JPH0641629B1 - - Google Patents

Info

Publication number
JPH0641629B1
JPH0641629B1 JP3508781A JP50878191A JPH0641629B1 JP H0641629 B1 JPH0641629 B1 JP H0641629B1 JP 3508781 A JP3508781 A JP 3508781A JP 50878191 A JP50878191 A JP 50878191A JP H0641629 B1 JPH0641629 B1 JP H0641629B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP3508781A
Other languages
Japanese (ja)
Inventor
Michio Satou
Takasi Yamanobe
Mituo Kawai
Tooru Komatu
Hiromi Shizu
Noriaki Yagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3508781A priority Critical patent/JPH0641629B1/ja
Publication of JPH0641629B1 publication Critical patent/JPH0641629B1/ja
Expired - Lifetime legal-status Critical Current

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Landscapes

  • Physical Vapour Deposition (AREA)
JP3508781A 1990-05-15 1991-05-15 Expired - Lifetime JPH0641629B1 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3508781A JPH0641629B1 (enrdf_load_stackoverflow) 1990-05-15 1991-05-15

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP12305490 1990-05-15
JP3508781A JPH0641629B1 (enrdf_load_stackoverflow) 1990-05-15 1991-05-15

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP7169236A Division JPH0820863A (ja) 1995-06-12 1995-06-12 シリサイド膜およびその膜を使用した半導体装置

Publications (1)

Publication Number Publication Date
JPH0641629B1 true JPH0641629B1 (enrdf_load_stackoverflow) 1994-06-01

Family

ID=26460071

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3508781A Expired - Lifetime JPH0641629B1 (enrdf_load_stackoverflow) 1990-05-15 1991-05-15

Country Status (1)

Country Link
JP (1) JPH0641629B1 (enrdf_load_stackoverflow)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61179534A (ja) * 1985-01-16 1986-08-12 Mitsubishi Metal Corp スパツタリング装置用複合タ−ゲツト
JPS63219580A (ja) * 1987-03-09 1988-09-13 Hitachi Metals Ltd スパツタリングタ−ゲツトおよびその製造方法
JPS63227771A (ja) * 1987-03-16 1988-09-22 Tosoh Corp 高純度チタンシリサイドからなるスパツタリング用タ−ゲツト及びその製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61179534A (ja) * 1985-01-16 1986-08-12 Mitsubishi Metal Corp スパツタリング装置用複合タ−ゲツト
JPS63219580A (ja) * 1987-03-09 1988-09-13 Hitachi Metals Ltd スパツタリングタ−ゲツトおよびその製造方法
JPS63227771A (ja) * 1987-03-16 1988-09-22 Tosoh Corp 高純度チタンシリサイドからなるスパツタリング用タ−ゲツト及びその製造方法

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