JPH064033A - Deflection coil driving system - Google Patents

Deflection coil driving system

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Publication number
JPH064033A
JPH064033A JP4159164A JP15916492A JPH064033A JP H064033 A JPH064033 A JP H064033A JP 4159164 A JP4159164 A JP 4159164A JP 15916492 A JP15916492 A JP 15916492A JP H064033 A JPH064033 A JP H064033A
Authority
JP
Japan
Prior art keywords
deflection coil
switch
amplifier
during
period
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP4159164A
Other languages
Japanese (ja)
Inventor
Takayasu Yoshihara
隆安 吉原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP4159164A priority Critical patent/JPH064033A/en
Publication of JPH064033A publication Critical patent/JPH064033A/en
Withdrawn legal-status Critical Current

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Abstract

PURPOSE:To obtain the deflection coil driving system which has excellent linearity and requires no high voltage in a flyback period. CONSTITUTION:A switch 13 is turned ON in a scanning period and a saw-tooth wave signal VIN which is inputted to an amplifier 12 is amplified by the amplifier 12 in the scanning period and supplied to a deflecting coil 10 through a switch 13. Consequently, the deflecting coil is driven by a current amplification system. In the flyback period, the switch 13 is turned OFF. Consequently, the deflecting coil 10 is disconnected from the amplifier 12 and resonates with a capacitor C1 connected in parallel to generate flyback pulses VL, so that a deflecting current IL is deflected back.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、偏向コイルの駆動方式
に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a deflection coil driving system.

【0002】[0002]

【従来の技術】偏向コイルはCRTディスプレイ装置や
走査型電子顕微鏡(SEM)等の荷電粒子ビームを偏向
させる場合に幅広く用いられているが、その駆動方式と
してはパルス駆動方式と電流増幅方式の二つが主に用い
られている。
2. Description of the Related Art A deflection coil is widely used for deflecting a charged particle beam in a CRT display device, a scanning electron microscope (SEM), etc., and its drive system is classified into a pulse drive system and a current amplification system. One is mainly used.

【0003】図7はパルス駆動方式による偏向コイル駆
動回路の構成例を示す図であり、同期信号2によりトラ
ンジスタQ1 をスイッチングさせることによって偏向コ
イル1に駆動電流を供給するように構成されている。ま
た、図8は電流増幅方式による駆動回路の構成例を示す
図であり、入力される鋸歯状波の電流を増幅器3で電流
増幅して偏向コイル1を駆動するようになされている。
FIG. 7 is a diagram showing an example of the configuration of a deflection coil drive circuit based on the pulse drive system, which is configured to supply a drive current to the deflection coil 1 by switching the transistor Q 1 by a synchronization signal 2. . Further, FIG. 8 is a diagram showing a configuration example of a drive circuit of a current amplification system, in which an input current of a sawtooth wave is amplified by an amplifier 3 to drive a deflection coil 1.

【0004】[0004]

【発明が解決しようとする課題】パルス駆動方式は回路
構成が簡単、且つ効率が良好であるためCRTディスプ
レイ装置の偏向回路に広く採用されているが、リニアリ
ティの点で問題があり、そのためにS字歪補正、ピンク
ッション歪補正等の歪補正を行う回路が煩雑になるばか
りでなく、細かな歪補正が非常に難しいという問題があ
る。
The pulse driving method is widely adopted in the deflection circuit of the CRT display device because of its simple circuit structure and good efficiency, but it has a problem in linearity, and therefore S There is a problem that not only a circuit for performing distortion correction such as character distortion correction and pincushion distortion correction becomes complicated, but also fine distortion correction is very difficult.

【0005】これに対して、電流増幅方式はリニアリテ
ィが良好であり、且つ歪補正を高精度に行うことができ
るためにSEMの走査コイルの駆動に用いられている
が、帰線期間には大電圧を必要とするという問題があ
る。即ち、図8において偏向コイル1のインダクタンス
をLy ,偏向コイル1の抵抗分をRy ,偏向電流をIL
としたとき、必要な電源電圧Eは E=Ly ×(dIL/dt)+Ry ×IL で表されるが、帰線期間では駆動電流の時間的変化が非
常に大きなものとなるために必要な電源電圧Eは大きな
ものとなるのである。
On the other hand, the current amplification method is used for driving the scanning coil of the SEM because it has good linearity and can perform distortion correction with high accuracy, but it is large during the blanking period. There is the problem of requiring a voltage. That is, in FIG. 8, the inductance of the deflection coil 1 is L y , the resistance of the deflection coil 1 is R y , and the deflection current is I L.
Then, the required power supply voltage E is expressed by E = L y × (dI L / dt) + R y × I L , but the change over time of the drive current becomes extremely large during the blanking period. Therefore, the power supply voltage E required for is large.

【0006】本発明は、上記の課題を解決するものであ
って、リニアリティが良好で、且つ帰線期間に高電圧を
必要としない偏向コイル駆動方式を提供することを目的
とするものである。
An object of the present invention is to solve the above-mentioned problems and to provide a deflection coil driving system which has good linearity and does not require a high voltage during the blanking period.

【0007】[0007]

【課題を解決するための手段】上記の目的を達成するた
めに、本発明の偏向コイル駆動方式は、走査期間は電流
増幅方式により偏向コイルを駆動し、帰線期間はパルス
駆動方式により駆動することを特徴とする。
In order to achieve the above object, in the deflection coil driving system of the present invention, the deflection coil is driven by the current amplification system during the scanning period and is driven by the pulse driving system during the blanking period. It is characterized by

【0008】[0008]

【作用及び発明の効果】本発明によれば、走査期間には
電流増幅方式により駆動するので、リニアリティが良好
であるばかりでなく、各種の歪の補正も容易に、且つ高
精度に行うことができる。そして、帰線期間にはパルス
駆動方式の動作を行うので高い電源電圧は必要とせず、
従って従来に比較して損失を低減させることができる。
According to the present invention, since the driving is performed by the current amplification method during the scanning period, not only the linearity is good, but also various distortions can be easily and accurately corrected. it can. Then, during the blanking period, since the operation of the pulse drive method is performed, a high power supply voltage is not required,
Therefore, the loss can be reduced as compared with the conventional case.

【0009】[0009]

【実施例】以下、図面を参照しつつ実施例を説明する。
図1は本発明に係る偏向コイル駆動方式の一実施例の構
成を示す図、図2はその動作を説明するための波形図で
あり、10は偏向コイル、11は鋸歯状波発生器、12
は増幅器、13はスイッチを示す。
Embodiments will be described below with reference to the drawings.
FIG. 1 is a diagram showing a configuration of an embodiment of a deflection coil driving system according to the present invention, FIG. 2 is a waveform diagram for explaining the operation, 10 is a deflection coil, 11 is a sawtooth wave generator, and 12 is a sawtooth wave generator.
Is an amplifier and 13 is a switch.

【0010】鋸歯状波発生器11は、図2Aに示す鋸歯
状波信号VIN及び同図Bに示すような帰線期間にローレ
ベルとなる制御信号VCONTを発生する。そして、鋸歯状
波信号VINは増幅器12へ入力され、制御信号VCONT
スイッチ13に供給される。制御信号VCONTは走査期間
はハイレベル、帰線期間はローレベルであり、制御信号
CONTがハイレベルのときスイッチ13は閉路状態にな
り、ローレベルの場合は開路状態になる。
The saw-tooth wave generator 11 generates a saw-tooth wave signal V IN shown in FIG. 2A and a control signal V CONT that is at a low level during the blanking period shown in FIG. 2B. Then, the sawtooth wave signal V IN is input to the amplifier 12, and the control signal V CONT is supplied to the switch 13. The control signal V CONT is at the high level during the scanning period and is at the low level during the retrace line period. When the control signal V CONT is at the high level, the switch 13 is closed, and when it is at the low level, the switch 13 is open.

【0011】従って、走査期間には増幅器12に入力さ
れる鋸歯状波信号VINは増幅器12で増幅され、スイッ
チ13を介して偏向コイル10に供給される。即ち、走
査期間には従来の電流増幅方式と同様の駆動がなされ
る。しかし、帰線期間にはスイッチ13は開路状態とな
るので、偏向コイル10は増幅器12から切り離され、
並列に接続されているコンデンサC1 と共振することに
よって図2Cに示す帰線パルスVL が発生し、これによ
って偏向電流IL は図2Dに示すように振り戻される。
Therefore, during the scanning period, the sawtooth wave signal V IN input to the amplifier 12 is amplified by the amplifier 12 and supplied to the deflection coil 10 via the switch 13. That is, during the scanning period, the same drive as the conventional current amplification method is performed. However, since the switch 13 is opened during the blanking period, the deflection coil 10 is disconnected from the amplifier 12,
Resonance with the capacitor C 1 connected in parallel produces the retrace pulse VL shown in FIG. 2C, which causes the deflection current I L to be swung back as shown in FIG. 2D.

【0012】なお、従来の電流増幅方式においては増幅
器12の電源電圧V- は、帰線パルスVL の最小値V
Lminより小さくなければならなかったが、本発明では帰
線期間にはパルス駆動方式により駆動するので、図2C
に示すようにV- >VLminでも動作するものである。
[0012] Incidentally, in the conventional current amplification method is the supply voltage of the amplifier 12 V - is the minimum value V of the retrace pulse V L
Although it has to be smaller than Lmin , in the present invention, the pulse driving method is used during the blanking period.
As shown in FIG. 5, it operates even if V > V Lmin .

【0013】図1において、スイッチ13としては外部
よりオン/オフ制御が可能なものであればどのような構
成のものでも用いることができるが、実際には負荷定
数、帰線期間の長さ、帰線パルス電圧等を考慮して、ト
ランジスタ、電界効果トランジスタ、リレー、アナログ
スイッチ等を用いて構成すればよい。
In FIG. 1, the switch 13 may have any structure as long as it can be controlled to be turned on / off from the outside. In practice, the load constant, the length of the blanking period, It may be configured using a transistor, a field effect transistor, a relay, an analog switch, or the like in consideration of the return pulse voltage and the like.

【0014】図3はスイッチ13をトランジスタQ2
ダイオードD2 の並列回路で構成した例を示す図であ
り、図4はその動作を説明するための波形図である。ト
ランジスタQ2 は走査期間にはオン、帰線期間にはオフ
となされ、これによって上述した動作が行われる。ここ
で、トランジスタQ2 のオン/オフ制御は、そのベース
に図2Bに示す制御信号VCONTを印加することによって
行うことができるのは当然であるが、図3においては所
定の閾値VTHを設定することによって帰線期間にはオフ
となるようになされている。即ち、増幅器12の出力電
圧VO は帰線期間には閾値VTH未満となるのでトランジ
スタQ2 はオフとなり、これによって偏向コイル10は
増幅器12から切り離され、並列に接続されているコン
デンサC1と共振することによって図4Cに示す帰線パ
ルスVL が発生し、これによって偏向電流IL は図4D
に示すように振り戻される。
FIG. 3 is a diagram showing an example in which the switch 13 is constituted by a parallel circuit of a transistor Q 2 and a diode D 2 , and FIG. 4 is a waveform diagram for explaining the operation thereof. The transistor Q 2 is turned on during the scanning period and turned off during the blanking period, whereby the above-described operation is performed. Here, ON / OFF control of the transistor Q 2 is, although of course can be done by applying a control signal V CONT shown in FIG. 2B to the base, the predetermined threshold value V TH in FIG. 3 It is set so that it is turned off during the flyback period by setting it. That is, since the output voltage V O of the amplifier 12 becomes less than the threshold value V TH during the blanking period, the transistor Q 2 is turned off, whereby the deflection coil 10 is disconnected from the amplifier 12, and the capacitor C 1 connected in parallel. retrace pulse V L is generated as shown in FIG. 4C by resonating with, thereby deflecting current I L Figure 4D
It is turned back as shown in.

【0015】また、図5はスイッチ13をトランジスタ
3 ,Q4 の並列回路で構成した例を示す図であり、図
6はその動作を説明するための波形図である。トランジ
スタQ3 ,Q4 のベースには制御信号VCONTが印加され
る。また、制御信号VCONTはスイッチS1 ,S2 にも供
給される。スイッチS1 は走査期間にはオン、帰線期間
にはオフとなり、スイッチS2 は走査期間にはオフ、帰
線期間にはオンとなるものである。
FIG. 5 is a diagram showing an example in which the switch 13 is composed of a parallel circuit of transistors Q 3 and Q 4 , and FIG. 6 is a waveform diagram for explaining the operation. The control signal V CONT is applied to the bases of the transistors Q 3 and Q 4 . The control signal V CONT is also supplied to the switches S 1 and S 2 . The switch S 1 is on during the scanning period and off during the blanking period, and the switch S 2 is off during the scanning period and on during the blanking period.

【0016】従って、走査期間には入力鋸歯状波信号V
INはスイッチS1 を介して増幅器12に入力され、増幅
されてスイッチ13を介して偏向コイル10に供給され
る。しかし、帰線期間には偏向コイル10は増幅器12
から切り離され、並列に接続されているコンデンサC1
と共振することによって図6Cに示す帰線パルスVL
発生し、これによって偏向電流IL は図6Dに示すよう
に振り戻される。なお、スイッチS1 ,S2 は、帰線期
間に増幅器12が飽和することがあるので、それを防止
するために設けられているものである。
Therefore, during the scanning period, the input sawtooth wave signal V
IN is input to the amplifier 12 via the switch S 1 , is amplified, and is supplied to the deflection coil 10 via the switch 13. However, during the blanking period, the deflection coil 10 is operated by the amplifier 12
Capacitor C 1 disconnected from and connected in parallel
By resonating with, a retrace pulse V L shown in FIG. 6C is generated, which causes the deflection current I L to be swung back as shown in FIG. 6D. It should be noted that the switches S 1 and S 2 are provided to prevent the amplifier 12 from being saturated during the blanking period, so that it may be prevented.

【0017】以上、本発明の実施例について説明した
が、本発明は上記実施例に限定されるものではなく種々
の変形が可能であることは当業者に明かである。
Although the embodiments of the present invention have been described above, it is obvious to those skilled in the art that the present invention is not limited to the above embodiments and various modifications can be made.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明の一実施例の構成を示す図である。FIG. 1 is a diagram showing a configuration of an exemplary embodiment of the present invention.

【図2】 図1の構成の動作を説明するための波形図で
ある。
FIG. 2 is a waveform diagram for explaining the operation of the configuration of FIG.

【図3】 本発明の他の構成例を示す図である。FIG. 3 is a diagram showing another configuration example of the present invention.

【図4】 図3の構成の動作を説明するための波形図で
ある。
FIG. 4 is a waveform diagram for explaining the operation of the configuration of FIG.

【図5】 本発明の更に他の構成例を示す図である。FIG. 5 is a diagram showing still another configuration example of the present invention.

【図6】 図5の構成の動作を説明するための波形図で
ある。
6 is a waveform diagram for explaining the operation of the configuration of FIG.

【図7】 パルス駆動方式を説明するための図である。FIG. 7 is a diagram for explaining a pulse driving method.

【図8】 電流駆動方式を説明するための図である。FIG. 8 is a diagram for explaining a current driving method.

【符号の説明】[Explanation of symbols]

10…偏向コイル、11…鋸歯状波発生器、12…増幅
器、13…スイッチ。
10 ... Deflection coil, 11 ... Sawtooth wave generator, 12 ... Amplifier, 13 ... Switch.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 走査期間は電流増幅方式により偏向コイ
ルを駆動し、帰線期間はパルス駆動方式により駆動する
ことを特徴とする偏向コイル駆動方式。
1. A deflection coil driving method, wherein a deflection coil is driven by a current amplification method during a scanning period, and a pulse driving method is driven during a blanking period.
JP4159164A 1992-06-18 1992-06-18 Deflection coil driving system Withdrawn JPH064033A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4159164A JPH064033A (en) 1992-06-18 1992-06-18 Deflection coil driving system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4159164A JPH064033A (en) 1992-06-18 1992-06-18 Deflection coil driving system

Publications (1)

Publication Number Publication Date
JPH064033A true JPH064033A (en) 1994-01-14

Family

ID=15687676

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4159164A Withdrawn JPH064033A (en) 1992-06-18 1992-06-18 Deflection coil driving system

Country Status (1)

Country Link
JP (1) JPH064033A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014093211A (en) * 2012-11-05 2014-05-19 Jeol Ltd Deflection device for charged particle beam and charged particle beam apparatus with the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014093211A (en) * 2012-11-05 2014-05-19 Jeol Ltd Deflection device for charged particle beam and charged particle beam apparatus with the same

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