate insulating film 10 is covered thereon. The semiconductor layer 9 is formed in a predetermined pattern on the gate insulating film, and the drain electrode 6 and the source electrode 7 are provided on the semiconductor layer 9, and the source electrode 7 is connected to the display electrode 8. An insulating film 5 is provided for the purpose of protecting the channel portion between the source electrode and the drain electrode, and the channel portion is provided with the light shielding film 4. In the figure, 13 and 14 are alignment films for aligning liquid crystal molecules. This alignment film is an organic film and is rubbed in one direction with a cloth or the like to form fine grooves, but static electricity is easily generated in this step. Further, since the panel assembly is performed in a dry atmosphere, electric charges are accumulated between both electrode substrates. FIG. 2 shows the electrical connection of the gate electrode, the source electrode, and the drain electrode in the case of forming a matrix. As shown in the figure, the gate electrode is divided into n rows and connected, and the drain electrode is divided into n columns and connected. The source electrode is connected to the display electrode, and is connected to the common electrode (earth symbol) via the capacitance of the liquid crystal layer.
FIG. 3 schematically shows a terminal portion of a liquid crystal display panel used for explaining the manufacturing method of this embodiment.
The gate electrode terminal groups G ₁ , G ₂ ... G _n and the drain electrode terminal groups D ₁ , D ₂ ... D _m are on the same electrode substrate 12, as is apparent from the explanation of FIG. 1, while the common electrode is Although on the electrode substrate 1, this common electrode is connected to the common electrode terminal COM of the electrode substrate 12 via the transfer terminal. The electrodes are patterned so that the gate electrode terminal group, the drain electrode terminal group, and the common electrode terminal are short-circuited in advance on the four sides of the electrode substrate 12.

The TFT electrode substrate 12 having the configuration shown in FIG. 1 is easily charged with static electricity in the rubbing process as described above, but since the gate electrode and the drain electrode are short-circuited at the terminal portion as described in FIG. , The TFT is not damaged.
In addition, the TFT electrode substrate 12 and the common electrode substrate 1 are assembled with a constant gap, and the periphery is sealed with an adhesive except for the injection hole for filling the liquid crystal. As described in FIG. 3, the common electrode is the drain electrode, Since it is short-circuited with the gate electrode, no electric charge is accumulated between both electrode substrates. Fill the liquid crystal material through the injection hole, seal the injection hole, attach the polarizing plate,
The liquid crystal display panel is completed. When rubbing the polarizing plate surface or removing the protective sheet of the polarizing plate, a phenomenon in which electric charge is charged between the electrode substrates and the liquid crystal molecule orientation is temporarily disturbed is observed, but in the manufacturing method of this example, Because of the short circuit, this charge charging can be prevented. The short circuit shown in FIGS. 3 (a) and 3 (b) is opened when the liquid crystal display panel is incorporated into a module by cutting the portion indicated by the alternate long and short dash line in FIG.

Although the present invention has been described with reference to the embodiments, the static electricity generation in the manufacturing process of the active matrix liquid crystal display panel can be suppressed by short-circuiting the gate electrode terminal, the drain electrode terminal and the common electrode terminal.
Since the T is protected from damage due to static electricity, the yield of the liquid crystal display panel can be significantly improved.

[Brief description of drawings]

FIG. 1 is a schematic sectional view of an active matrix liquid crystal display panel, and FIG. 2 is a circuit diagram showing electrical connection of gate electrodes, drain electrodes, source electrodes, display electrodes, and common electrodes, FIG. 3 (a). , (B) are a plan view and a side view showing a terminal portion of a liquid crystal display panel for explaining the short-circuit means of the embodiment used for explaining the present invention. In the figure, 1 ... common electrode substrate, 12 ... TFT electrode substrate,
11 ... Gate electrode, 10 ... Gate insulating film, 9 ... Semiconductor layer, 6 ... Drain electrode, 7 ... Source electrode, 8 ...
... Display electrode, 5 ... Protective film, 4 ... Light-shielding film, 13,14
…… Alignment film, 3 …… Liquid crystal material.

Claims (1)

[Claims] 1. A method of manufacturing an active matrix liquid crystal display panel, comprising: a first electrode substrate having a plurality of MOS structure thin film transistors arranged in a matrix; and a second electrode substrate having a common electrode. Forming a connection part for short-circuiting the gate electrode terminals forming the row and the column electrode terminals forming the thin film transistor and a common electrode terminal continuous to the connection part on the first electrode substrate;
Rubbing the first electrode substrate having the connecting portion and the common electrode terminal, and connecting the common electrode terminal of the first electrode substrate and the common electrode of the second electrode substrate. At the same time, the method includes the steps of assembling the first and second electrode substrates so as to face each other with a predetermined gap therebetween, enclosing a liquid crystal, and cutting the connection portion from the first substrate after completion of the assembly. Active matrix liquid crystal display panel manufacturing method.